MKS Instruments (MKSI) 10-Q 6 Nov 13 2013 Q3 Quarterly report Financial data

Document_and_Entity_Informatio

Document and Entity Information	9 Months Ended
	Sep. 30, 2013	Oct. 30, 2013
Document And Entity Information [Abstract]	'	'
Document Type	'10-Q	'
Amendment Flag	'false	'
Document Period End Date	30-Sep-13	'
Document Fiscal Year Focus	'2013	'
Document Fiscal Period Focus	'Q3	'
Entity Registrant Name	'MKS INSTRUMENTS INC	'
Entity Central Index Key	'0001049502	'
Current Fiscal Year End Date	'--12-31	'
Entity Filer Category	'Large Accelerated Filer	'
Entity Common Stock, Shares Outstanding	'	53,228,335

Consolidated_Balance_Sheets

Consolidated Balance Sheets (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Current assets:	'	'
Cash and cash equivalents	$254,778	$287,588
Short-term investments	365,876	327,653
Trade accounts receivable, net	98,133	82,060
Inventories	136,060	134,639
Deferred income taxes	10,059	8,194
Other current assets	28,651	28,048
Total current assets	893,557	868,182
Property, plant and equipment, net	78,020	80,516
Long-term investments	5,183	12,158
Goodwill	150,700	150,733
Intangible assets, net	13,316	11,561
Other assets	31,198	29,412
Total assets	1,171,974	1,152,562
Current liabilities:	'	'
Accounts payable	27,304	16,803
Accrued compensation	25,190	20,955
Income taxes payable	7,768	4,148
Other current liabilities	35,899	37,405
Total current liabilities	96,161	79,311
Other liabilities	70,391	61,095
Commitments and contingencies (Note 18)	'	'
Stockholders' equity:	'	'
Preferred Stock, $0.01 par value per share, 2,000,000 shares authorized; none issued and outstanding	'	'
Common Stock, no par value, 200,000,000 shares authorized; 53,171,905 and 52,748,849 shares issued and outstanding at September 30, 2013 and December 31, 2012, respectively	113	113
Additional paid-in capital	726,018	718,005
Retained earnings	267,246	278,583
Accumulated other comprehensive income	12,045	15,455
Total stockholders' equity	1,005,422	1,012,156
Total liabilities and stockholders' equity	$1,171,974	$1,152,562

Consolidated_Balance_Sheets_Pa

Consolidated Balance Sheets (Parenthetical) (USD $)	Sep. 30, 2013	Dec. 31, 2012
Statement Of Financial Position [Abstract]	'	'
Preferred Stock, par value	$0.01	$0.01
Preferred Stock, shares authorized	2,000,000	2,000,000
Preferred Stock, shares issued	0	0
Preferred Stock, shares outstanding	0	0
Common Stock, par value	$0	$0
Common Stock, shares authorized	200,000,000	200,000,000
Common Stock, shares issued	53,171,905	52,748,849
Common Stock, shares outstanding	53,171,905	52,748,849

Consolidated_Statements_of_Ope

Consolidated Statements of Operations and Comprehensive Income (USD $)	3 Months Ended				9 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2013		Sep. 30, 2012		Sep. 30, 2013		Sep. 30, 2012
Net revenues:	'		'		'		'
Products	$139,846		$114,647		$388,998		$427,986
Services	26,607		26,800		76,028		81,726
Total net revenues	166,453		141,447		465,026		509,712
Cost of revenues:	'		'		'		'
Cost of products	87,809		68,304		237,590		243,950
Cost of services	16,410		16,572		48,542		48,884
Total cost of revenues	104,219		84,876		286,132		292,834
Gross profit	62,234		56,571		178,894		216,878
Research and development	15,257		14,136		47,318		45,911
Selling, general and administrative	33,158		29,661		102,140		96,332
Litigation	'		5,316		'		5,316
Insurance reimbursement	'		'		-1,071		'
Completed acquisition costs	'		851		171		1,258
Restructuring	1,126		'		1,364		'
Amortization of intangible assets	361		215		1,537		453
Income from operations	12,332		6,392		27,435		67,608
Interest income	221		299		760		760
Interest expense	13		32		50		92
Income before income taxes	12,540		6,659		28,145		68,276
Provision for income taxes	10,082		4,079		12,606		24,356
Net income	2,458		2,580		15,539		43,920
Other comprehensive income:	'		'		'		'
Changes in value of financial instruments designated as cash flow hedges, net of tax (benefit) expense	-891	[1]	-417	[1]	185	[1]	-297	[1]
Foreign currency translation adjustments, net of tax of $0 for the three and nine months ended September 30, 2013 and 2012	5,593		6,007		-3,582		1,955
Unrealized gain (loss) on investments, net of tax expense (benefit)	48	[2]	70	[2]	-13	[2]	3	[2]
Total comprehensive income	$7,208		$8,240		$12,129		$45,581
Net income per share:	'		'		'		'
Basic	$0.05		$0.05		$0.29		$0.83
Diluted	$0.05		$0.05		$0.29		$0.82
Cash dividends per common share	$0.16		$0.16		$0.48		$0.46
Weighted average common shares outstanding:	'		'		'		'
Basic	53,165		52,854		52,998		52,679
Diluted	53,513		53,290		53,410		53,240
[1]	(1) Tax (benefit) was $(491) and $(260) for the three months ended September 30, 2013 and 2012, respectively. Tax expense (benefit) was $161 and $(177) for the nine months ended September 30, 2013 and 2012, respectively.
[2]	(2) Tax expense was $26 and $44 for the three months ended September 30, 2013 and 2012, respectively. Tax (benefit) expense was $(11) and $2 for the nine months ended September 30, 2013 and 2012, respectively.

Consolidated_Statements_of_Ope1

Consolidated Statements of Operations and Comprehensive Income (Parenthetical) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Income Statement [Abstract]	'	'	'	'
Tax expense (benefit) on changes in value of financial instruments designated as cash flow hedges	($491)	($260)	$161	($177)
Tax on foreign currency translation adjustments	0	0	0	0
Tax (benefit) expense on unrealized gain (loss) on investments	$26	$44	($11)	$2

Consolidated_Statements_of_Cas

Consolidated Statements of Cash Flows (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012
Cash flows from operating activities:	'	'
Net income	$15,539	$43,920
Adjustments to reconcile net income to net cash provided by operating activities:	'	'
Depreciation and amortization	12,715	10,197
Stock-based compensation	11,509	9,900
Provision for excess and obsolete inventory	16,554	12,596
Deferred income taxes	3,623	3,059
Excess tax benefits from stock-based compensation	-825	-1,998
Other	1,234	610
Changes in operating assets and liabilities:	'	'
Trade accounts receivable	-17,702	33,992
Inventories	-17,949	-893
Income taxes	3,887	715
Other current assets	-2,974	2,984
Accrued compensation and other liabilities	5,912	7,516
Accounts payable	10,468	-8,750
Other non-current assets	-209	'
Net cash provided by operating activities	41,782	113,848
Cash flows from investing activities:	'	'
Acquisition of businesses, net of cash acquired	-2,326	-24,385
Purchases of investments	-374,998	-363,040
Maturities of investments	253,231	161,102
Sales of investments	90,580	126,928
Purchases of property, plant and equipment	-9,154	-11,040
Other	-59	-347
Net cash used in investing activities	-42,726	-110,782
Cash flows from financing activities:	'	'
Proceeds from short-term borrowings	6	2,896
Payments on short-term borrowings	-776	-4,956
Repurchase of common stock	-2,875	-7,026
Net payments related to employee stock awards	-2,464	-830
Dividend payments to common stockholders	-25,458	-24,261
Excess tax benefits from stock-based compensation	825	1,998
Net cash used in financing activities	-30,742	-32,179
Effect of exchange rate changes on cash and cash equivalents	-1,124	1,165
Decrease in cash and cash equivalents	-32,810	-27,948
Cash and cash equivalents at beginning of period	287,588	312,916
Cash and cash equivalents at end of period	$254,778	$284,968

Basis_of_Presentation

Basis of Presentation	9 Months Ended
	Sep. 30, 2013
Accounting Policies [Abstract]	'
Basis of Presentation	'
	1)	Basis of Presentation
	The terms “MKS” and the “Company” refer to MKS Instruments, Inc. and its subsidiaries. The interim financial data as of September 30, 2013 and for the three and nine months ended September 30, 2013 and 2012 are unaudited; however, in the opinion of MKS, the interim data includes all adjustments, consisting only of normal recurring adjustments, necessary for a fair statement of the results for the interim periods. The consolidated balance sheet presented as of December 31, 2012 has been derived from the audited consolidated financial statements as of that date. The unaudited consolidated financial statements presented herein have been prepared in accordance with the instructions to Form 10-Q and do not include all of the information and note disclosures required by United States generally accepted accounting principles (“U.S. GAAP”). The consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in the MKS Annual Report on Form 10-K for the year ended December 31, 2012 filed with the Securities and Exchange Commission on February 26, 2013.
	The preparation of these consolidated financial statements requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent liabilities at the date of the consolidated financial statements and the reported amounts of revenues and expenses during the reporting period. On an on-going basis, management evaluates its estimates and judgments, including those related to revenue recognition, stock-based compensation, inventory, intangible assets, goodwill and other long-lived assets, acquisition expenses, income taxes and investments. Management bases its estimates and judgments on historical experience and on various other factors that are believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.
	Revision of prior period financial statements
	During the three months ended September 30, 2013, the Company identified a prior period error which affected the previous balance sheets of all interim periods in 2013 and all interim and annual periods in 2012 and 2011 and certain footnote disclosures for annual periods in 2012, 2011 and 2010. The Company previously reported the amounts of its uncertain tax positions on the balance sheets net instead of gross. The Company considered the guidance in Accounting Standards Codification (“ASC”) Topic 740-10-45, Other Presentation Matters and ASC Topic 210-20, Offsetting with respect to this matter. The error had no impact to the income statement, statements of cash flows or the statements of stockholders’ equity of any previously reported periods. In evaluating whether our previously issued consolidated financial statements were materially misstated, the Company considered the guidance in ASC Topic 250, Accounting Changes and Error Corrections, ASC Topic 250-10-S99-1, Assessing Materiality, and ASC Topic 250-10-S99-2, Considering the Effects of Prior Year Misstatements when Quantifying Misstatements in Current Year Financial Statements. The Company concluded this error was not material to the prior reporting periods, or to the 2013 results, and therefore, amendments of previously filed reports were not required. Accordingly, during the three months ended September 30, 2013, the Company recorded these prior period adjustments to correct this error. The revisions for these corrections to the applicable prior periods are reflected in the financial information herein and will be reflected in future filings containing such financial information.
	The tables below reflect the revisions in the balance sheet line items for the periods ended December 31, 2012 and 2011.
			December 31, 2012
			As previously		Adjustment			As revised
			reported
	Other assets		$	11,692	$	17,720		$	29,412
	Other liabilities		$	43,375	$	17,720		$	61,095
			31-Dec-11
			As previously		Adjustment			As revised
			reported
	Other assets		$	12,266	$	15,281		$	27,547
	Other liabilities		$	32,211	$	15,281		$	47,492
	The tables below reflect the sections in certain footnotes that were affected by the revision for the periods ended December 31, 2012 and 2011.
	Other Assets
			December 31, 2012
			As previously		Adjustment			As revised
			reported
	Deferred tax assets, net		$	9,497	$	—		$	9,497
	Long-term income tax receivable			—		17,720			17,720
	Other			2,195		—			2,195
			$	11,692	$	17,720		$	29,412
			31-Dec-11
			As previously		Adjustment			As revised
			reported
	Deferred tax assets, net		$	10,274	$	—		$	10,274
	Long-term income tax receivable			—		15,281			15,281
	Other			1,992		—			1,992
			$	12,266	$	15,281		$	27,547
	Other Liabilities
			31-Dec-12
			As previously		Adjustment			As revised
			reported
	Long-term income tax payable		$	20,880	$	17,720		$	38,600
	Accrued compensation			18,750		—			18,750
	Other			3,745		—			3,745
			$	43,375	$	17,720		$	61,095
			December 31, 2011
			As previously		Adjustment			As revised
			reported
	Long-term income tax payable		$	16,084	$	15,281		$	31,365
	Accrued compensation			15,174		—			15,174
	Other			953		—			953
			$	32,211	$	15,281		$	47,492
	Income Taxes
			December 31, 2012
			As previously		Adjustment			As revised
			reported
	Current taxes:
	United States		$	10,431	$	4,314		$	14,745
	State			783		—			783
	Foreign			12,074		(4,314	)		7,760
			$	23,288	$	—		$	23,288
			31-Dec-11
			As previously		Adjustment			As revised
			reported
	Current taxes:
	United States		$	25,824	$	15,032		$	40,856
	State			2,602		—			2,602
	Foreign			20,346		(15,032	)		5,314
		$	48,772	$	—		$	48,772
		December 31, 2010
		As previously		Adjustment			As revised
		reported
Current taxes:
United States		$	27,789	$	8,807		$	36,596
State			3,323		—			3,323
Foreign			22,296		(8,807	)		13,489
		$	53,408	$	—		$	53,408
Segment Note
A reconciliation of segment assets to consolidated total assets is as follows:
		December 31, 2012
		As previously		Adjustment			As revised
		reported
Total segment assets		$	216,699	$	—		$	216,699
Cash and cash equivalents and investments			627,399		—			627,399
Other current assets			36,242		—			36,242
Property, plant and equipment, net			80,516		—			80,516
Goodwill and intangible assets, net			162,294		—			162,294
Other assets			11,692		17,720			29,412
Consolidated total assets		$	1,134,842	$	17,720		$	1,152,562
		December 31, 2011
		As previously		Adjustment			As revised
		reported
Total segment assets		$	274,526	$	—		$	274,526
Cash and cash equivalents and investments			573,392		—			573,392
Other current assets			44,856		—			44,856
Property, plant and equipment, net			72,487		—			72,487
Goodwill and intangible assets, net			141,127		—			141,127
Other assets			12,266		15,281			27,547
Consolidated total assets		$	1,118,654	$	15,281		$	1,133,935

Recently_Issued_Accounting_Pro

Recently Issued Accounting Pronouncements	9 Months Ended
	Sep. 30, 2013
Accounting Changes And Error Corrections [Abstract]	'
Recently Issued Accounting Pronouncements	'
	2)	Recently Issued Accounting Pronouncements
	In December 2011, the Financial Accounting Standards Board (“FASB”) issued Accounting Standards Update (“ASU”) No. 2011-11, “Disclosures about Offsetting Assets and Liabilities.” This ASU is intended to enhance the understanding of the effects of netting arrangements on an entity’s financial statements, including financial instruments and derivative instruments that are either offset or subject to a master netting arrangement. The scope of this ASU includes derivatives, sale and repurchase agreements, reverse sale and repurchase agreements, and securities borrowing and lending arrangements. In January 2013, the FASB issued ASU No. 2013-01 “Clarifying the Scope of Disclosures about Offsetting Assets and Liabilities.” This standard provided additional guidance on the scope of ASU No. 2011-11. The provisions of this ASU are effective for interim and annual periods beginning on or after January 1, 2013. The adoption of ASU No. 2011-11 did not have a material effect on the Company’s consolidated financial statements.
	On February 5, 2013, the FASB issued ASU No. 2013-02, “Other Comprehensive Income (Topic 220: Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income.” This ASU is intended to improve the reporting of reclassifications out of accumulated other comprehensive income by requiring an entity to provide information about the amounts reclassified out of accumulated other comprehensive income by component. In addition, an entity is required to present, either on the face of the statement where net income is presented or in the notes, significant amounts reclassified out of accumulated other comprehensive income, by the respective line items of net income but only if the amount reclassified is required under U.S. GAAP to be reclassified to net income in its entirely in the same reporting period. For other amounts that are not required under U.S. GAAP to be reclassified in their entirety to net income, an entity is required to cross-reference to other disclosures required under U.S. GAAP that provide additional detail about those amounts. The provisions of this ASU are effective prospectively for interim and annual periods beginning after December 15, 2012. The adoption of ASU No. 2013-12 did not have a material effect on the Company’s consolidated financial statements.
	On July 18, 2013, the FASB issued ASU 2013-11, “Income Taxes (Topic 740): Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exists.” Under the new standard, unrecognized tax benefits will be netted against all available same-jurisdiction loss or other tax carryforwards that would be utilized, rather than only against carryforwards that are created by unrecognized tax benefits. The provisions of this ASU are effective for interim and annual periods beginning on or after December 15, 2013. The adoption of ASU No. 2013-11 is not expected to have a material effect on the Company’s consolidated financial statements.

Investments

Investments	9 Months Ended
	Sep. 30, 2013
Investments Debt And Equity Securities [Abstract]	'
Investments	'
	3)	Investments
	The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:
			September 30, 2013		December 31, 2012
	Available-for-sale investments:
	Bankers’ acceptance drafts		$	330	$	242
	Time deposits			77,577		52
	Commercial paper and corporate obligations			81,308		—
	U.S. treasury obligations			—		13,054
	U.S. agency obligations			205,702		313,514
				364,917		326,862
	Trading investments:
	Mutual funds			959		791
			$	365,876	$	327,653
	The fair value of long-term investments with maturities of more than one year consists of the following:
			September 30, 2013		December 31, 2012
	Available-for-sale investments:
	Time deposits		$	56	$	—
	U.S. agency obligations			5,127		12,158
			$	5,183	$	12,158
	The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:
	As of September 30, 2013:		Cost		Gross		Gross			Estimated
					Unrealized		Unrealized			Fair Value
					Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts		$	330	$	—	$	—		$	330
	Time deposits			77,575		5		(3	)		77,577
	Commercial paper and corporate obligations			81,300		10		(2	)		81,308
	U.S. agency obligations			205,639		63		—			205,702
			$	364,844	$	78	$	(5	)	$	364,917
	Long-term investments:
	Time deposits		$	56	$	—	$	—		$	56
	U.S. agency obligations			5,122		5		—			5,127
	U.S. agency obligations		$	5,178	$	5	$	—		$	5,183
	As of December 31, 2012:		Cost		Gross		Gross			Estimated
					Unrealized		Unrealized			Fair Value
					Gains		(Losses)
	Short-term investments:
	Time deposits		$	52	$	—	$	—		$	52
	Bankers’ acceptance drafts			242		—		—			242
	U.S. treasury obligations			13,045		9		—			13,054
	U.S. agency obligations			313,262		258		(6	)		313,514
			$	326,601	$	267	$	(6	)	$	326,862
	Long-term investments:
	U.S. agency obligations		$	12,156	$	2	$	—		$	12,158
	Interest income is accrued as earned. Dividend income is recognized as income on the date the stock trades “ex-dividend.” The cost of marketable securities sold is determined by the specific identification method. Realized gains or (losses) are reflected in income and were not material for the three and nine months ended September 30, 2013 and 2012, respectively.
	The gains and (losses) for trading investments were immaterial for the three and nine months ended September 30, 2013 and 2012.

Fair_Value_Measurements

Fair Value Measurements	9 Months Ended
	Sep. 30, 2013
Fair Value Disclosures [Abstract]	'
Fair Value Measurements	'
	4)	Fair Value Measurements
	In accordance with the provisions of fair value accounting, a fair value measurement assumes that the transaction to sell an asset or transfer a liability occurs in the principal market for the asset or liability or, in the absence of a principal market, the most advantageous market for the asset or liability and defines fair value based upon an exit price model.
	The fair value measurement guidance establishes a fair value hierarchy which requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The guidance describes three levels of inputs that may be used to measure fair value:
	Level 1		Quoted prices (unadjusted) in active markets for identical assets or liabilities assessed at the measurement date. Active markets are those in which transactions for the asset or liability occur in sufficient frequency and volume to provide pricing information on an ongoing basis.
	Level 2		Observable inputs other than Level 1 prices, such as quoted prices for similar assets or liabilities; quoted prices in markets that are not active; or other inputs that are observable or can be corroborated by observable market data for substantially the full term of the assets or liabilities. Level 2 assets and liabilities include debt securities with quoted prices that are traded less frequently than exchange-traded instruments or securities or derivative contracts that are valued using a pricing model with inputs that are observable in the market or can be derived principally from or corroborated by observable market data.
	Level 3		Unobservable inputs that are supported by little or no market activity and that are significant to the fair value of the assets or liabilities. Level 3 assets and liabilities include financial instruments whose value is determined using pricing models, discounted cash flow methodologies, or similar techniques, as well as instruments for which the determination of fair value requires significant management judgment or estimation.
	In certain cases, the inputs used to measure fair value may fall into different levels of the fair value hierarchy. In such cases, the Company categorizes such assets and liabilities based on the lowest level input that is significant to the fair value measurement in its entirety. The Company’s assessment of the significance of a particular input to the fair value measurement in its entirety requires judgment and considers factors specific to the asset or liability.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of September 30, 2013 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant		Significant
			September 30, 2013		Active Markets		Other		Unobservable
					for Identical		Observable		Inputs
					Assets		Inputs		(Level 3)
					(Level 1)		(Level 2)
	Assets:
	Cash equivalents:
	Money market funds		$	57,982	$	57,982	$	—	$	—
	Trading securities:
	Mutual funds			959		959		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			330		—		330		—
	Time deposits			77,633		—		77,633		—
	Commercial paper and corporate obligations			81,308		—		81,308		—
	U.S. agency obligations			210,829		195,275		15,554		—
	Derivatives – currency forward contracts			746		—		746		—
	Total assets		$	429,787	$	254,216	$	175,571	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	749	$	—	$	749	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	57,982	$	57,982	$	—	$	—
	Short-term investments			365,876		191,107		174,769		—
	Other current assets			746		—		746		—
	Total current assets		$	424,604	$	249,089	$	175,515	$	—
	Long-term investments		$	5,183	$	5,127	$	56	$	—
	Liabilities:
	Other current liabilities		$	749	$	—	$	749	$	—
	-1	The cash and cash equivalent amounts presented in the table above do not include cash of $192,396 and non-negotiable time deposits of $4,400 as of September 30, 2013.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2012 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			December 31, 2012		Active Markets		Observable		Unobservable
					for Identical		Inputs		Inputs
					Assets		(Level 2)		(Level 3)
					(Level 1)
	Assets:
	Cash equivalents:
	Money market funds		$	51,291	$	51,291	$	—	$	—
	Bankers acceptance drafts			16		—		16		—
	Trading securities:
	Mutual funds			791		791		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			242		—		242		—
	U.S. treasury obligations			13,054		—		13,054		—
	U.S. agency obligations			325,672		295,665		30,007		—
	Derivatives – currency forward contracts			961		—		961		—
	Total assets		$	392,027	$	347,747	$	44,280	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	1,310	$	—	$	1,310	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	51,307	$	51,291	$	16	$	—
	Short-term investments(2)			327,601		284,298		43,303		—
Other current assets			961		—		961		—
Total current assets		$	379,869	$	335,589	$	44,280	$	—
Long-term investments		$	12,158	$	12,158	$	—	$	—
Liabilities:
Other current liabilities		$	1,310	$	—	$	1,310	$	—
-1	The cash and cash equivalent amounts presented in the table above do not include cash of $185,143 and non-negotiable time deposits of $51,138 as of December 31, 2012.
-2	The short-term investments presented in the table above do not include non-negotiable time deposits of $52 as of December 31, 2012.
Trading Mutual Fund Investments
Trading investments consist of certain U.S. and international equity mutual funds and government agency fixed income mutual funds.
Bankers’ Acceptance Drafts
Bankers’ acceptance drafts are short-term credit investments created by a non-financial firm and guaranteed by a bank. These drafts are often traded at a discount from face value and may be traded on a secondary market.
Available-For-Sale Investments
Available-for-sale investments consisted of time deposits and drafts denominated in the Euro currency, U.S. treasury obligations and U.S. agency obligations. The Company measures its debt and equity investments at fair value.
Derivatives
As a result of the Company’s global operating activities, the Company is exposed to market risks from changes in foreign currency exchange rates, which may adversely affect its operating results and financial position. When deemed appropriate, the Company minimizes its risks from foreign currency exchange rate fluctuations through the use of derivative financial instruments. The principal market in which the Company executes its foreign currency contracts is the institutional market in an over-the-counter environment with a relatively high level of price transparency. The market participants usually are large commercial banks. The forward foreign currency exchange contracts are valued using broker quotations, or market transactions and are classified within Level 2 of the fair value hierarchy.

Derivatives

Derivatives	9 Months Ended
	Sep. 30, 2013
Derivative Instruments And Hedging Activities Disclosure [Abstract]	'
Derivatives	'
	5)	Derivatives
	The Company enters into derivative instruments for risk management purposes only, including derivatives designated as hedging instruments and those utilized as economic hedges. The Company operates internationally and, in the normal course of business, is exposed to fluctuations in interest rates and foreign exchange rates. These fluctuations can increase the costs of financing, investing and operating the business. The Company has used derivative instruments, such as forward contracts, to manage certain foreign currency exposure.
	By nature, all financial instruments involve market and credit risks. The Company enters into derivative instruments with major investment grade financial institutions and no collateral is required. The Company has policies to monitor the credit risk of these counterparties. While there can be no assurance, the Company does not anticipate any material non-performance by any of these counterparties.
	The Company hedges a portion of its forecasted foreign currency denominated intercompany sales of inventory, over a maximum period of eighteen months, using forward foreign exchange contracts accounted for as cash-flow hedges related to Japanese, South Korean, British and Euro currencies. To the extent these derivatives are effective in off-setting the variability of the hedged cash flows, and otherwise meet the hedge accounting criteria, changes in the derivatives’ fair value are not included in current earnings but are included in other comprehensive income (“OCI”) in stockholders’ equity. These changes in fair value will subsequently be reclassified into earnings, as applicable, when the forecasted transaction occurs. To the extent that a previously designated hedging transaction is no longer an effective hedge, any ineffectiveness measured in the hedging relationship is recorded currently in earnings in the period it occurs. The cash flows resulting from forward exchange contracts are classified in the consolidated statements of cash flows as part of cash flows from operating activities. The Company does not enter into derivative instruments for trading or speculative purposes.
	To the extent the hedge accounting criteria is not met, the related foreign currency forward contracts are considered as economic hedges and changes in the fair value of these contracts are recorded immediately in earnings in the period in which they occur. These include hedges that are used to reduce exchange rate risks arising from the change in fair value of certain foreign currency denominated assets and liabilities (i.e., payables, receivables) and other economic hedges where the hedge accounting criteria were not met.
	As of September 30, 2013 and December 31, 2012, the Company had outstanding forward foreign exchange contracts with gross notional values of $36,529 and $41,448, respectively. The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of September 30, 2013 and December 31, 2012:
			September 30, 2013
	Currency Hedged (Buy/Sell)		Gross Notional			F air Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	11,763		$	746
	U.S. Dollar/South Korean Won			18,081			(636	)
	U.S. Dollar/Euro			4,241			(76	)
	U.S. Dollar/U.K. Pound Sterling			2,444			(37	)
	Total		$	36,529		$	(3	)
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
			December 31, 2012
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	13,992		$	961
	U.S. Dollar/South Korean Won			19,374			(1,180	)
	U.S. Dollar/Euro			4,217			(57	)
	U.S. Dollar/U.K. Pound Sterling			3,865			(73	)
	Total		$	41,448		$	(349	)
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
	The following table provides a summary of the fair value amounts of the Company’s derivative instruments:
	Derivatives Designated as Hedging Instruments		September 30, 2013			December 31, 2012
	Derivative assets:
	Forward exchange contracts		$	746		$	961
	Derivative liabilities:
	Forward exchange contracts			(749	)		(1,310	)
	Total net derivative (liability) designated as hedging instruments(1)		$	(3	)	$	(349	)
	-1	The derivative assets of $746 and derivative liabilities of $749 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of September 30, 2013. The derivative assets of $961 and derivative liabilities of $1,310 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of December 31, 2012. These foreign exchange contracts are subject to a master netting agreement with one financial institution. However, the Company has elected to record these contracts on a gross basis in the balance sheet.
	The net amount of existing losses as of September 30, 2013 that are expected to be reclassified from accumulated OCI into earnings within the next twelve months is $3.
	The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
	Derivatives Designated as Cash Flow Hedging Relationships		2013			2012			2013			2012
	Forward exchange contracts:
	Net (loss) recognized in OCI(1)		$	(1,837	)	$	(581	)	$	(315	)	$	(312	)
	Net gain (loss) reclassified from OCI into income(2)		$	297		$	(739	)	$	1,102		$	(1,178	)
	Net (loss) recognized in expense(3)		$	—		$	(66	)	$	—		$	(66	)
	-1	Net change in the fair value of the effective portion classified in OCI.
	-2	Effective portion classified in cost of products for the three and nine months ended September 30, 2013 and selling, general and administrative expenses for the three and nine months ended September 30, 2012.
	-3	Ineffective portion amount excluded from effectiveness testing which is recorded in selling, general and administrative expenses for the three and nine months ended September 30, 2012.
	The following table provides a summary of gains on derivatives not designated as hedging instruments:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
	Derivatives Not Designated as Hedging Instruments		2013			2012			2013			2012
	Forward exchange contracts:
	Net (loss) gain recognized in income(1)		$	(514	)	$	(552	)	$	141		$	(552	)
	-1	The Company has a forward foreign exchange contract that hedges an intercompany loan with its Korean subsidiary. This hedge does not qualify for hedge accounting and any gains (losses) are recorded immediately in selling, general and administrative expenses.

Inventories

Inventories	9 Months Ended
	Sep. 30, 2013
Inventory Disclosure [Abstract]	'
Inventories	'
	6)	Inventories
	Inventories consist of the following:
			September 30, 2013		December 31, 2012
	Raw materials		$	72,240	$	76,610
	Work-in-process			22,145		19,708
	Finished goods			41,675		38,321
			$	136,060	$	134,639

Acquisition

Acquisition	9 Months Ended
	Sep. 30, 2013
Business Combinations [Abstract]	'
Acquisition	'
	7)	Acquisition
	On March 12, 2013, the Company acquired Alter Power Systems S.r.l. (“Alter”), located in Reggio Emilia, Italy. The aggregate purchase price, net of cash acquired and after final debt and working capital adjustments was $2,426. Total cash paid as of June 30, 2013, net of cash acquired of $21 was $2,058. During June 2013, one of two holdback provisions was met and the Company released $123. The Company will pay the remaining $368 subject to a final holdback provision being met. Alter develops advanced microwave power generators, components and systems for industrial microwave heating, microwave plasma coating and semiconductor applications. This acquisition strengthens the Company’s existing microwave plasma expertise and product portfolio, and extends its opportunity into high growth, non-plasma microwave applications for industrial processes, food and beverage manufacturing and other markets.
	The following table summarizes the estimated fair value of the assets acquired and liabilities assumed at the date of the acquisition:
	Current assets		$	1,053
	Property and equipment			211
	Intangible assets			2,806
	Other assets			67
	Total assets acquired			4,137
	Debt (Note 11)			770
	Deferred taxes and other liabilities			920
	Total liabilities assumed			1,690
	Total purchase price			2,447
	Cash acquired			(21	)
	Total purchase price, net of cash acquired		$	2,426
	The intangible assets associated with the acquisition are not deductible for tax purposes. The following table reflects the allocation of the acquired intangible assets and related estimates of useful lives. These acquired intangibles will be amortized on a straight-line basis.
	Current developed technology		$	2,208		9 year useful life
	Trademarks and trade names			598		3 year useful life
			$	2,806
	The results of this acquisition were included in the Company’s consolidated operations beginning on March 12, 2013. The pro forma consolidated statements reflecting the operating results of Alter, had it been acquired as of January 1, 2013, would not differ materially from the operating results of the Company as reported for the quarter ended March 31, 2013. Alter is included in the Company’s Power and Reactive Gas Products group and the Advanced Manufacturing Capital Equipment reportable segment.

Goodwill_and_Intangible_Assets

Goodwill and Intangible Assets	9 Months Ended
	Sep. 30, 2013
Goodwill And Intangible Assets Disclosure [Abstract]	'
Goodwill and Intangible Assets	'
	8)	Goodwill and Intangible Assets
	Goodwill
	The Company’s methodology for allocating the purchase price relating to purchase acquisitions is determined through established and generally accepted valuation techniques. Goodwill is measured as the excess of the cost of the acquisition over the sum of the amounts assigned to tangible and identifiable intangible assets acquired less liabilities assumed. The Company assigns assets acquired (including goodwill) and liabilities assumed to one or more reporting units as of the date of acquisition. Typically acquisitions relate to a single reporting unit and thus do not require the allocation of goodwill to multiple reporting units. If the products obtained in an acquisition are assigned to multiple reporting units, the goodwill is distributed to the respective reporting units as part of the purchase price allocation process.
	Goodwill and purchased intangible assets with indefinite useful lives are not amortized, but are reviewed for impairment annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets requires significant judgment. The Company regularly monitors current business conditions and other factors including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability that may impact future operating results.
	As of October 31, 2012, the Company performed its annual impairment assessment of goodwill and determined that there was no impairment.
	The changes in the carrying amount of goodwill and accumulated impairment (loss) during the nine months ended September, 2013 and twelve months ended December 31, 2012 were as follows:
			2013									2012
			Gross			Accumulated			Net			Gross		Accumulated			Net
			Carrying			Impairment						Carrying		Impairment
			Amount			(Loss)						Amount		(Loss)
	Beginning balance at January 1		$	290,147		$	(139,414	)	$	150,733		$	279,498	$	(139,414	)	$	140,084
	Acquired goodwill(1)			—			—			—			9,989		—			9,989
	Foreign currency translation			(33	)		—			(33	)		660		—			660
	Ending balance at September 30, 2013 and December 31, 2012		$	290,114		$	(139,414	)	$	150,700		$	290,147	$	(139,414	)	$	150,733
	-1	In August 2012, the Company purchased Plasmart, Inc. for $22,607, net of cash acquired. The Company recorded $9,989 of goodwill in connection with the acquisition.
	Intangible Assets
	Components of the Company’s intangible assets are comprised of the following:
			Gross			Accumulated			Foreign			Net
						Amortization			Currency
									Translation
	As of September 30, 2013:
	Completed technology(1)		$	84,680		$	(77,823	)	$	369		$	7,226
	Customer relationships			14,571			(9,590	)		281			5,262
	Patents, trademarks, trade names and other(1)			25,636			(24,840	)		32			828
			$	124,887		$	(112,253	)	$	682		$	13,316
	-1	In August 2013, the Company purchased $268 of net assets of which $388 was completed technology. In March 2013, the Company purchased Alter for $2,426, net of cash acquired. The Company recorded $2,806 of separately identified intangible assets, of which $2,208 was completed technology and $598 was trademarks and trade names.
			Gross			Accumulated			Foreign			Net
						Amortization			Currency
									Translation
	As of December 31, 2012:
	Completed technology		$	82,084		$	(77,243	)	$	254		$	5,095
	Customer relationships			14,571			(8,886	)		312			5,997
	Patents, trademarks, trade names and other			25,038			(24,587	)		18			469
			$	121,693		$	(110,716	)	$	584		$	11,561
	Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2013 were $361 and $1,537, respectively. Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2012 were $215 and $453, respectively. Estimated amortization expense for each of the remaining fiscal years is as follows:
	Year		Amount
	2013 (remaining)		$	466
	2014			1,768
	2015			1,752
	2016			1,570
	2017			1,541
	2018			1,532
	Thereafter			4,687

Other_Assets

Other Assets	9 Months Ended
	Sep. 30, 2013
Deferred Costs Capitalized Prepaid And Other Assets Disclosure [Abstract]	'
Other Assets	'
	9)	Other Assets
			September 30,		December 31,
			2013		2012
	Other Current Assets:
	Income tax receivable		$	10,684	$	12,768
	Other			17,967		15,280
	Total other current assets		$	28,651	$	28,048
	Other Assets:
	Deferred tax assets, net		$	9,828	$	9,497
	Long-term income tax receivable			19,411		17,720
	Other			1,959		2,195
	Total other assets		$	31,198	$	29,412

Other_Liabilities

Other Liabilities	9 Months Ended
	Sep. 30, 2013
Other Liabilities Disclosure [Abstract]	'
Other Liabilities	'
	10)	Other Liabilities
			September 30,		December 31,
			2013		2012
	Other Current Liabilities:
	Product warranties		$	6,732	$	8,266
	Deferred revenue			4,599		9,280
	Other			24,568		19,859
	Total other current liabilities		$	35,899	$	37,405
	Other Liabilities:
	Long-term income tax payable		$	44,309	$	38,600
	Accrued compensation			21,078		18,750
	Other			5,004		3,745
	Total other liabilities		$	70,391	$	61,095

Debt

Debt	9 Months Ended
	Sep. 30, 2013
Debt Disclosure [Abstract]	'
Debt	'
	11)	Debt
	The Company’s Japanese subsidiary has lines of credit and short-term borrowing arrangements with two financial institutions which generally expire and are renewed at three month intervals. The lines of credit provide for aggregate borrowings as of September 30, 2013 of up to an equivalent of $23,284 U.S. dollars. One of the borrowing arrangements has an interest rate based on the Tokyo Interbank Offer Rate at the time of borrowing and the other has an interest rate based on the Japanese Short-term Prime Lending Rate. There were no borrowings outstanding under these arrangements at September 30, 2013 and December 31, 2012.
	The Company also had various lines of credit and short and long-term borrowing arrangements as a result of its acquisitions of Plasmart, Inc. in 2012 and Alter in March 2013. All of these lines of credit and borrowing arrangements were paid off and terminated in the second quarter of 2013. There were no outstanding balances at September 30, 2013 and December 31, 2012, respectively.

Product_Warranties

Product Warranties	9 Months Ended
	Sep. 30, 2013
Guarantees [Abstract]	'
Product Warranties	'
	12)	Product Warranties
	The Company provides for the estimated costs to fulfill customer warranty obligations upon the recognition of the related revenue. While the Company engages in extensive product quality programs and processes, including actively monitoring and evaluating the quality of its component suppliers, the Company’s warranty obligation is affected by shipment volume, product failure rates, utilization levels, material usage, and supplier warranties on parts delivered to the Company. Should actual product failure rates, utilization levels, material usage, or supplier warranties on parts differ from the Company’s estimates, revisions to the estimated warranty liability would be required. The product warranty liability is included in other current liabilities in the consolidated balance sheets.
	Product warranty activities were as follows:
			Nine Months Ended September 30,
			2013			2012
	Balance at January 1		$	8,266		$	8,315
	Provision for product warranties			1,705			3,750
	Direct charges to warranty liability			(3,142	)		(3,733	)
	Foreign currency translation			(97	)		505
	Balance at September 30		$	6,732		$	8,837

Income_Taxes

Income Taxes	9 Months Ended
	Sep. 30, 2013
Income Tax Disclosure [Abstract]	'
Income Taxes	'
	13)	Income Taxes
	The Company’s effective tax rate for the three and nine months ended September 30, 2013 was 80.4% and 44.8%, respectively. The Company’s effective tax rate for the three and nine months ended September 30, 2012 was 61.3% and 35.7%, respectively. The effective tax rate for the nine months ended September 30, 2013, and related income tax expense was higher than the U.S. statutory tax rate primarily due to a decision made during the quarter ended September 30, 2013 to pay currently, at a substantially reduced rate, taxes on certain accumulated earnings of its Israeli subsidiary relating to calendar year periods 2002-2011 covered under its tax holiday that expired on December 31, 2011. This additional charge was partially offset by additional U.S. tax incentives realized by the Company and recognized as discrete events during the quarter ended September 30, 2013, and the geographic mix of income and profits earned by the Company’s international subsidiaries being taxed at rates lower than the U.S. statutory rate. Additionally, certain tax incentives realized by the Company were recognized as discrete events during the quarter ended March 31, 2013. These incentives were reinstated under The American Taxpayer Relief Act of 2012 that was signed into law on January 2, 2013. The effective tax rate for the nine months ended September 30, 2012, and related income tax expense was higher than the U.S. statutory tax rate primarily due to the cumulative year-to-date tax effect of a slightly higher annual effective tax rate based on the Company’s revised full year forecast, and non-deductible acquisition costs that were offset in part by the geographic mix of income and profits earned by the Company’s international subsidiaries being taxed at rates lower than the U.S. statutory rate.
	At September 30, 2013, the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $45,402. At December 31, 2012, the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $40,674. The net increase from December 31, 2012 was attributable to an increase in reserves for existing uncertain tax positions. At September 30, 2013, there are $23,570, excluding interest and penalties, of net unrecognized tax benefits that, if recognized, would affect the annual effective tax rate. The Company accrues interest expense and, if applicable, penalties for any uncertain tax positions. Interest and penalties are classified as a component of income tax expense. At September 30, 2013 and December 31, 2012, the Company had accrued interest on unrecognized tax benefits of approximately $2,147 and $1,571, respectively.
	On September 13, 2013, the U.S. Department of the Treasury and Internal Revenue Service released final tangible property regulations that provide guidance on the tax treatment regarding the deduction and capitalization of expenditures related to tangible property. While early adoption is available, the effective date to implement these regulations is for tax years beginning on or after January 1, 2014. The Company is currently assessing these rules and the impact to its financial statements, if any, but believes adoption of these regulations will not have a material impact on its consolidated results of operations, cash flows or financial position.
	The Company and its subsidiaries are subject to examination by federal, state and foreign tax authorities. The Internal Revenue Service commenced an examination of the Company’s U.S. federal tax filings for tax years 2007 through 2009 during the quarter ended June 30, 2012. As a result, the U.S. statute of limitations remains open between tax years 2007 through present. The statute of limitations for the Company’s tax filings in other jurisdictions varies between fiscal years 2006 through present.
	While the Company believes it has adequately provided for all tax positions, amounts asserted by taxing authorities could materially differ from the Company’s accrued positions as a result of uncertain and complex application of tax regulations. Additionally, the recognition and measurement of certain tax benefits include estimates and judgment by management and inherently includes subjectivity. Accordingly, the Company may record additional provisions or benefits due to U.S. federal, state, and foreign tax-related matters in the future as it revises estimates or settles or otherwise resolves the underlying matters.

Net_Income_Per_Share

Net Income Per Share	9 Months Ended
	Sep. 30, 2013
Earnings Per Share [Abstract]	'
Net Income Per Share	'
	14)	Net Income Per Share
	The following table sets forth the computation of basic and diluted net income per share:
			Three Months Ended				Nine Months Ended
			September 30,				September 30,
			2013		2012		2013		2012
	Numerator:
	Net income		$	2,458	$	2,580	$	15,539	$	43,920
	Denominator:
	Shares used in net income per common share – basic			53,165,000		52,854,000		52,998,000		52,679,000
	Effect of dilutive securities:
	Stock options, restricted stock and employee stock purchase plan			348,000		436,000		412,000		561,000
	Shares used in net income per common share – diluted			53,513,000		53,290,000		53,410,000		53,240,000
	Net income per common share:
	Basic		$	0.05	$	0.05	$	0.29	$	0.83
	Diluted		$	0.05	$	0.05	$	0.29	$	0.82
	Basic earnings per share (“EPS”) is computed by dividing income available to common stockholders by the weighted-average number of common shares outstanding during the period. The computation of diluted EPS is similar to the computation of basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding (using the treasury stock method) if securities containing potentially dilutive common shares (stock options and restricted stock units) had been converted to such common shares, and if such assumed conversion is dilutive.
	As of September 30, 2013, stock options and restricted stock units relating to an aggregate of approximately 1,059,000 shares were outstanding. For the three and nine months ended September 30, 2013, the potential dilutive effect of approximately 104,000 and 101,000 weighted-average shares, respectively, of restricted stock units and stock options were excluded from the computation of diluted weighted-average shares outstanding as the shares would have an anti-dilutive effect on EPS.
	As of September 30, 2012, stock options and restricted stock units relating to an aggregate of approximately 1,250,000 shares were outstanding. For the three and nine months ended September 30, 2012, the potential dilutive effect of 105,000 and 227,000 weighted-average shares, respectively, of restricted stock units and stock options were excluded from the computation of diluted weighted-average shares outstanding as the shares would have an anti-dilutive effect on EPS.

Stockholders_Equity

Stockholder's Equity	9 Months Ended
	Sep. 30, 2013
Equity [Abstract]	'
Stockholder's Equity	'
	15)	Stockholder’s Equity
	Stock Repurchase Program
	On July 25, 2011, the Company’s Board of Directors approved a share repurchase program for the repurchase of up to an aggregate of $200,000 of its outstanding common stock from time to time in open market purchases, privately negotiated transactions or through other appropriate means. The timing and quantity of any shares repurchased depends upon a variety of factors, including business conditions, stock market conditions and business development activities, including, but not limited to, merger and acquisition opportunities. These repurchases may be commenced, suspended or discontinued at any time without prior notice.
	During the nine months ended September 30, 2013, the Company repurchased 107,000 shares of its common stock for $2,875, or an average price of $26.87 per share. No repurchases occurred during the three months ended September 30, 2013.
	Cash Dividends
	Holders of the Company’s common stock are entitled to receive dividends when they are declared by the Company’s Board of Directors. During the nine months ended September 30, 2013, the Board of Directors authorized three quarterly dividends of $0.16 per share, which totaled $25,458 or $0.48 per share. During the nine months ended September 30, 2012, the Board of Directors declared two quarterly dividends of $0.15 per share and one quarterly dividend of $0.16 per share that totaled $24,261 or $0.46 per share.
	On October 28, 2013, our Board of Directors declared a quarterly cash dividend of $0.16 per share to be paid on December 13, 2013 to shareholders of record as of December 2, 2013. Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of the Company’s Board of Directors.

Business_Segment_Geographic_Ar

Business Segment, Geographic Area, Product and Significant Customer Information	9 Months Ended
	Sep. 30, 2013
Segment Reporting [Abstract]	'
Business Segment, Geographic Area, Product and Significant Customer Information	'
	16)	Business Segment, Geographic Area, Product and Significant Customer Information
	The Company has four reportable segments based upon the manner in which information is produced internally and provided to the Company’s chief operating decision-maker (“CODM”).
	The Company develops, manufactures, sells and services products that measure, control, power and monitor critical parameters of advanced manufacturing processes. The Company’s CODM utilizes consolidated financial information to make decisions about allocating resources and assessing performance for the entire Company. In addition, certain disaggregated financial information is also provided to the CODM. Based upon the information provided to the CODM, the Company has determined it has eight operating segments and four reportable segments.
	The eight operating segments are PFMC Products, Controls Products, ASTeX Products, ENI Products, HPS Products (Vacuum Products), Analytical Solutions Group, Europe Region Sales & Service and Asia Region Sales & Service.
	PFMC Products, Controls Products, ASTeX Products, ENI Products and HPS Products comprise a single reportable segment due to the similarities of the operating segments. This reportable segment, Advanced Manufacturing Capital Equipment, includes the development, manufacturing, sales and servicing of instruments and control products, power and reactive gas products, and vacuum products, all of which are utilized in semiconductor processing and other similar advanced manufacturing processes. Sales in this segment include both external sales and intercompany sales (which are stated at agreed upon transfer prices). External sales of these products made in Europe or Asia are reported as sales in the Europe Region Sales & Service or Asia Region Sales & Service segments.
	Analytical Solutions Group, Asia Region Sales & Service and Europe Region Sales & Service are each separate reportable segments. The Company has reported corporate expenses and certain intercompany pricing transactions in a Corporate, Eliminations and Other reconciling column. The Analytical Solutions Group includes gas composition analysis and information technology products. The Europe and Asia region sales and service segments mainly resell and service the Advanced Manufacturing Capital Equipment and Analytical Solutions Group products sold in their respective regions.
	MKS derives the segment results directly from the manner in which results are reported in its management reporting system. The accounting policies MKS uses to derive reportable segment results are substantially the same as those used for external reporting purposes except that a substantial portion of the sales of the Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments are intercompany sales to the regions at tax-based transfer prices and certain significant costs, including stock-based compensation and management incentive compensation, are not allocated to the segments and are included in Corporate, Eliminations and Other. The CODM reviews several metrics of each operating segment, including net revenues and gross profit (loss).
	The following is net revenues by reportable segment:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Advanced Manufacturing Capital Equipment		$	133,307		$	104,191			$363,512			$382,016
	Analytical Solutions Group			13,313			15,160			41,217			47,680
	Europe Region Sales & Service Operations(1)			12,436			13,485			35,287			38,141
	Asia Region Sales & Service Operations(1)			52,558			46,782			149,267			182,663
	Corporate, Eliminations and Other			(45,161	)		(38,171	)		(124,257	)		(140,788	)
			$	166,453		$	141,447			$465,026			$509,712
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
	The following is gross profit by reportable segment:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Advanced Manufacturing Capital Equipment		$	43,151		$	34,829		$	121,647		$	141,521
	Analytical Solutions Group			6,758			8,100			21,239			24,485
	Europe Region Sales & Service Operations(1)			3,427			3,547			10,005			11,292
	Asia Region Sales & Service Operations(1)			11,580			9,030			31,366			28,143
	Corporate, Eliminations and Other			(2,682	)		1,065			(5,363	)		11,437
			$	62,234		$	56,571		$	178,894		$	216,878
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
	The following is capital expenditures by reportable segment for the three and nine months ended September 30, 2013 and 2012:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Capital expenditures		$	1,893		$	125		$	24		$	239		$	513		$	2,794
	Nine Months Ended September 30, 2013:
	Capital expenditures		$	6,599		$	265		$	137		$	435		$	1,718		$	9,154
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2012:
	Capital expenditures		$	2,102		$	283		$	35		$	237		$	371		$	3,028
	Nine Months Ended September 30, 2012:
	Capital expenditures		$	6,741		$	698		$	109		$	654		$	2,838		$	11,040
	The following is depreciation and amortization by reportable segment for the three and nine months ended September 30, 2013 and 2012:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Depreciation and amortization		$	2,861		$	319		$	86		$	294		$	685		$	4,245
	Nine Months Ended September 30, 2013:
	Depreciation and amortization		$	8,819		$	923		$	260		$	876		$	1,837		$	12,715
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2012:
	Depreciation and amortization		$	2,409		$	248		$	102		$	537		$	344		$	3,640
	Nine Months Ended September 30, 2012:
	Depreciation and amortization		$	6,797		$	715		$	305		$	1,330		$	1,050		$	10,197
The following is segment assets by reportable segment:
		Product Groups						Foreign Sales & Service Operations
		Advanced			Analytical			Europe			Asia			Corporate,			Total
		Manufacturing			Solutions Group									Eliminations
		Capital Equipment												and Other
September 30, 2013:
Segment assets:
Accounts receivable(1)		$	14,645		$	4,263		$	6,611		$	36,380		$	36,234		$	98,133
Inventory			107,935			4,354			3,950			28,532			(8,711	)		136,060
Total segment assets		$	122,580		$	8,617		$	10,561		$	64,912		$	27,523		$	234,193
		Product Groups						Foreign Sales & Service Operations
		Advanced			Analytical			Europe			Asia			Corporate,			Total
		Manufacturing			Solutions Group									Eliminations
		Capital Equipment												and Other
December 31, 2012:
Segment assets:
Accounts receivable(1)		$	9,644		$	5,889		$	5,813		$	32,088		$	28,626		$	82,060
Inventory			108,397			3,841			3,691			29,534			(10,824	)		134,639
Total segment assets		$	118,041		$	9,730		$	9,504		$	61,622		$	17,802		$	216,699
-1	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.
A reconciliation of segment assets to consolidated total assets is as follows:
		September 30, 2013			December 31, 2012
Total segment assets		$	234,193		$	216,699
Cash and cash equivalents and investments			625,837			627,399
Other current assets			38,710			36,242
Property, plant and equipment, net			78,020			80,516
Goodwill and intangible assets, net			164,016			162,294
Other assets			31,198			29,412
Consolidated total assets		$	1,171,974		$	1,152,562
Worldwide Product Information
Because the reportable segment information above does not reflect worldwide sales of the Company’s products, the Company groups its products into four groups of similar products based upon the similarity of product function. Worldwide net revenue for each group of products is as follows:
		Three Months Ended						Nine Months Ended
		September 30,						September 30,
		2013			2012			2013			2012
Instruments and Control Products		$	60,615		$	57,761		$	184,729		$	205,654
Power and Reactive Gas Products			72,471			52,031			182,294			199,864
Vacuum Products			18,098			15,435			53,588			53,158
Analytical Solutions Group Products			15,269			16,220			44,415			51,036
		$	166,453		$	141,447		$	465,026		$	509,712
Sales of Instruments and Control Products, Power and Reactive Gas Products and Vacuum Products are included in the Company’s Advanced Manufacturing Capital Equipment Products segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions. Sales of the Analytical Solutions Group products are included in the Analytical Solutions Group segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions.
Geographic
Information about the Company’s operations in different geographic regions is presented in the tables below. Net revenues to unaffiliated customers are based on the location in which the sale originated. Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.
		Three Months Ended						Nine Months Ended
		September 30,						September 30,
		2013			2012			2013			2012
Net revenues:
United States		$	91,286		$	73,775		$	252,704		$	259,954
Korea			16,491			12,574			46,597			54,472
Japan			13,825			14,270			40,243			67,122
Europe			20,433			21,341			57,958			65,800
Asia (excluding Korea and Japan)			24,418			19,487			67,524			62,364
		$	166,453		$	141,447		$	465,026		$	509,712
		September 30, 2013			December 31, 2012
Long-lived assets:(1)
United States		$	61,404		$	62,203
Europe			5,175			5,844
Asia			13,398			14,664
		$	79,977		$	82,711
-1	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.
Major Customers
The Company had two customers with net revenues greater than 10% of total net revenues in the periods shown as follows:
		Three Months Ended						Nine Months Ended
		September 30,						September 30,
		2013			2012			2013			2012
Customer A			16.4	%		13.9	%		16.7	%		14.8	%
Customer B			13.5	%		8.5	%		11.8	%		10.3	%

Restructuring

Restructuring	9 Months Ended
	Sep. 30, 2013
Restructuring And Related Activities [Abstract]	'
Restructuring	'
	17)	Restructuring
	In the second and third quarters of 2013, the Company initiated restructuring plans to consolidate a small sales office and a small engineering facility to other MKS facilities. The plans included a small reduction in headcount of approximately 27 people.
	The Company recorded restructuring charges of $1,126 and $1,364 for the three and nine months ended September 30, 2013, respectively. The restructuring charges were primarily for severance and other charges associated with the reductions in workforce. The restructuring plans are expected to be completed by December 31, 2013.

Commitments_and_Contingencies

Commitments and Contingencies	9 Months Ended
	Sep. 30, 2013
Commitments And Contingencies Disclosure [Abstract]	'
Commitments and Contingencies	'
	18)	Commitments and Contingencies
	In the third quarter of 2012, we incurred $5,316 in charges to settle litigation with former shareholders of one of our former subsidiaries. This litigation was long-standing and the decision to reach a settlement was made to eliminate future legal expenses related to the suit. In the second quarter of 2013, we recovered $1,071 from our insurance company relating to the 2012 litigation settlement.
	The Company is subject to various legal proceedings and claims, which have arisen in the ordinary course of business. In the opinion of management, the ultimate disposition of these matters will not have a material adverse effect on the Company’s results of operations, financial condition or cash flows.

Recently_Issued_Accounting_Pro1

Recently Issued Accounting Pronouncements (Policies)	9 Months Ended
	Sep. 30, 2013
Accounting Changes And Error Corrections [Abstract]	'
Offsetting Assets and Liabilities	'
	In December 2011, the Financial Accounting Standards Board (“FASB”) issued Accounting Standards Update (“ASU”) No. 2011-11, “Disclosures about Offsetting Assets and Liabilities.” This ASU is intended to enhance the understanding of the effects of netting arrangements on an entity’s financial statements, including financial instruments and derivative instruments that are either offset or subject to a master netting arrangement. The scope of this ASU includes derivatives, sale and repurchase agreements, reverse sale and repurchase agreements, and securities borrowing and lending arrangements. In January 2013, the FASB issued ASU No. 2013-01 “Clarifying the Scope of Disclosures about Offsetting Assets and Liabilities.” This standard provided additional guidance on the scope of ASU No. 2011-11. The provisions of this ASU are effective for interim and annual periods beginning on or after January 1, 2013. The adoption of ASU No. 2011-11 did not have a material effect on the Company’s consolidated financial statements.
Other Comprehensive Income	'
	On February 5, 2013, the FASB issued ASU No. 2013-02, “Other Comprehensive Income (Topic 220: Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income.” This ASU is intended to improve the reporting of reclassifications out of accumulated other comprehensive income by requiring an entity to provide information about the amounts reclassified out of accumulated other comprehensive income by component. In addition, an entity is required to present, either on the face of the statement where net income is presented or in the notes, significant amounts reclassified out of accumulated other comprehensive income, by the respective line items of net income but only if the amount reclassified is required under U.S. GAAP to be reclassified to net income in its entirely in the same reporting period. For other amounts that are not required under U.S. GAAP to be reclassified in their entirety to net income, an entity is required to cross-reference to other disclosures required under U.S. GAAP that provide additional detail about those amounts. The provisions of this ASU are effective prospectively for interim and annual periods beginning after December 15, 2012. The adoption of ASU No. 2013-12 did not have a material effect on the Company’s consolidated financial statements.
Income Taxes	'
	On July 18, 2013, the FASB issued ASU 2013-11, “Income Taxes (Topic 740): Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exists.” Under the new standard, unrecognized tax benefits will be netted against all available same-jurisdiction loss or other tax carryforwards that would be utilized, rather than only against carryforwards that are created by unrecognized tax benefits. The provisions of this ASU are effective for interim and annual periods beginning on or after December 15, 2013. The adoption of ASU No. 2013-11 is not expected to have a material effect on the Company’s consolidated financial statements.

Basis_of_Presentation_Tables

Basis of Presentation (Tables)	9 Months Ended
	Sep. 30, 2013
Accounting Policies [Abstract]	'
Revisions in the Balance Sheet Line Items	'
	The tables below reflect the revisions in the balance sheet line items for the periods ended December 31, 2012 and 2011.
		December 31, 2012
		As previously		Adjustment			As revised
		reported
	Other assets	$	11,692	$	17,720		$	29,412
	Other liabilities	$	43,375	$	17,720		$	61,095
		31-Dec-11
		As previously		Adjustment			As revised
		reported
	Other assets	$	12,266	$	15,281		$	27,547
	Other liabilities	$	32,211	$	15,281		$	47,492
Revision of Other Assets and Other Liabilities	'
	The tables below reflect the sections in certain footnotes that were affected by the revision for the periods ended December 31, 2012 and 2011.
	Other Assets
		December 31, 2012
		As previously		Adjustment			As revised
		reported
	Deferred tax assets, net	$	9,497	$	—		$	9,497
	Long-term income tax receivable		—		17,720			17,720
	Other		2,195		—			2,195
		$	11,692	$	17,720		$	29,412
		31-Dec-11
		As previously		Adjustment			As revised
		reported
	Deferred tax assets, net	$	10,274	$	—		$	10,274
	Long-term income tax receivable		—		15,281			15,281
	Other		1,992		—			1,992
		$	12,266	$	15,281		$	27,547
	Other Liabilities
		31-Dec-12
		As previously		Adjustment			As revised
		reported
	Long-term income tax payable	$	20,880	$	17,720		$	38,600
	Accrued compensation		18,750		—			18,750
	Other		3,745		—			3,745
		$	43,375	$	17,720		$	61,095
		December 31, 2011
		As previously		Adjustment			As revised
		reported
	Long-term income tax payable	$	16,084	$	15,281		$	31,365
	Accrued compensation		15,174		—			15,174
	Other		953		—			953
		$	32,211	$	15,281		$	47,492
Revision of Income Taxes	'
	Income Taxes
		December 31, 2012
		As previously		Adjustment			As revised
		reported
	Current taxes:
	United States	$	10,431	$	4,314		$	14,745
	State		783		—			783
	Foreign		12,074		(4,314	)		7,760
		$	23,288	$	—		$	23,288
		31-Dec-11
		As previously		Adjustment			As revised
		reported
	Current taxes:
	United States	$	25,824	$	15,032		$	40,856
	State		2,602		—			2,602
	Foreign		20,346		(15,032	)		5,314
		$	48,772	$	—		$	48,772
		December 31, 2010
		As previously		Adjustment			As revised
		reported
	Current taxes:
	United States	$	27,789	$	8,807		$	36,596
	State		3,323		—			3,323
	Foreign		22,296		(8,807	)		13,489
		$	53,408	$	—		$	53,408
Reconciliation of Segment Assets to Consolidated Total Assets	'
	A reconciliation of segment assets to consolidated total assets is as follows:
		December 31, 2012
		As previously		Adjustment			As revised
		reported
	Total segment assets	$	216,699	$	—		$	216,699
	Cash and cash equivalents and investments		627,399		—			627,399
	Other current assets		36,242		—			36,242
	Property, plant and equipment, net		80,516		—			80,516
	Goodwill and intangible assets, net		162,294		—			162,294
	Other assets		11,692		17,720			29,412
	Consolidated total assets	$	1,134,842	$	17,720		$	1,152,562
		December 31, 2011
		As previously		Adjustment			As revised
		reported
	Total segment assets	$	274,526	$	—		$	274,526
	Cash and cash equivalents and investments		573,392		—			573,392
	Other current assets		44,856		—			44,856
	Property, plant and equipment, net		72,487		—			72,487
	Goodwill and intangible assets, net		141,127		—			141,127
	Other assets		12,266		15,281			27,547
	Consolidated total assets	$	1,118,654	$	15,281		$	1,133,935

Investments_Tables

Investments (Tables)	9 Months Ended
	Sep. 30, 2013
Investments Debt And Equity Securities [Abstract]	'
Fair Value of Available for Sale and Trading Investments	'
	The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:
		September 30, 2013		December 31, 2012
	Available-for-sale investments:
	Bankers’ acceptance drafts	$	330	$	242
	Time deposits		77,577		52
	Commercial paper and corporate obligations		81,308		—
	U.S. treasury obligations		—		13,054
	U.S. agency obligations		205,702		313,514
			364,917		326,862
	Trading investments:
	Mutual funds		959		791
		$	365,876	$	327,653
Fair Value of Long-Term Available-for-Sale Investments	'
	The fair value of long-term investments with maturities of more than one year consists of the following:
		September 30, 2013		December 31, 2012
	Available-for-sale investments:
	Time deposits	$	56	$	—
	U.S. agency obligations		5,127		12,158
		$	5,183	$	12,158
Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities	'
	The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:
	As of September 30, 2013:	Cost		Gross		Gross			Estimated
				Unrealized		Unrealized			Fair Value
				Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts	$	330	$	—	$	—		$	330
	Time deposits		77,575		5		(3	)		77,577
	Commercial paper and corporate obligations		81,300		10		(2	)		81,308
	U.S. agency obligations		205,639		63		—			205,702
		$	364,844	$	78	$	(5	)	$	364,917
	Long-term investments:
	Time deposits	$	56	$	—	$	—		$	56
	U.S. agency obligations		5,122		5		—			5,127
	U.S. agency obligations	$	5,178	$	5	$	—		$	5,183
	As of December 31, 2012:	Cost		Gross		Gross			Estimated
				Unrealized		Unrealized			Fair Value
				Gains		(Losses)
	Short-term investments:
	Time deposits	$	52	$	—	$	—		$	52
	Bankers’ acceptance drafts		242		—		—			242
	U.S. treasury obligations		13,045		9		—			13,054
	U.S. agency obligations		313,262		258		(6	)		313,514
		$	326,601	$	267	$	(6	)	$	326,862
	Long-term investments:
	U.S. agency obligations	$	12,156	$	2	$	—		$	12,158

Fair_Value_Measurements_Tables

Fair Value Measurements (Tables)	9 Months Ended
	Sep. 30, 2013
Fair Value Disclosures [Abstract]	'
Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis	'
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of September 30, 2013 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant		Significant
			September 30, 2013		Active Markets		Other		Unobservable
					for Identical		Observable		Inputs
					Assets		Inputs		(Level 3)
					(Level 1)		(Level 2)
	Assets:
	Cash equivalents:
	Money market funds		$	57,982	$	57,982	$	—	$	—
	Trading securities:
	Mutual funds			959		959		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			330		—		330		—
	Time deposits			77,633		—		77,633		—
	Commercial paper and corporate obligations			81,308		—		81,308		—
	U.S. agency obligations			210,829		195,275		15,554		—
	Derivatives – currency forward contracts			746		—		746		—
	Total assets		$	429,787	$	254,216	$	175,571	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	749	$	—	$	749	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	57,982	$	57,982	$	—	$	—
	Short-term investments			365,876		191,107		174,769		—
	Other current assets			746		—		746		—
	Total current assets		$	424,604	$	249,089	$	175,515	$	—
	Long-term investments		$	5,183	$	5,127	$	56	$	—
	Liabilities:
	Other current liabilities		$	749	$	—	$	749	$	—
	-1	The cash and cash equivalent amounts presented in the table above do not include cash of $192,396 and non-negotiable time deposits of $4,400 as of September 30, 2013.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2012 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			December 31, 2012		Active Markets		Observable		Unobservable
					for Identical		Inputs		Inputs
					Assets		(Level 2)		(Level 3)
					(Level 1)
	Assets:
	Cash equivalents:
	Money market funds		$	51,291	$	51,291	$	—	$	—
	Bankers acceptance drafts			16		—		16		—
	Trading securities:
	Mutual funds			791		791		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			242		—		242		—
	U.S. treasury obligations			13,054		—		13,054		—
	U.S. agency obligations			325,672		295,665		30,007		—
	Derivatives – currency forward contracts			961		—		961		—
	Total assets		$	392,027	$	347,747	$	44,280	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	1,310	$	—	$	1,310	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	51,307	$	51,291	$	16	$	—
	Short-term investments(2)			327,601		284,298		43,303		—
	Other current assets			961		—		961		—
	Total current assets		$	379,869	$	335,589	$	44,280	$	—
	Long-term investments		$	12,158	$	12,158	$	—	$	—
	Liabilities:
	Other current liabilities		$	1,310	$	—	$	1,310	$	—
	-1	The cash and cash equivalent amounts presented in the table above do not include cash of $185,143 and non-negotiable time deposits of $51,138 as of December 31, 2012.
	-2	The short-term investments presented in the table above do not include non-negotiable time deposits of $52 as of December 31, 2012.

Derivatives_Tables

Derivatives (Tables)	9 Months Ended
	Sep. 30, 2013
Derivative Instruments And Hedging Activities Disclosure [Abstract]	'
Summary of Primary Net Hedging Positions and Corresponding Fair Values	'
	The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of September 30, 2013 and December 31, 2012:
			September 30, 2013
	Currency Hedged (Buy/Sell)		Gross Notional			F air Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	11,763		$	746
	U.S. Dollar/South Korean Won			18,081			(636	)
	U.S. Dollar/Euro			4,241			(76	)
	U.S. Dollar/U.K. Pound Sterling			2,444			(37	)
	Total		$	36,529		$	(3	)
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
			December 31, 2012
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	13,992		$	961
	U.S. Dollar/South Korean Won			19,374			(1,180	)
	U.S. Dollar/Euro			4,217			(57	)
	U.S. Dollar/U.K. Pound Sterling			3,865			(73	)
	Total		$	41,448		$	(349	)
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
Summary of Fair Value Amounts of Company's Derivative Instruments	'
	The following table provides a summary of the fair value amounts of the Company’s derivative instruments:
	Derivatives Designated as Hedging Instruments		September 30, 2013			December 31, 2012
	Derivative assets:
	Forward exchange contracts		$	746		$	961
	Derivative liabilities:
	Forward exchange contracts			(749	)		(1,310	)
	Total net derivative (liability) designated as hedging instruments(1)		$	(3	)	$	(349	)
	-1	The derivative assets of $746 and derivative liabilities of $749 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of September 30, 2013. The derivative assets of $961 and derivative liabilities of $1,310 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of December 31, 2012. These foreign exchange contracts are subject to a master netting agreement with one financial institution. However, the Company has elected to record these contracts on a gross basis in the balance sheet.
Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments	'
	The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
	Derivatives Designated as Cash Flow Hedging Relationships		2013			2012			2013			2012
	Forward exchange contracts:
	Net (loss) recognized in OCI(1)		$	(1,837	)	$	(581	)	$	(315	)	$	(312	)
	Net gain (loss) reclassified from OCI into income(2)		$	297		$	(739	)	$	1,102		$	(1,178	)
	Net (loss) recognized in expense(3)		$	—		$	(66	)	$	—		$	(66	)
	-1	Net change in the fair value of the effective portion classified in OCI.
	-2	Effective portion classified in cost of products for the three and nine months ended September 30, 2013 and selling, general and administrative expenses for the three and nine months ended September 30, 2012.
	-3	Ineffective portion amount excluded from effectiveness testing which is recorded in selling, general and administrative expenses for the three and nine months ended September 30, 2012.
Summary of Gains on Derivatives Not Designated as Hedging Instruments	'
	The following table provides a summary of gains on derivatives not designated as hedging instruments:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
	Derivatives Not Designated as Hedging Instruments		2013			2012			2013			2012
	Forward exchange contracts:
	Net (loss) gain recognized in income(1)		$	(514	)	$	(552	)	$	141		$	(552	)
	-1	The Company has a forward foreign exchange contract that hedges an intercompany loan with its Korean subsidiary. This hedge does not qualify for hedge accounting and any gains (losses) are recorded immediately in selling, general and administrative expenses.

Inventories_Tables

Inventories (Tables)	9 Months Ended
	Sep. 30, 2013
Inventory Disclosure [Abstract]	'
Summary of Inventories	'
	Inventories consist of the following:
		September 30, 2013		December 31, 2012
	Raw materials	$	72,240	$	76,610
	Work-in-process		22,145		19,708
	Finished goods		41,675		38,321
		$	136,060	$	134,639

Acquisition_Tables

Acquisition (Tables)	9 Months Ended
	Sep. 30, 2013
Business Combinations [Abstract]	'
Summary of Estimated Fair Value of Assets Acquired and Liabilities Assumed	'
	The following table summarizes the estimated fair value of the assets acquired and liabilities assumed at the date of the acquisition:
	Current assets	$	1,053
	Property and equipment		211
	Intangible assets		2,806
	Other assets		67
	Total assets acquired		4,137
	Debt (Note 11)		770
	Deferred taxes and other liabilities		920
	Total liabilities assumed		1,690
	Total purchase price		2,447
	Cash acquired		(21	)
	Total purchase price, net of cash acquired	$	2,426
Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives	'
	The following table reflects the allocation of the acquired intangible assets and related estimates of useful lives. These acquired intangibles will be amortized on a straight-line basis.
	Current developed technology	$	2,208		9 year useful life
	Trademarks and trade names		598		3 year useful life
		$	2,806

Goodwill_and_Intangible_Assets1

Goodwill and Intangible Assets (Tables)	9 Months Ended
	Sep. 30, 2013
Goodwill And Intangible Assets Disclosure [Abstract]	'
Goodwill	'
	The changes in the carrying amount of goodwill and accumulated impairment (loss) during the nine months ended September, 2013 and twelve months ended December 31, 2012 were as follows:
			2013									2012
			Gross			Accumulated			Net			Gross		Accumulated			Net
			Carrying			Impairment						Carrying		Impairment
			Amount			(Loss)						Amount		(Loss)
	Beginning balance at January 1		$	290,147		$	(139,414	)	$	150,733		$	279,498	$	(139,414	)	$	140,084
	Acquired goodwill(1)			—			—			—			9,989		—			9,989
	Foreign currency translation			(33	)		—			(33	)		660		—			660
	Ending balance at September 30, 2013 and December 31, 2012		$	290,114		$	(139,414	)	$	150,700		$	290,147	$	(139,414	)	$	150,733
	-1	In August 2012, the Company purchased Plasmart, Inc. for $22,607, net of cash acquired. The Company recorded $9,989 of goodwill in connection with the acquisition.
Intangible Assets	'
	Components of the Company’s intangible assets are comprised of the following:
			Gross			Accumulated			Foreign			Net
						Amortization			Currency
									Translation
	As of September 30, 2013:
	Completed technology(1)		$	84,680		$	(77,823	)	$	369		$	7,226
	Customer relationships			14,571			(9,590	)		281			5,262
	Patents, trademarks, trade names and other(1)			25,636			(24,840	)		32			828
			$	124,887		$	(112,253	)	$	682		$	13,316
	-1	In August 2013, the Company purchased $268 of net assets of which $388 was completed technology. In March 2013, the Company purchased Alter for $2,426, net of cash acquired. The Company recorded $2,806 of separately identified intangible assets, of which $2,208 was completed technology and $598 was trademarks and trade names.
			Gross			Accumulated			Foreign			Net
						Amortization			Currency
									Translation
	As of December 31, 2012:
	Completed technology		$	82,084		$	(77,243	)	$	254		$	5,095
	Customer relationships			14,571			(8,886	)		312			5,997
	Patents, trademarks, trade names and other			25,038			(24,587	)		18			469
			$	121,693		$	(110,716	)	$	584		$	11,561
Estimated Amortization Expense	'
	nine months ended September 30, 2012 were $215 and $453, respectively. Estimated amortization expense for each of the remaining fiscal years is as follows:
	Year		Amount
	2013 (remaining)		$	466
	2014			1,768
	2015			1,752
	2016			1,570
	2017			1,541
	2018			1,532
	Thereafter			4,687

Other_Assets_Tables

Other Assets (Tables)	9 Months Ended
	Sep. 30, 2013
Deferred Costs Capitalized Prepaid And Other Assets Disclosure [Abstract]	'
Schedule of Other Assets	'
		September 30,		December 31,
		2013		2012
	Other Current Assets:
	Income tax receivable	$	10,684	$	12,768
	Other		17,967		15,280
	Total other current assets	$	28,651	$	28,048
	Other Assets:
	Deferred tax assets, net	$	9,828	$	9,497
	Long-term income tax receivable		19,411		17,720
	Other		1,959		2,195
	Total other assets	$	31,198	$	29,412

Other_Liabilities_Tables

Other Liabilities (Tables)	9 Months Ended
	Sep. 30, 2013
Other Liabilities Disclosure [Abstract]	'
Schedule of Other Liabilities	'
		September 30,		December 31,
		2013		2012
	Other Current Liabilities:
	Product warranties	$	6,732	$	8,266
	Deferred revenue		4,599		9,280
	Other		24,568		19,859
	Total other current liabilities	$	35,899	$	37,405
	Other Liabilities:
	Long-term income tax payable	$	44,309	$	38,600
	Accrued compensation		21,078		18,750
	Other		5,004		3,745
	Total other liabilities	$	70,391	$	61,095

Product_Warranties_Tables

Product Warranties (Tables)	9 Months Ended
	Sep. 30, 2013
Guarantees [Abstract]	'
Product Warranties	'
	Product warranty activities were as follows:
		Nine Months Ended September 30,
		2013			2012
	Balance at January 1	$	8,266		$	8,315
	Provision for product warranties		1,705			3,750
	Direct charges to warranty liability		(3,142	)		(3,733	)
	Foreign currency translation		(97	)		505
	Balance at September 30	$	6,732		$	8,837

Net_Income_Per_Share_Tables

Net Income Per Share (Tables)	9 Months Ended
	Sep. 30, 2013
Earnings Per Share [Abstract]	'
Computation of Basic and Diluted Net Income Per Share	'
	The following table sets forth the computation of basic and diluted net income per share:
		Three Months Ended				Nine Months Ended
		September 30,				September 30,
		2013		2012		2013		2012
	Numerator:
	Net income	$	2,458	$	2,580	$	15,539	$	43,920
	Denominator:
	Shares used in net income per common share – basic		53,165,000		52,854,000		52,998,000		52,679,000
	Effect of dilutive securities:
	Stock options, restricted stock and employee stock purchase plan		348,000		436,000		412,000		561,000
	Shares used in net income per common share – diluted		53,513,000		53,290,000		53,410,000		53,240,000
	Net income per common share:
	Basic	$	0.05	$	0.05	$	0.29	$	0.83
	Diluted	$	0.05	$	0.05	$	0.29	$	0.82

Business_Segment_Geographic_Ar1

Business Segment, Geographic Area, Product and Significant Customer Information (Tables)	9 Months Ended
	Sep. 30, 2013
Segment Reporting [Abstract]	'
Net Revenues by Reportable Segment	'
	The following is net revenues by reportable segment:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Advanced Manufacturing Capital Equipment		$	133,307		$	104,191			$363,512			$382,016
	Analytical Solutions Group			13,313			15,160			41,217			47,680
	Europe Region Sales & Service Operations(1)			12,436			13,485			35,287			38,141
	Asia Region Sales & Service Operations(1)			52,558			46,782			149,267			182,663
	Corporate, Eliminations and Other			(45,161	)		(38,171	)		(124,257	)		(140,788	)
			$	166,453		$	141,447			$465,026			$509,712
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
Schedule of Gross Profit (Loss) by Reportable Segment	'
	The following is gross profit by reportable segment:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Advanced Manufacturing Capital Equipment		$	43,151		$	34,829		$	121,647		$	141,521
	Analytical Solutions Group			6,758			8,100			21,239			24,485
	Europe Region Sales & Service Operations(1)			3,427			3,547			10,005			11,292
	Asia Region Sales & Service Operations(1)			11,580			9,030			31,366			28,143
	Corporate, Eliminations and Other			(2,682	)		1,065			(5,363	)		11,437
			$	62,234		$	56,571		$	178,894		$	216,878
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment	'
	The following is capital expenditures by reportable segment for the three and nine months ended September 30, 2013 and 2012:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Capital expenditures		$	1,893		$	125		$	24		$	239		$	513		$	2,794
	Nine Months Ended September 30, 2013:
	Capital expenditures		$	6,599		$	265		$	137		$	435		$	1,718		$	9,154
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2012:
	Capital expenditures		$	2,102		$	283		$	35		$	237		$	371		$	3,028
	Nine Months Ended September 30, 2012:
	Capital expenditures		$	6,741		$	698		$	109		$	654		$	2,838		$	11,040
	The following is depreciation and amortization by reportable segment for the three and nine months ended September 30, 2013 and 2012:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Depreciation and amortization		$	2,861		$	319		$	86		$	294		$	685		$	4,245
	Nine Months Ended September 30, 2013:
	Depreciation and amortization		$	8,819		$	923		$	260		$	876		$	1,837		$	12,715
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2012:
	Depreciation and amortization		$	2,409		$	248		$	102		$	537		$	344		$	3,640
	Nine Months Ended September 30, 2012:
	Depreciation and amortization		$	6,797		$	715		$	305		$	1,330		$	1,050		$	10,197
	The following is segment assets by reportable segment:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	September 30, 2013:
	Segment assets:
	Accounts receivable(1)		$	14,645		$	4,263		$	6,611		$	36,380		$	36,234		$	98,133
	Inventory			107,935			4,354			3,950			28,532			(8,711	)		136,060
	Total segment assets		$	122,580		$	8,617		$	10,561		$	64,912		$	27,523		$	234,193
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	December 31, 2012:
	Segment assets:
	Accounts receivable(1)		$	9,644		$	5,889		$	5,813		$	32,088		$	28,626		$	82,060
	Inventory			108,397			3,841			3,691			29,534			(10,824	)		134,639
	Total segment assets		$	118,041		$	9,730		$	9,504		$	61,622		$	17,802		$	216,699
	-1	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.
Reconciliation of Segment Assets to Consolidated Total Assets	'
	A reconciliation of segment assets to consolidated total assets is as follows:
			September 30, 2013			December 31, 2012
	Total segment assets		$	234,193		$	216,699
	Cash and cash equivalents and investments			625,837			627,399
	Other current assets			38,710			36,242
	Property, plant and equipment, net			78,020			80,516
	Goodwill and intangible assets, net			164,016			162,294
	Other assets			31,198			29,412
	Consolidated total assets		$	1,171,974		$	1,152,562
Worldwide Net Revenue for Each Group of Products	'
	Worldwide net revenue for each group of products is as follows:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Instruments and Control Products		$	60,615		$	57,761		$	184,729		$	205,654
	Power and Reactive Gas Products			72,471			52,031			182,294			199,864
	Vacuum Products			18,098			15,435			53,588			53,158
	Analytical Solutions Group Products			15,269			16,220			44,415			51,036
			$	166,453		$	141,447		$	465,026		$	509,712
Company Long-Lived Assets in Different Geographic Regions	'
	Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Net revenues:
	United States		$	91,286		$	73,775		$	252,704		$	259,954
	Korea			16,491			12,574			46,597			54,472
	Japan			13,825			14,270			40,243			67,122
	Europe			20,433			21,341			57,958			65,800
	Asia (excluding Korea and Japan)			24,418			19,487			67,524			62,364
			$	166,453		$	141,447		$	465,026		$	509,712
			September 30, 2013			December 31, 2012
	Long-lived assets:(1)
	United States		$	61,404		$	62,203
	Europe			5,175			5,844
	Asia			13,398			14,664
			$	79,977		$	82,711
	-1	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.
Customers With Net Revenues Greater Than 10% of Total Net Revenues	'
	The Company had two customers with net revenues greater than 10% of total net revenues in the periods shown as follows:
			Three Months Ended						Nine Months Ended
			September 30,						September 30,
			2013			2012			2013			2012
	Customer A			16.4	%		13.9	%		16.7	%		14.8	%
	Customer B			13.5	%		8.5	%		11.8	%		10.3	%

Basis_of_Presentation_Revision

Basis of Presentation - Revisions in the Balance Sheet Line Items (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Other assets	$31,198	$29,412	$27,547
Other liabilities	70,391	61,095	47,492
As Previously Reported [Member]	'	'	'
Other assets	'	11,692	12,266
Other liabilities	'	43,375	32,211
Adjustment [Member]	'	'	'
Other assets	'	17,720	15,281
Other liabilities	'	$17,720	$15,281

Basis_of_Presentation_Revision1

Basis of Presentation - Revision of Other Assets and Other Liabilities (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Deferred tax assets, net	$9,828	$9,497	$10,274
Long-term income tax receivable	19,411	17,720	15,281
Other	1,959	2,195	1,992
Total other assets	31,198	29,412	27,547
Long-term income tax payable	44,309	38,600	31,365
Accrued compensation	21,078	18,750	15,174
Other	5,004	3,745	953
Total other liabilities	70,391	61,095	47,492
As Previously Reported [Member]	'	'	'
Deferred tax assets, net	'	9,497	10,274
Other	'	2,195	1,992
Total other assets	'	11,692	12,266
Long-term income tax payable	'	20,880	16,084
Accrued compensation	'	18,750	15,174
Other	'	3,745	953
Total other liabilities	'	43,375	32,211
Adjustment [Member]	'	'	'
Long-term income tax receivable	'	17,720	15,281
Total other assets	'	17,720	15,281
Long-term income tax payable	'	17,720	15,281
Total other liabilities	'	$17,720	$15,281

Basis_of_Presentation_Revision2

Basis of Presentation - Revision of Income Taxes (Detail) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Current taxes:	'	'	'
United States	$14,745	$40,856	$36,596
State	783	2,602	3,323
Foreign	7,760	5,314	13,489
Current taxes, Total	23,288	48,772	53,408
As Previously Reported [Member]	'	'	'
Current taxes:	'	'	'
United States	10,431	25,824	27,789
State	783	2,602	3,323
Foreign	12,074	20,346	22,296
Current taxes, Total	23,288	48,772	53,408
Adjustment [Member]	'	'	'
Current taxes:	'	'	'
United States	4,314	15,032	8,807
Foreign	($4,314)	($15,032)	($8,807)

Basis_of_Presentation_Reconcil

Basis of Presentation - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Segment Reporting Information [Line Items]	'	'	'
Total segment assets	$234,193	$216,699	$274,526
Cash and cash equivalents and investments	625,837	627,399	573,392
Other current assets	38,710	36,242	44,856
Property, plant and equipment, net	78,020	80,516	72,487
Goodwill and intangible assets, net	164,016	162,294	141,127
Other assets	31,198	29,412	27,547
Total assets	1,171,974	1,152,562	1,133,935
As Previously Reported [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Total segment assets	'	216,699	274,526
Cash and cash equivalents and investments	'	627,399	573,392
Other current assets	'	36,242	44,856
Property, plant and equipment, net	'	80,516	72,487
Goodwill and intangible assets, net	'	162,294	141,127
Other assets	'	11,692	12,266
Total assets	'	1,134,842	1,118,654
Adjustment [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Other assets	'	17,720	15,281
Total assets	'	$17,720	$15,281

Investments_Schedule_of_Fair_V

Investments - Schedule of Fair Value of Available for Sale of Investments (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	$364,917	$326,862
Fair value of short-term investments	365,876	327,653
Fair value of long-term available-for-sale investments	5,183	12,158
Bankers' Acceptance Drafts [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	330	242
Time Deposits [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	77,577	52
Fair value of long-term available-for-sale investments	56	'
Commercial Paper and Corporate Obligations [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	81,308	'
U.S. Treasury Obligations [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	'	13,054
U.S. Agency Obligations [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term available-for-sale investments	205,702	313,514
Fair value of long-term available-for-sale investments	5,127	12,158
Mutual Funds [Member]	'	'
Schedule Of Available For Sale And Trading Securities [Line Items]	'	'
Fair value of short-term investments, mutual funds	$959	$791

Investments_Gross_Unrealized_G

Investments - Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	$364,917	$326,862
Long-term investments, Estimated Fair Value	5,183	12,158
Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	364,844	326,601
Investments, Gross Unrealized Gains	78	267
Investments, Gross Unrealized (Losses)	-5	-6
Long Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	5,178	'
Investments, Gross Unrealized Gains	5	'
Investments, Gross Unrealized (Losses)	'	'
Bankers' Acceptance Drafts [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	330	242
Bankers' Acceptance Drafts [Member] | Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	330	242
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	'	'
Time Deposits [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	77,577	52
Long-term investments, Estimated Fair Value	56	'
Time Deposits [Member] | Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	77,575	52
Investments, Gross Unrealized Gains	5	'
Investments, Gross Unrealized (Losses)	-3	'
Time Deposits [Member] | Long Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	56	'
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	'	'
Commercial Paper and Corporate Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	81,308	'
Commercial Paper and Corporate Obligations [Member] | Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	81,300	'
Investments, Gross Unrealized Gains	10	'
Investments, Gross Unrealized (Losses)	-2	'
U.S. Agency Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	205,702	313,514
Long-term investments, Estimated Fair Value	5,127	12,158
U.S. Agency Obligations [Member] | Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	205,639	313,262
Investments, Gross Unrealized Gains	63	258
Investments, Gross Unrealized (Losses)	'	-6
U.S. Agency Obligations [Member] | Long Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	5,122	12,156
Investments, Gross Unrealized Gains	5	2
Investments, Gross Unrealized (Losses)	'	'
U.S. Treasury Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	'	13,054
U.S. Treasury Obligations [Member] | Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	'	13,045
Investments, Gross Unrealized Gains	'	9
Investments, Gross Unrealized (Losses)	'	'

Fair_Value_Measurements_Schedu

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Assets Derivatives - currency forward contracts	$746	$961
Liabilities Derivatives - currency forward contracts	749	1,310
Long-term investments	5,183	12,158
Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	57,982	51,307
Assets Derivatives - currency forward contracts	746	961
Total assets	429,787	392,027
Liabilities Derivatives - currency forward contracts	749	1,310
Short-term investments	365,876	327,601
Total current assets	424,604	379,869
Long-term investments	5,183	12,158
Other current liabilities	749	1,310
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	57,982	51,291
Assets Derivatives - currency forward contracts	'	'
Total assets	254,216	347,747
Liabilities Derivatives - currency forward contracts	'	'
Short-term investments	191,107	284,298
Total current assets	249,089	335,589
Long-term investments	5,127	12,158
Other current liabilities	'	'
Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	16
Assets Derivatives - currency forward contracts	746	961
Total assets	175,571	44,280
Liabilities Derivatives - currency forward contracts	749	1,310
Short-term investments	174,769	43,303
Total current assets	175,515	44,280
Long-term investments	56	'
Other current liabilities	749	1,310
Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Assets Derivatives - currency forward contracts	'	'
Total assets	'	'
Liabilities Derivatives - currency forward contracts	'	'
Short-term investments	'	'
Total current assets	'	'
Long-term investments	'	'
Other current liabilities	'	'
Money Market Funds [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	57,982	51,291
Money Market Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	57,982	51,291
Money Market Funds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Money Market Funds [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Bankers' Acceptance Drafts [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	16
Available-for-sale securities	330	242
Bankers' Acceptance Drafts [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Bankers' Acceptance Drafts [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	16
Available-for-sale securities	330	242
Bankers' Acceptance Drafts [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Mutual Funds [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	959	791
Mutual Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	959	791
Mutual Funds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	'
Mutual Funds [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	'
U.S. Treasury Obligations [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	13,054
U.S. Treasury Obligations [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
U.S. Treasury Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	13,054
U.S. Treasury Obligations [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
U.S. Agency Obligations [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	210,829	325,672
U.S. Agency Obligations [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	195,275	295,665
U.S. Agency Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	15,554	30,007
U.S. Agency Obligations [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Other Current Assets [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Assets Derivatives - currency forward contracts	746	961
Other Current Assets [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Assets Derivatives - currency forward contracts	'	'
Other Current Assets [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Assets Derivatives - currency forward contracts	746	961
Other Current Assets [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Assets Derivatives - currency forward contracts	'	'
Time Deposits [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	77,633	'
Time Deposits [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Time Deposits [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	77,633	'
Time Deposits [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Commercial Paper and Corporate Obligations [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	81,308	'
Commercial Paper and Corporate Obligations [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Commercial Paper and Corporate Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	81,308	'
Commercial Paper and Corporate Obligations [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'

Fair_Value_Measurements_Schedu1

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Parenthetical) (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Short-term investments	$364,917	$326,862
Time Deposits [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Not included in cash and cash equivalent amount	4,400	51,138
Short-term investments	'	52
Cash [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Not included in cash and cash equivalent amount	$192,396	$185,143

Derivatives_Additional_Informa

Derivatives - Additional Information (Detail) (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Dec. 31, 2012
Derivative Instruments and Hedging Activities Disclosures [Line Items]	'	'
Maximum period for hedging a portion of forecasted foreign currency denominated intercompany sales of inventory	'18 months	'
Gross notional values of outstanding forward foreign exchange contracts	$36,529	$41,448
Fair value asset / (liability)	-3	'
Cash Flow Hedging [Member]	'	'
Derivative Instruments and Hedging Activities Disclosures [Line Items]	'	'
Gross notional values of outstanding forward foreign exchange contracts	$36,529	$41,448

Derivatives_Summary_of_Primary

Derivatives - Summary of Primary Net Hedging Positions and Corresponding Fair Values (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	$36,529	$41,448
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	-3	-349
U.S. Dollar/Japanese Yen [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	11,763	13,992
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	746	961
U.S. Dollar/South Korean Won [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	18,081	19,374
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	-636	-1,180
U.S. Dollar/Euro [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	4,241	4,217
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	-76	-57
U.S. Dollar/U.K. Pound Sterling [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	2,444	3,865
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	($37)	($73)

Derivatives_Summary_of_Fair_Va

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Derivatives, Fair Value [Line Items]	'	'
Forward exchange contracts, Assets	$746	$961
Forward exchange contracts, Liabilities	-749	-1,310
Total net derivative (liability) designated as hedging instruments	-3	-349
Derivatives Designated as Hedging Instruments [Member]	'	'
Derivatives, Fair Value [Line Items]	'	'
Forward exchange contracts, Assets	746	961
Forward exchange contracts, Liabilities	-749	-1,310
Total net derivative (liability) designated as hedging instruments	($3)	($349)

Derivatives_Summary_of_Fair_Va1

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Parenthetical) (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Derivative Instruments And Hedging Activities Disclosure [Abstract]	'	'
Derivative assets classified in other current assets	$746	$961
Derivative liabilities classified in other current liabilities	$749	$1,310

Derivatives_Summary_of_Gains_L

Derivatives - Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments (Detail) (Forward Exchange Contracts [Member], Cash Flow Hedging [Member], USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Forward Exchange Contracts [Member] | Cash Flow Hedging [Member]	'	'	'	'
Derivative Instruments, Gain (Loss) [Line Items]	'	'	'	'
Net (loss) recognized in OCI	($1,837)	($581)	($315)	($312)
Net gain (loss) reclassified from OCI into income	297	-739	1,102	-1,178
Net (loss) recognized in expense	'	($66)	'	($66)

Derivatives_Summary_of_Gains_o

Derivatives - Summary of Gains on Derivatives Not Designated as Hedging Instruments (Detail) (Derivative not Designated as Hedging Instruments [Member], USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Derivative not Designated as Hedging Instruments [Member]	'	'	'	'
Derivative Instruments, Gain (Loss) [Line Items]	'	'	'	'
Net (loss) gain recognized in income	($514)	($552)	$141	($552)

Inventories_Summary_of_Invento

Inventories - Summary of Inventories (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Inventory Disclosure [Abstract]	'	'
Raw materials	$72,240	$76,610
Work-in-process	22,145	19,708
Finished goods	41,675	38,321
Inventories	$136,060	$134,639

Acquisition_Additional_Informa

Acquisition - Additional Information (Detail) (USD $)	9 Months Ended		1 Months Ended			9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Jun. 30, 2013	Mar. 31, 2013	Mar. 12, 2013	Sep. 30, 2013
			Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]
Business Acquisition [Line Items]	'	'	'	'	'	'
Acquisition purchase price, net of cash acquired	'	'	'	'	$2,426	'
Acquisition date	'	'	'	'	'	12-Mar-13
Total cash paid, net of cash acquired	2,326	24,385	2,058	2,426	2,426	'
Cash acquired from acquisition	'	'	'	'	'	21
Remaining cash to be paid	'	'	'	'	'	368
Holdback provisions paid	'	'	'	'	'	$123

Acquisition_Summary_of_Estimat

Acquisition - Summary of Estimated Fair Value of Assets Acquired and Liabilities Assumed (Detail) (USD $)	9 Months Ended		1 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Jun. 30, 2013	Mar. 31, 2013	Mar. 12, 2013
			Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]
Business Acquisition [Line Items]	'	'	'	'	'
Current assets	'	'	'	'	$1,053
Property and equipment	'	'	'	'	211
Intangible assets	'	'	'	'	2,806
Other assets	'	'	'	'	67
Total assets acquired	'	'	'	'	4,137
Debt (Note 11)	'	'	'	'	770
Deferred taxes and other liabilities	'	'	'	'	920
Total liabilities assumed	'	'	'	'	1,690
Total purchase price	'	'	'	'	2,447
Cash acquired	'	'	'	'	-21
Total purchase price, net of cash acquired	$2,326	$24,385	$2,058	$2,426	$2,426

Acquisition_Allocation_of_Acqu

Acquisition - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (USD $)	1 Months Ended
In Thousands, unless otherwise specified	Aug. 31, 2013	Mar. 31, 2013
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	$268	$2,806
Current Developed Technology [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	'	2,208
Estimated useful life of finite lived intangible assets	'	'9 years
Trademarks and Trade Names [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	'	$598
Estimated useful life of finite lived intangible assets	'	'3 years

Goodwill_and_Intangible_Assets2

Goodwill and Intangible Assets - Additional Information (Detail) (USD $)	1 Months Ended	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Oct. 31, 2012	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Goodwill And Intangible Assets Disclosure [Abstract]	'	'	'	'	'
Impairment of goodwill	$0	'	'	'	'
Aggregate amortization expense related to acquired intangibles	'	$361	$215	$1,537	$453

Goodwill_and_Intangible_Assets3

Goodwill and Intangible Assets - Goodwill (Detail) (USD $)	9 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Dec. 31, 2012
Goodwill And Intangible Assets Disclosure [Abstract]	'	'
Goodwill gross carrying amount, Beginning balance	$290,147	$279,498
Acquired goodwill, gross	'	9,989
Foreign currency translation	-33	660
Goodwill gross carrying amount, Ending balance	290,114	290,147
Accumulated Impairment Loss, Beginning balance	-139,414	-139,414
Acquired goodwill, impairment loss	'	'
Foreign currency translation, impairment loss	'	'
Accumulated Impairment Loss, Ending balance	-139,414	-139,414
Goodwill, net, Beginning balance	150,733	140,084
Acquired goodwill, net	'	9,989
Foreign currency translation, net	-33	660
Goodwill, net, Ending balance	$150,700	$150,733

Goodwill_and_Intangible_Assets4

Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) (USD $)	9 Months Ended				1 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Dec. 31, 2012	Dec. 31, 2011	Aug. 31, 2012
					Plasmart, Inc. [Member]
Goodwill [Line Items]	'	'	'	'	'
Acquisition purchase price, net of cash acquired	$2,326	$24,385	'	'	$22,607
Goodwill in connection with acquisition	$150,700	'	$150,733	$140,084	$9,989

Goodwill_and_Intangible_Assets5

Goodwill and Intangible Assets - Intangible Assets (Detail) (USD $)	9 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Dec. 31, 2012
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	$124,887	$121,693
Accumulated Amortization	-112,253	-110,716
Foreign Currency Translation	682	584
Intangible assets, net	13,316	11,561
Completed Technology [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	84,680	82,084
Accumulated Amortization	-77,823	-77,243
Foreign Currency Translation	369	254
Intangible assets, net	7,226	5,095
Customer Relationships [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	14,571	14,571
Accumulated Amortization	-9,590	-8,886
Foreign Currency Translation	281	312
Intangible assets, net	5,262	5,997
Patents, Trademarks, Trade Names and Other [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	25,636	25,038
Accumulated Amortization	-24,840	-24,587
Foreign Currency Translation	32	18
Intangible assets, net	$828	$469

Goodwill_and_Intangible_Assets6

Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (USD $)	1 Months Ended		9 Months Ended		1 Months Ended
In Thousands, unless otherwise specified	Aug. 31, 2013	Mar. 31, 2013	Sep. 30, 2013	Sep. 30, 2012	Aug. 31, 2013	Jun. 30, 2013	Mar. 31, 2013	Mar. 12, 2013	Mar. 31, 2013	Mar. 31, 2013
					Completed Technology [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]	Alter Power Systems [Member]
									Completed Technology [Member]	Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]	'	'	'	'	'	'	'	'	'	'
Acquisition purchase price	'	'	$2,326	$24,385	'	$2,058	$2,426	$2,426	'	'
Completed technology of net assets	268	2,806	'	'	388	'	'	'	'	'
Intangible asset in connection with acquisition	'	'	'	'	'	'	$2,806	'	$2,208	$598

Goodwill_and_Intangible_Assets7

Goodwill and Intangible Assets - Estimated Amortization Expense (Detail) (USD $)	Sep. 30, 2013
In Thousands, unless otherwise specified
Goodwill And Intangible Assets Disclosure [Abstract]	'
2013 (remaining)	$466
2014	1,768
2015	1,752
2016	1,570
2017	1,541
2018	1,532
Thereafter	$4,687

Other_Assets_Schedule_of_Other

Other Assets - Schedule of Other Assets (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Other Current Assets:	'	'	'
Income tax receivable	$10,684	$12,768	'
Other	17,967	15,280	'
Total other current assets	28,651	28,048	'
Other Assets:	'	'	'
Deferred tax assets, net	9,828	9,497	10,274
Long-term income tax receivable	19,411	17,720	15,281
Other	1,959	2,195	1,992
Total other assets	$31,198	$29,412	$27,547

Other_Liabilities_Schedule_of_

Other Liabilities - Schedule of Other Liabilities (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Other Current Liabilities:	'	'	'
Product warranties	$6,732	$8,266	'
Deferred revenue	4,599	9,280	'
Other	24,568	19,859	'
Total other current liabilities	35,899	37,405	'
Other Liabilities:	'	'	'
Long-term income tax payable	44,309	38,600	31,365
Accrued compensation	21,078	18,750	15,174
Other	5,004	3,745	953
Total other liabilities	$70,391	$61,095	$47,492

Debt_Additional_Information_De

Debt - Additional Information (Detail) (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Dec. 31, 2012
	Institution
Japan Line of Credit [Member]	'	'
Debt Instrument [Line Items]	'	'
Number of financial institutions for available lines of credit and borrowing arrangements	2	'
Aggregate borrowings expire and renewed	'3 month intervals	'
Total available line of credit	$23,284	'
Total borrowings outstanding	0	0
Plasmart Line of Credit [Member]	'	'
Debt Instrument [Line Items]	'	'
Total borrowings outstanding	0	0
Alter Line of Credit [Member]	'	'
Debt Instrument [Line Items]	'	'
Total borrowings outstanding	$0	$0

Product_Warranties_Product_War

Product Warranties - Product Warranty Activities (Detail) (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012
Guarantees [Abstract]	'	'
Beginning balance	$8,266	$8,315
Provision for product warranties	1,705	3,750
Direct charges to warranty liability	-3,142	-3,733
Foreign currency translation	-97	505
Ending balance	$6,732	$8,837

Income_Taxes_Additional_Inform

Income Taxes - Additional Information (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012	Dec. 31, 2012
Income Tax Disclosure [Abstract]	'	'	'	'	'
Effective tax rate	80.40%	61.30%	44.80%	35.70%	'
Tax holiday expired	'	'	31-Dec-11	'	'
Gross unrecognized tax benefits excluding interest and penalties	$45,402	'	$45,402	'	$40,674
Net unrecognized tax benefit excluding interest and penalties that would impact effective tax rate	23,570	'	23,570	'	'
Accrued interest on unrecognized tax benefits	$2,147	'	$2,147	'	$1,571

Net_Income_Per_Share_Computati

Net Income Per Share - Computation of Basic and Diluted Net Income Per Share (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, except Share data, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Numerator:	'	'	'	'
Net income	$2,458	$2,580	$15,539	$43,920
Denominator:	'	'	'	'
Shares used in net income per common share - basic	53,165,000	52,854,000	52,998,000	52,679,000
Effect of dilutive securities:	'	'	'	'
Stock options, restricted stock and employee stock purchase plan	348,000	436,000	412,000	561,000
Shares used in net income per common share - diluted	53,513,000	53,290,000	53,410,000	53,240,000
Net income per common share:	'	'	'	'
Basic	$0.05	$0.05	$0.29	$0.83
Diluted	$0.05	$0.05	$0.29	$0.82

Net_Income_Per_Share_Additiona

Net Income Per Share - Additional Information (Detail)	3 Months Ended		9 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Earnings Per Share [Abstract]	'	'	'	'
Stock options and restricted stock units outstanding	1,059,000	1,250,000	1,059,000	1,250,000
Number of shares excluded from computation of diluted earnings per share	104,000	105,000	101,000	227,000

Stockholders_Equity_Additional

Stockholder's Equity - Additional Information (Detail) (USD $)	1 Months Ended	3 Months Ended						9 Months Ended
In Thousands, except Share data, unless otherwise specified	Jul. 25, 2011	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Sep. 30, 2013	Sep. 30, 2012
Equity [Abstract]	'	'	'	'	'	'	'	'	'
Common stock, value of shares authorized to repurchase	$200,000	'	'	'	'	'	'	'	'
Stock repurchase, shares	'	'	'	'	'	'	'	107,000	'
Value of shares repurchased	'	'	'	'	'	'	'	2,875	'
Average price of repurchased shares	'	'	'	'	'	'	'	$26.87	'
Cash dividend paid	'	$0.16	$0.16	$0.16	$0.16	$0.15	$0.15	$0.48	$0.46
Dividend payment to common shareholders	'	'	'	'	'	'	'	$25,458	$24,261
Dividend declared date	'	'	'	'	'	'	'	28-Oct-13	'
Cash dividend to be paid	'	$0.16	'	'	'	'	'	'	'
Dividend to be paid date	'	'	'	'	'	'	'	13-Dec-13	'
Dividend declared, shareholders of record date	'	'	'	'	'	'	'	2-Dec-13	'

Business_Segment_Geographic_Ar2

Business Segment, Geographic Area, Product and Significant Customer Information - Additional Information (Detail)	9 Months Ended
	Sep. 30, 2013
	Customer
	Segment
	Product
Segment Reporting [Abstract]	'
Number of reportable segments	4
Number of operating segments	8
Number of product groups	4
Number of major customers	2
Entity wide net revenue major customer percentage minimum	10.00%

Business_Segment_Geographic_Ar3

Business Segment, Geographic Area, Product and Significant Customer Information - Net Revenues by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	$166,453	$141,447	$465,026	$509,712
Advanced Manufacturing Capital Equipment [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	133,307	104,191	363,512	382,016
Analytical Solutions Group [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	13,313	15,160	41,217	47,680
Europe Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	12,436	13,485	35,287	38,141
Asia Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	52,558	46,782	149,267	182,663
Corporate, Eliminations and Other [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	($45,161)	($38,171)	($124,257)	($140,788)

Business_Segment_Geographic_Ar4

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Gross Profit (Loss) by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	$62,234	$56,571	$178,894	$216,878
Advanced Manufacturing Capital Equipment [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	43,151	34,829	121,647	141,521
Analytical Solutions Group [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	6,758	8,100	21,239	24,485
Europe Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	3,427	3,547	10,005	11,292
Asia Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	11,580	9,030	31,366	28,143
Corporate, Eliminations and Other [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	($2,682)	$1,065	($5,363)	$11,437

Business_Segment_Geographic_Ar5

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012	Dec. 31, 2012	Dec. 31, 2011
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	$2,794	$3,028	$9,154	$11,040	'	'
Depreciation and amortization	4,245	3,640	12,715	10,197	'	'
Accounts receivable	98,133	'	98,133	'	82,060	'
Inventory	136,060	'	136,060	'	134,639	'
Total segment assets	234,193	'	234,193	'	216,699	274,526
Advanced Manufacturing Capital Equipment [Member]	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	1,893	2,102	6,599	6,741	'	'
Depreciation and amortization	2,861	2,409	8,819	6,797	'	'
Accounts receivable	14,645	'	14,645	'	9,644	'
Inventory	107,935	'	107,935	'	108,397	'
Total segment assets	122,580	'	122,580	'	118,041	'
Analytical Solutions Group [Member]	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	125	283	265	698	'	'
Depreciation and amortization	319	248	923	715	'	'
Accounts receivable	4,263	'	4,263	'	5,889	'
Inventory	4,354	'	4,354	'	3,841	'
Total segment assets	8,617	'	8,617	'	9,730	'
Europe Region Sales & Service Operations [Member]	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	24	35	137	109	'	'
Depreciation and amortization	86	102	260	305	'	'
Accounts receivable	6,611	'	6,611	'	5,813	'
Inventory	3,950	'	3,950	'	3,691	'
Total segment assets	10,561	'	10,561	'	9,504	'
Asia Region Sales & Service Operations [Member]	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	239	237	435	654	'	'
Depreciation and amortization	294	537	876	1,330	'	'
Accounts receivable	36,380	'	36,380	'	32,088	'
Inventory	28,532	'	28,532	'	29,534	'
Total segment assets	64,912	'	64,912	'	61,622	'
Corporate, Eliminations and Other [Member]	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'
Capital expenditures	513	371	1,718	2,838	'	'
Depreciation and amortization	685	344	1,837	1,050	'	'
Accounts receivable	36,234	'	36,234	'	28,626	'
Inventory	-8,711	'	-8,711	'	-10,824	'
Total segment assets	$27,523	'	$27,523	'	$17,802	'

Business_Segment_Geographic_Ar6

Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) (USD $)	Sep. 30, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Statement Of Financial Position [Abstract]	'	'	'
Total segment assets	$234,193	$216,699	$274,526
Cash and cash equivalents and investments	625,837	627,399	573,392
Other current assets	38,710	36,242	44,856
Property, plant and equipment, net	78,020	80,516	72,487
Goodwill and intangible assets, net	164,016	162,294	141,127
Other assets	31,198	29,412	27,547
Total assets	$1,171,974	$1,152,562	$1,133,935

Business_Segment_Geographic_Ar7

Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	$166,453	$141,447	$465,026	$509,712
Instruments and Control Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	60,615	57,761	184,729	205,654
Power and Reactive Gas Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	72,471	52,031	182,294	199,864
Vacuum Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	18,098	15,435	53,588	53,158
Analytical Solutions Group Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	$15,269	$16,220	$44,415	$51,036

Business_Segment_Geographic_Ar8

Business Segment, Geographic Area, Product and Significant Customer Information - Company Long-Lived Assets in Different Geographic Regions (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012	Dec. 31, 2012
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	$166,453	$141,447	$465,026	$509,712	'
Long-lived assets	79,977	'	79,977	'	82,711
United States [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	91,286	73,775	252,704	259,954	'
Long-lived assets	61,404	'	61,404	'	62,203
Korea [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	16,491	12,574	46,597	54,472	'
Japan [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	13,825	14,270	40,243	67,122	'
Europe [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	20,433	21,341	57,958	65,800	'
Long-lived assets	5,175	'	5,175	'	5,844
Asia (excluding Korea and Japan) [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	24,418	19,487	67,524	62,364	'
Long-lived assets	$13,398	'	$13,398	'	$14,664

Business_Segment_Geographic_Ar9

Business Segment, Geographic Area, Product and Significant Customer Information - Customers With Net Revenues Greater Than 10% of Total Net Revenues (Detail)	3 Months Ended		9 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Customer A [Member]	'	'	'	'
Revenue, Major Customer [Line Items]	'	'	'	'
Percentage of total net revenues	16.40%	13.90%	16.70%	14.80%
Customer B [Member]	'	'	'	'
Revenue, Major Customer [Line Items]	'	'	'	'
Percentage of total net revenues	13.50%	8.50%	11.80%	10.30%

Restructuring_Additional_Infor

Restructuring - Additional Information (Detail) (USD $)	3 Months Ended	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2013
		People
Restructuring And Related Activities [Abstract]	'	'
Number of Reduction in the Company's headcount	'	27
Restructuring Charges	$1,126	$1,364

Commitments_and_Contingencies_

Commitments and Contingencies - Additional Information (Detail) (USD $)	3 Months Ended			9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Commitments And Contingencies Disclosure [Abstract]	'	'	'	'	'
Litigation settlement with shareholders of former subsidiary	'	'	$5,316	'	$5,316
Insurance reimbursement for litigation settlement	'	$1,071	'	'	'