EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
Beijing Newport Spectra-Physics Technologies Co., Ltd. | China | |||
FEMTOLASERS Produktions GmbH | Austria | |||
Femtolasers, Inc. | Delaware | |||
High Q Laser GmbH | Austria | |||
Hilger Analytical Limited | United Kingdom | |||
Micro-Controle Spectra-Physics S.A.S. | France | |||
MKS Denmark ApS | Denmark | |||
MKS German Holding GmbH | Germany | |||
MKS Instruments (China) Company Limited | China | |||
MKS Instruments (Hong Kong) Limited | Hong Kong | |||
MKS Instruments (Shanghai) Limited | China | |||
MKS Instruments (Singapore) Pte. Ltd. | Singapore | |||
MKS Instruments AB | Sweden | |||
MKS Instruments Deutschland GmbH | Germany | |||
MKS Instruments Holdings Ltd | United Kingdom | |||
MKS Instruments Israel Ltd. | Israel | |||
MKS Instruments Italy S.r.l. | Italy | |||
MKS Instruments UK Limited | United Kingdom | |||
MKS International Holdings Limited | United Kingdom | |||
MKS Japan, Inc. | Japan | |||
MKS Korea Ltd. | Korea | |||
MKS Luxembourg S.a.r.l. | Luxembourg | |||
MKS Taiwan Technology Limited | Taiwan | |||
Newport Corporation | Nevada | |||
Newport Corporation (Barbados) SRL | Barbados | |||
Newport Domestic International Sales Corporation | California | |||
Newport European Distribution Company | California | |||
Newport Government Systems, Inc. | California | |||
Newport Instruments Canada Corporation | California | |||
Newport Laser Holding GmbH | Austria | |||
Newport Ophir Holdings Ltd. | Israel | |||
Newport Opto-Electronics Technologies (Korea), LLC | Korea | |||
Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore | |||
Newport Opto-Electronics Technologies (Wuxi) Company Limited | China | |||
Newport Spectra-Physics BV | Netherlands | |||
Newport Spectra-Physics GmbH | Germany | |||
Newport Spectra-Physics Limited | United Kingdom | |||
Ophir Holdings, LLC | Massachusetts | |||
Ophir Japan Ltd. | Japan | |||
Ophir Optics Europe GmbH | Switzerland | |||
Ophir Optics SRL | Romania | |||
Ophir Optronics GmbH | Germany | |||
Ophir Optronics Ltd. | Israel | |||
Ophir Optronics Solutions Ltd. | Israel | |||
Ophir Spiricon Europe GmbH | Germany | |||
Ophir-Spiricon, LLC | Utah | |||
Optical Metrology Ltd. | Israel | |||
Spectra-Physics, K.K. | Japan | |||
Telvac Engineering Limited | United Kingdom | |||
VGen Technology (Shenzhen) Ltd. | China | |||
V-Gen Ltd. | Israel |