MKS Instruments (MKSI) 8-K Entry into a Material Definitive Agreement

Summary of 2006 Compensatory Arrangements with Executive Officers

John R. Bertucci	$	450,000
Executive Chairman
Leo Berlinghieri	$	450,000
President and Chief Executive Officer
Gerald G. Colella	$	313,216
Chief Business Officer and Vice President
Ron Hadar	$	235,018
Vice President and General Manager, CIT Products
Robert L. Klimm	$	230,759

Vice President and General Manager, Power and Reactive Gas Products Group

Frank Schneider	$	225,000
Vice President and General Manager, Ion Systems
John A. Smith	$	270,657
Vice President and Chief Technology Officer
William D. Stewart	$	244,550
Vice President and General Manager, Vacuum Products Group
Ronald C. Weigner	$	250,092

Vice President and Chief Financial Officer