Rudolph 10-K 27 Feb 14 2013 FY Annual report Financial data

Document_and_Entity_Informatio

Document and Entity Information Document (USD $)	12 Months Ended
	Dec. 31, 2013	Feb. 06, 2014	Jun. 30, 2013
Document Information [Abstract]	'	'	'
Entity Registrant Name	'RUDOLPH TECHNOLOGIES INC	'	'
Entity Central Index Key	'0001094392	'	'
Current Fiscal Year End Date	'--12-31	'	'
Entity Filer Category	'Accelerated Filer	'	'
Document Type	'10-K	'	'
Document Period End Date	31-Dec-13	'	'
Document Fiscal Year Focus	'2013	'	'
Document Fiscal Period Focus	'FY	'	'
Amendment Flag	'false	'	'
Entity Common Stock, Shares Outstanding	'	32,954,404	'
Entity Well-known Seasoned Issuer	'No	'	'
Entity Voluntary Filers	'No	'	'
Entity Current Reporting Status	'Yes	'	'
Entity Public Float	'	'	$350,859,510

Statement_of_Financial_Positio

Statement of Financial Position (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Cash and Cash Equivalents, at Carrying Value	$80,790	$104,253
Marketable Securities, Current	86,582	64,963
Accounts Receivable, less allowance of $606 in 2012 and $1,152 in 2013	53,437	57,113
Inventory, Net	61,351	57,948
Income Taxes Receivable	2,832	0
Prepaid Expense and Other Assets	3,186	4,301
Assets, Current	288,178	288,578
Property, Plant and Equipment, Net	13,058	11,909
Goodwill	22,553	15,361
Intangible Assets, Net (Excluding Goodwill)	11,464	12,358
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	34,332	34,284
Other Assets, Noncurrent	1,777	2,094
Assets	371,362	364,584
Accounts Payable, Current	3,095	3,932
Employee-related Liabilities, Current	7,457	8,975
Accrued Royalties	669	765
Product Warranty Accrual, Current	1,551	2,024
Taxes Payable, Current	0	1,823
Deferred Revenue	8,786	11,170
Other Liabilities, Current	10,132	8,359
Liabilities, Current	31,690	37,048
Convertible Debt, Noncurrent	51,751	49,010
Other Liabilities, Noncurrent	8,918	8,037
Liabilities	92,359	94,095
Preferred stock issued and outstanding	0	0
Common Stock, Value, Issued	33	32
Additional Paid in Capital, Common Stock	415,739	409,974
Accumulated Other Comprehensive Income (Loss), Net of Tax	-1,795	-1,085
Retained Earnings (Accumulated Deficit)	-134,974	-138,432
Stockholders' Equity Attributable to Parent	279,003	270,489
Liabilities and Equity	$371,362	$364,584

Statement_of_Financial_Positio1

Statement of Financial Position B/S Parathetical (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, except Share data, unless otherwise specified
Allowance for Doubtful Accounts Receivable, Current	$1,152	$606
Preferred Stock, Par or Stated Value Per Share	$0.00	$0.00
Preferred Stock, Shares Authorized	5,000	5,000
Preferred Stock, Shares Issued	0	0
Preferred Stock, Shares Outstanding	0	0
Common Stock, Par or Stated Value Per Share	$0.00	$0.00
Common Stock, Shares Authorized	100,000	50,000
Common Stock, Shares, Issued	32,953	32,367
Common Stock, Shares, Outstanding	32,953	32,367

Statement_of_Income

Statement of Income (USD $)	12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Consolidated Statements of Operations [Abstract]	'	'	'
Revenues	$176,238	$218,486	$187,196
Cost of Revenue	85,506	102,811	86,843
Gross Profit	90,732	115,675	100,353
Research and Development Expense	39,994	39,331	36,298
Selling, General and Administrative Expense	41,542	40,225	40,826
Amortization of Intangible Assets	2,592	1,853	1,757
Operating Expenses	84,128	81,409	78,881
Operating Income (Loss)	6,604	34,266	21,472
Interest Income (Expense), Net	5,079	4,377	1,925
Other Nonoperating Income (Expense)	-8	482	-847
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	1,533	29,407	20,394
Income Tax Expense (Benefit)	-1,925	-14,458	-4,832
Net Income (Loss) Attributable to Parent	$3,458	$43,865	$25,226
Earnings Per Share, Basic	$0.11	$1.36	$0.79
Earnings Per Share, Diluted	$0.10	$1.34	$0.78
Weighted Average Number of Shares Outstanding, Basic	32,783	32,226	31,744
Weighted Average Number of Shares Outstanding, Diluted	33,388	32,853	32,256

Statement_of_Comprehensive_Inc

Statement of Comprehensive Income (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Net Income (Loss) Attributable to Parent	$3,458	$43,865	$25,226
Other Comprehensive Income (Loss), Unrealized Holding Gain (Loss) on Securities Arising During Period, Net of Tax	-50	-17	151
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	-660	394	-683
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$2,748	$44,242	$24,694

Statement_of_Shareholders_Equi

Statement of Shareholders' Equity (USD $)

12 Months Ended

12 Months Ended

12 Months Ended

In Thousands, unless otherwise specified

Dec. 31, 2013

Dec. 31, 2012

Dec. 31, 2011

Dec. 31, 2013

Dec. 31, 2012

Dec. 31, 2011

Dec. 31, 2010

Dec. 31, 2013

Dec. 31, 2012

Dec. 31, 2011

Dec. 31, 2010

Dec. 31, 2013

Dec. 31, 2012

Dec. 31, 2011

Dec. 31, 2013

Dec. 31, 2012

Dec. 31, 2011

Dec. 31, 2010

Common Stock [Member]

Common Stock [Member]

Common Stock [Member]

Common Stock [Member]

Additional Paid-in Capital [Member]

Additional Paid-in Capital [Member]

Additional Paid-in Capital [Member]

Additional Paid-in Capital [Member]

Accumulated Other Comprehensive Income (Loss) [Member]

Accumulated Other Comprehensive Income (Loss) [Member]

Accumulated Other Comprehensive Income (Loss) [Member]

Retained Earnings [Member]

Retained Earnings [Member]

Retained Earnings [Member]

Retained Earnings [Member]

Shares, Issued

'

'

'

32,953

32,367

31,883

31,417

'

'

'

'

'

'

'

'

'

'

'

Stockholders' Equity Attributable to Parent

$279,003

$270,489

$221,778

$33

$32

$32

$31

$415,739

$409,974

$405,505

$393,456

($1,795)

($1,085)

($1,462)

($134,974)

($138,432)

($182,297)

($207,523)

Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures

'

'

'

586

484

466

'

'

'

'

'

'

'

'

'

'

'

'

Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures

1,012

257

257

1

0

1

'

1,011

257

256

'

0

0

0

0

0

0

'

Net Income (Loss) Attributable to Parent

3,458

43,865

25,226

'

'

'

'

'

'

'

'

'

'

'

3,458

43,865

25,226

'

Share-based Compensation

4,106

4,001

4,802

'

'

'

'

4,106

4,001

4,802

'

'

'

'

'

'

'

'

Employee Service Share-based Compensation, Tax Benefit from Compensation Expense

648

211

528

'

'

'

'

648

211

528

'

'

'

'

'

'

'

'

Issuance of Convertible Note

'

'

'

'

'

'

'

'

'

13,963

'

'

'

'

'

'

'

'

Adjustments to Additional Paid in Capital, Warrant Issued

'

'

'

'

'

'

'

'

'

7,007

'

'

'

'

'

'

'

'

Purchase of convertible note hedge

'

'

'

'

'

'

'

'

'

-14,507

'

'

'

'

'

'

'

'

Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent

-660

394

-683

'

'

'

'

'

'

'

'

-660

394

-683

'

'

'

'

Unrealized Gain (Loss) on Investments

($50)

($17)

$151

'

'

'

'

'

'

'

'

($50)

($17)

$151

'

'

'

'

Statement_of_Cash_Flows

Statement of Cash Flows (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Net Cash Provided by (Used in) Operating Activities [Abstract]	'	'	'
Net Income (Loss) Attributable to Parent	$3,458	$43,865	$25,226
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]	'	'	'
Amortization	2,786	2,212	2,113
Amortization of Financing Costs and Discounts	3,044	2,736	1,129
Depreciation	4,150	3,680	4,210
Foreign Currency Transaction Gain (Loss), before Tax	-8	482	-846
Increase (Decrease) in Marketable Securities, Restricted	0	0	-1
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	138	0	0
Share-based Compensation	4,106	4,001	4,802
Provision for doubtful accounts and inventory valuation	3,608	3,263	1,278
Increase (Decrease) in Deferred Income Taxes	-1,510	-20,814	-9,018
Increase (Decrease) in Accounts Receivable	2,631	-14,743	17,958
Increase (Decrease) in Income Taxes Receivable	-4,605	3,547	-529
Increase (Decrease) in Inventories	-6,758	-6,701	-35
Increase (Decrease) in Prepaid Expense and Other Assets	1,383	-1,365	-4,389
Increase (Decrease) in Accounts Payable	-912	-2,735	-3,427
Increase (Decrease) in Deferred Revenue	-2,393	3,648	-1,330
Increase (Decrease) in Other Operating Liabilities	-3,034	991	8,303
Net Cash Provided by (Used in) Operating Activities	6,084	22,067	45,444
Payments to Acquire Marketable Securities	-119,068	-96,309	-81,004
Proceeds from Sale and Maturity of Marketable Securities	97,289	102,384	11,418
Payments to Acquire Property, Plant, and Equipment	-4,880	-2,429	-1,622
Payments to Acquire Businesses, Net of Cash Acquired	-3,365	-18,580	0
Net Cash Provided by (Used in) Investing Activities	-30,024	-14,934	-71,208
Proceeds from Convertible Debt	0	0	57,749
Proceeds from Issuance of Warrants	0	0	7,007
Payments for (Proceeds from) Derivative Instrument, Financing Activities	0	0	-14,507
Proceeds from (Payments for) Other Financing Activities	-224	0	0
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	1,012	257	257
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	648	211	528
Net Cash Provided by (Used in) Financing Activities	1,436	468	51,034
Effect of Exchange Rate on Cash and Cash Equivalents	-959	-19	281
Cash and Cash Equivalents, Period Increase (Decrease)	-23,463	7,582	25,551
Cash and Cash Equivalents, at Carrying Value	80,790	104,253	96,671
Income Taxes Paid	5,492	2,402	2,454
Interest Paid	$2,250	$2,188	$0

Organization_and_Nature_of_Ope

Organization and Nature of Operations	12 Months Ended
	Dec. 31, 2013
Organization and Nature of Operations: [Abstract]	'
Nature of Operations [Text Block]	'
	Organization and Nature of Operations:
	Rudolph Technologies, Inc. and Subsidiaries (the “Company”) designs, develops, manufactures and supports high-performance process control defect inspection, advanced packaging lithography, metrology and process control software systems used in semiconductor device manufacturing. The Company has branch sales and service offices in South Korea, Taiwan and Singapore and wholly-owned sales and service subsidiaries in the United States, Europe, Japan and China. The Company operates in a single segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities.

Summary_of_Significant_Account

Summary of Significant Accounting Policies	12 Months Ended
	Dec. 31, 2013
Summary of Significant Accounting Policies [Abstract]	'
Significant Accounting Policies [Text Block]	'
	Summary of Significant Accounting Policies:
	A. Consolidation:
	The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated.
	B. Revenue Recognition:
	Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions which have occurred prior to January 1, 2011, revenue for arrangements with multiple elements, such as sales of products that include software and services, was allocated to each element using the residual method based on the fair value of the undelivered items as determined using the prior guidance for revenue arrangements with multiple deliverables. Under the residual method, the amount of revenue allocated to delivered elements equals the total arrangement consideration less the aggregate fair value of any undelivered elements; (4) for transactions occurring on or after January 1, 2011 containing multiple elements, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies.
	Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized.
	Revenue from software license fees is recognized upon shipment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period.
	C. Estimates:
	The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, purchase accounting allocations (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates.
	D. Cash and Cash Equivalents:
	Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased.
	E. Marketable Securities:
	The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities.
	For additional information on the Company’s marketable securities, see Note 5 of Notes to the Consolidated Financial Statements.
	F. Allowance for Doubtful Accounts:
	The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience.
	G. Inventories:
	Inventories are stated at the lower of cost (first-in, first-out) or market. Cost includes material, labor and overhead costs. Demonstration units, which are available for sale, are stated at their manufacturing costs and reserves are recorded to adjust the demonstration units to their net realizable value, if lower than cost.
	H. Property, Plant and Equipment:
	Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are thirty years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized.
	I. Impairment of Long-Lived Assets:
	Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows.
	J. Goodwill and Intangible Assets:
	Intangible assets with definitive useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. Under the amendments of ASC 350-10, ASU No. 2011-08, Testing Goodwill for Impairment, beginning in the first quarter of 2012, the Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of a reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its aggregated reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2013. No impairments were noted.
	For additional information on the Company’s goodwill and purchased intangible assets, see Note 6 of Notes to the Consolidated Financial Statements.
	K. Concentration of Credit Risk:
	Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer.
	L. Warranties:
	The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized.
	M. Income Taxes:
	The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings.
	The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current unless the liability is expected to be settled in cash within 12 months of the reporting date.
	For additional information on the Company’s income taxes, see Note 13 of Notes to the Consolidated Financial Statements.
	N. Translation of Foreign Currencies:
	The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. These foreign branches and subsidiaries are limited in their operations and level of investment so that the risk of currency fluctuations is not material. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales.
	Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $985 and $1,645 as of December 31, 2012 and 2013, respectively.
	O. Share-based Compensation:
	The fair value of stock options is determined using the Black-Scholes valuation model. The Black-Scholes valuation calculation requires the Company to estimate key assumptions such as future stock price volatility, expected terms, risk-free interest rates and dividend yield. Expected stock price volatility is based on historical volatility of the Company’s stock. The Company uses historical data to estimate option exercises and employee terminations within the valuation model. The expected term of options granted is derived from an analysis of historical exercises and remaining contractual life of stock options, and represents the period of time that options granted are expected to be outstanding. The risk-free interest rate is based on the U.S. Treasury yield curve in effect at the time of grant. The Company has never paid cash dividends, and does not currently intend to pay cash dividends, and thus has assumed a 0% dividend yield. The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method.
	For additional information on the Company’s share-based compensation plans, see Note 11 of Notes to the Consolidated Financial Statements.
	P. Research and Development and Software Development Costs:
	Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2012 and 2013, capitalized software development costs were $201 and $16, respectively. During the years ended December 31, 2011, 2012 and 2013, software development cost amortization totaled $356, $361 and $185, respectively.
	Q. Shipping and Handling Costs:
	Shipping and handling cost are included as a component of cost of revenues.
	R. Fair Value of Financial Instruments:
	The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The carrying amount of our convertible senior notes was $49,010 and $51,751 as of December 31, 2012 and 2013, respectively. The fair value of our convertible senior notes was $51,018 and $59,340 as of December 31, 2012 and 2013, respectively. The Company’s convertible senior notes are not publicly traded. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.
	For additional information on the Company’s fair value of financial instruments, see Note 4 of Notes to the Consolidated Financial Statements.
	S. Derivative Instruments and Hedging Activities:
	The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2012 and 2013, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets.
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2012 and 2013 were as follows:
		December 31,
		2012		2013
	Notional amount	$	3,457	$	1,029
	Fair value of asset	$	268	$	6
	The Company recognized a loss of $256 with respect to forward contracts that matured during 2011. In 2012 and 2013, the Company recognized a gain of $112 and $374 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $2,950, $3,340 and $2,922, for 2011, 2012 and 2013, respectively.
	T. Reclassifications:
	Certain prior year amounts have been reclassified to conform to the 2013 financial statement presentation.
	U. Recent Accounting Pronouncements:
	In July 2013, the Financial Accounting Standards Board (FASB) issued Accounting Standard Update (ASU) No. 2013-11, “Income Taxes (Topic 740): Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exists.” The ASU requires that an unrecognized tax benefit, or a portion of an unrecognized tax benefit, should be presented in the financial statements as a reduction to a deferred tax asset for a net operating loss carryforward, a similar tax loss, or a tax credit carryforward, except as follows. To the extent a net operating loss carryforward, a similar tax loss, or a tax credit carryforward is not available at the reporting date under the tax law of the applicable jurisdiction to settle any additional income taxes that would result from the disallowance of a tax position or the tax law of the applicable jurisdiction does not require the entity to use, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit should be presented in the financial statements as a liability and should not be combined with deferred tax assets. The assessment of whether a deferred tax asset is available is based on the unrecognized tax benefit and deferred tax asset that exist at the reporting date and should be made presuming disallowance of the tax position at the reporting date. This ASU is effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. The adoption of this guidance is reflected in the Company’s consolidated statements of financial position and cash flows.
	In July 2013, the FASB issued ASU No. 2013-10, “Derivatives and Hedging (Topic 815): Inclusion of the Fed Funds Effective Swap Rate (or Overnight Index Swap Rate) as a Benchmark Interest Rate for Hedge Accounting Purposes (a consensus of the FASB Emerging Issues Task Force.” The ASU permits the Fed Funds Effective Swap Rate (OIS) to be used as a U.S. benchmark interest rate for hedge accounting purposes under Topic 850, in addition to UST and LIBOR. The amendments also remove the restriction on using different benchmark rates for similar hedges. This ASU is effective prospectively for qualifying new or redesignated hedging relationships entered into on or after July 17, 2013. The Company does not believe that this guidance will have a material impact on its consolidated financial position, results of operations, or cash flows.
	In February 2013, the FASB issued ASU No. 2013-02, “Comprehensive Income (Topic 220): Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income.” The ASU requires an entity to report the effect of significant reclassifications out of accumulated other comprehensive income on the respective line items in net income if the amount being reclassified is required under U.S. GAAP to be reclassified in its entirety to net income. For other amounts that are not required under U.S. GAAP to be reclassified in their entirety to net income in the same reporting period, an entity is required to cross-reference other disclosures required under U.S. GAAP that provide additional detail about those amounts. This ASU is effective prospectively for reporting periods beginning after December 15, 2012. The adoption of this amendment did not have a material impact on the Company’s consolidated financial position, results of operations or cash flows.

Business_Combinations

Business Combinations	12 Months Ended
	Dec. 31, 2013
Business Combinations [Abstract]	'
Business Combination Disclosure [Text Block]	'
	Business Combinations:
	NanoPhotonics
	In June 2012, the Company announced that it had acquired specific assets and liabilities of NanoPhotonics GmbH, located in Mainz, Germany (“NanoPhotonics acquisition”). The acquired business has been integrated into the Company’s inspection technology group.  The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.
	Azores
	In December 2012, the Company announced that it had acquired Azores Corporation, located in Wilmington, Massachusetts (“Azores acquisition”). The acquired business marks the Company’s entry into the advanced packaging and FPD lithography markets. The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.
	Tamar
	In April 2013, the Company announced that it had acquired specific assets of Tamar Technology, located in Newbury Park, California (“Tamar acquisition”). The acquired business has been integrated into the Company’s inspection technology group.  The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.
	The Company recognized provisional assets and liabilities as of the acquisition date for NanoPhotonics, Azores and Tamar. For the period ended December 31, 2013, the Company finalized the identification and measurement of the assets and liabilities for all of these acquisitions. The Company recast its December 31, 2012 balance sheet to reflect measurement period adjustments related to Azores inventory, income taxes and goodwill.

Fair_Value_Measurements

Fair Value Measurements	12 Months Ended
	Dec. 31, 2013
Fair Value Measurements [Abstract]	'
Fair Value Disclosures [Text Block]	'
	Fair Value Measurements:
	The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement.
	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2012 and December 31, 2013:
		Fair Value Measurements Using
		Carrying Value			Quoted Prices in Active Markets for Identical Assets (Level 1)			Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
	December 31, 2012
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds	$	64,117		$	—		$	64,117	$	—
	Corporate bonds	500			—			500		—
	Auction rate securities	346			—			—		346
	Foreign currency forward contracts	268			—			268		—
	Total Assets	$	65,231		$	—		$	64,885	$	346
	December 31, 2013
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds	$	86,305		$	—		$	86,305	$	—
	Auction rate securities	277			—			—		277
	Foreign currency forward contracts	6			—			6		—
	Total Assets	$	86,588		$	—		$	86,311	$	277
	Liabilities:
	Contingent consideration - acquisitions	$	5,208		$	—		$	—	$	5,208
	Total Liabilities	$	5,208		$	—		$	—	$	5,208
	The Company’s investments classified as Level 1 are based on quoted prices that are available in active markets.
	The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class.
	Level 3 investments consist of an auction rate security and contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these investments. The Level 3 assumptions used in preparing the discounted cash flow model included estimates of interest rates of 3.7%, timing and amount of cash flows and expected holding periods of the auction rate security, based on data available as of December 31, 2013. Changes in the unobservable input values would be unlikely to cause material changes in the fair value of the auction rate security. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 6.2% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration.
	This table presents a reconciliation for all assets and liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2013:
		Fair Value Measurements Using Significant Unobservable Inputs (Level 3)
	Assets:
	Balance at December 31, 2012	$	346
	Unrealized gains in accumulated other comprehensive loss	(69		)
	Purchases	—
	Sales, issuances, and settlements	—
	Transfers into (out of) Level 3	—
	Balance at December 31, 2013	$	277
	Liabilities:
	Balance at December 31, 2012	$	—
	Additions	5,294
	Total gain (loss) included in earnings	138
	Payments	(224		)
	Transfer into (out of) Level 3	—
	Balance at December 31, 2013	$	5,208
	See Note 5 for additional discussion regarding the fair value of the Company’s marketable securities.
	Fair Value of Other Financial Instruments
	The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.
	The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value of expected cash flow model incorporating the probabilities of the contingent events occurring.
	The following table reflects information pertaining to the Company’s convertible senior notes:
		December 31,
		2012			2013
	Net carrying value of convertible senior notes	$	49,010		$	51,751
	Estimated fair value of convertible senior notes	$	51,018		$	59,340
	Estimated interest rate used in discounted cash flow model	9.4		%	4.2		%
	Fair value of contingent interest	$	—		$	—

Marketable_Securities

Marketable Securities	12 Months Ended
	Dec. 31, 2013
Marketable Securities [Abstract]	'
Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]	'
	Marketable Securities:
	The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale.  Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.”  Realized gains and losses on available-for-sale securities are included in “Other expense (income).”  The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities.  The cost of securities sold is based on the specific identification method.
	As of December 31, 2013, the Company held one auction-rate security with a fair value of $277. The underlying asset of the Company’s auction-rate security consisted of a municipal bond with an auction reset feature. Due to auction failures in the marketplace, the Company will not have access to these funds unless (a) future auctions occur and are successful, (b) the security is called by the issuer, (c) the Company sells the security in an available secondary market, or (d) the underlying note matures. Currently, there are no active secondary markets. As of December 31, 2013, the Company has recorded a cumulative temporary unrealized impairment loss of $198 within “Accumulated other comprehensive loss” based upon its assessment of the fair value of this security. The Company believes that this impairment is temporary as it does not intend to sell this security, the Company will not be required to sell this security before recovery, and the Company expects to recover the amortized cost basis of these securities.
	The Company has determined that the gross unrealized losses on its marketable securities at December 31, 2012 and 2013 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value.
	At December 31, 2012 and 2013, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains			Gross Unrealized Holding Losses			Fair Value
	December 31, 2012
	Municipal notes and bonds	$	64,088	$	36		$	(7	)	$	64,117
	Corporate Bonds	500		—			—			500
	Auction rate securities	475		—			(129		)	346
	Total marketable securities	$	65,063	$	36		$	(136	)	$	64,963
	December 31, 2013
	Municipal notes and bonds	$	86,257	$	50		$	(2	)	$	86,305
	Auction rate securities	475		—			(198		)	277
	Total marketable securities	$	86,732	$	50		$	(200	)	$	86,582
	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2012 and 2013:
		December 31, 2012					December 31, 2013
		Amortized		Fair			Amortized			Fair
		Cost		Value			Cost			Value
	Due within one year	$	57,367	$	57,390		$	78,909		$	78,948
	Due after one through five years	7,016		7,022			5,811			5,821
	Due after five through ten years	205		205			—			—
	Due after ten years	475		346			2,011			1,813
	Total marketable securities	$	65,063	$	64,963		$	86,731		$	86,582
	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2012 and 2013.
		In Unrealized Loss Position					In Unrealized Loss Position
		For Less Than 12 Months					For Greater Than 12 Months
		Fair		Gross			Fair			Gross
		Value		Unrealized			Value			Unrealized
				Losses						Losses
	December 31, 2012
	Municipal notes and bonds	$	9,037	$	(7	)	$	—		$	—
	Tax-free auction rate securities	—		—			346			(129		)
	Total marketable securities	$	9,037	$	(7	)	$	346		$	(129	)
	December 31, 2013
	Municipal notes and bonds	$	16,448	$	(2	)	$	—		$	—
	Tax-free auction rate securities	—		—			475			(198		)
	Total marketable securities	$	16,448	$	(2	)	$	475		$	(198	)
	See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities.

Goodwill_and_Purchased_Intangi

Goodwill and Purchased Intangible Assets	12 Months Ended
	Dec. 31, 2013
Identifiable Intangible Assets [Abstract]	'
Goodwill and Intangible Assets Disclosure [Text Block]	'
	Goodwill and Purchased Intangible Assets:
	Goodwill
	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2011		$	4,492
	Goodwill acquired during the period		10,756
	Other, primarily currency translation		113
	Balance at December 31, 2012		15,361
	Goodwill acquired during the period		6,989
	Other, primarily currency translation		203
	Balance at December 31, 2013		$	22,553
	Purchased Intangible Assets
	Purchased intangible assets as of December 31, 2012 and 2013 are as follows:
		Gross Carrying Amount			Accumulated Amortization		Net
	December 31, 2012
	Finite-lived intangibles:
	Developed technology	$	58,961		$	49,358	$	9,603
	Customer and distributor relationships	8,712			7,102		1,610
	Trade names	4,361			3,216		1,145
	Total identifiable intangible assets	$	72,034		$	59,676	$	12,358
	December 31, 2013
	Finite-lived intangibles:
	Developed technology	$	59,831		$	51,496	$	8,335
	Customer and distributor relationships	9,560			7,449		2,111
	Trade names	4,361			3,343		1,018
	Total identifiable intangible assets	$	73,752		$	62,288	$	11,464
	Amounts include the impact of foreign currency translation.
	Intangible asset amortization expense amounted to $1,757, $1,853 and $2,592 for the years ended December 31, 2011, 2012 and 2013, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense will be $2,422 for 2014, $2,050 for 2015, $1,941 for 2016, $1,553 for 2017, and $1,117 for 2018.

Balance_Sheet_Details

Balance Sheet Details	12 Months Ended
	Dec. 31, 2013
Balance Sheet Details [Abstract]	'
Balance Sheet Details [Text Block]	'
	Balance Sheet Details:
	Inventories
	Inventories are comprised of the following:
		December 31,
		2012			2013
	Materials	$	29,746		$	31,194
	Work-in-process	12,298			19,867
	Finished goods	15,904			10,290
	Total inventories	$	57,948		$	61,351
	The Company has established reserves of $5,620 and $6,101 at December 31, 2012 and 2013, respectively, for slow moving and obsolete inventory. During 2012, the Company recorded a net charge in cost of revenues of $2,934 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2012, the Company disposed of $5,241 of inventory. During 2013, the Company recorded a net charge in cost of revenues of $2,863 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2013, the Company disposed of $2,382 of inventory.
	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		December 31,
		2012			2013
	Land and building	$	4,997		$	5,024
	Machinery and equipment	18,826			20,827
	Furniture and fixtures	3,381			4,043
	Computer equipment	7,789			5,568
	Leasehold improvements	6,807			7,744
		41,800			43,206
	Accumulated depreciation	(29,891		)	(30,148		)
	Total property, plant and equipment, net	$	11,909		$	13,058
	Depreciation expense amounted to $4,210, $3,680 and $4,150 for the years ended December 31, 2011, 2012, and 2013, respectively.
	Other current liabilities
	Other current liabilities is comprised of the following:
		December 31,
		2012			2013
	Litigation accrual	$	4,293		$	4,293
	Other	4,066			5,839
	Total other current liabilities	$	8,359		$	10,132
	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
		December 31,
		2012			2013
	Unrecognized tax benefits (including interest)	$	5,871		$	2,806
	Contingent consideration - acquisitions	—			4,340
	Other	2,166			1,772
	Total non-current liabilities	$	8,037		$	8,918

Debt_Obligations

Debt Obligations	12 Months Ended
	Dec. 31, 2013
Debt Obligations [Abstract]	'
Debt Disclosure [Text Block]	'
	Debt Obligations:
	On July 25, 2011, the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 (the “Indenture”), between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes pay interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012, at an annual rate of 3.75% and will mature on July 15, 2016, unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant discussed below, were $50,249.
	The following table reflects the net carrying value of the Notes as of December 31, 2012 and 2013:
		December 31,
		2012		2013
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	10,990		8,249
	Net carrying value of convertible senior notes	$	49,010	$	51,751
	The Notes may be converted at any time prior to the close of business on the business day immediately preceding April 15, 2016, at the option of the holder, upon satisfaction of one or more of the following conditions: 1) during any calendar quarter commencing after September 30, 2011, if the last reported sale price of the Company’s common stock for at least 20 trading days (whether or not consecutive) during the period of 30 consecutive trading days ending on the last trading day of the immediately preceding calendar quarter exceeds 130% of the applicable conversion price on each applicable trading day; 2) during the five business day period after any five consecutive trading-day period (the “measurement period”) in which the “trading price” (as defined in the Indenture) per $1 principal amount of the Notes for each trading day of such measurement period was less than 98% of the product of the last reported sale price of the Company’s common stock and the applicable conversion rate on such trading day; or 3) upon the occurrence of specified corporate events. On and after April 15, 2016 until the close of business on the second scheduled trading day immediately preceding the maturity date of July 15, 2016, holders may convert their notes, in multiples of $1 principal amount, regardless of whether any of the foregoing conditions have been met.
	Upon conversion, the Company will deliver to holders in respect of each $1 principal amount of Notes being converted a “settlement amount” equal to the sum of the daily settlement amounts for each of the 40 consecutive trading days during the applicable cash settlement averaging period. The conversion value of each Note will be paid in: 1) cash equal to the principal amount of the Notes to be converted, and 2) to the extent the conversion value exceeds the aggregate principal amount of the Notes being converted, the Company’s common stock in respect of the remainder (plus cash in lieu of any fractional shares of common stock). The conversion rate will be subject to adjustment in certain circumstances but will not be adjusted for any accrued and unpaid interest. Upon a “fundamental change” at any time, as defined in the Indenture, the Company will, under certain circumstances, increase the conversion rate for a holder who elects to convert its Notes in connection with a “make whole fundamental change,” as defined in the Indenture. In addition, the holders may, subject to certain conditions, require the Company to repurchase for cash all or a portion of their Notes upon a “fundamental change” at a price equal to 100% of the principal amount of the Notes being repurchased plus accrued and unpaid interest, if any.
	The Company separately accounts for the liability and equity components of the Notes. The initial debt component of the Notes were valued at $45,493 based on the present value of the future cash flows using a discount rate of 10%, the Company’s assumed borrowing rate at the date of issuance for similar debt instruments without the conversion feature. The equity component was valued at $14,507. Total issuance costs were $2,251, of which $544 was allocated to the equity component and $1,707 was allocated to debt issuance costs and will be amortized to interest expense over the term of the Notes.
	The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2011, 2012 and 2013.
		December 31,
		2011		2012		2013
	Contractual interest coupon	$	999	$	2,251	$	2,250
	Amortization of interest discount	1,031		2,486		2,740
	Amortization of debt issuance costs	98		250		303
	Total interest cost recognized	$	2,128	$	4,987	$	5,293
	The remaining bond discount of the Notes of $8,249, as of December 31, 2013 will be amortized over the remaining life of the Notes.
	Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes (the “Option Counterparty”). The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is initially $17.00 per share. Each of these components is discussed separately below:
	Convertible Note Hedge. The Option Counterparty agreed to sell to the Company up to approximately 4,634 shares of the Company’s common stock, which is the maximum number of shares issuable upon conversion of the Notes, at a price of $12.95 per share. The convertible note hedge transaction will be settled in shares of the Company’s common stock (and cash in lieu of fractional shares) and will expire on the earlier of the “second scheduled trading day” (as defined in the Indenture) prior to the maturity date of the Notes or the last day any of the Notes remain outstanding. Subject to certain terms and conditions, settlement of the convertible note hedge would result in the Company receiving shares of the Company’s common stock equivalent to the number of shares that the Company is obligated to deliver to holders of the Notes upon conversion of the Notes.
	The Company will not be required to make any cash payments to the Option Counterparty or its affiliates upon the exercise of the options that are a part of the convertible note hedge transaction, but will be entitled to receive from the Option Counterparty a number of shares of Company common stock generally based on the amount by which the market price per share of Company common stock, as measured under the terms of the convertible note hedge transaction, is greater than the strike price of the convertible note hedge transaction during the relevant valuation period under the convertible note hedge transaction.
	The convertible note hedge transaction cost of $14,507 has been accounted for as an equity transaction.
	Warrant. The Company received $7,007 from the Option Counterparty from the sale of the warrant to purchase up to approximately 4,634 shares of the Company’s common stock at an exercise price of $17.00 per share. As of December 31, 2013, the warrant had an expected life of 3.0 years and expires between October 13, 2016 and January 9, 2017. As of December 31, 2013, the warrant had not been exercised and remained outstanding. Additionally, if the market price per share of Company common stock, as measured under the terms of the warrant transaction, exceeds the strike price of the warrant during the valuation period at the maturity of the warrant, the Company will owe the Option Counterparty a number of shares of Company common stock in an amount based on the excess of such market price per share of Company common stock over the strike price of the warrant.
	The fair value of the warrant was initially recorded in equity and continues to be classified as equity.
	The convertible note hedge transaction and the warrant transaction are separate transactions entered into by the Company. Holders of the Notes will not have any rights with respect to the convertible note hedge transaction and the warrant transaction.

Commitments_and_Contingencies

Commitments and Contingencies	12 Months Ended
	Dec. 31, 2013
Commitments and Contingencies [Abstract]	'
Commitments and Contingencies Disclosure [Text Block]	'
	Commitments and Contingencies:
	Intellectual Property Indemnification Obligations
	The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees.
	Warranty Reserves
	The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the year-end and warranty accruals are related to sales during the year.
	Changes in the Company’s warranty reserves are as follows:
		Year Ended December 31,
		2011			2012			2013
	Balance, beginning of the year	$	1,654		$	1,406		$	2,024
	Accruals	1,987			2,482			1,956
	Warranty Liability assumed in acquisition	—			225			—
	Usage	(2,235		)	(2,089		)	(2,429		)
	Balance, end of the year	$	1,406		$	2,024		$	1,551
	Letter of Credit
	As of December 31, 2013, the Company had a $40,000 irrevocable standby letter of credit with Credit Suisse AG available to secure the damages assessment in connection with the ITC litigation discussed in Legal Matters below, which the Company is in the process of appealing. The letter of credit contains a provision for automatic renewal each year. Upon draw down of funds, the letter of credit would be collateralized by securities held in the Company’s investment portfolios and reported in the Condensed Consolidated Balance Sheets within the caption “Cash and cash equivalents” and “Marketable securities.” No amounts were outstanding on the letter of credit as of, or during the year ended, December 31, 2013.
	Legal Matters
	From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. As previously disclosed, in December 2007, the Company completed the acquisition of specific assets and liabilities of the semiconductor division of Applied Precision LLC (“Applied”). As a result of the acquisition, the Company assumed certain liabilities of Applied including a lawsuit filed in the United States District Court, District of Arizona, by Integrated Technology Corporation (“ITC”) which alleged Applied’s PrecisionPoint™, PrecisionWoRx® and ProbeWoRx® products infringed an ITC patent (Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182-PHX-ROS). Prior to trial, the District Court ruled that such products sold prior to August of 2007 (the “pre-August 2007 tools”) infringed the ITC patent. At trial in December of 2011, a trial verdict was rendered in which the jury found that while the Company’s products manufactured after August of 2007 (the “post-August 2007 tools”) did not literally infringe ITC’s patent, the products were found to infringe under a rule known as the doctrine of equivalents, a legal principle which expands the language of patent claims to encompass products or processes which may otherwise be found not to literally infringe the patent. The jury awarded $15,475 to ITC in damages for sales made during the years 2000-2011, of which award approximately one-half related to sales for pre-August 2007 tools. The jury found that for the sales of the post-August 2007 tools, the infringement was willful. On July 23, 2012, the District Court issued an Order which affirmed the jury’s award, applied treble damages to the portion of the jury award related to post-August 2007 tool sales and granted ITC’s motion for attorney’s fees and prejudgment interest on the verdict and attorney’s fees. At that time, the District Court also enjoined the Company from future infringement of the ITC patent and from selling or supplying the applicable products with the applicable features from or into the United States. The Company appealed the injunction, the District Court Order and the damages assessment. In October 2012, the injunction was stayed by the U.S. Federal Court of Appeals and thereafter in June of 2013, the patent expired. On November 4, 2013, the U.S. Federal Court of Appeals issued a ruling which reversed the judgment of infringement against all post-August 2007 tools, reversed the finding of willfulness, vacated the treble damages award, vacated the award of attorney’s fees and costs, remanded the issue back to the District Court for further review, and affirmed the award of damages and interest for the pre-August 2007 tools. As a result, the matter is resolved with regard to the alleged infringement of the post-August 2007 tools. With regard to the damages assessment against the pre-August 2007 tools, the Company believes that it has meritorious defenses and shall continue to vigorously prosecute our appeal regarding this issue. However, it is probable that the Company could realize a loss in this matter regarding the pre-August 2007 tools for which the Company has estimated and recorded a liability of approximately $4,293 in “Other liabilities” in the Consolidated Balance Sheets. The maximum liability reasonably possible for the pre-August 2007 products, including damages and interest, is an additional $6,285 plus attorney’s fees beyond the accrual. While the Company continues to believe that its current PrecisionWoRx® and ProbeWoRx® systems do not infringe ITC’s patent, the Company reached an agreement with ITC in October 2012 with regards to a redesign of the products under which ITC agreed that such redesign is permissible under the court’s injunction.
	In the Company’s patent infringement suit against Camtek, Ltd., of Migdal Hamek, Israel, concerning the Company’s proprietary continuous scan wafer inspection technology, the U.S. Federal Court of Appeals issued a ruling on August 22, 2011.  In its opinion, the Appellate Court affirmed multiple rulings from trial at the District Court level including (i) finding the Company’s U.S. Patent No. 6,826,298 valid, (ii) the part of the infringement ruling based on the finding that Camtek’s Falcon product strobes “based on velocity,” and (iii) the dismissal of Camtek’s claim against the Company for inequitable conduct against the U.S. Patent and Trademark Office.  The court did, however, revise one claim construction ruling made by the District Court in the original case.  As a result, the Appellate Court set aside the verdict delivered by the jury for damages and the District Court’s decision to enter an injunction against Camtek’s selling Falcon tools in the U.S. and remanded the case back to the trial court for a limited trial on this single infringement issue.  No trial date has been set for this limited trial.  This lawsuit was initially brought in 2005 by August Technology prior to its merger with the Company.
	Lease Agreements
	The Company rents space for its manufacturing and service operations and sales offices, which expire through 2019. Total rent expense for these facilities amounted to $3,139, $3,134 and $3,794 for the years ended December 31, 2011, 2012 and 2013, respectively.
	The Company also leases certain equipment pursuant to operating leases, which expire through 2018. Rent expense related to these leases amounted to $111, $123 and $171 for the years ended December 31, 2011, 2012 and 2013, respectively.
	Total future minimum lease payments under noncancelable operating leases as of December 31, 2013 amounted to $3,873 for 2014, $3,712 for 2015, $2,682 for 2016, $2,037 for 2017, $1,955 for 2018 and $704 for all periods thereafter.
	Royalty Agreements
	Under various licensing agreements, the Company is obligated to pay royalties based on net sales of products sold. There are no minimum annual royalty payments. Royalty expense amounted to $1,086, $1,165 and $831 for the years ended December 31, 2011, 2012 and 2013, respectively.
	Open and Committed Purchase Orders
	The Company has open and committed purchase orders of $15,678 as of December 31, 2013.
	Debt Obligations
	The Company’s contractual obligation relating to the principal payment of its convertible senior notes totaling $60,000 is due on July 15, 2016.

Preferred_Share_Purchase_Right

Preferred Share Purchase Rights	12 Months Ended
	Dec. 31, 2013
Preferred Share Purchase Rights [Abstract]	'
Preferred Stock [Text Block]	'
	Preferred Share Purchase Rights:
	On June 27, 2005, the Board of Directors of the Company adopted a Stockholder Rights Plan (the “Rights Plan”) and declared a dividend distribution of one Preferred Share Purchase Right (a “Right”) on each outstanding share of Company common stock. Each right entitles stockholders to buy one one-thousandth of a share of newly created Series A Junior Participating Preferred Stock of Rudolph at an exercise price of $120. The Company’s Board of Directors is entitled to redeem the Rights at $0.001 per Right at any time before a person has acquired 15% or more of the outstanding Rudolph common stock.
	Subject to limited exceptions, the Rights will be exercisable if a person or group acquires 15% or more of Rudolph common stock or announces a tender offer for 15% or more of the common stock. Each Right other than Rights held by the acquiring person, which will become void, entitles its holder to purchase a number of common shares of Rudolph having a market value at that time of twice the Right’s exercise price.
	The Rights Plan is scheduled to expire in 2015.

ShareBased_Compensation_and_Em

Share-Based Compensation and Employee Benefit Plans	12 Months Ended
	Dec. 31, 2013
Share-Based Compensation and Employee Benefit Plans [Abstract]	'
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	'
	Share-Based Compensation and Employee Benefit Plans:
	Share-Based Compensation Plans
	The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth of the Company. The Company settles stock option exercises and restricted stock awards with newly issued common shares.
	The Company established the 2009 Stock Plan (the “2009 Plan”) effective November 1, 2009. The 2009 Plan provides for the grant of 3,300 stock options and stock purchase rights to employees, directors and consultants at an exercise price equal to or greater than the fair market value of the common stock on the date of grant. Shares of common stock available for future grants of 753 from a previous stock plan were carried forward into the allocated balance of the 2009 Plan. Options granted under the 2009 Plan typically grade vest over a five-year period and expire ten years from the date of grant. Restricted stock units granted under the 2009 Plan typically vest over a five-year period for employees and one year for directors. Restricted stock units granted to employees have time based vesting or performance and time based vesting. As of December 31, 2012 and 2013, there were 2,472 and 2,264, respectively shares of common stock available for issuance pursuant to future grants under the 2009 Plan.
	The following table reflects share-based compensation expense by type of award:
		Year Ended December 31,
		2011				2012				2013
	Share-based compensation expense:
	Stock options	$	404			$	282			$	570
	Restricted stock units	4,398				3,719				3,536
	Total share-based compensation	4,802				4,001				4,106
	Tax effect on share-based compensation	1,902				1,551				1,500
	Net effect on net income	$	2,900			$	2,450			$	2,606
	Tax effect on:
	Effect on earnings per share—basic	$	(0.09	)		$	(0.08	)		$	(0.08	)
	Effect on earnings per share—diluted	$	(0.09	)		$	(0.07	)		$	(0.08	)
	Valuation Assumptions for Stock Options
	For the years ended December 31, 2011, 2012 and 2013 there were 0, 165 and 0 employee stock options granted, respectively. The fair value of each option granted to employees was estimated on the date of grant using the Black-Scholes option-pricing model with the following assumptions:
		Year Ended December 31,
		2011					2012					2013
	Expected life (years)	0					5					0
	Expected volatility	—		%			85.2		%			—		%
	Expected dividend yield	—		%			—		%			—		%
	Risk-free interest rate	—		%			0.8		%			—		%
	Weighted average fair value per option	$	—				$	7.88				$	—
	Non-Employee Options
	At December 31, 2012 and 2013, the fair value of options granted to non-employees was $337 and $272, respectively.
	Stock Option Activity
	A summary of the Company’s stock option activity with respect to the years ended December 31, 2011, 2012 and 2013 follows:
		Shares			Weighted Average Exercise Price Per Share				Weighted Average Remaining Contractual Term (years)		Aggregate Intrinsic Value
	Outstanding at December 31, 2010	1,950			$	19.14
	Granted	—			—
	Exercised	(7	)		10.27
	Expired	(515	)		32.35
	Forfeited	—			—
	Outstanding at December 31, 2011	1,428			14.42
	Granted	195			11.9
	Exercised	(6	)		10.16
	Expired	(130	)		14
	Forfeited	—			—
	Outstanding at December 31, 2012	1,487			14.15
	Granted	—			—
	Exercised	(96	)		8.1
	Expired	(392	)		16.6
	Forfeited	(29	)		7.88
	Outstanding at December 31, 2013	970			$	13.94			3.8		$	1,602
	Vested or expected to vest at December 31, 2013	953			$	13.98			3.7		$	1,599
	Exercisable at December 31, 2013	768			$	14.81			2.6		$	1,310
	The total intrinsic value of the stock options exercised during 2011, 2012 and 2013 was $14, $14 and $312, respectively.
	The options outstanding and exercisable at December 31, 2013 were in the following exercise price ranges:
			Options Outstanding									Options Exercisable
	Range of Exercise Prices		Shares			Weighted Average Remaining Contractual Life (years)		Weighted				Shares			Weighted
								Average							Average
								Exercise Price							Exercise Price
	$6.80 - $6.80		292			5.16		$	6.8			238			$	6.8
	$7.86 - $13.59		257			7.17		$	11.65			109			$	11.15
	$13.62 - $21.13		243			1.18		$	16.22			243			$	16.22
	$22.09 - $29.85		178			0.09		$	25.89			178			$	25.89
	$6.80 - $29.85		970			3.77		$	13.94			768			$	14.81
	As of December 31, 2013, there was $1,110 of total unrecognized compensation cost related to stock options granted under the plans. That cost is expected to be recognized over a weighted average remaining period of 3.0 years.
	Restricted Stock Unit Activity
	A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2011, 2012 and 2013 follows:
		Number of Shares			Weighted Average
Grant Date Fair
Value
Nonvested at December 31, 2010	1,455			$	7.28
Granted	535			$	10.25
Vested	(436	)		$	8.46
Forfeited	(89	)		$	7.26
Nonvested at December 31, 2011	1,465			$	8.01
Granted	409			$	9.81
Vested	(457	)		$	8.53
Forfeited	(37	)		$	8.16
Nonvested at December 31, 2012	1,380			$	8.37
Granted	333			$	12.37
Vested	(470	)		$	7.74
Forfeited	(127	)		$	9.29
Nonvested at December 31, 2013	1,116			$	9.73
As of December 31, 2013, there was $5,755 of total unrecognized compensation cost related to restricted stock units granted under the plans. That cost is expected to be recognized over a weighted average period of 2.0 years.
Employee Stock Purchase Plan
The Company established an Employee Stock Purchase Plan (the “ESPP”) effective November 1, 2009. Under the terms of the ESPP, eligible employees may have up to 15% of eligible compensation deducted from their pay and applied to the purchase of shares of Company common stock. The price the employee must pay for each share of stock will be 95% of the fair market value of Company common stock at the end of the applicable six-month purchase period. The ESPP is intended to qualify under Section 423 of the Internal Revenue Code and is a non-compensatory plan as defined by FASB Accounting Standards Codification (ASC) 718, Stock Compensation. No stock-based compensation expense for the ESPP was recorded for the years ended December 31, 2011, 2012 and 2013. As of December 31, 2012 and 2013, there were 837 and 1,116 shares available for issuance under the ESPP, respectively.
401(k) Savings Plan
The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to the Plan on a pre-tax or after tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary. Company matching contributions to the plan totaled $838, $880 and $957 for the years ended December 31, 2011, 2012 and 2013, respectively.
Profit Sharing Program
The Company has a profit sharing program, wherein a percentage of pre-tax profits, at the discretion of the Board of Directors, is provided to all employees who have completed a stipulated employment period. The Company did not make contributions to this program for the years ended December 31, 2011, 2012 and 2013.

Other_Income_Expense

Other Income (Expense)	12 Months Ended
	Dec. 31, 2013
Other Income (Expense) [Abstract]	'
Other Income and Other Expense Disclosure [Text Block]	'
	Other Income (Expense):
	Other income (expense) is comprised of the following:
		Year Ended December 31,
		2011		2012			2013
	Foreign currency exchange gains (losses), net	$	846	$	(482	)	$	8
	Realized gains on sales of marketable securities, net	1		—			—
	Total other income (expense)	$	847	$	(482	)	$	8

Income_Taxes

Income Taxes	12 Months Ended
	Dec. 31, 2013
Income Taxes [Abstract]	'
Income Tax Disclosure [Text Block]	'
	Income Taxes:
	The components of income tax expense are as follows:
		Year Ended December 31,
		2011			2012			2013
	Current:
	Federal	$	1,737		$	3,164		$	(1,790	)
	State	318			312			(122		)
	Foreign	2,131			2,880			1,497
		4,186			6,356			(415		)
	Deferred:
	Federal	(8,038		)	(18,003		)	(2,378		)
	State	(818		)	(2,799		)	938
	Foreign	(162		)	(12		)	(70		)
		(9,018		)	(20,814		)	(1,510		)
	Total income tax benefit	$	(4,832	)	$	(14,458	)	$	(1,925	)
	The income (loss) before tax are comprised of the following:
		Year Ended December 31,
		2011			2012			2013
	Domestic operations	$	23,963		$	13,278		$	(4,860	)
	Foreign operations	$	(3,569	)	$	16,129		$	6,393
	The income tax benefit of $4,832 and $14,458 in 2011 and 2012, respectively, primarily resulted from benefits related to the release of valuation allowance recorded against U.S. deferred tax assets, partially offset by taxes accrued in both the U.S. and foreign tax jurisdictions. The income tax benefit of $1,925 in 2013 primarily resulted from benefits related to the reversal of unrecognized tax benefits, foreign tax credits and research and development credits for both 2012 and 2013 recognized in 2013, which were not available in 2012 as a result of legislation, and $1.3 million of expense related to a correction of the prior year income tax balances recognized in the fourth quarter of 2013. The correction of the prior year income tax balance was not considered material to the prior year or current year financial statements.
	Deferred tax assets and liabilities are comprised of the following:
		December 31,
		2012			2013
	Research and development credit carryforward	$	3,506		$	5,233
	Reserves and accruals not currently deductible	4,444			3,085
	Deferred revenue	3,191			2,379
	Domestic net operating loss carryforwards	2,351			1,900
	Capital losses	31			29
	Foreign net operating loss and credit carryforwards	2,145			6,327
	Intangibles	12,610			11,506
	Tax deductible transaction costs	429			347
	Share-based compensation	2,086			1,730
	Inventory obsolescence reserve	3,517			3,935
	Depreciation	—			356
	Other	1,946			223
	Gross deferred tax assets	36,256			37,050
	Valuation allowance for deferred tax assets	(1,361		)	(1,646		)
	Deferred tax assets after valuation allowance	34,895			35,404
	Gross deferred tax liabilities	(611		)	(1,072		)
	Net deferred tax assets	$	34,284		$	34,332
	At December 31, 2012 and 2013, the Company had valuation allowances of $1,361 and $1,646, respectively, on certain of our deferred tax assets to reflect the deferred tax asset at the net amount that is more likely than not to be realized.
	In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment.
	The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2011, 2012 and 2013 to income before provision for income taxes as follows:
		Year Ended December 31,
		2011			2012			2013
	Federal income tax provision at statutory rate	$	7,138		$	10,292		$	537
	State taxes, net of federal effect	207			(698		)	828
	Foreign taxes net of federal effect	1,136			1,296			(1,514		)
	Domestic manufacturing benefit	(536		)	(915		)	—
	Change in valuation allowance for deferred tax assets	(12,358		)	(23,313		)	(153		)
	Research tax credit	(875		)	—			(1,965		)
	Deferred tax true-up	—			—			401
	Other	456			(1,120		)	(59		)
	Provision (benefit) for income taxes	$	(4,832	)	$	(14,458	)	$	(1,925	)
	Effective tax rate	(24		)%	(49		)%	(126		)%
	At December 31, 2013, the Company had federal, state and foreign net operating loss carryforwards of $1,371, $399 and $516, respectively. In addition, as of December 31, 2013 the Company had federal AMT carryforwards of $130. The federal, state and foreign net operating loss carryforwards expire on various dates through December 31, 2031, December 31, 2031 and December 31, 2022, respectively. At December 31, 2013, the Company had federal and state research & development credits and foreign tax credit carryforwards of $4,068, $1,165 and $4,386, respectively. The federal research & development credits are set to expire at various dates through December 31, 2033.The state research & development credits are set to expire at various dates through December 21, 2024. The foreign tax credit is set to expire at various dates through December 31, 2023. The 2013 benefit for income taxes includes a benefit of $1,993 for unrecognized tax benefits, a provision of $850 for the correction of a prior year income tax balance recognized in the fourth quarter and a provision of $625 related to an Internal Revenue Service audit adjustment. These amounts are included in the “Other” line item.
	A provision has not been made at December 31, 2013 for U.S. or additional foreign withholding taxes on approximately $2,524 of undistributed earnings of our foreign subsidiaries in Europe and Japan because it is the present intention of management to permanently reinvest these undistributed earnings. Upon distribution of those earnings, U.S. taxes on such permanently reinvested foreign earnings would be recorded net of applicable foreign tax credits and withholding taxes, if any. It is not practical to estimate the amount of tax that might be payable if some or all of such earnings were to be remitted.
	The total amount of unrecognized tax benefits were as follows:
		December 31,
		2011			2012			2013
	Unrecognized tax benefits, opening balance	$	6,724		$	8,476		$	9,566
	Gross increases—tax positions in prior period	1,358			486			533
Gross decreases - tax positions in prior period	—			(494		)	(4,992		)
Gross increases—current-period tax positions	394			1,098			599
Lapse of statute of limitations	—			—			—
Unrecognized tax benefits, ending balance	$	8,476		$	9,566		$	5,706
Included in the balance of unrecognized tax benefits at December 31, 2012 and 2013 are unrecognized tax benefits of $6,272 and $4,278, respectively, which would be reflected as an adjustment to income tax expense if recognized. The year over year decrease from 2012 to 2013 is primarily due to the reversal of unrecognized tax benefits related to federal tax exposures. It is reasonably possible that certain amounts of unrecognized tax benefits may reverse in the next 12 months; however, we do not expect such reversals would have a significant impact on our results of operations or financial position.
The Company recognizes accrued interest and penalties related to unrecognized tax benefits in income tax expense. During the years ended December 31, 2011, 2012 and 2013, the Company recognized approximately $330, $557 and $(768), respectively, in interest and penalties expense associated with uncertain tax positions. As of December 31, 2012 and 2013, the Company had accrued interest and penalties expense related to unrecognized tax benefits of $1,538 and $770, respectively.
The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions. In December 2013, the Company is under a federal income tax examination by the Internal Revenue Service for examination of income tax returns for the tax years ended, December 31, 2007 through December 31, 2009. The Company has not been contacted by any other U.S. state, local or foreign tax authority for all open tax periods beginning after December 31, 2007.
The American Taxpayer Relief Act of 2012 was passed by Congress and signed into law on January 1, 2013. The provisions under this law were made retroactive to January 1, 2012. However, as a result of the law being signed on January 1, 2013, the financial impact of any retroactive provision was recorded as a discrete event in the first quarter of 2013. This discrete event reduced tax expense in the first quarter of 2013 by approximately $800 for research and development tax credits for 2012.

Accumulated_Other_Comprehensiv

Accumulated Other Comprehensive Loss (Notes)	12 Months Ended
	Dec. 31, 2013
Statement of Other Comprehensive Income [Abstract]	'
Comprehensive Income (Loss) Note [Text Block]	'
	Accumulated Other Comprehensive Loss:
	Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income to our net income.
	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments		Accumulated other comprehensive loss
	Beginning Balance, December 31, 2011	$	1,379		$	83	$	1,462
	Net current period other comprehensive loss	(394		)	17		(377		)
	Reclassifications	—			—		—
	Beginning Balance, December 31, 2012	$	985		$	100	$	1,085
	Net current period other comprehensive loss	660			50		710
	Reclassifications	—			—		—
	Ending balance, December 31, 2013	$	1,645		$	150	$	1,795

Segment_Reporting_and_Geograph

Segment Reporting and Geographic Information	12 Months Ended
	Dec. 31, 2013
Segment Reporting and Geographic Information [Abstract]	'
Segment Reporting Disclosure [Text Block]	'
	Segment Reporting and Geographic Information:
	The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection, metrology, and process control software systems used by microelectronics device manufacturers, and therefore have one reportable segment. The Company’s chief decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level.
	The following table lists the different sources of revenue:
		Year Ended December 31,
		2011					2012					2013
	Systems and software:
	Inspection	$	91,825		49	%	$	128,917		59	%	$	89,089	51	%
	Metrology	38,616			21	%	38,001			17	%	26,500		15	%
	Data analysis and review	23,356			13	%	19,840			9	%	17,927		10	%
	Lithography	—			—	%	—			—	%	8,548		5	%
	Parts	21,719			11	%	20,802			10	%	21,078		12	%
	Services	11,680			6	%	10,926			5	%	13,096		7	%
	Total revenue	$	187,196		100	%	$	218,486		100	%	$	176,238	100	%
	The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows:
		Year Ended December 31,
		2011			2012			2013
	Revenues from third parties:
	United States	$	52,910		$	42,108		$	40,849
	Taiwan	26,898			62,239			54,682
	South Korea	26,725			33,675			10,704
	Singapore	16,344			26,183			17,260
	Austria	15,960			11,423			898
	Japan	14,925			16,405			7,326
	Germany	14,657			5,393			5,669
	China	11,124			12,266			20,061
	Other Europe	7,653			8,794			18,789
	Total revenue	$	187,196		$	218,486		$	176,238
	The following customers each accounted for more than 10% of total revenues for the indicated periods:
	Year Ended December 31,
	2011		2012	2013
	Infineon Technologies		Samsung Semiconductor Inc.	Intel Semiconductor Inc.
	Samsung Semiconductor Inc.		Advanced Semiconductor Engineering, Inc.	STATS ChipPAC Ltd.
	No other individual end user customer accounted for more than 10% of our revenues in 2011, 2012 and 2013.
	At December 31, 2012, one customer, Intel Corporation accounted for more than 10% of net accounts receivable. At December 31, 2013, one customer, STATS ChipPAC Ltd., accounted for more than 10% of net accounts receivable.
	Substantially all of the Company’s long-lived assets are located within the United States of America.

Earnings_Loss_Per_Share

Earnings (Loss) Per Share	12 Months Ended
	Dec. 31, 2013
Earnings (Loss) Per Share [Abstract]	'
Earnings Per Share [Text Block]	'
	Earnings Per Share:
	Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be antidilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share.
	The following table lists the weighted average number of stock options and restricted stock units excluded from computation of diluted earnings per share at December 31, 2011, 2012, and 2013 as there impact would be anti-dilutive:
		Year Ended December 31,
		2011		2012			2013
	Stock options	1,257		984			707
	Restricted stock units	291		37			3
	Diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes and warrants (as described in Note 8) as their impact would be anti-dilutive.
	The computations of basic and diluted income per share for the years ended December 31, 2011, 2012, and 2013 are as follows:
		December 31,
		2011			2012			2013
	Numerator:
	Net income	$	25,226		$	43,865		$	3,458
	Denominator:
	Basic earnings per share - weighted average shares outstanding	31,744			32,226			32,783
	Effect of potential diluted securities:
	Employee stock options and restricted stock units - dilutive shares	512			627			605
	Diluted earnings per share - weighted average shares outstanding	32,256			32,853			33,388
	Earnings per share:
	Basic	$	0.79		$	1.36		$	0.11
	Diluted	$	0.78		$	1.34		$	0.1

Share_Repurchase_Program

Share Repurchase Program	12 Months Ended
	Dec. 31, 2013
Share Repurchase Program [Abstract]	'
Share Repurchase [Text Block]	'
	Share Repurchase Program
	In July 2008, the Board of Directors authorized a share repurchase program of up to 3,000 shares of the Company’s common stock with no established end date. As of the time of the filing of this Annual Report on Form 10-K, the Company has not purchased any shares under this program.

Quarterly_Consolidated_Financi

Quarterly Consolidated Financial Data (unaudited)	12 Months Ended
	Dec. 31, 2013
Quarterly Consolidated Financial Data (unaudited) [Abstract]	'
Quarterly Financial Information [Text Block]	'
	Quarterly Consolidated Financial Data (unaudited):
	The following tables present certain unaudited consolidated quarterly financial information for the years ended December 31, 2013 and 2012. In the opinion of the Company’s management, this quarterly information has been prepared on the same basis as the consolidated financial statements and includes all adjustments (consisting only of normal recurring adjustments) necessary to present fairly the information for the periods presented. The results of operations for any quarter are not necessarily indicative of results for the full year or for any future period.
	Year-over-year quarterly comparisons of the Company’s results of operations may not be meaningful, as the sequential quarterly comparisons set forth below tend to reflect the cyclical activity of the semiconductor industry as a whole. Other quarterly fluctuations in expenses are related directly to sales activity and volume and may also reflect the timing of operating expenses incurred throughout the year and the purchase accounting effects of business combinations.
		Quarters Ended
		March 31,			June 30,		September 30,		December 31,		Total
		2012			2012		2012		2012
	Revenues	$	45,709		$	56,326	$	62,152	$	54,299	$	218,486
	Gross profit	23,765			30,222		33,125		28,563		115,675
	Income before income taxes	2,873			9,931		10,571		6,032		29,407
	Net income	1,862			6,346		6,661		28,996		43,865
	Income per share:
	Basic	$	0.06		$	0.2	$	0.21	$	0.9	$	1.36
	Diluted	$	0.06		$	0.19	$	0.2	$	0.88	$	1.34
	Weighted average number of shares outstanding:
	Basic	32,026			32,144		32,317		32,354		32,226
	Diluted	32,713			32,727		32,862		33,045		32,853
		Quarters Ended
		March 31,			June 30,		September 30,		December 31,		Total
		2013			2013		2013		2013
	Revenues	$	41,650		$	46,059	$	44,044	$	44,485	$	176,238
	Gross profit	21,874			23,515		22,470		22,873		90,732
	Income (loss) before income taxes	(255		)	1,332		37		419		1,533
	Net income	393			759		252		2,054		3,458
	Income per share:
	Basic	$	0.01		$	0.02	$	0.01	$	0.06	$	0.11
	Diluted	$	0.01		$	0.02	$	0.01	$	0.06	$	0.1
	Weighted average number of shares outstanding:
	Basic	32,523			32,567		32,897		32,951		32,783
	Diluted	33,239			33,155		33,426		33,539		33,388

Summary_of_Significant_Account1

Summary of Significant Accounting Policies (Policies)	12 Months Ended
	Dec. 31, 2013
Summary of Significant Accounting Policies [Abstract]	'
Consolidation, Policy [Policy Text Block]	'
	A. Consolidation:
	The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated.
Revenue Recognition, Policy [Policy Text Block]	'
	B. Revenue Recognition:
	Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions which have occurred prior to January 1, 2011, revenue for arrangements with multiple elements, such as sales of products that include software and services, was allocated to each element using the residual method based on the fair value of the undelivered items as determined using the prior guidance for revenue arrangements with multiple deliverables. Under the residual method, the amount of revenue allocated to delivered elements equals the total arrangement consideration less the aggregate fair value of any undelivered elements; (4) for transactions occurring on or after January 1, 2011 containing multiple elements, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies.
	Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized.
	Revenue from software license fees is recognized upon shipment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period.
Use of Estimates, Policy [Policy Text Block]	'
	C. Estimates:
	The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, purchase accounting allocations (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates.
Cash and Cash Equivalents, Policy [Policy Text Block]	'
	D. Cash and Cash Equivalents:
	Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased.
Marketable Securities, Policy [Policy Text Block]	'
	E. Marketable Securities:
	The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities.
	For additional information on the Company’s marketable securities, see Note 5 of Notes to the Consolidated Financial Statements.
Trade and Other Accounts Receivable, Policy [Policy Text Block]	'
	F. Allowance for Doubtful Accounts:
	The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience.
Inventory, Policy [Policy Text Block]	'
	G. Inventories:
	Inventories are stated at the lower of cost (first-in, first-out) or market. Cost includes material, labor and overhead costs. Demonstration units, which are available for sale, are stated at their manufacturing costs and reserves are recorded to adjust the demonstration units to their net realizable value, if lower than cost.
Property, Plant and Equipment, Policy [Policy Text Block]	'
	H. Property, Plant and Equipment:
	Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are thirty years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized.
Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]	'
	I. Impairment of Long-Lived Assets:
	Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows.
Goodwill and Intangible Assets, Policy [Policy Text Block]	'
	J. Goodwill and Intangible Assets:
	Intangible assets with definitive useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. Under the amendments of ASC 350-10, ASU No. 2011-08, Testing Goodwill for Impairment, beginning in the first quarter of 2012, the Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of a reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its aggregated reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2013. No impairments were noted.
	For additional information on the Company’s goodwill and purchased intangible assets, see Note 6 of Notes to the Consolidated Financial Statements.
Concentration Risk, Credit Risk, Policy [Policy Text Block]	'
	K. Concentration of Credit Risk:
	Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer.
Standard Product Warranty, Policy [Policy Text Block]	'
	L. Warranties:
	The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized.
Income Tax, Policy [Policy Text Block]	'
	M. Income Taxes:
	The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings.
	The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current unless the liability is expected to be settled in cash within 12 months of the reporting date.
	For additional information on the Company’s income taxes, see Note 13 of Notes to the Consolidated Financial Statements.
Foreign Currency Transactions and Translations Policy [Policy Text Block]	'
	N. Translation of Foreign Currencies:
	The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. These foreign branches and subsidiaries are limited in their operations and level of investment so that the risk of currency fluctuations is not material. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales.
	Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $985 and $1,645 as of December 31, 2012 and 2013, respectively.
Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]	'
	O. Share-based Compensation:
	The fair value of stock options is determined using the Black-Scholes valuation model. The Black-Scholes valuation calculation requires the Company to estimate key assumptions such as future stock price volatility, expected terms, risk-free interest rates and dividend yield. Expected stock price volatility is based on historical volatility of the Company’s stock. The Company uses historical data to estimate option exercises and employee terminations within the valuation model. The expected term of options granted is derived from an analysis of historical exercises and remaining contractual life of stock options, and represents the period of time that options granted are expected to be outstanding. The risk-free interest rate is based on the U.S. Treasury yield curve in effect at the time of grant. The Company has never paid cash dividends, and does not currently intend to pay cash dividends, and thus has assumed a 0% dividend yield. The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method.
	For additional information on the Company’s share-based compensation plans, see Note 11 of Notes to the Consolidated Financial Statements.
Research, Development, and Computer Software, Policy [Policy Text Block]	'
	P. Research and Development and Software Development Costs:
	Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2012 and 2013, capitalized software development costs were $201 and $16, respectively. During the years ended December 31, 2011, 2012 and 2013, software development cost amortization totaled $356, $361 and $185, respectively.
Shipping and Handling Cost, Policy [Policy Text Block]	'
	Q. Shipping and Handling Costs:
	Shipping and handling cost are included as a component of cost of revenues.
Fair Value of Financial Instruments, Policy [Policy Text Block]	'
	Q. Shipping and Handling Costs:
	Shipping and handling cost are included as a component of cost of revenues.
	R. Fair Value of Financial Instruments:
	The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The carrying amount of our convertible senior notes was $49,010 and $51,751 as of December 31, 2012 and 2013, respectively. The fair value of our convertible senior notes was $51,018 and $59,340 as of December 31, 2012 and 2013, respectively. The Company’s convertible senior notes are not publicly traded. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.
	For additional information on the Company’s fair value of financial instruments, see Note 4 of Notes to the Consolidated Financial Statements.
Derivative Instruments and Hedging Activities Disclosure [Text Block]	'
	. Derivative Instruments and Hedging Activities:
	The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2012 and 2013, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets.
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2012 and 2013 were as follows:
		December 31,
		2012		2013
	Notional amount	$	3,457	$	1,029
	Fair value of asset	$	268	$	6
	The Company recognized a loss of $256 with respect to forward contracts that matured during 2011. In 2012 and 2013, the Company recognized a gain of $112 and $374 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $2,950, $3,340 and $2,922, for 2011, 2012 and 2013, respectively.
Reclassification, Policy [Policy Text Block]	'
	. Reclassifications:
	Certain prior year amounts have been reclassified to conform to the 2013 financial statement presentation.
New Accounting Pronouncements and Changes in Accounting Principles [Text Block]	'
	. Recent Accounting Pronouncements:
	In July 2013, the Financial Accounting Standards Board (FASB) issued Accounting Standard Update (ASU) No. 2013-11, “Income Taxes (Topic 740): Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exists.” The ASU requires that an unrecognized tax benefit, or a portion of an unrecognized tax benefit, should be presented in the financial statements as a reduction to a deferred tax asset for a net operating loss carryforward, a similar tax loss, or a tax credit carryforward, except as follows. To the extent a net operating loss carryforward, a similar tax loss, or a tax credit carryforward is not available at the reporting date under the tax law of the applicable jurisdiction to settle any additional income taxes that would result from the disallowance of a tax position or the tax law of the applicable jurisdiction does not require the entity to use, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit should be presented in the financial statements as a liability and should not be combined with deferred tax assets. The assessment of whether a deferred tax asset is available is based on the unrecognized tax benefit and deferred tax asset that exist at the reporting date and should be made presuming disallowance of the tax position at the reporting date. This ASU is effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. The adoption of this guidance is reflected in the Company’s consolidated statements of financial position and cash flows.
	In July 2013, the FASB issued ASU No. 2013-10, “Derivatives and Hedging (Topic 815): Inclusion of the Fed Funds Effective Swap Rate (or Overnight Index Swap Rate) as a Benchmark Interest Rate for Hedge Accounting Purposes (a consensus of the FASB Emerging Issues Task Force.” The ASU permits the Fed Funds Effective Swap Rate (OIS) to be used as a U.S. benchmark interest rate for hedge accounting purposes under Topic 850, in addition to UST and LIBOR. The amendments also remove the restriction on using different benchmark rates for similar hedges. This ASU is effective prospectively for qualifying new or redesignated hedging relationships entered into on or after July 17, 2013. The Company does not believe that this guidance will have a material impact on its consolidated financial position, results of operations, or cash flows.
	In February 2013, the FASB issued ASU No. 2013-02, “Comprehensive Income (Topic 220): Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income.” The ASU requires an entity to report the effect of significant reclassifications out of accumulated other comprehensive income on the respective line items in net income if the amount being reclassified is required under U.S. GAAP to be reclassified in its entirety to net income. For other amounts that are not required under U.S. GAAP to be reclassified in their entirety to net income in the same reporting period, an entity is required to cross-reference other disclosures required under U.S. GAAP that provide additional detail about those amounts. This ASU is effective prospectively for reporting periods beginning after December 15, 2012. The adoption of this amendment did not have a material impact on the Company’s consolidated financial position, results of operations or cash flows.

Summary_of_Significant_Account2

Summary of Significant Accounting Policies Summary of Significant Accounting Policies (Tables)	12 Months Ended
	Dec. 31, 2013
Accounting Policies [Abstract]	'
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	'
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2012 and 2013 were as follows:
		December 31,
		2012		2013
	Notional amount	$	3,457	$	1,029
	Fair value of asset	$	268	$	6

Fair_Value_Measurements_Tables

Fair Value Measurements (Tables)	12 Months Ended
	Dec. 31, 2013
Fair Value Measurements [Abstract]	'
Fair Value, Measurement Inputs, Disclosure [Text Block]	'
	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2012 and December 31, 2013:
		Fair Value Measurements Using
		Carrying Value			Quoted Prices in Active Markets for Identical Assets (Level 1)			Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
	December 31, 2012
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds	$	64,117		$	—		$	64,117	$	—
	Corporate bonds	500			—			500		—
	Auction rate securities	346			—			—		346
	Foreign currency forward contracts	268			—			268		—
	Total Assets	$	65,231		$	—		$	64,885	$	346
	December 31, 2013
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds	$	86,305		$	—		$	86,305	$	—
	Auction rate securities	277			—			—		277
	Foreign currency forward contracts	6			—			6		—
	Total Assets	$	86,588		$	—		$	86,311	$	277
	Liabilities:
	Contingent consideration - acquisitions	$	5,208		$	—		$	—	$	5,208
	Total Liabilities	$	5,208		$	—		$	—	$	5,208
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	'
	This table presents a reconciliation for all assets and liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2013:
		Fair Value Measurements Using Significant Unobservable Inputs (Level 3)
	Assets:
	Balance at December 31, 2012	$	346
	Unrealized gains in accumulated other comprehensive loss	(69		)
	Purchases	—
	Sales, issuances, and settlements	—
	Transfers into (out of) Level 3	—
	Balance at December 31, 2013	$	277
	Liabilities:
	Balance at December 31, 2012	$	—
	Additions	5,294
	Total gain (loss) included in earnings	138
	Payments	(224		)
	Transfer into (out of) Level 3	—
	Balance at December 31, 2013	$	5,208
Fair value convertible senior notes [Table Text Block]	'
	The following table reflects information pertaining to the Company’s convertible senior notes:
		December 31,
		2012			2013
	Net carrying value of convertible senior notes	$	49,010		$	51,751
	Estimated fair value of convertible senior notes	$	51,018		$	59,340
	Estimated interest rate used in discounted cash flow model	9.4		%	4.2		%
	Fair value of contingent interest	$	—		$	—

Marketable_Securities_Tables

Marketable Securities (Tables)	12 Months Ended
	Dec. 31, 2013
Marketable Securities [Abstract]	'
Available-for-sale Securities [Table Text Block]	'
	At December 31, 2012 and 2013, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains			Gross Unrealized Holding Losses			Fair Value
	December 31, 2012
	Municipal notes and bonds	$	64,088	$	36		$	(7	)	$	64,117
	Corporate Bonds	500		—			—			500
	Auction rate securities	475		—			(129		)	346
	Total marketable securities	$	65,063	$	36		$	(136	)	$	64,963
	December 31, 2013
	Municipal notes and bonds	$	86,257	$	50		$	(2	)	$	86,305
	Auction rate securities	475		—			(198		)	277
	Total marketable securities	$	86,732	$	50		$	(200	)	$	86,582
Investments Classified by Contractual Maturity Date [Table Text Block]	'
	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2012 and 2013:
		December 31, 2012					December 31, 2013
		Amortized		Fair			Amortized			Fair
		Cost		Value			Cost			Value
	Due within one year	$	57,367	$	57,390		$	78,909		$	78,948
	Due after one through five years	7,016		7,022			5,811			5,821
	Due after five through ten years	205		205			—			—
	Due after ten years	475		346			2,011			1,813
	Total marketable securities	$	65,063	$	64,963		$	86,731		$	86,582
Schedule of Unrealized Loss on Investments [Table Text Block]	'
	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2012 and 2013.
		In Unrealized Loss Position					In Unrealized Loss Position
		For Less Than 12 Months					For Greater Than 12 Months
		Fair		Gross			Fair			Gross
		Value		Unrealized			Value			Unrealized
				Losses						Losses
	December 31, 2012
	Municipal notes and bonds	$	9,037	$	(7	)	$	—		$	—
	Tax-free auction rate securities	—		—			346			(129		)
	Total marketable securities	$	9,037	$	(7	)	$	346		$	(129	)
	December 31, 2013
	Municipal notes and bonds	$	16,448	$	(2	)	$	—		$	—
	Tax-free auction rate securities	—		—			475			(198		)
	Total marketable securities	$	16,448	$	(2	)	$	475		$	(198	)

Goodwill_and_Purchased_Intangi1

Goodwill and Purchased Intangible Assets (Tables)	12 Months Ended
	Dec. 31, 2013
Intangible Assets [Abstract]	'
Schedule of Goodwill [Table Text Block]	'
	Goodwill
	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2011		$	4,492
	Goodwill acquired during the period		10,756
	Other, primarily currency translation		113
	Balance at December 31, 2012		15,361
	Goodwill acquired during the period		6,989
	Other, primarily currency translation		203
	Balance at December 31, 2013		$	22,553
Schedule of Finite-Lived Intangible Assets [Table Text Block]	'
	Purchased intangible assets as of December 31, 2012 and 2013 are as follows:
		Gross Carrying Amount			Accumulated Amortization		Net
	December 31, 2012
	Finite-lived intangibles:
	Developed technology	$	58,961		$	49,358	$	9,603
	Customer and distributor relationships	8,712			7,102		1,610
	Trade names	4,361			3,216		1,145
	Total identifiable intangible assets	$	72,034		$	59,676	$	12,358
	December 31, 2013
	Finite-lived intangibles:
	Developed technology	$	59,831		$	51,496	$	8,335
	Customer and distributor relationships	9,560			7,449		2,111
	Trade names	4,361			3,343		1,018
	Total identifiable intangible assets	$	73,752		$	62,288	$	11,464

Balance_Sheet_Details_Tables

Balance Sheet Details (Tables)	12 Months Ended
	Dec. 31, 2013
Balance Sheet Details [Abstract]	'
Schedule of Inventory, Current [Table Text Block]	'
	Inventories
	Inventories are comprised of the following:
		December 31,
		2012			2013
	Materials	$	29,746		$	31,194
	Work-in-process	12,298			19,867
	Finished goods	15,904			10,290
	Total inventories	$	57,948		$	61,351
Property, Plant and Equipment [Table Text Block]	'
	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		December 31,
		2012			2013
	Land and building	$	4,997		$	5,024
	Machinery and equipment	18,826			20,827
	Furniture and fixtures	3,381			4,043
	Computer equipment	7,789			5,568
	Leasehold improvements	6,807			7,744
		41,800			43,206
	Accumulated depreciation	(29,891		)	(30,148		)
	Total property, plant and equipment, net	$	11,909		$	13,058
Other Current liabilities [Table Text Block]	'
	Other current liabilities
	Other current liabilities is comprised of the following:
		December 31,
		2012			2013
	Litigation accrual	$	4,293		$	4,293
	Other	4,066			5,839
	Total other current liabilities	$	8,359		$	10,132
Other Non-current liabilities [Table Text Block]	'
	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
		December 31,
		2012			2013
	Unrecognized tax benefits (including interest)	$	5,871		$	2,806
	Contingent consideration - acquisitions	—			4,340
	Other	2,166			1,772
	Total non-current liabilities	$	8,037		$	8,918

Debt_Obligations_Tables

Debt Obligations (Tables)	12 Months Ended
	Dec. 31, 2013
Debt Obligations [Abstract]	'
Schedule of Long-term Debt Instruments [Table Text Block]	'
	The following table reflects the net carrying value of the Notes as of December 31, 2012 and 2013:
		December 31,
		2012		2013
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	10,990		8,249
	Net carrying value of convertible senior notes	$	49,010	$	51,751
Interest cost recognized on the convertible senior notes [Table Text Block]	'
	The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2011, 2012 and 2013.
		December 31,
		2011		2012		2013
	Contractual interest coupon	$	999	$	2,251	$	2,250
	Amortization of interest discount	1,031		2,486		2,740
	Amortization of debt issuance costs	98		250		303
	Total interest cost recognized	$	2,128	$	4,987	$	5,293

Commitments_and_Contingencies_

Commitments and Contingencies (Tables)	12 Months Ended
	Dec. 31, 2013
Commitments and Contingencies [Abstract]	'
Schedule of Product Warranty Liability [Table Text Block]	'
	Changes in the Company’s warranty reserves are as follows:
		Year Ended December 31,
		2011			2012			2013
	Balance, beginning of the year	$	1,654		$	1,406		$	2,024
	Accruals	1,987			2,482			1,956
	Warranty Liability assumed in acquisition	—			225			—
	Usage	(2,235		)	(2,089		)	(2,429		)
	Balance, end of the year	$	1,406		$	2,024		$	1,551

ShareBased_Compensation_and_Em1

Share-Based Compensation and Employee Benefit Plans (Tables)	12 Months Ended
	Dec. 31, 2013
Share-Based Compensation and Employee Benefit Plans [Abstract]	'
Disclosure of Share-based Compensation Arrangements by Share-based Payment Award [Table Text Block]	'
	The following table reflects share-based compensation expense by type of award:
		Year Ended December 31,
		2011				2012				2013
	Share-based compensation expense:
	Stock options	$	404			$	282			$	570
	Restricted stock units	4,398				3,719				3,536
	Total share-based compensation	4,802				4,001				4,106
	Tax effect on share-based compensation	1,902				1,551				1,500
	Net effect on net income	$	2,900			$	2,450			$	2,606
	Tax effect on:
	Effect on earnings per share—basic	$	(0.09	)		$	(0.08	)		$	(0.08	)
	Effect on earnings per share—diluted	$	(0.09	)		$	(0.07	)		$	(0.08	)
	A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2011, 2012 and 2013 follows:
		Number of Shares			Weighted Average
					Grant Date Fair
					Value
	Nonvested at December 31, 2010	1,455			$	7.28
	Granted	535			$	10.25
	Vested	(436	)		$	8.46
	Forfeited	(89	)		$	7.26
	Nonvested at December 31, 2011	1,465			$	8.01
	Granted	409			$	9.81
	Vested	(457	)		$	8.53
	Forfeited	(37	)		$	8.16
	Nonvested at December 31, 2012	1,380			$	8.37
	Granted	333			$	12.37
	Vested	(470	)		$	7.74
	Forfeited	(127	)		$	9.29
	Nonvested at December 31, 2013	1,116			$	9.73
Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]	'
		Year Ended December 31,
		2011					2012					2013
	Expected life (years)	0					5					0
	Expected volatility	—		%			85.2		%			—		%
	Expected dividend yield	—		%			—		%			—		%
	Risk-free interest rate	—		%			0.8		%			—		%
	Weighted average fair value per option	$	—				$	7.88				$	—
Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]	'
	A summary of the Company’s stock option activity with respect to the years ended December 31, 2011, 2012 and 2013 follows:
		Shares			Weighted Average Exercise Price Per Share				Weighted Average Remaining Contractual Term (years)		Aggregate Intrinsic Value
	Outstanding at December 31, 2010	1,950			$	19.14
	Granted	—			—
	Exercised	(7	)		10.27
	Expired	(515	)		32.35
	Forfeited	—			—
	Outstanding at December 31, 2011	1,428			14.42
	Granted	195			11.9
	Exercised	(6	)		10.16
	Expired	(130	)		14
	Forfeited	—			—
	Outstanding at December 31, 2012	1,487			14.15
	Granted	—			—
	Exercised	(96	)		8.1
	Expired	(392	)		16.6
	Forfeited	(29	)		7.88
	Outstanding at December 31, 2013	970			$	13.94			3.8		$	1,602
	Vested or expected to vest at December 31, 2013	953			$	13.98			3.7		$	1,599
	Exercisable at December 31, 2013	768			$	14.81			2.6		$	1,310
Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table Text Block]	'
	The options outstanding and exercisable at December 31, 2013 were in the following exercise price ranges:
			Options Outstanding									Options Exercisable
	Range of Exercise Prices		Shares			Weighted Average Remaining Contractual Life (years)		Weighted				Shares			Weighted
								Average							Average
								Exercise Price							Exercise Price
	$6.80 - $6.80		292			5.16		$	6.8			238			$	6.8
	$7.86 - $13.59		257			7.17		$	11.65			109			$	11.15
	$13.62 - $21.13		243			1.18		$	16.22			243			$	16.22
	$22.09 - $29.85		178			0.09		$	25.89			178			$	25.89
	$6.80 - $29.85		970			3.77		$	13.94			768			$	14.81

Other_Income_Expense_Tables

Other Income (Expense) (Tables)	12 Months Ended
	Dec. 31, 2013
Other Income (Expense) [Abstract]	'
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	'
	Other income (expense) is comprised of the following:
		Year Ended December 31,
		2011		2012			2013
	Foreign currency exchange gains (losses), net	$	846	$	(482	)	$	8
	Realized gains on sales of marketable securities, net	1		—			—
	Total other income (expense)	$	847	$	(482	)	$	8

Income_Taxes_Tables

Income Taxes (Tables)	12 Months Ended
	Dec. 31, 2013
Income Taxes [Abstract]	'
Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]	'
	The components of income tax expense are as follows:
		Year Ended December 31,
		2011			2012			2013
	Current:
	Federal	$	1,737		$	3,164		$	(1,790	)
	State	318			312			(122		)
	Foreign	2,131			2,880			1,497
		4,186			6,356			(415		)
	Deferred:
	Federal	(8,038		)	(18,003		)	(2,378		)
	State	(818		)	(2,799		)	938
	Foreign	(162		)	(12		)	(70		)
		(9,018		)	(20,814		)	(1,510		)
	Total income tax benefit	$	(4,832	)	$	(14,458	)	$	(1,925	)
Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]	'
	The income (loss) before tax are comprised of the following:
		Year Ended December 31,
		2011			2012			2013
	Domestic operations	$	23,963		$	13,278		$	(4,860	)
	Foreign operations	$	(3,569	)	$	16,129		$	6,393
Schedule of Deferred Tax Assets and Liabilities [Table Text Block]	'
	Deferred tax assets and liabilities are comprised of the following:
		December 31,
		2012			2013
	Research and development credit carryforward	$	3,506		$	5,233
	Reserves and accruals not currently deductible	4,444			3,085
	Deferred revenue	3,191			2,379
	Domestic net operating loss carryforwards	2,351			1,900
	Capital losses	31			29
	Foreign net operating loss and credit carryforwards	2,145			6,327
	Intangibles	12,610			11,506
	Tax deductible transaction costs	429			347
	Share-based compensation	2,086			1,730
	Inventory obsolescence reserve	3,517			3,935
	Depreciation	—			356
	Other	1,946			223
	Gross deferred tax assets	36,256			37,050
	Valuation allowance for deferred tax assets	(1,361		)	(1,646		)
	Deferred tax assets after valuation allowance	34,895			35,404
	Gross deferred tax liabilities	(611		)	(1,072		)
	Net deferred tax assets	$	34,284		$	34,332
Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]	'
	The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2011, 2012 and 2013 to income before provision for income taxes as follows:
		Year Ended December 31,
		2011			2012			2013
	Federal income tax provision at statutory rate	$	7,138		$	10,292		$	537
	State taxes, net of federal effect	207			(698		)	828
	Foreign taxes net of federal effect	1,136			1,296			(1,514		)
	Domestic manufacturing benefit	(536		)	(915		)	—
	Change in valuation allowance for deferred tax assets	(12,358		)	(23,313		)	(153		)
	Research tax credit	(875		)	—			(1,965		)
	Deferred tax true-up	—			—			401
	Other	456			(1,120		)	(59		)
	Provision (benefit) for income taxes	$	(4,832	)	$	(14,458	)	$	(1,925	)
	Effective tax rate	(24		)%	(49		)%	(126		)%
Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]	'
	The total amount of unrecognized tax benefits were as follows:
		December 31,
		2011			2012			2013
	Unrecognized tax benefits, opening balance	$	6,724		$	8,476		$	9,566
	Gross increases—tax positions in prior period	1,358			486			533
	Gross decreases - tax positions in prior period	—			(494		)	(4,992		)
	Gross increases—current-period tax positions	394			1,098			599
	Lapse of statute of limitations	—			—			—
	Unrecognized tax benefits, ending balance	$	8,476		$	9,566		$	5,706

Accumulated_Other_Comprehensiv1

Accumulated Other Comprehensive Loss (Tables)	12 Months Ended
	Dec. 31, 2013
Statement of Other Comprehensive Income [Abstract]	'
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	'
	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments		Accumulated other comprehensive loss
	Beginning Balance, December 31, 2011	$	1,379		$	83	$	1,462
	Net current period other comprehensive loss	(394		)	17		(377		)
	Reclassifications	—			—		—
	Beginning Balance, December 31, 2012	$	985		$	100	$	1,085
	Net current period other comprehensive loss	660			50		710
	Reclassifications	—			—		—
	Ending balance, December 31, 2013	$	1,645		$	150	$	1,795

Segment_Reporting_and_Geograph1

Segment Reporting and Geographic Information (Tables)	12 Months Ended
	Dec. 31, 2013
Segment Reporting and Geographic Information [Abstract]	'
Revenue from External Customers by Products and Services [Table Text Block]	'
	The following table lists the different sources of revenue:
		Year Ended December 31,
		2011					2012					2013
	Systems and software:
	Inspection	$	91,825		49	%	$	128,917		59	%	$	89,089	51	%
	Metrology	38,616			21	%	38,001			17	%	26,500		15	%
	Data analysis and review	23,356			13	%	19,840			9	%	17,927		10	%
	Lithography	—			—	%	—			—	%	8,548		5	%
	Parts	21,719			11	%	20,802			10	%	21,078		12	%
	Services	11,680			6	%	10,926			5	%	13,096		7	%
	Total revenue	$	187,196		100	%	$	218,486		100	%	$	176,238	100	%
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	'
	The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows:
		Year Ended December 31,
		2011			2012			2013
	Revenues from third parties:
	United States	$	52,910		$	42,108		$	40,849
	Taiwan	26,898			62,239			54,682
	South Korea	26,725			33,675			10,704
	Singapore	16,344			26,183			17,260
	Austria	15,960			11,423			898
	Japan	14,925			16,405			7,326
	Germany	14,657			5,393			5,669
	China	11,124			12,266			20,061
	Other Europe	7,653			8,794			18,789
	Total revenue	$	187,196		$	218,486		$	176,238
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	'
	The following customers each accounted for more than 10% of total revenues for the indicated periods:
	Year Ended December 31,
	2011		2012	2013
	Infineon Technologies		Samsung Semiconductor Inc.	Intel Semiconductor Inc.
	Samsung Semiconductor Inc.		Advanced Semiconductor Engineering, Inc.	STATS ChipPAC Ltd.

Earnings_Loss_Per_Share_Tables

Earnings (Loss) Per Share (Tables)	12 Months Ended
	Dec. 31, 2013
Earnings (Loss) Per Share [Abstract]	'
Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table Text Block]	'
	The following table lists the weighted average number of stock options and restricted stock units excluded from computation of diluted earnings per share at December 31, 2011, 2012, and 2013 as there impact would be anti-dilutive:
		Year Ended December 31,
		2011		2012			2013
	Stock options	1,257		984			707
	Restricted stock units	291		37			3
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	'
	The computations of basic and diluted income per share for the years ended December 31, 2011, 2012, and 2013 are as follows:
		December 31,
		2011			2012			2013
	Numerator:
	Net income	$	25,226		$	43,865		$	3,458
	Denominator:
	Basic earnings per share - weighted average shares outstanding	31,744			32,226			32,783
	Effect of potential diluted securities:
	Employee stock options and restricted stock units - dilutive shares	512			627			605
	Diluted earnings per share - weighted average shares outstanding	32,256			32,853			33,388
	Earnings per share:
	Basic	$	0.79		$	1.36		$	0.11
	Diluted	$	0.78		$	1.34		$	0.1

Quarterly_Consolidated_Financi1

Quarterly Consolidated Financial Data (unaudited) (Tables)	12 Months Ended
	Dec. 31, 2013
Quarterly Consolidated Financial Data (unaudited) [Abstract]	'
Schedule of Quarterly Financial Information [Table Text Block]	'
		Quarters Ended
		March 31,			June 30,		September 30,		December 31,		Total
		2012			2012		2012		2012
	Revenues	$	45,709		$	56,326	$	62,152	$	54,299	$	218,486
	Gross profit	23,765			30,222		33,125		28,563		115,675
	Income before income taxes	2,873			9,931		10,571		6,032		29,407
	Net income	1,862			6,346		6,661		28,996		43,865
	Income per share:
	Basic	$	0.06		$	0.2	$	0.21	$	0.9	$	1.36
	Diluted	$	0.06		$	0.19	$	0.2	$	0.88	$	1.34
	Weighted average number of shares outstanding:
	Basic	32,026			32,144		32,317		32,354		32,226
	Diluted	32,713			32,727		32,862		33,045		32,853
		Quarters Ended
		March 31,			June 30,		September 30,		December 31,		Total
		2013			2013		2013		2013
	Revenues	$	41,650		$	46,059	$	44,044	$	44,485	$	176,238
	Gross profit	21,874			23,515		22,470		22,873		90,732
	Income (loss) before income taxes	(255		)	1,332		37		419		1,533
	Net income	393			759		252		2,054		3,458
	Income per share:
	Basic	$	0.01		$	0.02	$	0.01	$	0.06	$	0.11
	Diluted	$	0.01		$	0.02	$	0.01	$	0.06	$	0.1
	Weighted average number of shares outstanding:
	Basic	32,523			32,567		32,897		32,951		32,783
	Diluted	33,239			33,155		33,426		33,539		33,388

Summary_of_Significant_Account3

Summary of Significant Accounting Policies Translation of Foreign Currency (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Intercompany Foreign Currency Balance [Line Items]	'	'
Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax	$1,645	$985

Summary_of_Significant_Account4

Summary of Significant Accounting Policies Research and Development and Software Development Costs (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
In Thousands, unless otherwise specified
Compensation Related Costs [Abstract]	'	'	'
Rtec Capitalized Software	$16	$201	'
Software development cost amortization	$185	$361	$356

Summary_of_Significant_Account5

Summary of Significant Accounting Policies Fair Value of Financial Instrument (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Convertible Debt, Noncurrent	$51,751	$49,010
Convertible Debt, Fair Value Disclosures	$59,340	$51,018

Summary_of_Significant_Account6

Summary of Significant Accounting Policies Derivative Instruments and Hedging Activities (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Derivative [Line Items]	'	'	'
Derivative, Notional Amount	$1,029	$3,457	'
Derivative Asset, Fair Value, Gross Asset	6	268	'
Derivative Instruments, Loss (Gain) Recognized in Income, Net	374	112	256
Notional Amount of Foreign Currency Derivatives	$2,922	$3,340	$2,950

Fair_Value_Measurements_Detail

Fair Value Measurements (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
	Rate	Rate
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$86,305	$64,117	'
Corporate Bonds	'	500	'
Available-for-sale Securities, Failed Auction, Value	277	346	'
Foreign Currency Contracts, Liability, Fair Value Disclosure	6	268	'
Assets, Fair Value Disclosure	86,588	65,231	'
Business Acquisition, Contingent Consideration, at Fair Value	5,208	'	'
Liabilities, Fair Value Disclosure	5,208	'	'
Fair Value Inputs, Discount Rate	3.70%	'	'
Fair Value Input Discount Rate 3	6.20%	'	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset Value	'	277	346
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Other Comprehensive Income (Loss)	'	-69	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Purchases	0	'	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Purchases, Sales, Issues, Settlements	'	0	'
Fair Value, Level 3 Transfers out, Description	'	'0	'
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	5,208	0	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	5,294	'	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Earnings	138	'	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Settlements	-224	'	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Liability, Transfers out of Level 3	0	'	'
Convertible Debt, Noncurrent	51,751	49,010	'
Convertible Debt, Fair Value Disclosures	59,340	51,018	'
Fair Value Inputs Discount Rate 2	4.20%	9.40%	'
Long-term Debt, Contingent Payment of Principal or Interest	'0	'0	'
Fair Value, Inputs, Level 1 [Member]	'	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0	'
Corporate Bonds	'	0	'
Available-for-sale Securities, Failed Auction, Value	0	0	'
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	0	'
Assets, Fair Value Disclosure	0	0	'
Business Acquisition, Contingent Consideration, at Fair Value	0	'	'
Liabilities, Fair Value Disclosure	0	'	'
Fair Value, Inputs, Level 2 [Member]	'	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	86,305	64,117	'
Corporate Bonds	'	500	'
Available-for-sale Securities, Failed Auction, Value	0	0	'
Foreign Currency Contracts, Liability, Fair Value Disclosure	6	268	'
Assets, Fair Value Disclosure	86,311	64,885	'
Business Acquisition, Contingent Consideration, at Fair Value	0	'	'
Liabilities, Fair Value Disclosure	0	'	'
Fair Value, Inputs, Level 3 [Member]	'	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0	'
Corporate Bonds	'	0	'
Available-for-sale Securities, Failed Auction, Value	277	346	'
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	0	'
Assets, Fair Value Disclosure	277	346	'
Business Acquisition, Contingent Consideration, at Fair Value	5,208	'	'
Liabilities, Fair Value Disclosure	$5,208	'	'

Marketable_Securities_Details

Marketable Securities (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Failed Auction, Value	$277	$346
Available-for-sale Securities, Amortized Cost Basis	86,731	65,063
Available-for-sale Securities, Fair Value Disclosure	86,582	64,963
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Amortized Cost Basis	78,909	57,367
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Fair Value	78,948	57,390
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	5,811	7,016
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	5,821	7,022
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Amortized Cost Basis	0	205
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Fair Value	0	205
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	2,011	475
Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value	1,813	346
US Government and Government Agencies and Authorities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	86,257	64,088
Available-for-sale Securities, Gross Unrealized Gains	50	36
Available-for-sale Securities, Gross Unrealized Losses	-2	-7
Available-for-sale Securities, Fair Value Disclosure	86,305	64,117
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	16,448	9,037
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	-2	-7
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Corporate Bond Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	'	500
Available-for-sale Securities, Gross Unrealized Gains	'	0
Available-for-sale Securities, Gross Unrealized Losses	'	0
Available-for-sale Securities, Fair Value Disclosure	'	500
Auction Rate Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	475	475
Available-for-sale Securities, Gross Unrealized Gains	0	0
Available-for-sale Securities, Gross Unrealized Losses	-198	-129
Available-for-sale Securities, Fair Value Disclosure	277	346
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	475	346
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	-198	-129
Available-for-sale Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	86,732	65,063
Available-for-sale Securities, Gross Unrealized Gains	50	36
Available-for-sale Securities, Gross Unrealized Losses	-200	-136
Available-for-sale Securities, Fair Value Disclosure	86,582	64,963
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	16,448	9,037
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	-2	-7
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	475	346
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	($198)	($129)

Goodwill_and_Purchased_Intangi2

Goodwill and Purchased Intangible Assets (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Finite-Lived Intangible Assets [Line Items]	'	'	'
Goodwill	$22,553	$15,361	$4,492
Business Combination, Goodwill Recognized, Description	'6989	'10756	'
Business Combination Goodwill Recognized Description2	'203	'113	'
Finite-Lived Intangible Assets, Gross	73,752	72,034	'
Finite-Lived Intangible Assets, Accumulated Amortization	62,288	59,676	'
Intangible Assets, Net (Excluding Goodwill)	11,464	12,358	'
Amortization of Intangible Assets	2,592	1,853	1,757
Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months	2,422	'	'
Finite-Lived Intangible Assets, Amortization Expense, Year Two	2,050	'	'
Finite-Lived Intangible Assets, Amortization Expense, Year Three	1,941	'	'
Finite-Lived Intangible Assets, Amortization Expense, Year Four	1,553	'	'
Finite-Lived Intangible Assets, Amortization Expense, Year Five	1,117	'	'
Developed Technology Rights [Member]	'	'	'
Finite-Lived Intangible Assets [Line Items]	'	'	'
Finite-Lived Intangible Assets, Gross	59,831	58,961	'
Finite-Lived Intangible Assets, Accumulated Amortization	51,496	49,358	'
Intangible Assets, Net (Excluding Goodwill)	8,335	9,603	'
Customer Relationships [Member]	'	'	'
Finite-Lived Intangible Assets [Line Items]	'	'	'
Finite-Lived Intangible Assets, Gross	9,560	8,712	'
Finite-Lived Intangible Assets, Accumulated Amortization	7,449	7,102	'
Intangible Assets, Net (Excluding Goodwill)	2,111	1,610	'
Trade Names [Member]	'	'	'
Finite-Lived Intangible Assets [Line Items]	'	'	'
Finite-Lived Intangible Assets, Gross	4,361	4,361	'
Finite-Lived Intangible Assets, Accumulated Amortization	3,343	3,216	'
Intangible Assets, Net (Excluding Goodwill)	$1,018	$1,145	'

Balance_Sheet_Details_Inventor

Balance Sheet Details Inventory (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012
Balance Sheet Details [Abstract]	'	'
Inventory, Raw Materials, Net of Reserves	$31,194	$29,746
Inventory, Work in Process, Net of Reserves	19,867	12,298
Inventory, Finished Goods, Net of Reserves	10,290	15,904
Inventory, Net	61,351	57,948
Inventory Valuation Reserves	6,101	5,620
Inventory Write-down	2,863	2,934
Inventory Disposal	$2,382	$5,241

Balance_Sheet_Details_Property

Balance Sheet Details Property Plant & Equipment (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Balance Sheet Details [Abstract]	'	'	'
Buildings and Land Gross	$5,024	$4,997	'
Machinery and Equipment, Gross	20,827	18,826	'
Furniture and Fixtures, Gross	4,043	3,381	'
Computer Equipments And Software Gross	5,568	7,789	'
Leasehold Improvements, Gross	7,744	6,807	'
Property, Plant and Equipment, Gross	43,206	41,800	'
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	-30,148	-29,891	'
Property, Plant and Equipment, Net	13,058	11,909	'
Depreciation	$4,150	$3,680	$4,210

Balance_Sheet_Details_Other_Cu

Balance Sheet Details Other Current Liabilities (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Balance Sheet Details [Abstract]	'	'
Estimated Litigation Liability, Current	$4,293	$4,293
Other Current Liabilities Subtotal	5,839	4,066
Other Liabilities, Current	$10,132	$8,359

Balance_Sheet_Details_Other_No

Balance Sheet Details Other Non-Current Liabilities (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Balance Sheet Details [Abstract]	'	'
Unrecognized Tax Benefits	$2,806	$5,871
Business Acquisition Contingent Consideration at Fair Value Long Term	4,340	0
Other Liabilities	1,772	2,166
Other Liabilities, Noncurrent	$8,918	$8,037

Debt_Obligations_Details

Debt Obligations (Details) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Jul. 25, 2011	Jul. 30, 2008
Debt Instrument [Line Items]	'	'	'	'	'
Debt Instrument, Face Amount	$60,000,000	$60,000,000	'	$60,000,000	'
Debt Instrument, Interest Rate, Stated Percentage	'	'	'	3.75%	'
Convertible Preferred Stock, Shares Issued upon Conversion	'	'	'	77,241	'
Principal Amount of Note	'	'	'	1,000,000	'
Debt Instrument, Convertible, Conversion Price	'	'	'	$12,950	'
Proceeds from Debt, Net of Issuance Costs	'	50,249,000	'	'	'
Debt Instrument, Unamortized Discount	8,249,000	10,990,000	'	'	'
Convertible Debt, Noncurrent	51,751,000	49,010,000	'	'	'
StockPricePercentageOfConversionPrice	'	'	'	'	130.00%
PrincipalAmountLessThanProductOfLastReportedSalePriceOfCommonStock	'	'	'	'	98.00%
PercentageOfPrincipalAmountsBeingRepurchased	'	'	'	'	100.00%
DebtInstrumentConvertibleInitialCarryingAmountOfLiabilityComponent	'	'	'	'	45,493,000
Payments for (Proceeds from) Derivative Instrument, Financing Activities	0	0	14,507,000	'	'
Issuancecostofdebtinstrument	'	'	'	'	2,251,000
Issuance cost allocated to APIC	'	'	'	'	544,000
debtissuancecosttobeallocated	'	'	'	'	1,707,000
Contractual Interest Coupon	2,250,000	2,251,000	999,000	'	'
Amortization of Debt Discount (Premium)	2,740,000	2,486,000	1,031,000	'	'
Amortization of Financing Costs	303,000	250,000	98,000	'	'
Interest Expense, Debt	5,293,000	4,987,000	2,128,000	'	'
Warrant Strike Price	'	'	'	$17,000	$17,000
Class of Warrant or Right, Number of Securities Called by Warrants or Rights	'	'	'	'	4,634,000
Proceeds from Issuance of Warrants	0	0	7,007,000	'	'
expected life of the warrant	$3	'	'	'	'

Commitments_and_Contingencies_1

Commitments and Contingencies (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Loss Contingencies [Line Items]	'	'	'	'
Document Period End Date	31-Dec-13	'	'	'
Standard Product Warranty Accrual	'	$2,024	$1,406	$1,654
Product Warranty Accrual, Warranties Issued	1,956	2,482	1,987	'
Product Warranty Accrual, Additions from Business Acquisition	0	225	0	'
Product Warranty Expense	-2,429	-2,089	-2,235	'
Product Warranty Accrual, Payments	1,551	2,024	1,406	'
MaximumCapacityToGuaranteeUnderExistingLettersOfCredit	40,000	'	'	'
Loss Contingency, Damages Awarded, Value	15,475	'	'	'
Estimated Litigation Liability	4,293	'	'	'
Estimated litigation liabilty unaccrued	6,285	'	'	'
Operating Leases, Rent Expense	3,794	3,134	3,139	'
Operatingleases,equipment	171	123	111	'
Operating Leases, Future Minimum Payments Due	3,873	'	'	'
Operating Leases, Future Minimum Payments, Due in Two Years	3,712	'	'	'
Operating Leases, Future Minimum Payments, Due in Three Years	2,682	'	'	'
Operating Leases, Future Minimum Payments, Due in Four Years	2,037	'	'	'
Operating Leases, Future Minimum Payments, Due in Five Years	1,955	'	'	'
Operating Leases, Future Minimum Payments, Due Thereafter	704	'	'	'
Royalty Expense	831	1,165	1,086	'
Purchase Commitment, Remaining Minimum Amount Committed	$15,678	'	'	'

Preferred_Share_Purchase_Right1

Preferred Share Purchase Rights (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012
Preferred Share Purchase Rights [Abstract]	'	'
Preferred Stock, Redemption Price Per Share	$120	'
Preferred Stock, Par or Stated Value Per Share	$0.00	$0.00
Rights plan share percentage	15.00%	'

ShareBased_Compensation_and_Em2

Share-Based Compensation and Employee Benefit Plans (Details) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010	Nov. 01, 2009
	Rate	Rate	Rate
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized	'	'	'	'	3,300,000
shares carried previous stock plan	'	'	'	'	753,000
Share based Compensation shares for issuance	2,264,000	2,472,000	'	'	'
Share-based Compensation	$4,106,000	$4,001,000	$4,802,000	'	'
Tax effect on share based compensation	1,500,000	1,551,000	1,902,000	'	'
Net effect on net income share based compensation	2,606,000	2,450,000	2,900,000	'	'
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	648,000	211,000	528,000	'	'
effect on earnings per share basic	-0.08	-0.08	-0.09	'	'
effect on earnings per share diluted	-0.08	-0.07	-0.09	'	'
Granted Options to employees	0	165,000	0	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term	'0 years 0 months 15 days	'5 years 0 months 0 days	'0 years 0 months 15 days	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate	0.00%	85.20%	0.00%	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate	0.00%	0.00%	0.00%	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate	0.00%	0.80%	0.00%	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value	$0	$7,880	$0	'	'
Optionsgrantednonemployees	272,000	337,000	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	970,000	1,487,000	1,428,000	1,950,000	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$13.94	$14.15	$14.42	$19.14	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures	0	195,000	0	'	'
Share-based Compensation Arrangements by Share-based Payment Award, Options, Grants in Period, Weighted Average Exercise Price	$0	$11.90	$0	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period	-96,000	-6,000	-7,000	'	'
Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price	$8.10	$10.16	$10.27	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Expirations in Period	-392,000	-130,000	-515,000	'	'
ShareBasedCompensationOptionExpired	$16.60	$14	$32.35	'	'
Stock Issued During Period, Shares, Share-based Compensation, Forfeited	-29,000	0	0	'	'
ShareBasedCompensationOptionsForfeited	$7.88	$0	$0	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'3 years 9 months 30 days	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value	1,602,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number	953,000	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Exercise Price	$13.98	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Remaining Contractual Term	'3 years 8 months 30 days	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value	1,599,000	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	768,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$14.81	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term	'2 years 7 months 15 days	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value	1,310,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Total Intrinsic Value	312,000	14,000	14,000	'	'
total unrecognized compensation cost - option	1,110,000	'	'	'	'
Wght average period for compensation cost recognized	'3 years 0 months 16 days	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,116,000	1,380,000	1,465,000	1,455,000	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$9.73	$8.37	$8.01	$7.28	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	333,000	409,000	535,000	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$12.37	$9.81	$10.25	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	-470,000	-457,000	-436,000	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$7.74	$8.53	$8.46	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	-127,000	-37,000	-89,000	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$9.29	$8.16	$0	'	'
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	5,755,000	'	'	'	'
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	'1 year 11 months 16 days	'	'	'	'
Employee Stock Purchase Plan available	1,116,000	837,000	'	'	'
Contribution plan Employee Percentage	100.00%	'	'	'	'
Defined Contribution Plan, Maximum Annual Contribution Per Employee, Percent	50.00%	'	'	'	'
Defined Contribution Plan, Cost Recognized	957,000	880,000	838,000	'	'
Range One [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	292,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$6.80	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'5 years 1 month 28 days	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	238,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$6.80	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$6.80	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$6.80	'	'	'	'
Range Two [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	257,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$11.65	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'7 years 1 month 30 days	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	109,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$11.15	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$7.86	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$13.59	'	'	'	'
Range Three [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	243,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$16.22	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'1 year 1 month 35 days	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	243,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$16.22	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$13.62	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$21.13	'	'	'	'
Range Four [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	178,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$25.89	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'0 years 0 months 33 days	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	178,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$25.89	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$22.09	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$29.85	'	'	'	'
Range Five [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	970,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$13.94	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	'3 years 8 months 39 days	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	768,000	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$14.81	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$6.80	'	'	'	'
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$29.85	'	'	'	'
Stock Options [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation	570,000	282,000	404,000	'	'
Restricted Stock Units (RSUs) [Member]	'	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'	'
Share-based Compensation	$3,536,000	$3,719,000	$4,398,000	'	'

Other_Income_Expense_Details

Other Income (Expense) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Component of Other Income, Nonoperating [Line Items]	'	'	'
Foreign Currency Transaction Gain (Loss), before Tax	$8	($482)	$846
Marketable Securities, Realized Gain (Loss)	0	0	1
Other Nonoperating Income (Expense)	$8	($482)	$847

Income_Taxes_Details

Income Taxes (Details) (USD $)	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
	Rate	Rate	Rate
Income Tax Examination [Line Items]	'	'	'	'
Current Federal Tax Expense (Benefit)	($1,790,000)	$3,164,000	$1,737,000	'
Current State and Local Tax Expense (Benefit)	-122,000	312,000	318,000	'
Current Foreign Tax Expense (Benefit)	1,497,000	2,880,000	2,131,000	'
Current Income Tax Expense (Benefit)	-415,000	6,356,000	4,186,000	'
Deferred Federal Income Tax Expense (Benefit)	-2,378,000	-18,003,000	-8,038,000	'
Deferred State and Local Income Tax Expense (Benefit)	938,000	-2,799,000	-818,000	'
Deferred Foreign Income Tax Expense (Benefit)	-70,000	-12,000	-162,000	'
Deferred Income Tax Expense (Benefit)	-1,510,000	-20,814,000	-9,018,000	'
Income Tax Expense (Benefit)	-1,925,000	-14,458,000	-4,832,000	'
Income (Loss) from Continuing Operations before Income Taxes, Domestic	-4,860,000	13,278,000	23,963,000	'
Income (Loss) from Continuing Operations before Income Taxes, Foreign	6,393,000	16,129,000	-3,569,000	'
Deferred Tax Assets, Tax Credit Carryforwards, Research	5,233,000	3,506,000	'	'
Deferred Tax Assets Deferred expense reserves and accruals	3,085,000	4,444,000	'	'
Deferred Tax Assets, Deferred Income	2,379,000	3,191,000	'	'
Deferred Tax Assets, Operating Loss Carryforwards, Domestic	1,900,000	2,351,000	'	'
Deferred Tax Assets, Capital Loss Carryforwards	29,000	31,000	'	'
Deferred Tax Assets Foreign Operating Loss and Credit Carryforward	6,327,000	2,145,000	'	'
Deferred Tax Liabilities, Intangible Assets	11,506,000	12,610,000	'	'
Deferred Tax Assets transaction costs	347,000	429,000	'	'
Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost	1,730,000	2,086,000	'	'
Deferred Tax Assets, Inventory	3,935,000	3,517,000	'	'
Deferred Tax Asset Depreciation	356,000	0	'	'
Deferred Tax Assets, Other	223,000	1,946,000	'	'
Deferred Tax Assets, Gross	37,050,000	36,256,000	'	'
Deferred Tax Assets, Valuation Allowance	-1,646,000	-1,361,000	'	'
Deferred Tax Assets, Net of Valuation Allowance	35,404,000	34,895,000	'	'
Deferred Tax Liabilities, Gross	-1,072,000	-611,000	'	'
Deferred Tax Assets, Net	34,332,000	34,284,000	'	'
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	537,000	10,292,000	7,138,000	'
Income Tax Reconciliation, State and Local Income Taxes	828,000	-698,000	207,000	'
Income Tax Reconciliation, Foreign Income Tax Rate Differential	-1,514,000	1,296,000	1,136,000	'
Income Tax Reconciliation, Deductions, Qualified Production Activities	0	-915,000	-536,000	'
Income Tax Reconciliation, Change in Deferred Tax Assets Valuation Allowance	-153,000	-23,313,000	-12,358,000	'
Income Tax Reconciliation, Tax Credits, Research	-1,965,000	0	-875,000	'
Income Tax Reconciliation, Prior Year Income Taxes	401,000	0	0	'
Income Tax Reconciliation, Other Adjustments	-59,000	-1,120,000	456,000	'
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	-126.00%	-49.00%	-24.00%	'
Operating loss carryforward federal	1,371,000	'	'	'
Operating Loss Carryforward State	399,000	'	'	'
Operating loss carryforward foreign	516,000	'	'	'
Federal AMT Carryforward	0	'	'	'
federal RD credit carryforward	4,068,000	'	'	'
State RD Credit Carryforward	1,165,000	'	'	'
foreign RD credit carryforward	4,386,000	'	'	'
Unrecognized Tax Benefits	1,993,000	'	'	'
Correction for prior year income tax balance	850,000	'	'	'
IRS Audit Adjustment	625,000	'	'	'
Undistributed Earnings of Foreign Subsidiaries	2,524,000	'	'	'
Unrecognixed tax benefit balance	5,706,000	9,566,000	8,476,000	6,724,000
Unrecognized Tax Benefits, Increases Resulting from Prior Period Tax Positions	533,000	486,000	1,358,000	'
Unrecognized Tax Benefits, Decreases Resulting from Prior Period Tax Positions	-4,992,000	-494,000	0	'
Unrecognized Tax Benefits, Increases Resulting from Current Period Tax Positions	599,000	1,098,000	394,000	'
Unrecognized Tax Benefits, Reductions Resulting from Lapse of Applicable Statute of Limitations	'	0	0	'
Unrecognized Tax Benefit adjustment to income tax expense	4,278,000	6,272,000	'	'
Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense	-768,000	557,000	330,000	'
Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued	770,000	1,538,000	'	'
Estimated tax reduction for RD	$1,300,000	$800,000	'	'

Accumulated_Other_Comprehensiv2

Accumulated Other Comprehensive Loss (Details) (USD $)	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
In Thousands, unless otherwise specified
Stockholders' Equity Attributable to Parent	($279,003)	($270,489)	($221,778)	'
Accumulated Translation Adjustment [Member]	'	'	'	'
Stockholders' Equity Attributable to Parent	1,645	985	1,379	'
Net current period other comprehensive gain (loss)	660	-394	'	'
Reclassification of accumulated other comprehensive income (loss)	0	0	'	'
Accumulated Net Unrealized Investment Gain (Loss) [Member]	'	'	'	'
Stockholders' Equity Attributable to Parent	150	100	83	'
Net current period other comprehensive gain (loss)	50	17	'	'
Reclassification of accumulated other comprehensive income (loss)	0	0	'	'
Accumulated Other Comprehensive Income (Loss) [Member]	'	'	'	'
Stockholders' Equity Attributable to Parent	1,795	1,085	1,462	930
Net current period other comprehensive gain (loss)	710	-377	'	'
Reclassification of accumulated other comprehensive income (loss)	$0	$0	'	'

Segment_Reporting_and_Geograph2

Segment Reporting and Geographic Information (Details) (USD $)	3 Months Ended								12 Months Ended
	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	$44,485,000	$44,044,000	$46,059,000	$41,650,000	$54,299,000	$62,152,000	$56,326,000	$45,709,000	$176,238,000	$218,486,000	$187,196,000
UNITED STATES	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	40,849,000	42,108,000	52,910,000
Taiwan [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	54,682,000	62,239,000	26,898,000
South Korea [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	10,704,000	33,675,000	26,725,000
Singapore	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	17,260,000	26,183,000	16,344,000
Austria [Domain]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	898,000	11,423,000	15,960,000
JAPAN	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	7,326,000	16,405,000	14,925,000
GERMANY	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	5,669,000	5,393,000	14,657,000
CHINA	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	20,061,000	12,266,000	11,124,000
Other Europe	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	18,789,000	8,794,000	7,653,000
Sales [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	176,238,000	218,486,000	187,196,000
Inspection Revenue [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	89,089,000	128,917,000	91,825,000
Percentage of Inspection Revenues [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.51	0.59	0.49
Metrology Revenue [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	26,500,000	38,001,000	38,616,000
Percentage of Metrology Revenue [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.15	0.17	0.21
Data Analysis & Review [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	17,927,000	19,840,000	23,356,000
Percentage of Data Analysis & Review [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.1	0.09	0.13
Lithography [Domain]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	8,548,000	0	0
Percentage of Lithography [Domain]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.05	0	0
Sales Revenue, Goods, Net [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	21,078,000	20,802,000	21,719,000
Percentage of Parts [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.12	0.1	0.11
Sales Revenue, Services, Net [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	13,096,000	10,926,000	11,680,000
Percentage of Service [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	0.07	0.05	0.06
Sales [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	176,238,000	218,486,000	187,196,000
Percentage of Total Revenue [Member]	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Revenues	'	'	'	'	'	'	'	'	$1	$1	$1

Earnings_Loss_Per_Share_Detail

Earnings (Loss) Per Share (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Earnings (Loss) Per Share [Abstract]	'	'	'	'	'	'	'	'	'	'	'
Options Excluded from calculation	'	'	'	'	'	'	'	'	707	984	1,257
Restricted Stock Units Excluded from Calculation	'	'	'	'	'	'	'	'	3	37	291
Net Income (Loss) Attributable to Parent	$2,054	$252	$759	$393	$28,996	$6,661	$6,346	$1,862	$3,458	$43,865	$25,226
Weighted Average Number of Shares Outstanding, Basic	32,951	32,897	32,567	32,523	32,354	32,317	32,144	32,026	32,783	32,226	31,744
Weighted Average Number Diluted Shares Outstanding Adjustment	'	'	'	'	'	'	'	'	605	627	512
Weighted Average Number of Shares Outstanding, Diluted	33,539	33,426	33,155	33,239	33,045	32,862	32,727	32,713	33,388	32,853	32,256
Earnings Per Share, Basic	$0.06	$0.01	$0.02	$0.01	$0	$0	$0	$0	$0.11	$1.36	$0.79
Earnings Per Share, Diluted	$0.06	$0.01	$0.02	$0.01	$0	$0	$0	$0	$0.10	$1.34	$0.78

Share_Repurchase_Program_Detai

Share Repurchase Program (Details)	Jul. 30, 2008
In Thousands, unless otherwise specified
Share Repurchase Program [Abstract]	'
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000

Quarterly_Consolidated_Financi2

Quarterly Consolidated Financial Data (unaudited) (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Quarterly Consolidated Financial Data (unaudited) [Abstract]	'	'	'	'	'	'	'	'	'	'	'
Revenues	$44,485	$44,044	$46,059	$41,650	$54,299	$62,152	$56,326	$45,709	$176,238	$218,486	$187,196
Gross Profit	22,873	22,470	23,515	21,874	28,563	33,125	30,222	23,765	90,732	115,675	100,353
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	419	37	1,332	-255	6,032	10,571	9,931	2,873	1,533	29,407	20,394
Net Income (Loss) Attributable to Parent	$2,054	$252	$759	$393	$28,996	$6,661	$6,346	$1,862	$3,458	$43,865	$25,226
Earnings Per Share, Basic	$0.06	$0.01	$0.02	$0.01	$0	$0	$0	$0	$0.11	$1.36	$0.79
Earnings Per Share, Diluted	$0.06	$0.01	$0.02	$0.01	$0	$0	$0	$0	$0.10	$1.34	$0.78
Weighted Average Number of Shares Outstanding, Basic	32,951	32,897	32,567	32,523	32,354	32,317	32,144	32,026	32,783	32,226	31,744
Weighted Average Number of Shares Outstanding, Diluted	33,539	33,426	33,155	33,239	33,045	32,862	32,727	32,713	33,388	32,853	32,256