| Cover | Jan. 11, 2022 |
| Cover [Abstract] | |
| Document Type | 8-K |
| Amendment Flag | false |
| Document Period End Date | Jan. 11, 2022 |
| Entity File Number | 0-16244 |
| Entity Registrant Name | VEECO INSTRUMENTS INC. |
| Entity Central Index Key | 0000103145 |
| Entity Tax Identification Number | 11-2989601 |
| Entity Incorporation, State or Country Code | DE |
| Entity Address, Address Line One | Terminal Drive |
| Entity Address, City or Town | Plainview |
| Entity Address, State or Province | NY |
| Entity Address, Postal Zip Code | 11803 |
| City Area Code | 516 |
| Local Phone Number | 677-0200 |
| Written Communications | false |
| Soliciting Material | false |
| Pre-commencement Tender Offer | false |
| Pre-commencement Issuer Tender Offer | false |
| Title of 12(b) Security | Common Stock, par value $0.01 per share |
| Trading Symbol | VECO |
| Security Exchange Name | NASDAQ |
| Entity Emerging Growth Company | false |
