Veeco Instruments (VECO) DEF 14A 23 Mar 23 Definitive proxy Financial data

Cover

Cover	12 Months Ended
	Dec. 31, 2022
Document Information [Line Items]
Document Type	DEF 14A
Amendment Flag	false
Entity Information [Line Items]
Entity Registrant Name	Veeco Instruments Inc.
Entity Central Index Key	0000103145

Pay vs Performance Disclosure

Pay vs Performance Disclosure	12 Months Ended
	Dec. 31, 2022 USD ($) $ / shares	Dec. 31, 2021 USD ($) $ / shares	Dec. 31, 2020 USD ($) $ / shares	Mar. 17, 2022 $ / shares	Mar. 12, 2021 $ / shares	Mar. 17, 2020 $ / shares	Dec. 31, 2019 $ / shares	Mar. 14, 2019 $ / shares	Oct. 01, 2018 $ / shares
Pay vs Performance Disclosure [Table]
Pay vs Performance [Table Text Block]	Pay Versus Performance As required by Item 402(v) of Regulation S-K, we are providing the following information regarding the relationship between executive compensation and our financial performance for each of the last three completed calendar years. In determining the “compensation actually paid” to our NEOs, we are required to make various adjustments to amounts that have been reported in the Summary Compensation Table in previous years since the required valuation methods for this section differ from those required in the Summary Compensation Table. The table below summarizes compensation values both previously reported in our Summary Compensation Table and the adjusted values required in this section for calendar years 2020, 2021 and 2022. ​ ​ Year ​ ​ ​ Summary (1) ​ ​ ​ Compensation (1)(3) ​ ​ ​ Average SCT (2) ​ ​ ​ Average (2)(3) ​ ​ ​ Value of Initial ​ ​ ​ Net Income ​ ​ ​ Adjusted ​ ​ ​ Company (4) ​ ​ ​ Peer Group (4) ​ ​ ​ ​ 2022 ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 126.48 ​ ​ ​ ​ ​ ​ 36.09 ​ ​ ​ ​ ​ ​ 166,942 ​ ​ ​ ​ ​ ​ 116.6 ​ ​ ​ ​ ​ 2021 ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​ ​ ​ ​ 193.81 ​ ​ ​ ​ ​ ​ 81.82 ​ ​ ​ ​ ​ ​ 26,038 ​ ​ ​ ​ ​ ​ 104.3 ​ ​ ​ ​ ​ 2020 ​ ​ ​ ​ ​ 2,610,509 ​ ​ ​ ​ ​ ​ 5,331,974 ​ ​ ​ ​ ​ ​ 1,138,308 ​ ​ ​ ​ ​ ​ 1,483,327 ​ ​ ​ ​ ​ ​ 118.18 ​ ​ ​ ​ ​ ​ 132.76 ​ ​ ​ ​ ​ ​ (8,391 ) ​ ​ ​ ​ ​ ​ 66.9 ​ ​ ​ ​ (1) The PEO (principal executive officer) for each year presented was identified as Dr. Miller, the Company’s CEO. ​ (2) The Non-PEO NEOs for each year presented were identified as Mr. Kiernan, Drs. Devasahayam and Porshnev, and Ms. Wilkerson. ​ (3) A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows: ​ ​ ​ ​ ​ ​ ​ 2022 ​ ​ ​ 2021 ​ ​ ​ 2020 ​ ​ ​ ​ ​ ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ ​ Total Compensation from ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​ ​ ​ ​ 2,610,509 ​ ​ ​ ​ ​ ​ 1,138,308 ​ ​ ​ ​ ​ Deduct: Amounts ​ ​ ​ ​ ​ (4,741,020 ) ​ ​ ​ ​ ​ ​ (1,135,870 ) ​ ​ ​ ​ ​ ​ (3,122,580 ) ​ ​ ​ ​ ​ ​ (813,172 ) ​ ​ ​ ​ ​ ​ (1,121,618 ) ​ ​ ​ ​ ​ ​ (460,253 ) ​ ​ ​ ​ ​ Add: Year-end value of equity awards granted in covered year that were outstanding and unvested as of the end of the covered fiscal year (a)(b) ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​ ​ ​ ​ 2,140,579 ​ ​ ​ ​ ​ ​ 780,839 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (2,779,460 ) ​ ​ ​ ​ ​ ​ (737,886 ) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​ ​ ​ ​ 1,868,289 ​ ​ ​ ​ ​ ​ 56,706 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (17,073 ) ​ ​ ​ ​ ​ ​ (89,499 ) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​ ​ ​ ​ (165,785 ) ​ ​ ​ ​ ​ ​ (32,272 ) ​ ​ ​ ​ ​ Compensation Actually ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​ ​ ​ ​ 5,331,974 ​ ​ ​ ​ ​ ​ 1,483,327 ​ ​ ​ ​ (a) Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows: ​ ​ ​ Date ​ ​ ​ Stock Price ​ ​ ​ ​ 12/31/2019 ​ ​ ​ ​ $ 14.69 ​ ​ ​ ​ ​ 12/31/2020 ​ ​ ​ ​ $ 17.36 ​ ​ ​ ​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​ ​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​ (b) Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ Per Share Fair Value at… ​ ​ ​ ​ ​ ​ ​ Award ​ ​ ​ Grant Date ​ ​ ​ Grant Date ​ ​ ​ 12/31/2019 ​ ​ ​ 12/31/2020 ​ ​ ​ 12/31/2021 ​ ​ ​ 12/31/2022 ​ ​ ​ ​ ​ ​ 2018PRSU (c ) ​ ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2019PRSU (d ) ​ ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2020PRSU (d ) ​ ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ 2021PRSU (e ) ​ ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ ​ ​ 2022PRSU (e ) ​ ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ (c) Granted to Dr. Miller only. ​ (d) Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan. ​ (e) Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson. ​ (4) The values disclosed in this TSR column represent the measurement period value of an investment of $100 in respective stock or index as of December 31, 2019, and then valued again on each of December 31, 2020, 2021, and 2022.
Company Selected Measure Name	Adjusted Operating Income
Named Executive Officers, Footnote [Text Block]	(1) The PEO (principal executive officer) for each year presented was identified as Dr. Miller, the Company’s CEO. ​ (2) The Non-PEO NEOs for each year presented were identified as Mr. Kiernan, Drs. Devasahayam and Porshnev, and Ms. Wilkerson.
PEO Total Compensation Amount	$ 5,914,884	$ 4,526,501	$ 2,610,509
PEO Actually Paid Compensation Amount	$ 894,752	13,102,240	5,331,974
Adjustment To PEO Compensation, Footnote [Text Block]	(3) A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows: ​ ​ ​ ​ ​ ​ ​ 2022 ​ ​ ​ 2021 ​ ​ ​ 2020 ​ ​ ​ ​ ​ ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ ​ Total Compensation from ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​ ​ ​ ​ 2,610,509 ​ ​ ​ ​ ​ ​ 1,138,308 ​ ​ ​ ​ ​ Deduct: Amounts ​ ​ ​ ​ ​ (4,741,020 ) ​ ​ ​ ​ ​ ​ (1,135,870 ) ​ ​ ​ ​ ​ ​ (3,122,580 ) ​ ​ ​ ​ ​ ​ (813,172 ) ​ ​ ​ ​ ​ ​ (1,121,618 ) ​ ​ ​ ​ ​ ​ (460,253 ) ​ ​ ​ ​ ​ Add: Year-end value of equity awards granted in covered year that were outstanding and unvested as of the end of the covered fiscal year (a)(b) ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​ ​ ​ ​ 2,140,579 ​ ​ ​ ​ ​ ​ 780,839 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (2,779,460 ) ​ ​ ​ ​ ​ ​ (737,886 ) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​ ​ ​ ​ 1,868,289 ​ ​ ​ ​ ​ ​ 56,706 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (17,073 ) ​ ​ ​ ​ ​ ​ (89,499 ) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​ ​ ​ ​ (165,785 ) ​ ​ ​ ​ ​ ​ (32,272 ) ​ ​ ​ ​ ​ Compensation Actually ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​ ​ ​ ​ 5,331,974 ​ ​ ​ ​ ​ ​ 1,483,327 ​ ​ ​ ​ (a) Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows: ​ ​ ​ Date ​ ​ ​ Stock Price ​ ​ ​ ​ 12/31/2019 ​ ​ ​ ​ $ 14.69 ​ ​ ​ ​ ​ 12/31/2020 ​ ​ ​ ​ $ 17.36 ​ ​ ​ ​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​ ​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​ (b) Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ Per Share Fair Value at… ​ ​ ​ ​ ​ ​ ​ Award ​ ​ ​ Grant Date ​ ​ ​ Grant Date ​ ​ ​ 12/31/2019 ​ ​ ​ 12/31/2020 ​ ​ ​ 12/31/2021 ​ ​ ​ 12/31/2022 ​ ​ ​ ​ ​ ​ 2018PRSU (c ) ​ ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2019PRSU (d ) ​ ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2020PRSU (d ) ​ ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ 2021PRSU (e ) ​ ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ ​ ​ 2022PRSU (e ) ​ ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ (c) Granted to Dr. Miller only. ​ (d) Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan. ​ (e) Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson.
Non-PEO NEO Average Total Compensation Amount	$ 1,769,683	1,514,852	1,138,308
Non-PEO NEO Average Compensation Actually Paid Amount	$ 409,560	2,755,988	1,483,327
Adjustment to Non-PEO NEO Compensation Footnote [Text Block]	(3) A reconciliation of Total Compensation per the Summary Compensation Table to Compensation Actually Paid is as follows: ​ ​ ​ ​ ​ ​ ​ 2022 ​ ​ ​ 2021 ​ ​ ​ 2020 ​ ​ ​ ​ ​ ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ PEO ​ ​ ​ Average for ​ ​ ​ ​ Total Compensation from ​ ​ ​ ​ ​ 5,914,884 ​ ​ ​ ​ ​ ​ 1,769,683 ​ ​ ​ ​ ​ ​ 4,526,501 ​ ​ ​ ​ ​ ​ 1,514,852 ​ ​ ​ ​ ​ ​ 2,610,509 ​ ​ ​ ​ ​ ​ 1,138,308 ​ ​ ​ ​ ​ Deduct: Amounts ​ ​ ​ ​ ​ (4,741,020 ) ​ ​ ​ ​ ​ ​ (1,135,870 ) ​ ​ ​ ​ ​ ​ (3,122,580 ) ​ ​ ​ ​ ​ ​ (813,172 ) ​ ​ ​ ​ ​ ​ (1,121,618 ) ​ ​ ​ ​ ​ ​ (460,253 ) ​ ​ ​ ​ ​ Add: Year-end value of equity awards granted in covered year that were outstanding and unvested as of the end of the covered fiscal year (a)(b) ​ ​ ​ ​ ​ 2,517,420 ​ ​ ​ ​ ​ ​ 603,132 ​ ​ ​ ​ ​ ​ 4,362,540 ​ ​ ​ ​ ​ ​ 1,136,078 ​ ​ ​ ​ ​ ​ 2,140,579 ​ ​ ​ ​ ​ ​ 780,839 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (2,779,460 ) ​ ​ ​ ​ ​ ​ (737,886 ) ​ ​ ​ ​ ​ ​ 4,456,145 ​ ​ ​ ​ ​ ​ 828,795 ​ ​ ​ ​ ​ ​ 1,868,289 ​ ​ ​ ​ ​ ​ 56,706 ​ ​ ​ ​ ​ Add: The amount of (a)(b) ​ ​ ​ ​ ​ (17,073 ) ​ ​ ​ ​ ​ ​ (89,499 ) ​ ​ ​ ​ ​ ​ 2,879,634 ​ ​ ​ ​ ​ ​ 89,435 ​ ​ ​ ​ ​ ​ (165,785 ) ​ ​ ​ ​ ​ ​ (32,272 ) ​ ​ ​ ​ ​ Compensation Actually ​ ​ ​ ​ ​ 894,752 ​ ​ ​ ​ ​ ​ 409,560 ​ ​ ​ ​ ​ ​ 13,102,240 ​ ​ ​ ​ ​ ​ 2,755,988 ​ ​ ​ ​ ​ ​ 5,331,974 ​ ​ ​ ​ ​ ​ 1,483,327 ​ ​ ​ ​ (a) Each NEO received time-based restricted stock awards in each of the periods presented. The fair value of time-based restricted stock awards is dependent on the Company’s stock price. The Company’s closing stock price as of the dates listed are as follows: ​ ​ ​ Date ​ ​ ​ Stock Price ​ ​ ​ ​ 12/31/2019 ​ ​ ​ ​ $ 14.69 ​ ​ ​ ​ ​ 12/31/2020 ​ ​ ​ ​ $ 17.36 ​ ​ ​ ​ ​ 12/31/2021 ​ ​ ​ ​ $ 28.47 ​ ​ ​ ​ ​ 12/31/2022 ​ ​ ​ ​ $ 18.58 ​ ​ ​ (b) Our NEOs received PRSUs during each of the periods presented, that are subject to the achievement of designated performance criteria, based on three-year total shareholder return. These PRSUs are valued based upon the Monte Carlo simulation method. Please see below for the per share fair value as of each respective date: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ Per Share Fair Value at… ​ ​ ​ ​ ​ ​ ​ Award ​ ​ ​ Grant Date ​ ​ ​ Grant Date ​ ​ ​ 12/31/2019 ​ ​ ​ 12/31/2020 ​ ​ ​ 12/31/2021 ​ ​ ​ 12/31/2022 ​ ​ ​ ​ ​ ​ 2018PRSU (c ) ​ ​ ​ ​ ​ ​ 10/1/2018 ​ ​ ​ ​ ​ $ 15.58 ​ ​ ​ ​ ​ $ 25.01 ​ ​ ​ ​ ​ $ 31.99 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2019PRSU (d ) ​ ​ ​ ​ ​ ​ 3/14/2019 ​ ​ ​ ​ ​ $ 14.46 ​ ​ ​ ​ ​ $ 20.36 ​ ​ ​ ​ ​ $ 24.81 ​ ​ ​ ​ ​ $ 56.29 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 2020PRSU (d ) ​ ​ ​ ​ ​ ​ 3/17/2020 ​ ​ ​ ​ ​ $ 10.59 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 18.92 ​ ​ ​ ​ ​ $ 43.47 ​ ​ ​ ​ ​ $ 29.82 ​ ​ ​ ​ ​ ​ ​ 2021PRSU (e ) ​ ​ ​ ​ ​ ​ 3/12/2021 ​ ​ ​ ​ ​ $ 27.81 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 40.60 ​ ​ ​ ​ ​ $ 24.76 ​ ​ ​ ​ ​ ​ ​ 2022PRSU (e ) ​ ​ ​ ​ ​ ​ 3/17/2022 ​ ​ ​ ​ ​ $ 45.28 ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ $ 22.27 ​ ​ ​ ​ ​ (c) Granted to Dr. Miller only. ​ (d) Granted to Drs. Miller, Devasahayam, and Porshnev, and Mr. Kiernan. ​ (e) Granted to Drs. Miller, Devasahayam, and Porshnev, Mr. Kiernan, and Ms. Wilkerson.
Compensation Actually Paid vs. Total Shareholder Return [Text Block]	The graph below reflects the relationships between the PEO and Average Non-PEO NEO Compensation Actually Paid (“CAP”), and the Company’s cumulative indexed Total Shareholder Return, or TSR (assuming an initial fixed investment of $100), and our Peer Group TSR (assuming an initial fixed investment of $100), for the fiscal years ended December 31, 2020, 2021, and 2022:
Compensation Actually Paid vs. Company Selected Measure [Text Block]	The graph below reflects the relationships between the PEO and Average Non-PEO NEO Compensation Actually Paid (“CAP”) and the Company’s reported GAAP Net Income and Adjusted Operating Income for the fiscal years ended December 31, 2020, 2021, and 2022:
Tabular List [Table Text Block]	The Company’s most important performance measures for each of the PEO and non-PEO NEOs is discussed under the 2022 Management Bonus Plan (the “2022 Plan”) subsection of the Compensation Discussion and Analysis section of this proxy. As more fully described in this subsection, the 2022 Plan was based on the financial performance of the Company as measured by Adjusted Operating Income. This financial metric was selected because it closely aligns operating performance with earnings per share, a key driver of shareholder value. Under the 2022 Plan, 25% of each participant’s bonus was based on individual performance which, for each of the PEO and non-PEO NEOs, factored financial goals incorporating revenue, gross margin, bookings and expenses.
Total Shareholder Return Amount	$ 126.48	193.81	118.18
Peer Group Total Shareholder Return Amount	36.09	81.82	132.76
Net Income (Loss)	$ 166,942,000	$ 26,038,000	$ (8,391,000)
Company Selected Measure Amount	116,600	104,300	66,900
PEO Name	Dr. Miller	Dr. Miller	Dr. Miller
Share Price | $ / shares	$ 18.58	$ 28.47	$ 17.36				$ 14.69
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 10/1/2018 | $ / shares									$ 15.58
Fair Value of Performance-Based Restricted Stock Units, Grant Date 10/1/2018 | $ / shares			31.99				25.01
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/14/2019 | $ / shares								$ 14.46
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/14/2019 | $ / shares		56.29	24.81				$ 20.36
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2020 | $ / shares						$ 10.59
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2020 | $ / shares	29.82	43.47	$ 18.92
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/12/2021 | $ / shares					$ 27.81
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/12/2021 | $ / shares	24.76	$ 40.6
Grand Date Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2022 | $ / shares				$ 45.28
Fair Value of Performance-Based Restricted Stock Units, Grant Date 3/17/2022 | $ / shares	$ 22.27
Measure [Axis]: 1
Pay vs Performance Disclosure [Table]
Measure Name	Adjusted Operating Income
PEO [Member] | Equity Awards Adjustments, Amounts Reported Under Stock Awards and Option Awards Columns in SCT [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	$ (4,741,020)	$ (3,122,580)	$ (1,121,618)
PEO [Member] | Equity Awards Adjustments, Year-end Value of Equity Awards Granted in Covered Year hat Were Outstanding and Unvested as of the End of the Covered Fiscal Year [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	2,517,420	4,362,540	2,140,579
PEO [Member] | Equity Awards Adjustments, Change in Fair Values as of Year-end (from End of the Prior year) of Awards Granted in Prior Years and Outstanding at Year-end [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	(2,779,460)	4,456,145	1,868,289
PEO [Member] | Equity Awards Adjustments, Change in Fair Values as of the Vesting Date (from End of the Prior Year) of Awards Granted in Any Prior Fiscal Year for Which Vesting Conditions were Satisfied During the Covered Fiscal Year [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	(17,073)	2,879,634	(165,785)
Non-PEO NEO [Member] | Equity Awards Adjustments, Amounts Reported Under Stock Awards and Option Awards Columns in SCT [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	(1,135,870)	(813,172)	(460,253)
Non-PEO NEO [Member] | Equity Awards Adjustments, Year-end Value of Equity Awards Granted in Covered Year hat Were Outstanding and Unvested as of the End of the Covered Fiscal Year [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	603,132	1,136,078	780,839
Non-PEO NEO [Member] | Equity Awards Adjustments, Change in Fair Values as of Year-end (from End of the Prior year) of Awards Granted in Prior Years and Outstanding at Year-end [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	(737,886)	828,795	56,706
Non-PEO NEO [Member] | Equity Awards Adjustments, Change in Fair Values as of the Vesting Date (from End of the Prior Year) of Awards Granted in Any Prior Fiscal Year for Which Vesting Conditions were Satisfied During the Covered Fiscal Year [Member]
Pay vs Performance Disclosure [Table]
Adjustment to Compensation Amount	$ (89,499)	$ 89,435	$ (32,272)