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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-143366, 333-38858 and 333-67297) of AXT, Inc. of our reports dated March 19, 2010 relating to the consolidated financial statements, which appear in this Form 10-K.
/s/ Burr Pilger Mayer, Inc.
San Jose, California
March 19, 2010