| Cover | 12 Months Ended |
| Dec. 31, 2022 | |
| Document Information [Line Items] | |
| Document Type | DEF 14A |
| Amendment Flag | false |
| Entity Information [Line Items] | |
| Entity Registrant Name | MKS Instruments, Inc. |
| Entity Central Index Key | 0001049502 |
| Pay vs Performance Disclosure Unit_pure in Millions | 12 Months Ended | ||
| Dec. 31, 2022 USD ($) | Dec. 31, 2021 USD ($) | Dec. 31, 2020 USD ($) | |
| Pay vs Performance Disclosure [Table] | |||
| Pay vs Performance [Table Text Block] | Pay Versus Performance Tabular Disclosure of Compensation Actually Paid versus Performance The following table discloses information on “compensation actually paid,” or CAP, to our principal executive officers, or PEOs, and, the average CAP, to our other Named Executive Officers, or non-PEO Summary CAP to PEO(2) Average Non-PEO Average CAP Non-PEO Value of Initial Net ($ millions) Adjusted ($ millions)(6) Year Lee Colella Lee Colella TSR Peer 2022 $ 8,148,398 N/A $ 3,494,929 N/A $ 2,063,860 $ 759,709 $ 78.58 $ 125.15 $ 333 $ 854 2021 $ 7,638,355 N/A $ 11,383,747 N/A $ 2,320,658 $ 3,336,104 $ 160.26 $ 160.00 $ 551 $ 868 2020 $ 6,127,026 $ 423,777 $ 8,922,167 $ 838,753 $ 2,284,429 $ 3,494,613 $ 137.71 $ 123.86 $ 350 $ 601 (1) These amounts reflect the total compensation of Dr. Lee for the previous three years and the total compensation of Mr. Colella for 2020, each as calculated in accordance with the requirements of Item 402(c) of Regulation S-K, (2) These amounts reflect CAP for Dr. Lee for the previous three years and for Mr. Colella for 2020, each as calculated in accordance with Item 402(v) of Regulation, S-K, 2022 2021 2020 Adjustment Lee Lee Lee Colella Total Compensation from Summary Compensation Table $ 8,148,398 $ 7,638,355 $ 6,127,026 $ 423,777 Less Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year $ (6,000,000 ) $ (4,520,000 ) $ (3,250,000 ) $ (200,000 ) Plus Fair Value of Covered Year Equity Awards Unvested at Fiscal Year-End $ 5,503,956 $ 7,086,150 $ 5,333,199 $ 299,195 Change in Fair Value of Prior Years’ Equity Awards Unvested at Fiscal Year-End $ (3,482,934 ) $ 698,646 $ 651,261 - Change in Fair Value of Prior Years’ Equity Awards Vested in the Covered Year $(674,491 ) $ 480,596 $ 60,681 $ 315,781 Compensation Actually Paid $ 3,494,929 $ 11,383,747 $ 8,922,167 $ 838,753 (3) Reflects the average total compensation of Mr. Bagshaw, Ms. Burke, Mr. Henry, and Mr. Schreiner for 2022, the average total compensation of Mr. Bagshaw, Ms. Burke, Dr. Gitin, and Mr. Schreiner for 2021, and the average total compensation of Mr. Bagshaw, Ms. Burke, and Mr. Schreiner for 2020, each as calculated in accordance with the requirements of Item 402(c). (4) These amounts reflect the average CAP for our non-PEO non-PEO Adjustment 2022 2021 2020 Non-PEO Non-PEO Non-PEO Average Total Compensation from Summary Compensation Table $ 2,063,860 $ 2,320,658 $ 2,284,429 Less Average Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year $ (1,150,000 ) $ (1,030,000 ) $ (1,025,000 ) Plus Average Fair Value of Covered Year Equity Awards Unvested at Fiscal Year-End $ 1,025,706 $ 1,577,301 $ 1,672,797 Change in Average Fair Value of Prior Years’ Equity Awards Unvested at Fiscal Year-End $ (805,502 ) $ 305,120 $ 526,229 Change in Average Fair Value of Prior Years’ Equity Awards Vested in the Covered Year $ (374,355 ) $ 163,025 $ 36,158 Average Compensation Actually Paid $ 759,709 $ 3,336,104 $ 3,494,613 (5) Peer Group TSR represents TSR for the S&P 1500 Composite Electronic Equipment Instruments & Components Index, which is the industry peer group used for purposes of Item 201(e) of Regulation S-K. (6) We selected this measure as the most important in linking 2022 NEO CAP to Company performance because long-term equity incentive compensation comprises the largest percentage of total NEO compensation and Adjusted EBITDA is the financial measure we use to determine achievement under our long-term performance-based equity compensation awards. Adjusted EBITDA is defined as the Company’s GAAP operating income, excluding any charges or income not related to the operating performance of the Company, plus depreciation and stock compensation expense. For 2022, Adjusted EBITDA excludes the results of Atotech, which we acquired in August 2022. For 2021, Adjusted EBITDA excludes the results of Photon Control, which we acquired in July 2021. For further information regarding Adjusted EBITDA and its function in our executive compensation program, please see “Executive Compensation — Compensation Discussion and Analysis — Elements of Compensation — Long-Term Equity Incentive Compensation” above. | ||
| Company Selected Measure Name | Adjusted EBITDA | ||
| Named Executive Officers, Footnote [Text Block] | Reflects the average total compensation of Mr. Bagshaw, Ms. Burke, Mr. Henry, and Mr. Schreiner for 2022, the average total compensation of Mr. Bagshaw, Ms. Burke, Dr. Gitin, and Mr. Schreiner for 2021, and the average total compensation of Mr. Bagshaw, Ms. Burke, and Mr. Schreiner for 2020, each as calculated in accordance with the requirements of Item 402(c). | ||
| Peer Group Issuers, Footnote [Text Block] | Peer Group TSR represents TSR for the S&P 1500 Composite Electronic Equipment Instruments & Components Index, which is the industry peer group used for purposes of Item 201(e) of Regulation S-K. | ||
| Adjustment To PEO Compensation, Footnote [Text Block] | (2) These amounts reflect CAP for Dr. Lee for the previous three years and for Mr. Colella for 2020, each as calculated in accordance with Item 402(v) of Regulation, S-K, 2022 2021 2020 Adjustment Lee Lee Lee Colella Total Compensation from Summary Compensation Table $ 8,148,398 $ 7,638,355 $ 6,127,026 $ 423,777 Less Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year $ (6,000,000 ) $ (4,520,000 ) $ (3,250,000 ) $ (200,000 ) Plus Fair Value of Covered Year Equity Awards Unvested at Fiscal Year-End $ 5,503,956 $ 7,086,150 $ 5,333,199 $ 299,195 Change in Fair Value of Prior Years’ Equity Awards Unvested at Fiscal Year-End $ (3,482,934 ) $ 698,646 $ 651,261 - Change in Fair Value of Prior Years’ Equity Awards Vested in the Covered Year $(674,491 ) $ 480,596 $ 60,681 $ 315,781 Compensation Actually Paid $ 3,494,929 $ 11,383,747 $ 8,922,167 $ 838,753 | ||
| Non-PEO NEO Average Total Compensation Amount | $ 2,063,860 | $ 2,320,658 | $ 2,284,429 |
| Non-PEO NEO Average Compensation Actually Paid Amount | $ 759,709 | 3,336,104 | 3,494,613 |
| Adjustment to Non-PEO NEO Compensation Footnote [Text Block] | (4) These amounts reflect the average CAP for our non-PEO non-PEO Adjustment 2022 2021 2020 Non-PEO Non-PEO Non-PEO Average Total Compensation from Summary Compensation Table $ 2,063,860 $ 2,320,658 $ 2,284,429 Less Average Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year $ (1,150,000 ) $ (1,030,000 ) $ (1,025,000 ) Plus Average Fair Value of Covered Year Equity Awards Unvested at Fiscal Year-End $ 1,025,706 $ 1,577,301 $ 1,672,797 Change in Average Fair Value of Prior Years’ Equity Awards Unvested at Fiscal Year-End $ (805,502 ) $ 305,120 $ 526,229 Change in Average Fair Value of Prior Years’ Equity Awards Vested in the Covered Year $ (374,355 ) $ 163,025 $ 36,158 Average Compensation Actually Paid $ 759,709 $ 3,336,104 $ 3,494,613 | ||
| Compensation Actually Paid vs. Total Shareholder Return [Text Block] | |||
| Compensation Actually Paid vs. Net Income [Text Block] | |||
| Compensation Actually Paid vs. Company Selected Measure [Text Block] | |||
| Total Shareholder Return Vs Peer Group [Text Block] | |||
| Tabular List [Table Text Block] | Tabular Disclosure of Most Important Measures Linking Compensation Actually Paid During 2022 to Company Performance We disclose below the most important measures we use to link 2022 NEO CAP to Company performance. Named Executive Officers’ performance-based equity compensation is determined based on achievement of Adjusted EBITDA at different revenue levels. Named Executive Officers’ variable cash compensation is determined based on achievement of non-GAAP non-GAAP 2022 Most Important Measures Adjusted EBITDA Non-GAAP Annualized Cost Savings Revenue | ||
| Total Shareholder Return Amount | $ 78.58 | 160.26 | 137.71 |
| Peer Group Total Shareholder Return Amount | 125.15 | 160 | 123.86 |
| Net Income (Loss) | $ 333,000,000 | $ 551,000,000 | $ 350,000,000 |
| Company Selected Measure Amount | 854 | 868 | 601 |
| PEO Name | Dr. Lee | Mr. Colella | |
| Measure [Axis]: 1 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Adjusted EBITDA | ||
| Non-GAAP Measure Description [Text Block] | (6) We selected this measure as the most important in linking 2022 NEO CAP to Company performance because long-term equity incentive compensation comprises the largest percentage of total NEO compensation and Adjusted EBITDA is the financial measure we use to determine achievement under our long-term performance-based equity compensation awards. Adjusted EBITDA is defined as the Company’s GAAP operating income, excluding any charges or income not related to the operating performance of the Company, plus depreciation and stock compensation expense. For 2022, Adjusted EBITDA excludes the results of Atotech, which we acquired in August 2022. For 2021, Adjusted EBITDA excludes the results of Photon Control, which we acquired in July 2021. For further information regarding Adjusted EBITDA and its function in our executive compensation program, please see “Executive Compensation — Compensation Discussion and Analysis — Elements of Compensation — Long-Term Equity Incentive Compensation” above. | ||
| Measure [Axis]: 2 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Non-GAAP Operating Income | ||
| Measure [Axis]: 3 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Annualized Cost Savings | ||
| Measure [Axis]: 4 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Revenue | ||
| Lee [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| PEO Total Compensation Amount | $ 8,148,398 | $ 7,638,355 | $ 6,127,026 |
| PEO Actually Paid Compensation Amount | 3,494,929 | 11,383,747 | 8,922,167 |
| Colella [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| PEO Total Compensation Amount | 423,777 | ||
| PEO Actually Paid Compensation Amount | 838,753 | ||
| PEO [Member] | Lee [Member] | Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (6,000,000) | (4,520,000) | (3,250,000) |
| PEO [Member] | Lee [Member] | Fair Value of Covered Year Equity Awards Unvested at Fiscal Year End [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 5,503,956 | 7,086,150 | 5,333,199 |
| PEO [Member] | Lee [Member] | Change in Fair Value of Prior Years Equity Awards Unvested at Fiscal Year End [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (3,482,934) | 698,646 | 651,261 |
| PEO [Member] | Lee [Member] | Change in Fair Value of Prior Years Equity Awards Vested in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (674,491) | 480,596 | 60,681 |
| PEO [Member] | Colella [Member] | Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (200,000) | ||
| PEO [Member] | Colella [Member] | Fair Value of Covered Year Equity Awards Unvested at Fiscal Year End [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 299,195 | ||
| PEO [Member] | Colella [Member] | Change in Fair Value of Prior Years Equity Awards Vested in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 315,781 | ||
| Non-PEO NEO [Member] | Fair Value of Equity Awards Reported in the Summary Compensation Table in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (1,150,000) | (1,030,000) | (1,025,000) |
| Non-PEO NEO [Member] | Fair Value of Covered Year Equity Awards Unvested at Fiscal Year End [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 1,025,706 | 1,577,301 | 1,672,797 |
| Non-PEO NEO [Member] | Change in Fair Value of Prior Years Equity Awards Unvested at Fiscal Year End [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (805,502) | 305,120 | 526,229 |
| Non-PEO NEO [Member] | Change in Fair Value of Prior Years Equity Awards Vested in the Covered Year [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | $ (374,355) | $ 163,025 | $ 36,158 |
