MKS Instruments (MKSI) 10-Q 5 Nov 14 2014 Q3 Quarterly report Financial data

Document_and_Entity_Informatio

Document and Entity Information	9 Months Ended
	Sep. 30, 2014	Oct. 29, 2014
Document And Entity Information [Abstract]	'	'
Document Type	'10-Q	'
Amendment Flag	'false	'
Document Period End Date	30-Sep-14	'
Document Fiscal Year Focus	'2014	'
Document Fiscal Period Focus	'Q3	'
Trading Symbol	'MKSI	'
Entity Registrant Name	'MKS INSTRUMENTS INC	'
Entity Central Index Key	'0001049502	'
Current Fiscal Year End Date	'--12-31	'
Entity Filer Category	'Large Accelerated Filer	'
Entity Common Stock, Shares Outstanding	'	53,069,061

Consolidated_Balance_Sheets

Consolidated Balance Sheets (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Current assets:	'	'
Cash and cash equivalents	$295,456	$288,902
Short-term investments	140,042	300,715
Trade accounts receivable, net	106,290	116,744
Inventories	153,930	142,727
Deferred income taxes	12,422	13,428
Other current assets	28,735	16,715
Total current assets	736,875	879,231
Property, plant and equipment, net	73,642	77,536
Long-term investments	134,749	60,405
Goodwill	193,125	150,909
Intangible assets, net	48,812	13,090
Other assets	30,165	31,847
Total assets	1,217,368	1,213,018
Current liabilities:	'	'
Accounts payable	30,809	40,074
Accrued compensation	27,277	43,662
Income taxes payable	3,821	10,444
Other current liabilities	42,961	34,242
Total current liabilities	104,868	128,422
Other liabilities	53,940	63,073
Commitments and contingencies (Note 18)	'	'
Stockholders' equity:	'	'
Preferred Stock, $0.01 par value per share, 2,000,000 shares authorized; none issued and outstanding	'	'
Common Stock, no par value, 200,000,000 shares authorized; 53,065,338 and 53,363,450 shares issued and outstanding at September 30, 2014 and December 31, 2013, respectively	113	113
Additional paid-in capital	730,110	730,571
Retained earnings	323,639	278,966
Accumulated other comprehensive income	4,698	11,873
Total stockholders' equity	1,058,560	1,021,523
Total liabilities and stockholders' equity	$1,217,368	$1,213,018

Consolidated_Balance_Sheets_Pa

Consolidated Balance Sheets (Parenthetical) (USD $)	Sep. 30, 2014	Dec. 31, 2013
Statement of Financial Position [Abstract]	'	'
Preferred Stock, par value	$0.01	$0.01
Preferred Stock, shares authorized	2,000,000	2,000,000
Preferred Stock, shares issued	0	0
Preferred Stock, shares outstanding	0	0
Common Stock, par value	$0	$0
Common Stock, shares authorized	200,000,000	200,000,000
Common Stock, shares issued	53,065,338	53,363,450
Common Stock, shares outstanding	53,065,338	53,363,450

Consolidated_Statements_of_Ope

Consolidated Statements of Operations and Comprehensive Income (USD $)	3 Months Ended				9 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2014		Sep. 30, 2013		Sep. 30, 2014		Sep. 30, 2013
Net revenues:	'		'		'		'
Products	$158,520		$139,846		$497,172		$388,998
Services	28,278		26,607		80,676		76,028
Total net revenues	186,798		166,453		577,848		465,026
Cost of revenues:	'		'		'		'
Cost of products	89,181		87,809		276,905		237,590
Cost of services	18,292		16,410		52,611		48,542
Total cost of revenues (exclusive of amortization shown separately below)	107,473		104,219		329,516		286,132
Gross profit	79,325		62,234		248,332		178,894
Research and development	15,827		15,257		46,866		47,318
Selling, general and administrative	32,365		33,158		99,195		102,140
Insurance reimbursement	'		'		'		-1,071
Acquisition costs	'		'		499		171
Restructuring	1,223		1,126		1,970		1,364
Amortization of intangible assets	1,760		361		3,214		1,537
Income from operations	28,150		12,332		96,588		27,435
Interest income	399		221		895		760
Interest expense	5		13		35		50
Income before income taxes	28,544		12,540		97,448		28,145
(Benefit) provision for income taxes	-573		10,082		15,862		12,606
Net income	29,117		2,458		81,586		15,539
Other comprehensive income:	'		'		'		'
Changes in value of financial instruments designated as cash flow hedges, net of tax expense (benefit)	1,302	[1]	-891	[1]	458	[1]	185	[1]
Foreign currency translation adjustments, net of tax of $0 for the three months and nine months ended September 30, 2014 and 2013	-9,598		5,593		-7,604		-3,582
Unrealized (loss) gain on investments, net of tax expense (benefit)	-71	[2]	48	[2]	-29	[2]	-13	[2]
Total comprehensive income	$20,750		$7,208		$74,411		$12,129
Net income per share:	'		'		'		'
Basic	$0.55		$0.05		$1.53		$0.29
Diluted	$0.55		$0.05		$1.52		$0.29
Cash dividends per common share	$0.17		$0.16		$0.49		$0.48
Weighted average common shares outstanding:	'		'		'		'
Basic	53,054		53,165		53,276		52,998
Diluted	53,310		53,513		53,541		53,410
[1]	Tax expense (benefit) was $671 and $(491) for the three months ended September 30, 2014 and 2013, respectively. Tax expense was $134 and $161 for the nine months ended September 30, 2014 and 2013, respectively.
[2]	Tax (benefit) expense was $(37) and $26 for the three months ended September 30, 2014 and 2013, respectively. Tax (benefit) was $(8) and $(11) for the nine months ended September 30, 2014 and 2013, respectively.

Consolidated_Statements_of_Ope1

Consolidated Statements of Operations and Comprehensive Income (Parenthetical) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Income Statement [Abstract]	'	'	'	'
Tax expense (benefit) on changes in value of financial instruments designated as cash flow hedges	$671	($491)	$134	$161
Tax on foreign currency translation adjustments	0	0	0	0
Tax (benefit) expense on unrealized gain (loss) on investments	($37)	$26	($8)	($11)

Consolidated_Statements_of_Cas

Consolidated Statements of Cash Flows (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013
Cash flows from operating activities:	'	'
Net income	$81,586	$15,539
Adjustments to reconcile net income to net cash provided by operating activities:	'	'
Depreciation and amortization	14,757	12,715
Stock-based compensation	8,751	11,509
Provision for excess and obsolete inventory	8,707	16,554
Provision for bad debt	450	1,061
Deferred income taxes	474	3,623
Excess tax benefits from stock-based compensation	-416	-825
Other	24	173
Changes in operating assets and liabilities:	'	'
Trade accounts receivable	9,252	-17,702
Inventories	-14,476	-17,949
Income taxes	-26,765	3,887
Other current assets	-3,064	-2,974
Accrued compensation	-14,079	6,649
Other current and non-current liabilities	9,904	-737
Accounts payable	-9,168	10,468
Other assets	1,763	-209
Net cash provided by operating activities	67,700	41,782
Cash flows from investing activities:	'	'
Acquisition of businesses, net of cash acquired	-86,950	-2,326
Purchases of investments	-307,355	-374,998
Maturities of investments	211,385	253,231
Sales of investments	182,011	90,580
Proceeds from sale of property, plant and equipment	1,508	'
Purchases of property, plant and equipment	-9,362	-9,154
Other	53	-59
Net cash used in investing activities	-8,710	-42,726
Cash flows from financing activities:	'	'
Proceeds from short-term borrowings	'	6
Payments on short-term borrowings	'	-776
Repurchase of common stock	-20,809	-2,875
Net receipts (payments) related to employee stock awards	457	-2,464
Dividend payments to common stockholders	-26,081	-25,458
Excess tax benefits from stock-based compensation	416	825
Net cash used in financing activities	-46,017	-30,742
Effect of exchange rate changes on cash and cash equivalents	-6,419	-1,124
Increase (decrease) in cash and cash equivalents	6,554	-32,810
Cash and cash equivalents at beginning of period	288,902	287,588
Cash and cash equivalents at end of period	$295,456	$254,778

Basis_of_Presentation

Basis of Presentation	9 Months Ended
	Sep. 30, 2014
Accounting Policies [Abstract]	'
Basis of Presentation	'
	1)	Basis of Presentation
	The terms “MKS” and the “Company” refer to MKS Instruments, Inc. and its subsidiaries. The interim financial data as of September 30, 2014 and for the three and nine months ended September 30, 2014 and 2013 are unaudited; however, in the opinion of MKS, the interim data includes all adjustments, consisting only of normal recurring adjustments, necessary for a fair statement of the results for the interim periods. The consolidated balance sheet presented as of December 31, 2013 has been derived from the audited consolidated financial statements as of that date. The unaudited consolidated financial statements presented herein have been prepared in accordance with the instructions to Form 10-Q and do not include all of the information and note disclosures required by United States generally accepted accounting principles (“U.S. GAAP”). The consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in the MKS Annual Report on Form 10-K for the year ended December 31, 2013 filed with the Securities and Exchange Commission on February 26, 2014.
	The preparation of these consolidated financial statements requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent liabilities at the date of the consolidated financial statements and the reported amounts of revenues and expenses during the reporting period. On an on-going basis, management evaluates its estimates and judgments, including those related to revenue recognition, stock-based compensation, inventory, intangible assets, goodwill and other long-lived assets, acquisition expenses, income taxes and investments. Management bases its estimates and judgments on historical experience and on various other factors that are believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.

Recently_Issued_Accounting_Pro

Recently Issued Accounting Pronouncements	9 Months Ended
	Sep. 30, 2014
Accounting Changes and Error Corrections [Abstract]	'
Recently Issued Accounting Pronouncements	'
	2)	Recently Issued Accounting Pronouncements
	In May 2014 the Financial Accounting Standards Board issued Accounting Standards Update (“ASU”) No. 2014-09, “Revenue from Contracts with Customers (Topic 606),” which supersedes all existing revenue recognition requirements, including most industry-specific guidance. The new standard requires a company to recognize revenue when it transfers goods and services to customers in an amount that reflects the consideration that the company expects to be entitled to in exchange for those goods or services. The ASU also requires additional disclosure about the nature, amount, timing and uncertainty of revenue and cash flows arising from customer contracts, including significant judgments and assets recognized from costs incurred to obtain or fulfill a contract. This pronouncement is effective for annual reporting periods beginning after December 15, 2016, including interim periods within that reporting period. The two permitted transition methods under the new standard are the full retrospective method, in which case the standard would be applied to each prior reporting period presented, or the modified retrospective method, in which case the cumulative effect of applying the standard would be recognized at the date of initial application. The Company has not yet selected a transition method. The Company is currently evaluating the requirements of ASU No. 2014-09 and has not yet determined its impact on the Company’s consolidated financial statements.
	In August 2014, the Financial Accounting Standards Board issued ASU No. 2014-15, Presentation of Financial Statements—Going Concern (Subtopic 205-40): Disclosure of Uncertainties about an Entity’s Ability to Continue as a Going Concern. Under the new guidance, management will be required to assess an entity’s ability to continue as a going concern, and to provide related footnote disclosures in certain circumstances. The provisions of this ASU are effective for annual periods beginning after December 15, 2016, and for annual and interim periods thereafter. This ASU is not expected to have an impact on the Company’s financial statements or disclosures.

Investments

Investments	9 Months Ended
	Sep. 30, 2014
Investments, Debt and Equity Securities [Abstract]	'
Investments	'
	3)	Investments
	The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:
			September 30, 2014		December 31, 2013
	Available-for-sale investments:
	Bankers’ acceptance drafts		$	765	$	491
	Time deposits and certificates of deposit			40,672		64,989
	Commercial paper			9,691		53,434
	Corporate obligations			14,890		18,351
	Municipal bonds			2,099		—
	U.S. agency obligations			71,925		162,450
			$	140,042	$	299,715
	Trading investments:
	Mutual funds			—		1,000
			$	140,042	$	300,715
	The fair value of long-term investments with maturities of more than one year consists of the following:
			September 30, 2014		December 31, 2013
	Available-for-sale investments:
	Time deposits and certificates of deposit		$	50	$	54
	Asset-backed securities			63,986		—
	Corporate obligations			61,446		—
	Municipal bonds			1,257		—
	U.S. agency obligations			8,010		60,351
			$	134,749	$	60,405
	The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:
	As of September 30, 2014:		Cost		Gross		Gross			Estimated
					Unrealized		Unrealized			Fair Value
					Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts		$	765	$	—	$	—		$	765
	Time deposits and certificates of deposit			40,672		1		(1	)		40,672
	Commercial paper			9,692		2		(3	)		9,691
	Corporate obligations			14,889		1		—			14,890
	Municipal bonds			2,100		—		(1	)		2,099
	U.S. agency obligations			71,879		46		—			71,925
			$	139,997	$	50	$	(5	)	$	140,042
	Long-term investments:
	Time deposits		$	50	$	—	$	—		$	50
	Asset-backed securities			64,039		12		(65	)		63,986
	Corporate obligations			61,496		13		(63	)		61,446
	Municipal bonds			1,260		—		(3	)		1,257
	U.S. agency obligations			8,011		—		(1	)		8,010
			$	134,856	$	25	$	(132	)	$	134,749
	As of December 31, 2013:		Cost		Gross		Gross			Estimated
					Unrealized		Unrealized			Fair Value
					Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts		$	491	$	—	$	—		$	491
	Time deposits and certificates of deposit			64,983		10		(4	)		64,989
	Commercial paper			53,429		5		—			53,434
	Corporate obligations			18,360		—		(9	)		18,351
	U.S. agency obligations			162,430		22		(2	)		162,450
			$	299,693	$	37	$	(15	)	$	299,715
	Long-term investments:
	Time Deposits		$	54	$	—	$	—		$	54
	U.S. agency obligations			60,374		9		(32	)		60,351
			$	60,428	$	9	$	(32	)	$	60,405
	Interest income is accrued as earned. Dividend income is recognized as income on the date the stock trades “ex-dividend.” The cost of marketable securities sold is determined by the specific identification method. Realized gains or (losses) are reflected in income and were immaterial for the three and nine months ended September 30, 2014 and 2013, respectively.
	The gains and losses for trading investments were immaterial for the three and nine months ended September 30, 2014 and 2013, respectively.
	In accordance with the Company’s investment policy, no security shall have a maturity or average life longer than three years. The average duration of the portfolio shall be no more than one year. Corporate securities must have ratings of A3/A- or better. Asset-backed securities must be rated AAA. Short-term ratings of A-2/P2/F2 or higher are also permitted. With respect to compliance with these investment guidelines the rating agencies include Moody’s Investor Service, Standard & Poor’s and Fitch Investor Service. The middle of Moody’s, Standard & Poor’s and Fitch rating shall be used to determine compliance with credit quality guidelines. If a security is rated by two rating agencies, the lower rating will apply. If only one rating exists, that rating shall be used.

Fair_Value_Measurements

Fair Value Measurements	9 Months Ended
	Sep. 30, 2014
Fair Value Disclosures [Abstract]	'
Fair Value Measurements	'
	4)	Fair Value Measurements
	In accordance with the provisions of fair value accounting, a fair value measurement assumes that the transaction to sell an asset or transfer a liability occurs in the principal market for the asset or liability or, in the absence of a principal market, the most advantageous market for the asset or liability and defines fair value based upon an exit price model.
	The fair value measurement guidance establishes a fair value hierarchy which requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The guidance describes three levels of inputs that may be used to measure fair value:
	Level 1		Quoted prices in active markets for identical assets or liabilities assessed as of the reporting date. Active markets are those in which transactions for the asset or liability occur in sufficient frequency and volume to provide pricing information on an ongoing basis.
	Level 2		Observable inputs other than Level 1 prices, such as quoted prices for similar assets or liabilities; quoted prices in markets that are not active; or other inputs that are observable or can be corroborated by observable market data for substantially the full term of the assets or liabilities. Level 2 assets and liabilities include debt securities with quoted prices that are traded less frequently than exchange-traded instruments or securities or derivative contracts that are valued using a pricing model with inputs that are observable in the market or can be derived principally from or corroborated by observable market data.
	Level 3		Unobservable inputs that are supported by little or no market activity and that are significant to the fair value of the assets or liabilities. Level 3 assets and liabilities include financial instruments whose value is determined using pricing models, discounted cash flow methodologies, or similar techniques, as well as instruments for which the determination of fair value requires significant management judgment or estimation.
	In certain cases, the inputs used to measure fair value may fall into different levels of the fair value hierarchy. In such cases, the Company categorizes such assets and liabilities based on the lowest level input that is significant to the fair value measurement in its entirety. The Company’s assessment of the significance of a particular input to the fair value measurement in its entirety requires judgment and considers factors specific to the asset or liability.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of September 30, 2014 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			September 30, 2014		Active Markets for		Observable		Unobservable
					Identical Assets		Inputs		Inputs
					(Level 1)		(Level 2)		(Level 3)
	Assets:
	Cash equivalents:
	Money market funds		$	78,268	$	78,268	$	—	$	—
	Time deposits and certificates of deposit			8,239		—		8,239		—
	Bankers’ acceptance drafts			83		—		83		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			765		—		765		—
	Time deposits and certificates of deposit			40,722		—		40,722		—
	Commercial paper			9,691		—		9,691		—
	Asset-backed securities			63,986		—		63,986		—
	Corporate obligations			76,336		—		76,336		—
	Municipal bonds			3,356		—		3,356		—
	U.S. agency obligations			79,935		—		79,935		—
	Derivatives – currency forward contracts			1,042		—		1,042		—
	Total assets		$	362,423	$	78,268	$	284,155	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	88	$	—	$	88	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	86,590	$	78,268	$	8,322	$	—
	Short-term investments			140,042		—		140,042		—
	Other current assets			1,042		—		1,042		—
	Total current assets		$	227,674	$	78,268	$	149,406	$	—
	Long-term investments		$	134,749	$	—	$	134,749	$	—
	Liabilities:
	Other current liabilities		$	88	$	—	$	88	$	—
	-1	The cash and cash equivalent amounts presented in the table above do not include cash of $201,135 and non-negotiable time deposits of $7,731 as of September 30, 2014.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2013 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			December 31, 2013		Active Markets for		Observable		Unobservable
					Identical Assets		Inputs		Inputs
					(Level 1)		(Level 2)		(Level 3)
	Assets:
	Cash equivalents
	Money market funds		$	38,166	$	38,166	$	—	$	—
	Time deposits and certificates of deposit			7,050		—		7,050		—
	Bankers’ acceptance drafts			32		—		32		—
	Commercial paper			3,350		—		3,350		—
	Trading securities:
	Mutual funds			1,000		1,000		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			491		—		491		—
	Time deposits and certificates of deposit			65,043		—		65,043		—
	Commercial paper			53,434		—		53,434		—
	Corporate obligations			18,351		—		18,351		—
	U.S. agency obligations			222,801		—		222,801		—
	Derivatives – currency forward contracts			920		—		920		—
	Total assets		$	410,638	$	39,166	$	371,472	$	—
	Liabilities:
Derivatives – currency forward contracts		$	656	$	—	$	656	$	—
Reported as follows:
Assets:
Cash and cash equivalents (1)		$	48,598	$	38,166	$	10,432	$	—
Short-term investments			300,715		1,000		299,715		—
Other current assets			920		—		920		—
Total current assets		$	350,233	$	39,166	$	311,067	$	—
Long-term investments		$	60,405	$	—	$	60,405	$	—
Liabilities:
Other current liabilities		$	656	$	—	$	656	$	—
-1	The cash and cash equivalent amounts presented in the table above do not include cash of $234,675 and non-negotiable time deposits of $5,629 as of December 31, 2013.
Money Market Funds
Money market funds are cash and cash equivalents and are classified within Level 1 of the fair value hierarchy.
Trading Securities
As of December 31, 2013, trading securities consisted of certain U.S. and international equity mutual funds and government agency fixed income mutual funds.
Bankers’ Acceptance Drafts
Bankers’ acceptance drafts are short-term credit investments created by a non-financial firm and guaranteed by a bank. These drafts are often traded at a discount from face value and may be traded on a secondary market.
Available-For-Sale Investments
Available-for-sale investments consisted of time deposits and drafts denominated in the Euro currency, commercial paper, certificates of deposit, asset-backed securities which include auto loans, credit card receivables, equipment trust receivables, corporate obligations, municipal bonds and U.S. agency obligations. The Company measures its debt and equity investments at fair value.
Derivatives
As a result of the Company’s global operating activities, the Company is exposed to market risks from changes in foreign currency exchange rates, which may adversely affect its operating results and financial position. When deemed appropriate, the Company minimizes its risks from foreign currency exchange rate fluctuations through the use of derivative financial instruments. The principal market in which the Company executes its foreign currency contracts is the institutional market in an over-the-counter environment with a relatively high level of price transparency. The market participants usually are large commercial banks. The forward foreign currency exchange contracts are valued using broker quotations, or market transactions and are classified within Level 2 of the fair value hierarchy.

Derivatives

Derivatives	9 Months Ended
	Sep. 30, 2014
Derivative Instruments and Hedging Activities Disclosure [Abstract]	'
Derivatives	'
	5)	Derivatives
	The Company enters into derivative instruments for risk management purposes only, including derivatives designated as hedging instruments and those utilized as economic hedges. The Company operates internationally and, in the normal course of business, is exposed to fluctuations in interest rates and foreign exchange rates. These fluctuations can increase the costs of financing, investing and operating the business. The Company has used derivative instruments, such as forward contracts, to manage certain foreign currency exposure.
	By nature, all financial instruments involve market and credit risks. The Company enters into derivative instruments with major investment grade financial institutions and no collateral is required. The Company has policies to monitor the credit risk of these counterparties. While there can be no assurance, the Company does not anticipate any material non-performance by any of these counterparties.
	The Company hedges a portion of its forecasted foreign currency denominated intercompany sales of inventory, over a maximum period of eighteen months, using forward foreign exchange contracts accounted for as cash-flow hedges related to Japanese, South Korean, British, Euro and Taiwan currencies. To the extent these derivatives are effective in off-setting the variability of the hedged cash flows, and otherwise meet the hedge accounting criteria, changes in the derivatives’ fair value are not included in current earnings but are included in other comprehensive income (“OCI”) in stockholders’ equity. These changes in fair value will subsequently be reclassified into earnings, as applicable, when the forecasted transaction occurs. To the extent that a previously designated hedging transaction is no longer an effective hedge, any ineffectiveness measured in the hedging relationship is recorded currently in earnings in the period it occurs. The cash flows resulting from forward exchange contracts are classified in the consolidated statements of cash flows as part of cash flows from operating activities. The Company does not enter into derivative instruments for trading or speculative purposes.
	To the extent the hedge accounting criteria is not met, the related foreign currency forward contracts are considered as economic hedges and changes in the fair value of these contracts are recorded immediately in earnings in the period in which they occur. These include hedges that are used to reduce exchange rate risks arising from the change in fair value of certain foreign currency denominated assets and liabilities (i.e., payables, receivables) and other economic hedges where the hedge accounting criteria were not met.
	As of September 30, 2014 and December 31, 2013, the Company had outstanding forward foreign exchange contracts with gross notional values of $27,643 and $21,018, respectively. The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of September 30, 2014 and December 31, 2013:
			September 30, 2014
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	9,014		$	610
	U.S. Dollar/South Korean Won			10,122			48
	U.S. Dollar/Euro			2,500			205
	U.S. Dollar/U.K. Pound Sterling			1,261			40
	U.S. Dollar/Taiwan Dollar			4,746			51
	Total		$	27,643		$	954
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
			December 31, 2013
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	7,191		$	920
	U.S. Dollar/South Korean Won			9,254			(521	)
	U.S. Dollar/Euro			2,806			(85	)
	U.S. Dollar/U.K. Pound Sterling			1,767			(50	)
	Total		$	21,018		$	264
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
	The following table provides a summary of the fair value amounts of the Company’s derivative instruments:
			September 30, 2014			December 31, 2013
	Derivative assets:
	Forward exchange contracts		$	1,042		$	920
	Derivative liabilities:
	Forward exchange contracts			(88	)		(656	)
	Total net derivative asset (liability) designated as hedging instruments(1)		$	954		$	264
	-1	The derivative asset of $1,042 and derivative liability of $(88) are classified in other current assets and other current liabilities in the consolidated balance sheet as of September 30, 2014. The derivative asset of $920 and derivative liability of $(656) are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of December 31, 2013. These foreign exchange contracts are subject to a master netting agreement with one financial institution. However, the Company has elected to record these contracts on a gross basis in the balance sheet.
	The net amount of existing gains or losses as of September 30, 2014 that is expected to be reclassified from accumulated OCI into earnings within the next twelve months is immaterial.
	The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:
			Three Months Ended September 30,						Nine Months Ended September 30,
	Derivatives Designated as Cash Flow Hedging Relationships		2014			2013			2014			2013
	Forward exchange contracts:
	Net gain (loss) recognized in OCI(1)		$	2,071		$	(1,837	)	$	689		$	(315	)
	Net (loss) gain reclassified from OCI into income(2)		$	(352	)	$	297		$	(145	)	$	1,102
	-1	Net change in the fair value of the effective portion classified in OCI.
	-2	Effective portion classified in cost of products for the three and nine months ended September 30, 2014 and 2013.
	The following table provides a summary of (losses) gains on derivatives not designated as hedging instruments:
			Three Months Ended September 30,						Nine Months Ended September 30,
	Derivatives Not Designated as Hedging Instruments		2014			2013			2014			2013
	Forward exchange contracts:
	Net gain (loss) recognized in income(1)		$	(70	)	$	(514	)	$	(168	)	$	141
	-1	The Company enters into foreign exchange contracts to hedge against changes in the balance sheet for certain subsidiaries. These derivatives are not designated as hedging instruments and are recorded immediately in selling, general and administrative expenses.

Inventories

Inventories	9 Months Ended
	Sep. 30, 2014
Inventory Disclosure [Abstract]	'
Inventories	'
	6)	Inventories
	Inventories consist of the following:
			September 30, 2014		December 31, 2013
	Raw materials		$	77,737	$	75,687
	Work-in-process			26,428		24,304
	Finished goods			49,765		42,736
			$	153,930	$	142,727

Acquisitions

Acquisitions	9 Months Ended
	Sep. 30, 2014
Business Combinations [Abstract]	'
Acquisitions	'
	7)	Acquisitions
	Granville-Phillips
	On May 30, 2014, the Company acquired Granville-Phillips (“GP”), a division of Brooks Automation, Inc. (“Brooks”), for $87,000, which includes $86,950 in cash and $50 in contingent consideration. MKS will pay contingent consideration if it does not cease use of certain of Brooks’ administrative services by a pre-defined date in accordance with a transition services agreement. Granville-Phillips is a leading global provider of vacuum measurement and control instruments to the semiconductor, thin film and general industrial markets with sales of approximately $30,000 in 2013. The Company believes that the amount of goodwill relative to identifiable intangible assets relates to several factors, including: a well-regarded leader in indirect vacuum gauges, a premium brand, an excellent reputation for quality, reliability and performance and an assembled workforce. The acquisition aligns with the Company’s current strategy to grow its semiconductor business, while diversifying into other high growth advanced markets.
	The following table summarizes the estimated fair value of the assets acquired and liabilities assumed at the date of acquisition:
	Inventory		$	6,223
	Property and equipment			299
	Other assets			191
	Intangible assets			38,850
	Goodwill			41,612
	Warranty liability			(175	)
	Total purchase price		$	87,000
	The entire purchase price is expected to be deductible for tax purposes. The following table reflects the allocation of the acquired intangible assets and related estimates of useful lives. These acquired intangibles will be amortized on a straight-line basis.
	Customer relationships		$	21,250		7 years
	Trademark and trade names			1,900		12 years
	Current developed technology			15,700		9-12 years
			$	38,850
	The results of this acquisition were included in the Company’s consolidated operations beginning on May 30, 2014. The pro forma consolidated statements reflecting the operating results of GP, had it been acquired January 1, 2013, would not differ materially from the operating results of the Company as reported for the nine months ended September 30, 2014. GP is included in the Company’s Instruments, Control and Vacuum Products group and the Advanced Manufacturing Capital Equipment reportable segment.

Goodwill_and_Intangible_Assets

Goodwill and Intangible Assets	9 Months Ended
	Sep. 30, 2014
Goodwill and Intangible Assets Disclosure [Abstract]	'
Goodwill and Intangible Assets	'
	8)	Goodwill and Intangible Assets
	Goodwill
	The Company’s methodology for allocating the purchase price relating to purchase acquisitions is determined through established and generally accepted valuation techniques. Goodwill is measured as the excess of the cost of the acquisition over the sum of the amounts assigned to tangible and identifiable intangible assets acquired less liabilities assumed. The Company assigns assets acquired (including goodwill) and liabilities assumed to one or more reporting units as of the date of acquisition. Typically acquisitions relate to a single reporting unit and thus do not require the allocation of goodwill to multiple reporting units. If the products obtained in an acquisition are assigned to multiple reporting units, the goodwill is distributed to the respective reporting units as part of the purchase price allocation process.
	Goodwill and purchased intangible assets with indefinite useful lives are not amortized, but are reviewed for impairment annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets requires significant judgment. The Company regularly monitors current business conditions and other factors including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability that may impact future operating results.
	As of October 31, 2013, the Company performed its annual impairment assessment of goodwill and determined that there was no impairment.
	The changes in the carrying amount of goodwill and accumulated impairment (loss) during the nine months ended September 30, 2014 and twelve months ended December 31, 2013 were as follows:
			2014							2013
			Gross		Accumulated			Net		Gross		Accumulated			Net
			Carrying		Impairment					Carrying		Impairment
			Amount		(Loss)					Amount		(Loss)
	Beginning balance at January 1		$	290,323	$	(139,414	)	$	150,909	$	290,147	$	(139,414	)	$	150,733
	Acquired goodwill(1)			41,993		—			41,993		—		—			—
	Foreign currency translation			223		—			223		176		—			176
	Ending balance at September 30, 2014 and December 31, 2013		$	332,539	$	(139,414	)	$	193,125	$	290,323	$	(139,414	)	$	150,909
	-1	During the second quarter of 2014, the Company recorded $41,612 of goodwill related to the May 30, 2014 GP acquisition. During the first quarter of 2014, the Company recorded a purchase accounting adjustment for $381 related to the March 12, 2013 purchase of Alter S.r.l.
	Goodwill associated with each of our reportable segments is as follows:
			September 30, 2014		December 31, 2013
	Reportable segment:
	Advanced Manufacturing Capital Equipment		$	184,234	$	142,065
	Analytical Solutions Group			8,668		8,668
	Europe Region Sales & Service			—		—
	Asia Region Sales & Service			—		—
	Foreign currency translation			223		176
	Total goodwill		$	193,125	$	150,909
	Intangible Assets
	Components of the Company’s intangible assets are comprised of the following:
	As of September 30, 2014:		Gross		Accumulated			Foreign		Net
					Amortization			Currency
								Translation
	Completed technology (1)		$	100,380	$	(79,263	)	$	490	$	21,607
	Customer relationships (1)			35,821		(11,612	)		588		24,797
	Patents, trademarks, trade names and other (1)			27,536		(25,193	)		65		2,408
			$	163,737	$	(116,068	)	$	1,143	$	48,812
	-1	During the nine months ended September 30, 2014, the Company recorded $38,850 of separately identified intangible assets of which $15,700 was completed technology, $21,250 was customer relationships and $1,900 was trademarks and trade names, relating to the May 30, 2014 GP acquisition.
	As of December 31, 2013:		Gross		Accumulated			Foreign		Net
					Amortization			Currency
								Translation
	Completed technology		$	84,680	$	(78,072	)	$	519	$	7,127
	Customer relationships			14,571		(9,831	)		454		5,194
	Patents, trademarks, trade names and other			25,636		(24,951	)		84		769
			$	124,887	$	(112,854	)	$	1,057	$	13,090
	Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2014 were $1,760 and $3,214, respectively. Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2013 were $361 and $1,537, respectively. Estimated amortization expense for each of the remaining fiscal years is as follows:
	Year		Amount
	2014 (remaining)		$	1,777
	2015			6,555
	2016			6,306
	2017			6,268
	2018			6,260
	2019			6,214
	Thereafter			15,432

Other_Assets

Other Assets	9 Months Ended
	Sep. 30, 2014
Deferred Costs, Capitalized, Prepaid, and Other Assets Disclosure [Abstract]	'
Other Assets	'
	9)	Other Assets
			September 30, 2014		December 31, 2013
	Other Assets:
	Deferred tax assets, net		$	9,538	$	9,208
	Long-term income tax receivable			18,616		20,516
	Other			2,011		2,123
	Total other assets		$	30,165	$	31,847

Other_Liabilities

Other Liabilities	9 Months Ended
	Sep. 30, 2014
Other Liabilities Disclosure [Abstract]	'
Other Liabilities	'
	10)	Other Liabilities
			September 30, 2014		December 31, 2013
	Other Current Liabilities:
	Product warranties		$	6,689	$	6,956
	Deferred revenue			6,463		5,556
	Other			29,809		21,730
	Total other current liabilities		$	42,961	$	34,242
	Other Liabilities:
	Long-term income tax payable		$	35,417	$	46,745
	Accrued compensation			11,570		9,646
	Other			6,953		6,682
	Total other liabilities		$	53,940	$	63,073

Debt

Debt	9 Months Ended
	Sep. 30, 2014
Debt Disclosure [Abstract]	'
Debt	'
	11)	Debt
	The Company’s Japanese subsidiary has lines of credit and short-term borrowing arrangements with two financial institutions which generally expire and are renewed at three month intervals. The lines of credit provide for aggregate borrowings as of September 30, 2014 of up to an equivalent of $21,049 U.S. dollars. One of the borrowing arrangements has an interest rate based on the Tokyo Interbank Offer Rate at the time of borrowing and the other has an interest rate based on the Japanese Short-term Prime Lending Rate. There were no borrowings outstanding under these arrangements at September 30, 2014 and December 31, 2013.

Product_Warranties

Product Warranties	9 Months Ended
	Sep. 30, 2014
Guarantees [Abstract]	'
Product Warranties	'
	12)	Product Warranties
	The Company provides for the estimated costs to fulfill customer warranty obligations upon the recognition of the related revenue. While the Company engages in extensive product quality programs and processes, including actively monitoring and evaluating the quality of its component suppliers, the Company’s warranty obligation is affected by shipment volume, product failure rates, utilization levels, material usage, and supplier warranties on parts delivered to the Company. Should actual product failure rates, utilization levels, material usage, or supplier warranties on parts differ from the Company’s estimates, revisions to the estimated warranty liability would be required. The product warranty liability is included in other current liabilities in the consolidated balance sheets.
	Product warranty activities were as follows:
			Nine Months Ended September 30,
			2014			2013
	Beginning of period		$	6,956		$	8,266
	Provision for product warranties			1,880			1,705
	Direct charges to warranty liability			(2,119	)		(3,142	)
	Foreign currency translation			(28	)		(97	)
	End of period		$	6,689		$	6,732

Income_Taxes

Income Taxes	9 Months Ended
	Sep. 30, 2014
Income Tax Disclosure [Abstract]	'
Income Taxes	'
	13)	Income Taxes
	The Company’s effective tax rate for the three and nine months ended September 30, 2014 was (2.0)% and 16.3%, respectively. The effective tax rate for the three and nine months ended September 30, 2014 was lower than the U.S. statutory tax rate primarily due to the discrete release of income tax reserves related to the effective settlement of foreign tax examinations in the first and third quarters of 2014. The effective tax rate for the three and nine months ended September 30, 2014 also benefited from a third quarter discrete release of income tax reserves related to the expiration of the statute of limitations for a previously open tax year and a third quarter discrete benefit resulting from foreign tax credits recognized on the payment of a dividend from a foreign subsidiary. The geographic mix of income and profits earned by the Company’s international subsidiaries being taxed at rates lower than the U.S. statutory tax rate and the deduction for domestic production activities also had an impact in reducing the effective tax rate in the three and nine month periods.
	The Company’s effective tax rate for the three and nine months ended September 30, 2013 was 80.4% and 44.8%, respectively. The effective tax rate for the three and nine months ended September 30, 2013, and related income tax expense was higher than the U.S. statutory tax rate primarily due to a decision made during the quarter ended September 30, 2013 to pay currently, at a substantially reduced rate, taxes on certain accumulated earnings of its Israeli subsidiary relating to calendar year periods 2002 through 2011 covered under its tax holiday that expired on December 31, 2011. This additional charge was partially offset by additional U.S. tax incentives realized by the Company and recognized as discrete events during the quarter ended September 30, 2013, and the geographic mix of income and profits earned by the Company’s international subsidiaries being taxed at rates lower than the U.S. statutory rate. Additionally, certain tax incentives realized by the Company were recognized as discrete events during the quarter ended March 31, 2013. These incentives were reinstated under The American Taxpayer Relief Act of 2012 that was signed into law on January 2, 2013.
	At September 30, 2014 the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $32,318. At December 31, 2013 the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $47,684. The net decrease from December 31, 2013 was primarily attributable to a release in reserves for uncertain tax positions due to the effective settlement of foreign tax examinations and the expiration of the statute of limitations related to a previously open tax year. As of September 30, 2014, if these benefits were recognized in a future period, the timing of which is not estimable, the net unrecognized tax benefit of $15,286, excluding interest and penalties, would impact the Company’s effective tax rate. The Company accrues interest expense, and if applicable penalties, for any uncertain tax positions. Interest and penalties are classified as a component of income tax expense. At September 30, 2014, and December 31, 2013, the Company had accrued interest on unrecognized tax benefits of approximately $1,340 and $2,159, respectively.
	The Company and its subsidiaries are subject to examination by federal, state and foreign tax authorities. The Internal Revenue Service commenced an examination of the Company’s U.S. federal tax filings for tax years 2007 through 2009 during the quarter ended June 30, 2012. As a result, the U.S. statute of limitations remains open between tax years 2007 through 2009 and from 2011 through the present. However, carryforward amounts from prior years may still be adjusted upon examination by tax authorities if they are used in a future period. The statute of limitations for the Company’s tax filings in other jurisdictions varies between fiscal years 2005 through the present.

Net_Income_Per_Share

Net Income Per Share	9 Months Ended
	Sep. 30, 2014
Earnings Per Share [Abstract]	'
Net Income Per Share	'
	14)	Net Income Per Share
	The following table sets forth the computation of basic and diluted net income per share:
			Three Months Ended September 30,				Nine Months Ended September 30,
			2014		2013		2014		2013
	Numerator:
	Net income		$	29,117	$	2,458	$	81,586	$	15,539
	Denominator:
	Shares used in net income per common share – basic			53,054,000		53,165,000		53,276,000		52,998,000
	Effect of dilutive securities:
	Stock options, restricted stock and employee stock purchase plan			256,000		348,000		265,000		412,000
	Shares used in net income per common share – diluted			53,310,000		53,513,000		53,541,000		53,410,000
	Net income per common share:
	Basic		$	0.55	$	0.05	$	1.53	$	0.29
	Diluted		$	0.55	$	0.05	$	1.52	$	0.29
	Basic earnings per share (“EPS”) is computed by dividing income available to common stockholders by the weighted-average number of common shares outstanding during the period. The computation of diluted EPS is similar to the computation of basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding (using the treasury stock method) if securities containing potentially dilutive common shares (stock options and restricted stock units) had been converted to such common shares, and if such assumed conversion is dilutive.
	As of September 30, 2014, stock options and restricted stock units relating to an aggregate of approximately 769,000 shares were outstanding. For the three and nine months ended September 30, 2014, the potential dilutive effect of approximately 64 and 534 weighted-average shares, respectively, of restricted stock units and stock options were excluded from the computation of diluted weighted-average shares outstanding as the shares would have an anti-dilutive effect on EPS.
	As of September 30, 2013, stock options and restricted stock units relating to an aggregate of approximately 1,059,000 shares were outstanding. For the three and nine months ended September 30, 2013, the potential dilutive effect of approximately 104,000 and 101,000 weighted-average shares, respectively, of restricted stock units and stock options were excluded from the computation of diluted weighted-average shares outstanding as the shares would have an anti-dilutive effect on EPS.

Stockholders_Equity

Stockholder's Equity	9 Months Ended
	Sep. 30, 2014
Equity [Abstract]	'
Stockholder's Equity	'
	15)	Stockholder’s Equity
	Stock Repurchase Program
	On July 25, 2011, the Company’s Board of Directors approved a share repurchase program for the repurchase of up to an aggregate of $200,000 of its outstanding common stock from time to time in open market purchases, privately negotiated transactions or through other appropriate means. The timing and quantity of any shares repurchased depends upon a variety of factors, including business conditions, stock market conditions and business development activities, including, but not limited to, merger and acquisition opportunities. These repurchases may be commenced, suspended or discontinued at any time without prior notice.
	During the nine months ended September 30, 2014, the Company repurchased approximately 728,000 shares of its common stock for $20,809, or an average price of $28.59 per share.
	Cash Dividends
	Holders of the Company’s common stock are entitled to receive dividends when they are declared by the Company’s Board of Directors. During the nine months ended September 30, 2014, the Board of Directors authorized a cash dividend of $0.16 per share during the first quarter of 2014 and a cash dividend of $0.165 during the second and third quarters of 2014, which totaled $26,081.
	On October 27, 2014, our Board of Directors declared a quarterly cash dividend of $0.165 per share to be paid on December 12, 2014 to shareholders of record as of December 1, 2014. Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of the Company’s Board of Directors.

Business_Segment_Geographic_Ar

Business Segment, Geographic Area, Product and Significant Customer Information	9 Months Ended
	Sep. 30, 2014
Segment Reporting [Abstract]	'
Business Segment, Geographic Area, Product and Significant Customer Information	'
	16)	Business Segment, Geographic Area, Product and Significant Customer Information
	The Company develops, manufactures, sells and services products that measure, control, power and monitor critical parameters of advanced manufacturing processes. The Company’s Chief Operating Decision Maker (“CODM”) utilizes consolidated financial information to make decisions about allocating resources and assessing performance for the entire Company. In addition, certain disaggregated financial information is also provided to the CODM. Based upon the information provided to the CODM, the Company has determined it has eight operating segments and four reportable segments.
	The eight operating segments are PFMC Products, Controls Products, ASTeX Products, ENI Products, HPS Products (Vacuum Products), Analytical Solutions Group, Europe Region Sales & Service and Asia Region Sales & Service.
	PFMC Products, Controls Products, ASTeX Products, ENI Products and HPS Products comprise a single reportable segment due to the similarities of the operating segments. This reportable segment, Advanced Manufacturing Capital Equipment, includes the development, manufacturing, sales and servicing of instruments and control products, power and reactive gas products, and vacuum products, all of which are utilized in semiconductor processing and other similar advanced manufacturing processes. Sales in this segment include both external sales and intercompany sales (which are stated at agreed upon transfer prices). External sales of these products made in Europe or Asia are reported as sales in the Europe Region Sales & Service or Asia Region Sales & Service segments.
	Analytical Solutions Group, Asia Region Sales & Service and Europe Region Sales & Service are each separate reportable segments. The Company has reported corporate expenses and certain intercompany pricing transactions in a Corporate, Eliminations and Other reconciling column. The Analytical Solutions Group includes gas composition analysis and information technology products. The Europe and Asia region sales and service segments mainly resell and service the Advanced Manufacturing Capital Equipment and Analytical Solutions Group products sold in their respective regions.
	MKS derives the segment results directly from the manner in which results are reported in its management reporting system. The accounting policies MKS uses to derive reportable segment results are substantially the same as those used for external reporting purposes except that a substantial portion of the sales of the Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments are intercompany sales to the regions at tax-based transfer prices and certain significant costs, including stock-based compensation and management incentive compensation, are not allocated to the segments and are included in Corporate, Eliminations and Other. The CODM reviews several metrics of each operating segment, including net revenues and gross profit (loss).
	The following is net revenues by reportable segment:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Advanced Manufacturing Capital Equipment		$	152,901		$	132,856		$	472,837		$	362,153
	Analytical Solutions Group			15,079			13,313			44,549			41,217
	Europe Region Sales & Service Operations(1)			14,295			12,436			41,337			35,287
	Asia Region Sales & Service Operations(1)			55,416			52,558			177,914			149,267
	Corporate, Eliminations and Other			(50,893	)		(44,710	)		(158,789	)		(122,898	)
			$	186,798		$	166,453		$	577,848		$	465,026
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
	The following is gross profit by reportable segment:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Advanced Manufacturing Capital Equipment		$	61,887		$	43,151		$	191,049		$	121,647
	Analytical Solutions Group			7,667			6,758			22,066			21,239
	Europe Region Sales & Service Operations(1)			4,221			3,427			12,082			10,005
	Asia Region Sales & Service Operations(1)			7,974			11,580			30,639			31,366
	Corporate, Eliminations and Other			(2,424	)		(2,682	)		(7,504	)		(5,363	)
			$	79,325		$	62,234		$	248,332		$	178,894
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
	The following is capital expenditures by reportable segment for the three and nine months ended September 30, 2014 and 2013:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2014:
	Capital expenditures		$	1,341		$	21		$	60		$	307		$	378		$	2,107
	Nine Months Ended September 30, 2014:
	Capital expenditures		$	5,282		$	1,823		$	87		$	560		$	1,610		$	9,362
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Capital expenditures		$	1,893		$	125		$	24		$	239		$	513		$	2,794
	Nine Months Ended September 30, 2013:
	Capital expenditures		$	6,599		$	265		$	137		$	435		$	1,718		$	9,154
	The following is depreciation and amortization by reportable segment for the three and nine months ended September 30, 2014 and 2013:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2014:
	Depreciation and amortization		$	4,393		$	319		$	85		$	295		$	700		$	5,792
	Nine Months Ended September 30, 2014:
	Depreciation and amortization		$	10,816		$	795		$	260		$	874		$	2,012		$	14,757
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations
			Capital Equipment												and Other
	Three Months Ended September 30, 2013:
	Depreciation and amortization		$	2,861		$	319		$	86		$	294		$	685		$	4,245
	Nine Months Ended September 30, 2013:
	Depreciation and amortization		$	8,819		$	923		$	260		$	876		$	1,837		$	12,715
	The following is segment assets by reportable segment:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
Manufacturing			Solutions Group			Eliminations
Capital Equipment						and Other
September 30, 2014:
Segment assets:
Accounts receivable(1)		$	15,853		$	4,843		$	7,711		$	36,800		$	41,083		$	106,290
Inventory			125,309			4,638			3,697			27,612			(7,326	)		153,930
Total segment assets		$	141,162		$	9,481		$	11,408		$	64,412		$	33,757		$	260,220
		Product Groups						Foreign Sales & Service Operations
		Advanced			Analytical			Europe			Asia			Corporate,			Total
		Manufacturing			Solutions Group									Eliminations
		Capital Equipment												and Other
December 31, 2013:
Segment assets:
Accounts receivable(1)		$	20,767		$	5,603		$	6,538		$	44,207		$	39,629		$	116,744
Inventory			117,822			4,391			4,254			25,094			(8,834	)		142,727
Total segment assets		$	138,589		$	9,994		$	10,792		$	69,301		$	30,795		$	259,471
-1	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.
A reconciliation of segment assets to consolidated total assets is as follows:
		September 30, 2014			December 31, 2013
Total segment assets		$	260,220		$	259,471
Cash and cash equivalents and investments			570,247			650,022
Other current assets			41,157			30,143
Property, plant and equipment, net			73,642			77,536
Goodwill and intangible assets, net			241,937			163,999
Other assets			30,165			31,847
Consolidated total assets		$	1,217,368		$	1,213,018
Worldwide Product Information
Because the reportable segment information above does not reflect worldwide sales of the Company’s products, the Company groups its products into three groups of similar products based upon the similarity of product function. Worldwide net revenue for each group of products is as follows:
		Three Months Ended September 30,						Nine Months Ended September 30,
		2014			2013			2014			2013
Instruments, Control and Vacuum Products		$	93,027		$	78,713		$	284,934		$	238,317
Power and Reactive Gas Products			79,228			72,471			249,190			182,294
Analytical Solutions Group Products			14,543			15,269			43,724			44,415
		$	186,798		$	166,453		$	577,848		$	465,026
Sales of Instruments, Control and Vacuum Products and Power and Reactive Gas Products are included in the Company’s Advanced Manufacturing Capital Equipment Products segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions. Sales of the Analytical Solutions Group products are included in the Analytical Solutions Group segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions.
Geographic
Information about the Company’s operations in different geographic regions is presented in the tables below. Net revenues to unaffiliated customers are based on the location in which the sale originated. Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.
		Three Months Ended September 30,						Nine Months Ended September 30,
		2014			2013			2014			2013
Net revenues:
United States		$	107,583		$	91,286		$	332,892		$	252,704
Korea			20,540			19,012			70,806			52,224
Japan			14,798			13,825			46,141			40,243
Asia (excluding Korea and Japan)			22,539			21,897			68,304			61,897
Europe			21,338			20,433			59,705			57,958
		$	186,798		$	166,453		$	577,848		$	465,026
		September 30, 2014			December 31, 2013
Long-lived assets:(1)
United States		$	57,560		$	60,700
Europe			6,075			5,484
Asia			12,019			13,475
		$	75,654		$	79,659
-1	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.
Major Customers
The Company had two customers with net revenues greater than 10% of total net revenues in the periods shown as follows:
		Three Months Ended September 30,						Nine Months Ended September 30,
		2014			2013			2014			2013
Customer A			19.5	%		16.4	%		19.6	%		16.7	%
Customer B			11.2	%		13.5	%		12.7	%		11.8	%

Restructuring

Restructuring	9 Months Ended
	Sep. 30, 2014
Restructuring and Related Activities [Abstract]	'
Restructuring	'
	17)	Restructuring
	The Company recorded restructuring charges of $1,223 and $1,970 during the three and nine months ended September 30, 2014. The restructuring charges were primarily for severance associated with the reduction in workforce of approximately 111 people throughout the Company.
	The activity related to the Company’s restructuring accrual is shown below:
			Nine Months Ended
			September 30, 2014
	Balance at December 31		$	—
	Charged to expense			1,970
	Payments			(1,580	)
	Balance at September 30		$	390
	During the first quarter of 2014, the Company re-classified certain assets from property, plant and equipment to current assets classified as held for sale, as these assets met the criteria for classification as held for sale. These assets relate to the Company closing one of its facilities in Colorado, as part of restructuring activities announced during the third quarter of 2013. The Company sold this building during the third quarter of 2014 for $1,316, net of commissions, and recorded an immaterial loss.

Commitments_and_Contingencies

Commitments and Contingencies	9 Months Ended
	Sep. 30, 2014
Commitments and Contingencies Disclosure [Abstract]	'
Commitments and Contingencies	'
	18)	Commitments and Contingencies
	The Company is subject to various legal proceedings and claims, which have arisen in the ordinary course of business. In the opinion of management, the ultimate disposition of these matters will not have a material adverse effect on the Company’s results of operations, financial condition or cash flows.

Recently_Issued_Accounting_Pro1

Recently Issued Accounting Pronouncements (Policies)	9 Months Ended
	Sep. 30, 2014
Accounting Changes and Error Corrections [Abstract]	'
Recently Issued Accounting Pronouncements	'
	In May 2014 the Financial Accounting Standards Board issued Accounting Standards Update (“ASU”) No. 2014-09, “Revenue from Contracts with Customers (Topic 606),” which supersedes all existing revenue recognition requirements, including most industry-specific guidance. The new standard requires a company to recognize revenue when it transfers goods and services to customers in an amount that reflects the consideration that the company expects to be entitled to in exchange for those goods or services. The ASU also requires additional disclosure about the nature, amount, timing and uncertainty of revenue and cash flows arising from customer contracts, including significant judgments and assets recognized from costs incurred to obtain or fulfill a contract. This pronouncement is effective for annual reporting periods beginning after December 15, 2016, including interim periods within that reporting period. The two permitted transition methods under the new standard are the full retrospective method, in which case the standard would be applied to each prior reporting period presented, or the modified retrospective method, in which case the cumulative effect of applying the standard would be recognized at the date of initial application. The Company has not yet selected a transition method. The Company is currently evaluating the requirements of ASU No. 2014-09 and has not yet determined its impact on the Company’s consolidated financial statements.
	In August 2014, the Financial Accounting Standards Board issued ASU No. 2014-15, Presentation of Financial Statements—Going Concern (Subtopic 205-40): Disclosure of Uncertainties about an Entity’s Ability to Continue as a Going Concern. Under the new guidance, management will be required to assess an entity’s ability to continue as a going concern, and to provide related footnote disclosures in certain circumstances. The provisions of this ASU are effective for annual periods beginning after December 15, 2016, and for annual and interim periods thereafter. This ASU is not expected to have an impact on the Company’s financial statements or disclosures.

Investments_Tables

Investments (Tables)	9 Months Ended
	Sep. 30, 2014
Investments, Debt and Equity Securities [Abstract]	'
Fair Value of Short-Term Available-for-Sale and Trading Investments	'
	The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:
		September 30, 2014		December 31, 2013
	Available-for-sale investments:
	Bankers’ acceptance drafts	$	765	$	491
	Time deposits and certificates of deposit		40,672		64,989
	Commercial paper		9,691		53,434
	Corporate obligations		14,890		18,351
	Municipal bonds		2,099		—
	U.S. agency obligations		71,925		162,450
		$	140,042	$	299,715
	Trading investments:
	Mutual funds		—		1,000
		$	140,042	$	300,715
Fair Value of Long-Term Available-for-Sale Investments	'
	The fair value of long-term investments with maturities of more than one year consists of the following:
		September 30, 2014		December 31, 2013
	Available-for-sale investments:
	Time deposits and certificates of deposit	$	50	$	54
	Asset-backed securities		63,986		—
	Corporate obligations		61,446		—
	Municipal bonds		1,257		—
	U.S. agency obligations		8,010		60,351
		$	134,749	$	60,405
Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities	'
	The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:
	As of September 30, 2014:	Cost		Gross		Gross			Estimated
				Unrealized		Unrealized			Fair Value
				Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts	$	765	$	—	$	—		$	765
	Time deposits and certificates of deposit		40,672		1		(1	)		40,672
	Commercial paper		9,692		2		(3	)		9,691
	Corporate obligations		14,889		1		—			14,890
	Municipal bonds		2,100		—		(1	)		2,099
	U.S. agency obligations		71,879		46		—			71,925
		$	139,997	$	50	$	(5	)	$	140,042
	Long-term investments:
	Time deposits	$	50	$	—	$	—		$	50
	Asset-backed securities		64,039		12		(65	)		63,986
	Corporate obligations		61,496		13		(63	)		61,446
	Municipal bonds		1,260		—		(3	)		1,257
	U.S. agency obligations		8,011		—		(1	)		8,010
		$	134,856	$	25	$	(132	)	$	134,749
	As of December 31, 2013:	Cost		Gross		Gross			Estimated
				Unrealized		Unrealized			Fair Value
				Gains		(Losses)
	Short-term investments:
	Bankers’ acceptance drafts	$	491	$	—	$	—		$	491
	Time deposits and certificates of deposit		64,983		10		(4	)		64,989
	Commercial paper		53,429		5		—			53,434
	Corporate obligations		18,360		—		(9	)		18,351
	U.S. agency obligations		162,430		22		(2	)		162,450
		$	299,693	$	37	$	(15	)	$	299,715
	Long-term investments:
	Time Deposits	$	54	$	—	$	—		$	54
	U.S. agency obligations		60,374		9		(32	)		60,351
		$	60,428	$	9	$	(32	)	$	60,405

Fair_Value_Measurements_Tables

Fair Value Measurements (Tables)	9 Months Ended
	Sep. 30, 2014
Fair Value Disclosures [Abstract]	'
Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis	'
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of September 30, 2014 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			September 30, 2014		Active Markets for		Observable		Unobservable
					Identical Assets		Inputs		Inputs
					(Level 1)		(Level 2)		(Level 3)
	Assets:
	Cash equivalents:
	Money market funds		$	78,268	$	78,268	$	—	$	—
	Time deposits and certificates of deposit			8,239		—		8,239		—
	Bankers’ acceptance drafts			83		—		83		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			765		—		765		—
	Time deposits and certificates of deposit			40,722		—		40,722		—
	Commercial paper			9,691		—		9,691		—
	Asset-backed securities			63,986		—		63,986		—
	Corporate obligations			76,336		—		76,336		—
	Municipal bonds			3,356		—		3,356		—
	U.S. agency obligations			79,935		—		79,935		—
	Derivatives – currency forward contracts			1,042		—		1,042		—
	Total assets		$	362,423	$	78,268	$	284,155	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	88	$	—	$	88	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents(1)		$	86,590	$	78,268	$	8,322	$	—
	Short-term investments			140,042		—		140,042		—
	Other current assets			1,042		—		1,042		—
	Total current assets		$	227,674	$	78,268	$	149,406	$	—
	Long-term investments		$	134,749	$	—	$	134,749	$	—
	Liabilities:
	Other current liabilities		$	88	$	—	$	88	$	—
	-1	The cash and cash equivalent amounts presented in the table above do not include cash of $201,135 and non-negotiable time deposits of $7,731 as of September 30, 2014.
	Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2013 and are summarized as follows:
					Fair Value Measurements at Reporting Date Using
	Description		Total		Quoted Prices in		Significant Other		Significant
			December 31, 2013		Active Markets for		Observable		Unobservable
					Identical Assets		Inputs		Inputs
					(Level 1)		(Level 2)		(Level 3)
	Assets:
	Cash equivalents
	Money market funds		$	38,166	$	38,166	$	—	$	—
	Time deposits and certificates of deposit			7,050		—		7,050		—
	Bankers’ acceptance drafts			32		—		32		—
	Commercial paper			3,350		—		3,350		—
	Trading securities:
	Mutual funds			1,000		1,000		—		—
	Available-for-sale securities:
	Bankers’ acceptance drafts			491		—		491		—
	Time deposits and certificates of deposit			65,043		—		65,043		—
	Commercial paper			53,434		—		53,434		—
	Corporate obligations			18,351		—		18,351		—
	U.S. agency obligations			222,801		—		222,801		—
	Derivatives – currency forward contracts			920		—		920		—
	Total assets		$	410,638	$	39,166	$	371,472	$	—
	Liabilities:
	Derivatives – currency forward contracts		$	656	$	—	$	656	$	—
	Reported as follows:
	Assets:
	Cash and cash equivalents (1)		$	48,598	$	38,166	$	10,432	$	—
	Short-term investments			300,715		1,000		299,715		—
	Other current assets			920		—		920		—
	Total current assets		$	350,233	$	39,166	$	311,067	$	—
Long-term investments		$	60,405	$	—	$	60,405	$	—
Liabilities:
Other current liabilities		$	656	$	—	$	656	$	—
-1	The cash and cash equivalent amounts presented in the table above do not include cash of $234,675 and non-negotiable time deposits of $5,629 as of December 31, 2013.

Derivatives_Tables

Derivatives (Tables)	9 Months Ended
	Sep. 30, 2014
Derivative Instruments and Hedging Activities Disclosure [Abstract]	'
Summary of Primary Net Hedging Positions and Corresponding Fair Values	'
	The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of September 30, 2014 and December 31, 2013:
			September 30, 2014
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	9,014		$	610
	U.S. Dollar/South Korean Won			10,122			48
	U.S. Dollar/Euro			2,500			205
	U.S. Dollar/U.K. Pound Sterling			1,261			40
	U.S. Dollar/Taiwan Dollar			4,746			51
	Total		$	27,643		$	954
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
			December 31, 2013
	Currency Hedged (Buy/Sell)		Gross Notional			Fair Value(1)
			Value			Asset/(Liability)
	U.S. Dollar/Japanese Yen		$	7,191		$	920
	U.S. Dollar/South Korean Won			9,254			(521	)
	U.S. Dollar/Euro			2,806			(85	)
	U.S. Dollar/U.K. Pound Sterling			1,767			(50	)
	Total		$	21,018		$	264
	-1	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.
Summary of Fair Value Amounts of Company's Derivative Instruments	'
	The following table provides a summary of the fair value amounts of the Company’s derivative instruments:
			September 30, 2014			December 31, 2013
	Derivative assets:
	Forward exchange contracts		$	1,042		$	920
	Derivative liabilities:
	Forward exchange contracts			(88	)		(656	)
	Total net derivative asset (liability) designated as hedging instruments(1)		$	954		$	264
	-1	The derivative asset of $1,042 and derivative liability of $(88) are classified in other current assets and other current liabilities in the consolidated balance sheet as of September 30, 2014. The derivative asset of $920 and derivative liability of $(656) are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of December 31, 2013. These foreign exchange contracts are subject to a master netting agreement with one financial institution. However, the Company has elected to record these contracts on a gross basis in the balance sheet.
Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments	'
	The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:
			Three Months Ended September 30,						Nine Months Ended September 30,
	Derivatives Designated as Cash Flow Hedging Relationships		2014			2013			2014			2013
	Forward exchange contracts:
	Net gain (loss) recognized in OCI(1)		$	2,071		$	(1,837	)	$	689		$	(315	)
	Net (loss) gain reclassified from OCI into income(2)		$	(352	)	$	297		$	(145	)	$	1,102
	-1	Net change in the fair value of the effective portion classified in OCI.
	-2	Effective portion classified in cost of products for the three and nine months ended September 30, 2014 and 2013.
Summary of (Losses) Gains on Derivatives Not Designated as Hedging Instruments	'
	The following table provides a summary of (losses) gains on derivatives not designated as hedging instruments:
			Three Months Ended September 30,						Nine Months Ended September 30,
	Derivatives Not Designated as Hedging Instruments		2014			2013			2014			2013
	Forward exchange contracts:
	Net gain (loss) recognized in income(1)		$	(70	)	$	(514	)	$	(168	)	$	141
	-1	The Company enters into foreign exchange contracts to hedge against changes in the balance sheet for certain subsidiaries. These derivatives are not designated as hedging instruments and are recorded immediately in selling, general and administrative expenses.

Inventories_Tables

Inventories (Tables)	9 Months Ended
	Sep. 30, 2014
Inventory Disclosure [Abstract]	'
Summary of Inventories	'
	Inventories consist of the following:
		September 30, 2014		December 31, 2013
	Raw materials	$	77,737	$	75,687
	Work-in-process		26,428		24,304
	Finished goods		49,765		42,736
		$	153,930	$	142,727

Acquisitions_Tables

Acquisitions (Tables)	9 Months Ended
	Sep. 30, 2014
Business Combinations [Abstract]	'
Summary of Estimated Fair Value of Assets Acquired and Liabilities Assumed	'
	The following table summarizes the estimated fair value of the assets acquired and liabilities assumed at the date of acquisition:
	Inventory	$	6,223
	Property and equipment		299
	Other assets		191
	Intangible assets		38,850
	Goodwill		41,612
	Warranty liability		(175	)
	Total purchase price	$	87,000
Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives	'
	The following table reflects the allocation of the acquired intangible assets and related estimates of useful lives. These acquired intangibles will be amortized on a straight-line basis.
	Customer relationships	$	21,250		7 years
	Trademark and trade names		1,900		12 years
	Current developed technology		15,700		9-12 years
		$	38,850

Goodwill_and_Intangible_Assets1

Goodwill and Intangible Assets (Tables)	9 Months Ended
	Sep. 30, 2014
Goodwill and Intangible Assets Disclosure [Abstract]	'
Goodwill	'
	The changes in the carrying amount of goodwill and accumulated impairment (loss) during the nine months ended September 30, 2014 and twelve months ended December 31, 2013 were as follows:
			2014							2013
			Gross		Accumulated			Net		Gross		Accumulated			Net
			Carrying		Impairment					Carrying		Impairment
			Amount		(Loss)					Amount		(Loss)
	Beginning balance at January 1		$	290,323	$	(139,414	)	$	150,909	$	290,147	$	(139,414	)	$	150,733
	Acquired goodwill(1)			41,993		—			41,993		—		—			—
	Foreign currency translation			223		—			223		176		—			176
	Ending balance at September 30, 2014 and December 31, 2013		$	332,539	$	(139,414	)	$	193,125	$	290,323	$	(139,414	)	$	150,909
	-1	During the second quarter of 2014, the Company recorded $41,612 of goodwill related to the May 30, 2014 GP acquisition. During the first quarter of 2014, the Company recorded a purchase accounting adjustment for $381 related to the March 12, 2013 purchase of Alter S.r.l.
Goodwill Associated with Reportable Segments	'
	Goodwill associated with each of our reportable segments is as follows:
			September 30, 2014		December 31, 2013
	Reportable segment:
	Advanced Manufacturing Capital Equipment		$	184,234	$	142,065
	Analytical Solutions Group			8,668		8,668
	Europe Region Sales & Service			—		—
	Asia Region Sales & Service			—		—
	Foreign currency translation			223		176
	Total goodwill		$	193,125	$	150,909
Intangible Assets	'
	Components of the Company’s intangible assets are comprised of the following:
	As of September 30, 2014:		Gross		Accumulated			Foreign		Net
					Amortization			Currency
								Translation
	Completed technology (1)		$	100,380	$	(79,263	)	$	490	$	21,607
	Customer relationships (1)			35,821		(11,612	)		588		24,797
	Patents, trademarks, trade names and other (1)			27,536		(25,193	)		65		2,408
			$	163,737	$	(116,068	)	$	1,143	$	48,812
	-1	During the nine months ended September 30, 2014, the Company recorded $38,850 of separately identified intangible assets of which $15,700 was completed technology, $21,250 was customer relationships and $1,900 was trademarks and trade names, relating to the May 30, 2014 GP acquisition.
	As of December 31, 2013:		Gross		Accumulated			Foreign		Net
					Amortization			Currency
								Translation
	Completed technology		$	84,680	$	(78,072	)	$	519	$	7,127
	Customer relationships			14,571		(9,831	)		454		5,194
	Patents, trademarks, trade names and other			25,636		(24,951	)		84		769
			$	124,887	$	(112,854	)	$	1,057	$	13,090
Estimated Amortization Expense	'
	Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2014 were $1,760 and $3,214, respectively. Aggregate amortization expense related to acquired intangibles for the three and nine months ended September 30, 2013 were $361 and $1,537, respectively. Estimated amortization expense for each of the remaining fiscal years is as follows:
	Year		Amount
	2014 (remaining)		$	1,777
	2015			6,555
	2016			6,306
	2017			6,268
	2018			6,260
	2019			6,214
	Thereafter			15,432

Other_Assets_Tables

Other Assets (Tables)	9 Months Ended
	Sep. 30, 2014
Deferred Costs, Capitalized, Prepaid, and Other Assets Disclosure [Abstract]	'
Schedule of Other Assets	'
		September 30, 2014		December 31, 2013
	Other Assets:
	Deferred tax assets, net	$	9,538	$	9,208
	Long-term income tax receivable		18,616		20,516
	Other		2,011		2,123
	Total other assets	$	30,165	$	31,847

Other_Liabilities_Tables

Other Liabilities (Tables)	9 Months Ended
	Sep. 30, 2014
Other Liabilities Disclosure [Abstract]	'
Other Liabilities	'
		September 30, 2014		December 31, 2013
	Other Current Liabilities:
	Product warranties	$	6,689	$	6,956
	Deferred revenue		6,463		5,556
	Other		29,809		21,730
	Total other current liabilities	$	42,961	$	34,242
	Other Liabilities:
	Long-term income tax payable	$	35,417	$	46,745
	Accrued compensation		11,570		9,646
	Other		6,953		6,682
	Total other liabilities	$	53,940	$	63,073

Product_Warranties_Tables

Product Warranties (Tables)	9 Months Ended
	Sep. 30, 2014
Guarantees [Abstract]	'
Product Warranty Activities	'
	Product warranty activities were as follows:
		Nine Months Ended September 30,
		2014			2013
	Beginning of period	$	6,956		$	8,266
	Provision for product warranties		1,880			1,705
	Direct charges to warranty liability		(2,119	)		(3,142	)
	Foreign currency translation		(28	)		(97	)
	End of period	$	6,689		$	6,732

Net_Income_Per_Share_Tables

Net Income Per Share (Tables)	9 Months Ended
	Sep. 30, 2014
Earnings Per Share [Abstract]	'
Computation of Basic and Diluted Net Income Per Share	'
	The following table sets forth the computation of basic and diluted net income per share:
		Three Months Ended September 30,				Nine Months Ended September 30,
		2014		2013		2014		2013
	Numerator:
	Net income	$	29,117	$	2,458	$	81,586	$	15,539
	Denominator:
	Shares used in net income per common share – basic		53,054,000		53,165,000		53,276,000		52,998,000
	Effect of dilutive securities:
	Stock options, restricted stock and employee stock purchase plan		256,000		348,000		265,000		412,000
	Shares used in net income per common share – diluted		53,310,000		53,513,000		53,541,000		53,410,000
	Net income per common share:
	Basic	$	0.55	$	0.05	$	1.53	$	0.29
	Diluted	$	0.55	$	0.05	$	1.52	$	0.29

Business_Segment_Geographic_Ar1

Business Segment, Geographic Area, Product and Significant Customer Information (Tables)	9 Months Ended
	Sep. 30, 2014
Segment Reporting [Abstract]	'
Net Revenues by Reportable Segment	'
	The following is net revenues by reportable segment:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Advanced Manufacturing Capital Equipment		$	152,901		$	132,856		$	472,837		$	362,153
	Analytical Solutions Group			15,079			13,313			44,549			41,217
	Europe Region Sales & Service Operations(1)			14,295			12,436			41,337			35,287
	Asia Region Sales & Service Operations(1)			55,416			52,558			177,914			149,267
	Corporate, Eliminations and Other			(50,893	)		(44,710	)		(158,789	)		(122,898	)
			$	186,798		$	166,453		$	577,848		$	465,026
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
Schedule of Gross Profit by Reportable Segment	'
	The following is gross profit by reportable segment:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Advanced Manufacturing Capital Equipment		$	61,887		$	43,151		$	191,049		$	121,647
	Analytical Solutions Group			7,667			6,758			22,066			21,239
	Europe Region Sales & Service Operations(1)			4,221			3,427			12,082			10,005
	Asia Region Sales & Service Operations(1)			7,974			11,580			30,639			31,366
	Corporate, Eliminations and Other			(2,424	)		(2,682	)		(7,504	)		(5,363	)
			$	79,325		$	62,234		$	248,332		$	178,894
	-1	The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.
Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment	'
	The following is capital expenditures by reportable segment for the three and nine months ended September 30, 2014 and 2013:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	Three Months Ended September 30, 2014:
	Capital expenditures		$	1,341		$	21		$	60		$	307		$	378		$	2,107
	Nine Months Ended September 30, 2014:
	Capital expenditures		$	5,282		$	1,823		$	87		$	560		$	1,610		$	9,362
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	Three Months Ended September 30, 2013:
	Capital expenditures		$	1,893		$	125		$	24		$	239		$	513		$	2,794
	Nine Months Ended September 30, 2013:
	Capital expenditures		$	6,599		$	265		$	137		$	435		$	1,718		$	9,154
	The following is depreciation and amortization by reportable segment for the three and nine months ended September 30, 2014 and 2013:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	Three Months Ended September 30, 2014:
	Depreciation and amortization		$	4,393		$	319		$	85		$	295		$	700		$	5,792
	Nine Months Ended September 30, 2014:
	Depreciation and amortization		$	10,816		$	795		$	260		$	874		$	2,012		$	14,757
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	Three Months Ended September 30, 2013:
	Depreciation and amortization		$	2,861		$	319		$	86		$	294		$	685		$	4,245
	Nine Months Ended September 30, 2013:
	Depreciation and amortization		$	8,819		$	923		$	260		$	876		$	1,837		$	12,715
	The following is segment assets by reportable segment:
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	September 30, 2014:
	Segment assets:
	Accounts receivable(1)		$	15,853		$	4,843		$	7,711		$	36,800		$	41,083		$	106,290
	Inventory			125,309			4,638			3,697			27,612			(7,326	)		153,930
	Total segment assets		$	141,162		$	9,481		$	11,408		$	64,412		$	33,757		$	260,220
			Product Groups						Foreign Sales & Service Operations
			Advanced			Analytical			Europe			Asia			Corporate,			Total
			Manufacturing			Solutions Group									Eliminations and
			Capital Equipment												Other
	December 31, 2013:
	Segment assets:
	Accounts receivable(1)		$	20,767		$	5,603		$	6,538		$	44,207		$	39,629		$	116,744
	Inventory			117,822			4,391			4,254			25,094			(8,834	)		142,727
	Total segment assets		$	138,589		$	9,994		$	10,792		$	69,301		$	30,795		$	259,471
	-1	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.
Reconciliation of Segment Assets to Consolidated Total Assets	'
	A reconciliation of segment assets to consolidated total assets is as follows:
			September 30, 2014			December 31, 2013
	Total segment assets		$	260,220		$	259,471
	Cash and cash equivalents and investments			570,247			650,022
	Other current assets			41,157			30,143
	Property, plant and equipment, net			73,642			77,536
	Goodwill and intangible assets, net			241,937			163,999
	Other assets			30,165			31,847
	Consolidated total assets		$	1,217,368		$	1,213,018
Worldwide Net Revenue for Each Group of Products	'
	Worldwide net revenue for each group of products is as follows:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Instruments, Control and Vacuum Products		$	93,027		$	78,713		$	284,934		$	238,317
	Power and Reactive Gas Products			79,228			72,471			249,190			182,294
	Analytical Solutions Group Products			14,543			15,269			43,724			44,415
			$	186,798		$	166,453		$	577,848		$	465,026
Schedule of Net Revenues and Long-Lived Assets by Geographic Regions	'
	Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Net revenues:
	United States		$	107,583		$	91,286		$	332,892		$	252,704
	Korea			20,540			19,012			70,806			52,224
	Japan			14,798			13,825			46,141			40,243
	Asia (excluding Korea and Japan)			22,539			21,897			68,304			61,897
	Europe			21,338			20,433			59,705			57,958
			$	186,798		$	166,453		$	577,848		$	465,026
			September 30, 2014			December 31, 2013
	Long-lived assets:(1)
	United States		$	57,560		$	60,700
	Europe			6,075			5,484
	Asia			12,019			13,475
			$	75,654		$	79,659
	-1	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.
Customers with Net Revenues Greater than 10% of Total Net Revenues	'
	The Company had two customers with net revenues greater than 10% of total net revenues in the periods shown as follows:
			Three Months Ended September 30,						Nine Months Ended September 30,
			2014			2013			2014			2013
	Customer A			19.5	%		16.4	%		19.6	%		16.7	%
	Customer B			11.2	%		13.5	%		12.7	%		11.8	%

Restructuring_Tables

Restructuring (Tables)	9 Months Ended
	Sep. 30, 2014
Restructuring and Related Activities [Abstract]	'
Schedule of Company's Restructuring Activity	'
	The activity related to the Company’s restructuring accrual is shown below:
		Nine Months Ended
		September 30, 2014
	Balance at December 31	$	—
	Charged to expense		1,970
	Payments		(1,580	)
	Balance at September 30	$	390

Investments_Fair_Value_of_Shor

Investments - Fair Value of Short-Term Available-for-Sale and Trading Investments (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	$140,042	$299,715
Fair value of short-term investments	140,042	300,715
Bankers' Acceptance Drafts [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	765	491
Time Deposits and Certificates of Deposit [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	40,672	64,989
Commercial Paper [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	9,691	53,434
Corporate Obligations [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	14,890	18,351
Municipal Bonds [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	2,099	'
U.S. Agency Obligations [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term available-for-sale investments	71,925	162,450
Mutual Funds [Member]	'	'
Schedule of Investments [Line Items]	'	'
Fair value of short-term investments, mutual funds	'	$1,000

Investments_Fair_Value_of_Long

Investments - Fair Value of Long-Term Available-for-Sale Investments (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	$134,749	$60,405
Time Deposits and Certificates of Deposit [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	50	54
Asset Backed Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	63,986	'
Corporate Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	61,446	'
Municipal Bonds [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	1,257	'
U.S. Agency Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Fair value of long-term available-for-sale investments	$8,010	$60,351

Investments_Gross_Unrealized_G

Investments - Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	$140,042	$299,715
Long-term investments, Estimated Fair Value	134,749	60,405
Bankers' Acceptance Drafts [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	765	491
Time Deposits and Certificates of Deposit [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	40,672	64,989
Long-term investments, Estimated Fair Value	50	54
Commercial Paper [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	9,691	53,434
Corporate Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	14,890	18,351
Long-term investments, Estimated Fair Value	61,446	'
Municipal Bonds [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	2,099	'
Long-term investments, Estimated Fair Value	1,257	'
U.S. Agency Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Short-term investments, Estimated Fair Value	71,925	162,450
Long-term investments, Estimated Fair Value	8,010	60,351
Asset Backed Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Long-term investments, Estimated Fair Value	63,986	'
Short Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	139,997	299,693
Investments, Gross Unrealized Gains	50	37
Investments, Gross Unrealized (Losses)	-5	-15
Short-term investments, Estimated Fair Value	140,042	299,715
Short Term [Member] | Bankers' Acceptance Drafts [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	765	491
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	'	'
Short-term investments, Estimated Fair Value	765	491
Short Term [Member] | Time Deposits and Certificates of Deposit [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	40,672	64,983
Investments, Gross Unrealized Gains	1	10
Investments, Gross Unrealized (Losses)	-1	-4
Short-term investments, Estimated Fair Value	40,672	64,989
Short Term [Member] | Commercial Paper [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	9,692	53,429
Investments, Gross Unrealized Gains	2	5
Investments, Gross Unrealized (Losses)	-3	'
Short-term investments, Estimated Fair Value	9,691	53,434
Short Term [Member] | Corporate Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	14,889	18,360
Investments, Gross Unrealized Gains	1	'
Investments, Gross Unrealized (Losses)	'	-9
Short-term investments, Estimated Fair Value	14,890	18,351
Short Term [Member] | Municipal Bonds [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	2,100	'
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	-1	'
Short-term investments, Estimated Fair Value	2,099	'
Short Term [Member] | U.S. Agency Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	71,879	162,430
Investments, Gross Unrealized Gains	46	22
Investments, Gross Unrealized (Losses)	'	-2
Short-term investments, Estimated Fair Value	71,925	162,450
Long Term [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	134,856	60,428
Investments, Gross Unrealized Gains	25	9
Investments, Gross Unrealized (Losses)	-132	-32
Long-term investments, Estimated Fair Value	134,749	60,405
Long Term [Member] | Corporate Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	61,496	'
Investments, Gross Unrealized Gains	13	'
Investments, Gross Unrealized (Losses)	-63	'
Long-term investments, Estimated Fair Value	61,446	'
Long Term [Member] | Municipal Bonds [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	1,260	'
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	-3	'
Long-term investments, Estimated Fair Value	1,257	'
Long Term [Member] | U.S. Agency Obligations [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	8,011	60,374
Investments, Gross Unrealized Gains	'	9
Investments, Gross Unrealized (Losses)	-1	-32
Long-term investments, Estimated Fair Value	8,010	60,351
Long Term [Member] | Asset Backed Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	64,039	'
Investments, Gross Unrealized Gains	12	'
Investments, Gross Unrealized (Losses)	-65	'
Long-term investments, Estimated Fair Value	63,986	'
Long Term [Member] | Time Deposits [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Investments, Cost	50	54
Investments, Gross Unrealized Gains	'	'
Investments, Gross Unrealized (Losses)	'	'
Long-term investments, Estimated Fair Value	$50	$54

Investments_Additional_Informa

Investments - Additional Information (Detail) (Maximum [Member])	9 Months Ended
	Sep. 30, 2014
Maximum [Member]	'
Schedule of Trading Securities and Other Trading Assets [Line Items]	'
Investment securities maturity period or average life	'3 years
Average duration of portfolio	'1 year

Fair_Value_Measurements_Schedu

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Derivatives - currency forward contracts	$1,042	$920
Derivatives - currency forward contracts	88	656
Short-term investments	140,042	300,715
Long-term investments	134,749	60,405
Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	86,590	48,598
Derivatives - currency forward contracts	1,042	920
Total assets	362,423	410,638
Derivatives - currency forward contracts	88	656
Short-term investments	140,042	300,715
Total current assets	227,674	350,233
Long-term investments	134,749	60,405
Other current liabilities	88	656
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	78,268	38,166
Derivatives - currency forward contracts	'	'
Total assets	78,268	39,166
Derivatives - currency forward contracts	'	'
Short-term investments	'	1,000
Total current assets	78,268	39,166
Long-term investments	'	'
Other current liabilities	'	'
Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	8,322	10,432
Derivatives - currency forward contracts	1,042	920
Total assets	284,155	371,472
Derivatives - currency forward contracts	88	656
Short-term investments	140,042	299,715
Total current assets	149,406	311,067
Long-term investments	134,749	60,405
Other current liabilities	88	656
Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Derivatives - currency forward contracts	'	'
Total assets	'	'
Derivatives - currency forward contracts	'	'
Short-term investments	'	'
Total current assets	'	'
Long-term investments	'	'
Other current liabilities	'	'
Money Market Funds [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	78,268	38,166
Money Market Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	78,268	38,166
Money Market Funds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Money Market Funds [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Time Deposits and Certificates of Deposit [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	8,239	7,050
Available-for-sale securities	40,722	65,043
Time Deposits and Certificates of Deposit [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Time Deposits and Certificates of Deposit [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	8,239	7,050
Available-for-sale securities	40,722	65,043
Time Deposits and Certificates of Deposit [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Municipal Bonds [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	3,356	'
Municipal Bonds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Municipal Bonds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	3,356	'
Municipal Bonds [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Bankers' Acceptance Drafts [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	83	32
Available-for-sale securities	765	491
Bankers' Acceptance Drafts [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Bankers' Acceptance Drafts [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	83	32
Available-for-sale securities	765	491
Bankers' Acceptance Drafts [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Commercial Paper [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	3,350
Available-for-sale securities	9,691	53,434
Commercial Paper [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Commercial Paper [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	3,350
Available-for-sale securities	9,691	53,434
Commercial Paper [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Cash and cash equivalents	'	'
Available-for-sale securities	'	'
Asset Backed Securities [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	63,986	'
Asset Backed Securities [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Asset Backed Securities [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	63,986	'
Asset Backed Securities [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Corporate Obligations [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	76,336	18,351
Corporate Obligations [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Corporate Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	76,336	18,351
Corporate Obligations [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
U.S. Agency Obligations [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	79,935	222,801
U.S. Agency Obligations [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
U.S. Agency Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	79,935	222,801
U.S. Agency Obligations [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Available-for-sale securities	'	'
Mutual Funds [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	1,000
Mutual Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	1,000
Mutual Funds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	'
Mutual Funds [Member] | Significant Unobservable Inputs (Level 3) [Member] | Fair Value Measurements, Recurring [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Mutual funds	'	'

Fair_Value_Measurements_Schedu1

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Parenthetical) (Detail) (USD $)	Sep. 30, 2014
In Thousands, unless otherwise specified
Cash [Member]	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'
Not included in cash and cash equivalent amount	$201,135
Non Negotiable Time Deposits [Member]	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'
Not included in cash and cash equivalent amount	$7,731

Derivatives_Additional_Informa

Derivatives - Additional Information (Detail) (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Dec. 31, 2013
Derivative Instruments and Hedging Activities Disclosure [Abstract]	'	'
Maximum period for hedging a portion of forecasted foreign currency denominated intercompany sales of inventory	'18 months	'
Gross notional values of outstanding forward foreign exchange contracts	$27,643	$21,018
Accumulated earnings period	'12 months	'

Derivatives_Summary_of_Primary

Derivatives - Summary of Primary Net Hedging Positions and Corresponding Fair Values (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	$27,643	$21,018
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	954	264
Forward Exchange Contracts [Member] | U.S. Dollar/Japanese Yen [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	9,014	7,191
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	610	920
Forward Exchange Contracts [Member] | U.S. Dollar/South Korean Won [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	10,122	9,254
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	48	-521
Forward Exchange Contracts [Member] | U.S. Dollar/Euro [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	2,500	2,806
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	205	-85
Forward Exchange Contracts [Member] | U.S. Dollar/U.K. Pound Sterling [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	1,261	1,767
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	40	-50
Forward Exchange Contracts [Member] | U.S. Dollar/Taiwan Dollar [Member]	'	'
Derivative [Line Items]	'	'
Currency Hedged (Buy/Sell), Gross Notional Value, Net	4,746	'
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	$51	'

Derivatives_Summary_of_Fair_Va

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Derivatives, Fair Value [Line Items]	'	'
Forward exchange contracts, assets	$1,042	$920
Forward exchange contracts, liabilities	-88	-656
Total net derivative asset (liability) designated as hedging instruments	954	264
Derivatives Designated as Hedging Instruments [Member]	'	'
Derivatives, Fair Value [Line Items]	'	'
Forward exchange contracts, assets	1,042	920
Forward exchange contracts, liabilities	-88	-656
Total net derivative asset (liability) designated as hedging instruments	$954	$264

Derivatives_Summary_of_Fair_Va1

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Parenthetical) (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Derivative Instruments and Hedging Activities Disclosure [Abstract]	'	'
Derivative asset classified in other current assets	$1,042	$920
Derivative liability classified in other current liabilities	($88)	($656)

Derivatives_Summary_of_Gains_L

Derivatives - Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments (Detail) (Forward Exchange Contracts [Member], Cash Flow Hedging [Member], USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Forward Exchange Contracts [Member] | Cash Flow Hedging [Member]	'	'	'	'
Derivative Instruments, Gain (Loss) [Line Items]	'	'	'	'
Net gain (loss) recognized in OCI	$2,071	($1,837)	$689	($315)
Net (loss) gain reclassified from OCI into income	($352)	$297	($145)	$1,102

Derivatives_Summary_of_Losses_

Derivatives - Summary of (Losses) Gains on Derivatives Not Designated as Hedging Instruments (Detail) (Derivatives Not Designated as Hedging Instruments [Member], USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Derivatives Not Designated as Hedging Instruments [Member]	'	'	'	'
Derivative Instruments, Gain (Loss) Not Designated as Hedging Instruments [Line Items]	'	'	'	'
Net gain (loss) recognized in income	$70	($514)	($168)	$141

Inventories_Summary_of_Invento

Inventories - Summary of Inventories (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Inventory Disclosure [Abstract]	'	'
Raw materials	$77,737	$75,687
Work-in-process	26,428	24,304
Finished goods	49,765	42,736
Inventories	$153,930	$142,727

Acquisitions_Additional_Inform

Acquisitions - Additional Information (Detail) (Granville-Phillips [Member], USD $)	0 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	30-May-14	Dec. 31, 2013	30-May-14
Granville-Phillips [Member]	'	'	'
Business Acquisition [Line Items]	'	'	'
Business combination consideration price, cash	$86,950	'	'
Business combination contingent consideration	'	'	50
Business combination consideration price	87,000	'	'
Market sales of an acquiree	'	$30,000	'

Acquisitions_Summary_of_Estima

Acquisitions - Summary of Estimated Fair Value of Assets Acquired and Liabilities Assumed (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013	Dec. 31, 2012	Jun. 30, 2014	30-May-14
In Thousands, unless otherwise specified				Granville-Phillips [Member]	Granville-Phillips [Member]
Business Acquisition [Line Items]	'	'	'	'	'
Inventory	'	'	'	'	$6,223
Property and equipment	'	'	'	'	299
Other assets	'	'	'	'	191
Intangible assets	'	'	'	'	38,850
Goodwill	193,125	150,909	150,733	41,612	41,612
Warranty liability	'	'	'	'	-175
Total purchase price	'	'	'	'	$87,000

Acquisitions_Allocation_of_Acq

Acquisitions - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (Granville-Phillips [Member], USD $)	0 Months Ended	9 Months Ended
In Thousands, unless otherwise specified	30-May-14	Sep. 30, 2014
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets, purchase price	$38,850	'
Customer Relationships [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets, purchase price	21,250	21,250
Estimated useful life of finite lived intangible assets	'7 years	'
Trademarks and Trade Names [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets, purchase price	1,900	1,900
Estimated useful life of finite lived intangible assets	'12 years	'
Current Developed Technology [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets, purchase price	$15,700	'
Current Developed Technology [Member] | Minimum [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Estimated useful life of finite lived intangible assets	'9 years	'
Current Developed Technology [Member] | Maximum [Member]	'	'
Acquired Finite-Lived Intangible Assets [Line Items]	'	'
Estimated useful life of finite lived intangible assets	'12 years	'

Goodwill_and_Intangible_Assets2

Goodwill and Intangible Assets - Additional Information (Detail) (USD $)	0 Months Ended	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Oct. 31, 2013	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Goodwill and Intangible Assets Disclosure [Abstract]	'	'	'	'	'
Impairment of goodwill	$0	'	'	'	'
Aggregate amortization expense related to acquired intangibles	'	$1,760	$361	$3,214	$1,537

Goodwill_and_Intangible_Assets3

Goodwill and Intangible Assets - Goodwill (Detail) (USD $)	9 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Dec. 31, 2013
Goodwill and Intangible Assets Disclosure [Abstract]	'	'
Beginning balance, Goodwill Gross Carrying Amount	$290,323	$290,147
Acquired goodwill, Gross Carrying Amount	41,993	'
Foreign currency translation, Gross Carrying Amount	223	176
Ending balance, Goodwill Gross Carrying Amount	332,539	290,323
Beginning balance, Accumulated Impairment (Loss)	-139,414	-139,414
Acquired goodwill, Accumulated Impairment (Loss)	'	'
Foreign currency translation, Accumulated Impairment (Loss)	'	'
Ending balance, Accumulated Impairment (Loss)	-139,414	-139,414
Beginning balance, Goodwill Net	150,909	150,733
Acquired goodwill, Net	41,993	'
Foreign currency translation, Net	223	176
Ending balance, Goodwill Net	$193,125	$150,909

Goodwill_and_Intangible_Assets4

Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013	Dec. 31, 2012	Jun. 30, 2014	30-May-14	Mar. 31, 2014
In Thousands, unless otherwise specified				Granville-Phillips [Member]	Granville-Phillips [Member]	Alter S.r.l [Member]
Goodwill [Line Items]	'	'	'	'	'	'
Goodwill	$193,125	$150,909	$150,733	$41,612	$41,612	'
Acquisition purchase price adjustment	'	'	'	'	'	$381

Goodwill_and_Intangible_Assets5

Goodwill and Intangible Assets - Goodwill Associated with Reportable Segments (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Segment Reporting Information [Line Items]	'	'	'
Goodwill	$193,125	$150,909	$150,733
Advanced Manufacturing Capital Equipment [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Goodwill	184,234	142,065	'
Analytical Solutions Group [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Goodwill	8,668	8,668	'
Europe Region Sales & Service Operations [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Goodwill	'	'	'
Asia Region Sales & Service Operations [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Goodwill	'	'	'
Foreign Currency Translation [Member]	'	'	'
Segment Reporting Information [Line Items]	'	'	'
Goodwill	$223	$176	'

Goodwill_and_Intangible_Assets6

Goodwill and Intangible Assets - Intangible Assets (Detail) (USD $)	9 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Dec. 31, 2013
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	$163,737	$124,887
Accumulated Amortization	-116,068	-112,854
Foreign Currency Translation	1,143	1,057
Intangible assets, net	48,812	13,090
Completed Technology [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	100,380	84,680
Accumulated Amortization	-79,263	-78,072
Foreign Currency Translation	490	519
Intangible assets, net	21,607	7,127
Customer Relationships [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	35,821	14,571
Accumulated Amortization	-11,612	-9,831
Foreign Currency Translation	588	454
Intangible assets, net	24,797	5,194
Patents, Trademarks, Trade Names and Other [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Intangible assets, Gross	27,536	25,636
Accumulated Amortization	-25,193	-24,951
Foreign Currency Translation	65	84
Intangible assets, net	$2,408	$769

Goodwill_and_Intangible_Assets7

Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (Granville-Phillips [Member], USD $)	0 Months Ended	9 Months Ended
In Thousands, unless otherwise specified	30-May-14	Sep. 30, 2014
Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	'	$38,850
Acquired intangible assets	38,850	'
Completed Technology [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	'	15,700
Customer Relationships [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	21,250	21,250
Trademarks and Trade Names [Member]	'	'
Finite-Lived Intangible Assets [Line Items]	'	'
Acquired intangible assets	$1,900	$1,900

Goodwill_and_Intangible_Assets8

Goodwill and Intangible Assets - Estimated Amortization Expense (Detail) (USD $)	Sep. 30, 2014
In Thousands, unless otherwise specified
Goodwill and Intangible Assets Disclosure [Abstract]	'
2014 (remaining)	$1,777
2015	6,555
2016	6,306
2017	6,268
2018	6,260
2019	6,214
Thereafter	$15,432

Other_Assets_Schedule_of_Other

Other Assets - Schedule of Other Assets (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Other Assets:	'	'
Deferred tax assets, net	$9,538	$9,208
Long-term income tax receivable	18,616	20,516
Other	2,011	2,123
Total other assets	$30,165	$31,847

Other_Liabilities_Schedule_of_

Other Liabilities - Schedule of Other Liabilities (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Other Current Liabilities:	'	'
Product warranties	$6,689	$6,956
Deferred revenue	6,463	5,556
Other	29,809	21,730
Total other current liabilities	42,961	34,242
Other Liabilities:	'	'
Long-term income tax payable	35,417	46,745
Accrued compensation	11,570	9,646
Other	6,953	6,682
Total other liabilities	$53,940	$63,073

Debt_Additional_Information_De

Debt - Additional Information (Detail) (Japan [Member], USD $)	9 Months Ended
	Sep. 30, 2014	Dec. 31, 2013
	Institution
Japan [Member]	'	'
Debt Instrument [Line Items]	'	'
Number of financial institutions for available lines of credit and borrowing arrangements	2	'
Aggregate borrowings expire and renewed	'3 month intervals	'
Total available line of credit	$21,049	'
Total borrowings outstanding	$0	$0

Product_Warranties_Product_War

Product Warranties - Product Warranty Activities (Detail) (USD $)	9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013
Guarantees [Abstract]	'	'
Beginning of period	$6,956	$8,266
Provision for product warranties	1,880	1,705
Direct charges to warranty liability	-2,119	-3,142
Foreign currency translation	-28	-97
End of period	$6,689	$6,732

Income_Taxes_Additional_Inform

Income Taxes - Additional Information (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013	Dec. 31, 2013
Income Taxes [Line Items]	'	'	'	'	'
Effective tax rate	-2.00%	80.40%	16.30%	44.80%	'
Gross unrecognized tax benefits excluding interest and penalties	$32,318	'	$32,318	'	$47,684
Net unrecognized tax benefit excluding interest and penalties that would impact effective tax rate	15,286	'	15,286	'	'
Accrued interest on unrecognized tax benefits	$1,340	'	$1,340	'	$2,159
Income tax examination, description	'	'	'The Company and its subsidiaries are subject to examination by federal, state and foreign tax authorities. The Internal Revenue Service commenced an examination of the Company's U.S. federal tax filings for tax years 2007 through 2009 during the quarter ended June 30, 2012.	'	'
Earliest Tax Year [Member]	'	'	'	'	'
Income Taxes [Line Items]	'	'	'	'	'
Income tax examination period	'	'	'2007	'	'
Earliest Tax Year [Member] | Internal Revenue Service (IRS) [Member]	'	'	'	'	'
Income Taxes [Line Items]	'	'	'	'	'
Open tax year	'	'	'2009	'	'
Latest Tax Year [Member]	'	'	'	'	'
Income Taxes [Line Items]	'	'	'	'	'
Income tax examination period	'	'	'2009	'	'
Latest Tax Year [Member] | Internal Revenue Service (IRS) [Member]	'	'	'	'	'
Income Taxes [Line Items]	'	'	'	'	'
Open tax year	'	'	'2011	'	'

Net_Income_Per_Share_Computati

Net Income Per Share - Computation of Basic and Diluted Net Income Per Share (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, except Share data, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Numerator:	'	'	'	'
Net income	$29,117	$2,458	$81,586	$15,539
Denominator:	'	'	'	'
Shares used in net income per common share - basic	53,054,000	53,165,000	53,276,000	52,998,000
Effect of dilutive securities:	'	'	'	'
Stock options, restricted stock and employee stock purchase plan	256,000	348,000	265,000	412,000
Shares used in net income per common share - diluted	53,310,000	53,513,000	53,541,000	53,410,000
Net income per common share:	'	'	'	'
Basic	$0.55	$0.05	$1.53	$0.29
Diluted	$0.55	$0.05	$1.52	$0.29

Net_Income_Per_Share_Additiona

Net Income Per Share - Additional Information (Detail)	3 Months Ended		9 Months Ended
	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Earnings Per Share [Abstract]	'	'	'	'
Stock options and restricted stock units outstanding	769,000	1,059,000	769,000	1,059,000
Number of shares excluded from computation of diluted earnings per share	64	104,000	534	101,000

Stockholders_Equity_Additional

Stockholder's Equity - Additional Information (Detail) (USD $)	3 Months Ended				9 Months Ended			0 Months Ended
In Thousands, except Share data, unless otherwise specified	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013	Jul. 25, 2011	Oct. 27, 2014
								Subsequent Event [Member]
Stockholders Equity [Line Items]	'	'	'	'	'	'	'	'
Common stock, value of shares authorized to repurchase	'	'	'	'	'	'	$200,000	'
Stock repurchase, shares	'	'	'	'	728,000	'	'	'
Value of shares repurchased	'	'	'	'	20,809	'	'	'
Average price of repurchased shares	'	'	'	'	$28.59	'	'	'
Cash dividend paid	$0.17	$0.17	$0.16	$0.16	$0.49	$0.48	'	'
Dividend payment to common shareholders	'	'	'	'	$26,081	$25,458	'	'
Dividend declared date	'	'	'	'	27-Oct-14	'	'	'
Cash dividend to be paid	'	'	'	'	'	'	'	$0.17
Dividend to be paid date	'	'	'	'	12-Dec-14	'	'	'
Dividend declared, shareholders of record date	'	'	'	'	1-Dec-14	'	'	'

Business_Segment_Geographic_Ar2

Business Segment, Geographic Area, Product and Significant Customer Information - Additional Information (Detail)	9 Months Ended
	Sep. 30, 2014
	Customer
	Segment
	Product
Segment Reporting [Abstract]	'
Number of reportable segments	4
Number of operating segments	8
Number of product groups	3
Number of customers with net revenues greater than 10% of total net revenues	2
Entity wide net revenue major customer percentage minimum	10.00%

Business_Segment_Geographic_Ar3

Business Segment, Geographic Area, Product and Significant Customer Information - Net Revenues by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	$186,798	$166,453	$577,848	$465,026
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	152,901	132,856	472,837	362,153
Operating Segments [Member] | Analytical Solutions Group [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	15,079	13,313	44,549	41,217
Operating Segments [Member] | Europe Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	14,295	12,436	41,337	35,287
Operating Segments [Member] | Asia Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	55,416	52,558	177,914	149,267
Corporate, Eliminations and Other [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Total net revenues	($50,893)	($44,710)	($158,789)	($122,898)

Business_Segment_Geographic_Ar4

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Gross Profit by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	$79,325	$62,234	$248,332	$178,894
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	61,887	43,151	191,049	121,647
Operating Segments [Member] | Analytical Solutions Group [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	7,667	6,758	22,066	21,239
Operating Segments [Member] | Europe Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	4,221	3,427	12,082	10,005
Operating Segments [Member] | Asia Region Sales & Service Operations [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	7,974	11,580	30,639	31,366
Corporate, Eliminations and Other [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Gross profit	($2,424)	($2,682)	($7,504)	($5,363)

Business_Segment_Geographic_Ar5

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013	Dec. 31, 2013
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	$2,107	$2,794	$9,362	$9,154	'
Depreciation and amortization	5,792	4,245	14,757	12,715	'
Accounts receivable	106,290	'	106,290	'	116,744
Inventory	153,930	'	153,930	'	142,727
Total segment assets	260,220	'	260,220	'	259,471
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	1,341	1,893	5,282	6,599	'
Depreciation and amortization	4,393	2,861	10,816	8,819	'
Accounts receivable	15,853	'	15,853	'	20,767
Inventory	125,309	'	125,309	'	117,822
Total segment assets	141,162	'	141,162	'	138,589
Operating Segments [Member] | Analytical Solutions Group [Member]	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	21	125	1,823	265	'
Depreciation and amortization	319	319	795	923	'
Accounts receivable	4,843	'	4,843	'	5,603
Inventory	4,638	'	4,638	'	4,391
Total segment assets	9,481	'	9,481	'	9,994
Operating Segments [Member] | Europe Region Sales & Service Operations [Member]	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	60	24	87	137	'
Depreciation and amortization	85	86	260	260	'
Accounts receivable	7,711	'	7,711	'	6,538
Inventory	3,697	'	3,697	'	4,254
Total segment assets	11,408	'	11,408	'	10,792
Operating Segments [Member] | Asia Region Sales & Service Operations [Member]	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	307	239	560	435	'
Depreciation and amortization	295	294	874	876	'
Accounts receivable	36,800	'	36,800	'	44,207
Inventory	27,612	'	27,612	'	25,094
Total segment assets	64,412	'	64,412	'	69,301
Corporate, Eliminations and Other [Member]	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'
Capital expenditures	378	513	1,610	1,718	'
Depreciation and amortization	700	685	2,012	1,837	'
Accounts receivable	41,083	'	41,083	'	39,629
Inventory	-7,326	'	-7,326	'	-8,834
Total segment assets	$33,757	'	$33,757	'	$30,795

Business_Segment_Geographic_Ar6

Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) (USD $)	Sep. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Segment Reporting Information [Line Items]	'	'
Total assets	$1,217,368	$1,213,018
Other current assets	28,735	16,715
Property, plant and equipment, net	73,642	77,536
Other assets	30,165	31,847
Reconciliation of Segment Assets to Consolidated Assets [Member]	'	'
Segment Reporting Information [Line Items]	'	'
Total assets	260,220	259,471
Cash and cash equivalents and investments	570,247	650,022
Other current assets	41,157	30,143
Property, plant and equipment, net	73,642	77,536
Goodwill and intangible assets, net	241,937	163,999
Other assets	$30,165	$31,847

Business_Segment_Geographic_Ar7

Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	$186,798	$166,453	$577,848	$465,026
Instruments, Control and Vacuum Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	93,027	78,713	284,934	238,317
Power and Reactive Gas Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	79,228	72,471	249,190	182,294
Analytical Solutions Group Products [Member]	'	'	'	'
Revenue from External Customer [Line Items]	'	'	'	'
Net sales from product groups	$14,543	$15,269	$43,724	$44,415

Business_Segment_Geographic_Ar8

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Net Revenues and Long-Lived Assets by Geographic Regions (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013	Dec. 31, 2013
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	$186,798	$166,453	$577,848	$465,026	'
Long-lived assets	75,654	'	75,654	'	79,659
United States [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	107,583	91,286	332,892	252,704	'
Long-lived assets	57,560	'	57,560	'	60,700
Korea [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	20,540	19,012	70,806	52,224	'
Japan [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	14,798	13,825	46,141	40,243	'
Asia (excluding Korea and Japan) [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	22,539	21,897	68,304	61,897	'
Long-lived assets	12,019	'	12,019	'	13,475
Europe [Member]	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'
Net revenues	21,338	20,433	59,705	57,958	'
Long-lived assets	$6,075	'	$6,075	'	$5,484

Business_Segment_Geographic_Ar9

Business Segment, Geographic Area, Product and Significant Customer Information - Customers with Net Revenues Greater than 10% of Total Net Revenues (Detail) (Sales Revenue, Net [Member])	3 Months Ended		9 Months Ended
	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Customer A [Member]	'	'	'	'
Revenue, Major Customer [Line Items]	'	'	'	'
Percentage of total net revenues	19.50%	16.40%	19.60%	16.70%
Customer B [Member]	'	'	'	'
Revenue, Major Customer [Line Items]	'	'	'	'
Percentage of total net revenues	11.20%	13.50%	12.70%	11.80%

Restructuring_Additional_Infor

Restructuring - Additional Information (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
			Facility
			People
Reorganizations [Abstract]	'	'	'	'
Restructuring charges	$1,223	$1,126	$1,970	$1,364
Approximate number of workforce reduction from the company's headcount	'	'	111	'
Number of facilities closing	'	'	1	'
Proceeds from sale of building, net of commissions	$1,316	'	'	'

Restructuring_Schedule_of_Comp

Restructuring - Schedule of Company's Restructuring Activity (Detail) (USD $)	3 Months Ended		9 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2014	Sep. 30, 2013	Sep. 30, 2014	Sep. 30, 2013
Restructuring and Related Activities [Abstract]	'	'	'	'
Balance at December 31	'	'	'	'
Charged to expense	1,223	1,126	1,970	1,364
Payments	'	'	-1,580	'
Balance at September 30	$390	'	$390	'