| Document And Entity Information | Feb. 27, 2023 |
| Cover [Abstract] | |
| Document Type | 8-K |
| Amendment Flag | false |
| Document Period End Date | Feb. 27, 2023 |
| Entity Registrant Name | MKS INSTRUMENTS, INC. |
| Entity Central Index Key | 0001049502 |
| Entity Emerging Growth Company | false |
| Securities Act File Number | 000-23621 |
| Entity Incorporation, State or Country Code | MA |
| Entity Tax Identification Number | 04-2277512 |
| Entity Address, Address Line One | 2 Tech Drive |
| Entity Address, Address Line Two | Suite 201 |
| Entity Address, City or Town | Andover |
| Entity Address, State or Province | MA |
| Entity Address, Postal Zip Code | 01810 |
| City Area Code | 978 |
| Local Phone Number | 645-5500 |
| Entity Information, Former Legal or Registered Name | Not Applicable |
| Written Communications | false |
| Soliciting Material | false |
| Pre-commencement Tender Offer | false |
| Pre-commencement Issuer Tender Offer | false |
| Title of 12(b) Security | Common Stock, no par value |
| Trading Symbol | MKSI |
| Security Exchange Name | NASDAQ |
