Rudolph 10-Q 6 Aug 14 2014 Q2 Quarterly report Financial data

Document_and_Entity_Informatio

Document and Entity Information Document	6 Months Ended
	Jun. 30, 2014	Jul. 21, 2014
Entity Information [Line Items]	'	'
Entity Registrant Name	'RUDOLPH TECHNOLOGIES INC	'
Entity Central Index Key	'0001094392	'
Current Fiscal Year End Date	'--12-31	'
Entity Filer Category	'Accelerated Filer	'
Document Type	'10-Q	'
Document Period End Date	30-Jun-14	'
Document Fiscal Year Focus	'2014	'
Document Fiscal Period Focus	'Q2	'
Amendment Flag	'false	'
Entity Common Stock, Shares Outstanding	'	33,267,370

Statements_of_Financial_Positi

Statements of Financial Position Consolidated Balance Sheet (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Cash and Cash Equivalents, at Carrying Value	$54,658	$80,790
Marketable Securities, Current	122,643	86,582
Accounts Receivable, Net, Current	50,811	53,437
Inventory, Net	65,624	61,351
Prepaid Expense and Other Assets	22,204	14,804
Assets, Current	315,940	296,964
Property, Plant and Equipment, Net	11,837	13,058
Goodwill	22,495	22,553
Intangible Assets, Net (Excluding Goodwill)	10,124	11,464
Other Assets, Noncurrent	28,685	27,323
Assets	389,081	371,362
Accounts Payable and Accrued Liabilities	16,347	12,772
Other Liabilities, Current	33,509	18,918
Liabilities, Current	49,856	31,690
Convertible senior notes	53,225	51,751
Other Liabilities, Noncurrent	9,403	8,918
Liabilities	112,484	92,359
Commitments and Contingencies	'	'
Common Stock, Value, Issued	33	33
Additional Paid in Capital, Common Stock	418,215	415,739
Accumulated Other Comprehensive Income (Loss), Net of Tax	-1,541	-1,795
Retained Earnings (Accumulated Deficit)	-140,110	-134,974
Stockholders' Equity Attributable to Parent	276,597	279,003
Liabilities and Equity	$389,081	$371,362

Statements_of_Financial_Positi1

Statements of Financial Position B/S Parenthetical (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Allowance for Doubtful Accounts Receivable, Current	$1,175	$1,152

Statements_of_Income_Statement

Statements of Income Statement (USD $)	3 Months Ended		6 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Revenues	$43,018	$46,059	$84,667	$87,709
Cost of Revenue	19,714	22,544	39,794	42,320
Gross Profit	23,304	23,515	44,873	45,389
Research and Development Expense	10,841	10,214	20,846	19,917
Selling, General and Administrative Expense	21,285	10,519	32,066	20,771
Amortization of Intangible Assets	670	648	1,340	1,264
Operating Expenses	32,796	21,381	54,252	41,952
Operating Income (Loss)	-9,492	2,134	-9,379	3,437
Interest Expense, net	1,341	1,200	2,622	2,409
Total other expenses (income)	162	-398	35	-49
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	-10,995	1,332	-12,036	1,077
Income Tax Expense (Benefit)	-6,583	573	-6,900	-75
Net Income (Loss) Attributable to Parent	($4,412)	$759	($5,136)	$1,152
Earnings (Loss) Per Share, Basic	($0.13)	$0.02	($0.15)	$0.04
Earnings (Loss) Per Share, Diluted	($0.13)	$0.02	($0.15)	$0.03
Weighted Average Number of Shares Outstanding, Basic	33,240	32,567	33,186	32,633
Weighted Average Number of Shares Outstanding, Diluted	33,240	33,155	33,186	33,284

Statements_of_Comprehensive_In

Statements of Comprehensive Income (Loss) Statement (USD $)	3 Months Ended		6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Net Income (Loss) Attributable to Parent	($4,412)	$759	($5,136)	$1,152
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	24	-55	27	-41
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	359	-499	227	-948
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	($4,029)	$205	($4,882)	$163

Statements_of_Cash_Flows_State

Statements of Cash Flows Statement (USD $)	6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013
Net Income (Loss) Attributable to Parent	($5,136)	$1,152
Amortization	1,344	1,444
Amortization of Financing Costs and Discounts	1,648	1,482
Depreciation	2,038	2,067
Foreign Currency Transaction Gain (Loss), before Tax	35	-49
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	145	0
Share-based Compensation	3,162	1,955
Provision for doubtful accounts and inventory valuation	1,398	1,673
Increase (Decrease) in Deferred Income Taxes	65	0
Increase (Decrease) in Other Operating Assets and Liabilities, Net	6,047	-15,812
Net Cash Provided by (Used in) Operating Activities	10,746	-6,088
Payments to Acquire Marketable Securities	-110,591	-61,414
Proceeds from Sale and Maturity of Marketable Securities	75,389	35,440
Payments to Acquire Property, Plant, and Equipment	-1,020	-2,485
Payments to Acquire Businesses, Net of Cash Acquired	0	-3,365
Net Cash Provided by (Used in) Investing Activities	-36,222	-31,824
Payments for Repurchase of Common Stock	-986	0
Proceeds from (Payments for) Other Financing Activities	-194	0
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	182	630
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	118	611
Net Cash Provided by (Used in) Financing Activities	-880	1,241
Effect of Exchange Rate on Cash and Cash Equivalents	224	-790
Cash and Cash Equivalents, Period Increase (Decrease)	-26,132	-37,461
Cash and Cash Equivalents, at Carrying Value	54,658	66,792
Income Taxes Paid	893	3,923
Interest Paid	$1,125	$1,125

Basis_of_Presentation_Notes

Basis of Presentation (Notes)	6 Months Ended
	Jun. 30, 2014
Organization and Nature of Operations: [Abstract]	'
Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]	'
	Basis of Presentation
	The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”).  Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes.  Actual amounts could differ materially from those amounts.  The interim results for the three and six month periods ended June 30, 2014 are not necessarily indicative of results to be expected for the entire year or any future periods.  This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2013 (“2013 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2013 has been derived from the audited consolidated financial statements included in the 2013 10-K.
	Reclassifications
	Certain prior period amounts have been reclassified to conform to current financial statement presentation. These amounts include the reclassification of a portion of deferred tax assets from Other assets to Prepaid expenses and other current assets in the Condensed Consolidated Balance Sheets.
	Recent Accounting Pronouncements
	In May 2014, the Financial Accounting Standards Board issued Accounting Standards Update (ASU) No. 2014-09, “Revenue from Contracts with Customers.” ASU 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. ASU 2014-09 will be effective for the Company starting in the first quarter of 2017. ASU 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU 2014-09 is recognized as an adjustment to the 2017 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Business_Combination

Business Combination	6 Months Ended
	Jun. 30, 2014
Business Combination [Abstract]	'
Business Combination Disclosure [Text Block]	'
	Business Combinations
	Tamar Technology
	In April 2013, the Company announced that it had acquired specific assets of Tamar Technology, located in Newbury Park, California. The acquired business has been integrated into the Company’s inspection technology group.  The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.

Fair_Value_Measurements

Fair Value Measurements	6 Months Ended
	Jun. 30, 2014
Fair Value Measurements [Abstract]	'
Fair Value Disclosures [Text Block]	'
	Fair Value Measurements
	The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels.  Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement.
	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2014 and December 31, 2013:
							Fair Value Measurements Using
			Carrying				Quoted Prices in		Significant Other		Significant
			Value				Active Markets for		Observable Inputs		Unobservable Inputs
							Identical Assets		(Level 2)		(Level 3)
							(Level 1)
	June 30, 2014
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	122,335			$	—	$	122,335	$	—
	Auction rate securities		308				—		—		308
	Total Assets		$	122,643			$	—	$	122,335	$	308
	Liabilities:
	Contingent consideration - acquisitions		$	5,159			$	—	$	—	$	5,159
	Foreign currency forward contracts		47				—		47		—
	Total Liabilities		$	5,206			$	—	$	47	$	5,159
	December 31, 2013
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	86,305			$	—	$	86,305	$	—
	Auction rate securities		277				—		—		277
	Foreign currency forward contracts		6				—		6		—
	Total Assets		$	86,588			$	—	$	86,311	$	277
	Liabilities:
	Contingent consideration - acquisitions		$	5,208			$	—	$	—	$	5,208
	Total Liabilities		$	5,208			$	—	$	—	$	5,208
	Level 1 investments are based on quoted prices that are available in active markets.
	The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Available-for-sale debt securities prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class.
	Level 3 investments consist of an auction rate security and contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these investments. The Level 3 assumptions used in the discounted cash flow model for the auction rate security included estimates of interest rates of 3.1%, timing and amount of cash flows and expected holding periods of the auction rate security, based on data available on June 30, 2014. Changes in the unobservable input values would be unlikely to cause material changes in the fair value of the auction rate security. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 5.3% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rate could result in a significantly lower fair value measurement for the contingent consideration.
	This table presents a reconciliation for all assets and liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2014:
			Fair Value Measurements Using
			Significant Unobservable Inputs
			(Level 3)
	Assets:
	Balance at December 31, 2013		$	277
	Unrealized gain in accumulated other comprehensive loss		31
	Purchases		—
	Sales, issuances, and settlements		—
	Transfers into (out of) Level 3		—
	Balance at June 30, 2014		$	308
	Liabilities:
	Balance at December 31, 2013		$	5,208
	Additions		—
	Total gain included in earnings		145
	Payments		(194		)
	Transfers into (out of) Level 3		—
	Balance at June 30, 2014		$	5,159
	See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities.
	Fair Value of Other Financial Instruments
	The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.
	The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value of expected cash flow model incorporating the probabilities of the contingent events occurring.
	The following table reflects information pertaining to the Company’s convertible senior notes:
		June 30, 2014				December 31, 2013
	Net carrying value of convertible senior notes	$	53,225			$	51,751
	Estimated fair value of convertible senior notes	$	61,692			$	59,340
	Estimated interest rate used in discounted cash flow model	3.2		%		4.2		%
	There was no contingent interest related to the Company’s convertible senior notes as of June 30, 2014 and December 31, 2013.

Marketable_Securities

Marketable Securities	6 Months Ended
	Jun. 30, 2014
Marketable Securities [Abstract]	'
Marketable Securities [Text Block]	'
	Marketable Securities
	The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale.  Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.”  Realized gains and losses on available-for-sale securities are included in “Other expense (income)” in the Condensed Consolidated Statements of Operations.  The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities.  The cost of securities sold is based on the specific identification method.
	As of June 30, 2014, the Company held one auction rate security with a fair value of $308. The underlying asset of the Company’s auction rate security consisted of a municipal bond with an auction reset feature. Due to auction failures in the marketplace, the Company will not have access to these funds unless (a) future auctions occur and are successful, (b) the security is called by the issuer, (c) the Company sells the security in an available secondary market, or (d) the underlying note matures. Currently, there are no active secondary markets. As of June 30, 2014, the Company had recorded a cumulative temporary unrealized impairment loss of $167 within “Accumulated other comprehensive loss” based upon its assessment of the fair value of this security. The Company believes that this impairment is temporary as it does not intend to sell this security, the Company will not be required to sell this security before recovery, and the Company expects to recover the amortized cost basis of this security.
	The Company has determined that the gross unrealized losses on its marketable securities at June 30, 2014 and December 31, 2013 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value.
	At June 30, 2014 and December 31, 2013, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses		Fair Value
	June 30, 2014
	Municipal notes and bonds	$	122,292	$	44	$	1	$	122,335
	Auction rate securities	475		—		167		308
	Total marketable securities	$	122,767	$	44	$	168	$	122,643
	December 31, 2013
	Municipal notes and bonds	$	86,257	$	50	$	2	$	86,305
	Auction rate securities	475		—		198		277
	Total marketable securities	$	86,732	$	50	$	200	$	86,582
	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2014 and December 31, 2013:
		June 30, 2014				December 31, 2013
		Amortized Cost		Fair Value		Amortized Cost		Fair Value
	Due within one year	$	110,226	$	110,253	$	81,495	$	81,533
	Due after one through five years	12,066		12,082		4,762		4,772
	Due after five through ten years	—		—		—		—
	Due after ten years	475		308		475		277
	Total marketable securities	$	122,767	$	122,643	$	86,732	$	86,582
	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2014 and December 31, 2013:
		In Unrealized Loss Position For Less Than 12 Months				In Unrealized Loss Position For Greater Than 12 Months
		Fair Value		Gross Unrealized Losses		Fair Value		Gross Unrealized Losses
	June 30, 2014
	Municipal notes and bonds	$	15,122	$	1	$	—	$	—
	Auction rate securities	—		—		308		167
	Total	$	15,122	$	1	$	308	$	167
	December 31, 2013
	Municipal notes and bonds	$	16,448	$	2	$	—	$	—
	Auction rate securities	—		—		277		198
	Total	$	16,448	$	2	$	277	$	198
	See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

Derivative_Instruments_and_Hed

Derivative Instruments and Hedging Activities	6 Months Ended
	Jun. 30, 2014
Derivative Instruments and Hedging Activities [Abstract]	'
Derivative Instruments and Hedging Activities Disclosure [Text Block]	'
	Derivative Instruments and Hedging Activities
	The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At June 30, 2014 and December 31, 2013, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either “Prepaid expenses and other current assets” or “Other current liabilities” in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $53 and $255 for the six month period ended June 30, 2014 and 2013, respectively, are recorded within the caption “Other expense (income)” in the Condensed Consolidated Statements of Operations.
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2014 and December 31, 2013 were as follows:
		June 30, 2014			December 31, 2013
	Notional amount	$	1,675		$	1,029
	Fair value of asset (liability)	$	(47	)	$	6

Identifiable_Intangible_Assets

Identifiable Intangible Assets and Goodwill	6 Months Ended
	Jun. 30, 2014
Finite-Lived Intangible Assets [Line Items]	'
Goodwill and Intangible Assets Disclosure [Text Block]	'
	Goodwill and Purchased Intangible Assets
	Goodwill
	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2012	$	15,361
	Goodwill acquired during period	6,989
	Other, primarily currency translation	203
	Balance at December 31, 2013	$	22,553
	Goodwill acquired during period	—
	Other	(58		)
	Balance at June 30, 2014	$	22,495
	Purchased Intangible Assets
	Purchased intangible assets as of  June 30, 2014 and December 31, 2013 are as follows:
		Gross Carrying Amount			Accumulated Amortization		Net
	June 30, 2014
	Finite-lived intangibles:
	Developed technology	$	59,831		$	52,569	$	7,262
	Customer and distributor relationships	9,560			7,639		1,921
	Trade names	4,361			3,420		941
	Total identifiable intangible assets	$	73,752		$	63,628	$	10,124
	December 31, 2013
	Finite-lived intangibles:
	Developed technology	$	59,831		$	51,496	$	8,335
	Customer and distributor relationships	9,560			7,449		2,111
	Trade names	4,361			3,343		1,018
	Total identifiable intangible assets	$	73,752		$	62,288	$	11,464
	Intangible asset amortization expense for the three and six months ended June 30, 2014 was $670 and $1,340, respectively. For the three and six months ended June 30, 2013, intangible assets amortization expense was $648 and $1,264, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2014 will be $1,081, and for each of the next five years estimated amortization expense amounts to $2,050 for 2015, $1,941 for 2016, $1,553 for 2017, $1,117 for 2018, and $1,117 for 2019.

Balance_Sheet_Details

Balance Sheet Details	6 Months Ended
	Jun. 30, 2014
Balance Sheet Detail [Abstract]	'
Balance Sheet Details [Text Block]	'
	Balance Sheet Details
	Inventories
	Inventories are comprised of the following:
			June 30, 2014			December 31, 2013
	Materials		$	29,464		$	31,194
	Work-in-process		24,679			19,867
	Finished goods		11,481			10,290
	Total inventories		$	65,624		$	61,351
	The Company has established reserves of $7,056 and $6,101 as of June 30, 2014 and December 31, 2013, respectively, for slow moving and obsolete inventory, which are included in the amounts above.
	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		June 30, 2014			December 31, 2013
	Land and building	$	5,024		$	5,024
	Machinery and equipment	21,314			20,827
	Furniture and fixtures	3,484			4,043
	Computer equipment	6,088			5,568
	Leasehold improvements	7,811			7,744
		43,721			43,206
	Less: Accumulated depreciation	31,884			30,148
	Total property, plant and equipment, net	$	11,837		$	13,058
	Other assets
	Other assets is comprised of the following:
			June 30, 2014			December 31, 2013
	Deferred income taxes		$	27,087		$	25,547
	Other		1,598			1,776
	Total other assets		$	28,685		$	27,323
	Other current liabilities
	Other current liabilities is comprised of the following:
			June 30, 2014			December 31, 2013
	Litigation accrual		$	13,833		$	4,293
	Deferred revenue		10,363			8,383
	Contingent consideration - acquisitions		1,197			868
	Other		8,116			5,374
	Total other current liabilities		$	33,509		$	18,918
	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
			June 30, 2014			December 31, 2013
	Unrecognized tax benefits (including interest)		$	3,526		$	2,806
	Contingent consideration - acquisitions		3,962			4,340
	Other		1,915			1,772
	Total other non-current liabilities		$	9,403		$	8,918

Debt_Obligations

Debt Obligations	6 Months Ended
	Jun. 30, 2014
Debt Obligations [Abstract]	'
Debt Disclosure [Text Block]	'
	Debt Obligations
	On July 25, 2011, the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011, between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provide for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012, at an annual rate of 3.75% and will mature on July 15, 2016, unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is $17.00 per share subject to adjustment in accordance with the terms of the agreement. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant were $50,249.
	The following table reflects the net carrying value of the Notes:
		June 30, 2014		December 31, 2013
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	6,775		8,249
	Net carrying value of convertible senior notes	$	53,225	$	51,751
	The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2014 and June 30, 2013.
		Three Months Ended June 30,				Six Months Ended June 30,
		2014		2013		2014		2013
	Contractual interest coupon	$	563	$	562	$	1,125	$	1,124
	Amortization of interest discount	739		670		1,474		1,337
	Amortization of debt issuance costs	87		73		174		145
	Total interest cost recognized	$	1,389	$	1,305	$	2,773	$	2,606
	The remaining bond discount of the Notes of $6,775, as of June 30, 2014, will be amortized over the remaining life of the Notes.

Commitments_and_Contingencies

Commitments and Contingencies	6 Months Ended
	Jun. 30, 2014
Commitments and Contingencies [Abstract]	'
Commitments and Contingencies Disclosure [Text Block]	'
	Commitments and Contingencies
	Warranty Reserves
	The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the year-end and warranty accruals are related to sales during the year.
	Changes in the Company’s warranty reserves are as follows:
		Six Months Ended June 30,
		2014		2013
	Balance, beginning of the period	$	1,551	$	2,024
	Accruals	961		1,033
	Less: Usage	1,035		1,365
	Balance, end of the period	$	1,477	$	1,692
	Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.”
	Legal Matters
	From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. As previously disclosed, in December 2007, the Company completed the acquisition of specific assets and liabilities of the semiconductor division of Applied Precision LLC (“Applied”). As a result of the acquisition, the Company assumed certain liabilities of Applied including a lawsuit filed in the United States District Court, District of Arizona, by Integrated Technology Corporation (“ITC”) which alleged Applied’s PrecisionPoint™, PrecisionWoRx® and ProbeWoRx® products infringed an ITC patent (Integrated Technology Corporation v. Rudolph Technologies, Inc., No.  CV-06-2182-PHX-ROS).  Prior to trial, the District Court ruled that such products sold prior to August of 2007 (the “pre-August 2007 tools”) infringed the ITC patent. At trial in December of 2011, a trial verdict was rendered in which the jury found that while the Company’s products manufactured after August of 2007 (the “post-August 2007 tools”) did not literally infringe ITC’s patent, the products were found to infringe under a rule known as the doctrine of equivalents, a legal principle which expands the language of patent claims to encompass products or processes which may otherwise be found not to literally infringe the patent. The jury awarded $15,475 to ITC in damages for sales made during the years 2000-2011, of which award approximately one-half related to sales for pre-August 2007 tools. The jury found that for the sales of the post-August 2007 tools, the infringement was willful. On July 23, 2012, the District Court issued an Order which affirmed the jury’s award, applied treble damages to the portion of the jury award related to post-August 2007 tool sales and granted ITC’s motion for attorney’s fees and prejudgment interest on the verdict and attorney’s fees. At that time, the District Court also enjoined the Company from future infringement of the ITC patent and from selling or supplying the applicable products with the applicable features from or into the United States. The Company appealed the injunction, the District Court Order and the damages assessment. In October 2012, the injunction was stayed by the U.S. Federal Court of Appeals and thereafter in June of 2013, the patent expired. On November 4, 2013, the U.S. Federal Court of Appeals issued a ruling which reversed the judgment of infringement against all post-August 2007 tools, reversed the finding of willfulness, vacated the treble damages award, vacated the award of attorney’s fees and costs, remanded the issue back to the District Court for further review, and affirmed the award of damages and interest for the pre-August 2007 tools. As a result, the matter is resolved with regard to the alleged infringement of the post-August 2007 tools in the Company’s favor. With regard to the damages assessment against the pre-August 2007 tools, on March 4, 2014, the Company filed a Petition for a Writ of Certiorari with the U.S. Supreme Court to appeal the basis of the Federal Court of Appeals’ decision affirming the damages award for the pre-August 2007 tools. On June 30, 2014, the Supreme Court denied the Company’s Petition and as a result, the Company increased its related litigation accrual by $9,622 for a total accrual of $13,833. On July 22, 2014, the Company then paid to ITC $10,613 which represented only the damages and interest portion of the judgment. Since the patent expired in June of 2013 and payment of the judgment has been made, this matter is fully resolved with the sole exception of the issue of the remanded attorney’s fees. The Company believes that it has meritorious defenses regarding this issue and intends to continue to vigorously prosecute the matter. Included in the total accrual of $13,833, which is recorded under the caption, “Other current liabilities,” in the Condensed Consolidated Balance Sheets, is $3,250 related to the remanded attorney’s fees.  The Company expects that this is the maximum liability reasonably possible for the attorney’s fees, including interest, for this lawsuit with respect to both the pre-August 2007 and post-2007 August tools.
	In the Company’s patent infringement suit against Camtek, Ltd., of Migdal Hamek, Israel, concerning the Company’s proprietary continuous scan wafer inspection technology, the U.S. Federal Court of Appeals issued a ruling on August 22, 2011.  In its opinion, the Appellate Court affirmed multiple rulings from trial at the District Court level including (i) finding the Company’s U.S. Patent No. 6,826,298 valid, (ii) the part of the infringement ruling based on the finding that Camtek’s Falcon product strobes “based on velocity,” and (iii) the dismissal of Camtek’s claim against the Company for inequitable conduct against the U.S. Patent and Trademark Office.  The court did, however, revise one claim construction ruling made by the District Court in the original case.  As a result, the Appellate Court set aside the verdict delivered by the jury for damages and the District Court’s decision to enter an injunction against Camtek’s selling Falcon tools in the U.S. and remanded the case back to the trial court for a limited trial on this single infringement issue.  On March 31, 2014, the District Court ruled in the Company’s favor, finding that Camtek’s Falcon tools continue to infringe the Company’s patent even under the revised claim construction of the patent, obviating the need for the limited trial.  The Company intends to petition the court to reinstate a permanent injunction against the sale by Camtek of its infringing semiconductor inspection systems. The Company also anticipates that the damages originally awarded by the jury in 2009 will be reinstated, as well as related interest and all subsequently awarded damages.   This lawsuit was initially brought in 2005 by August Technology prior to its merger with the Company. A subsequent lawsuit has been filed by Rudolph against Camtek alleging infringement of Rudolph’s U.S. Patent No. 7,729,528, also related to the Company’s proprietary continuous scan wafer inspection technology.  This lawsuit is currently stayed pending resolution of a re-examination petition filed by Camtek with the U.S. Patent and Trademark Office.
	Letter of Credit
	As of June 30, 2014, the Company had a $40,000 irrevocable standby letter of credit with Credit Suisse AG available to secure the damages assessment in connection with the ITC litigation discussed in Legal Matters above. On July 22, 2014, the Company paid $10,613 to ITC through a draw down of the letter of credit. Pursuant to the terms of the letter of credit, upon draw down of the funds, the letter of credit was collateralized by securities held in the Company’s investment portfolios which were immediately sold to satisfy the letter of credit payment. The letter of credit was subsequently canceled upon completion of this payment.

ShareBased_Compensation

Share-Based Compensation	6 Months Ended
	Jun. 30, 2014
Share-based Compensation [Abstract]	'
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	'
	Share-Based Compensation
	Restricted Stock Unit Activity
	A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2014 is as follows:
		Number of Shares	Weighted Average Grant Date Fair Value
	Nonvested at December 31, 2013	1,116	$	9.73
	Granted	577	$	11.04
	Less: Vested	395	$	8.18
	Less: Forfeited	33	$	10.39
	Nonvested at June 30, 2014	1,265	$	10.79
	As of June 30, 2014 and December 31, 2013, there was $9,157 and $5,755 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively.  That cost is expected to be recognized over a weighted average period of 2.5 years and 2.0 years for the respective periods.

Other_Expense_Income

Other Expense (Income)	6 Months Ended
	Jun. 30, 2014
Other Income (Expense) [Abstract]	'
Other Income and Other Expense Disclosure [Text Block]	'
	Other Expense (Income)
		Three Months Ended					Six Months Ended
		June 30,					June 30,
		2014		2013			2014		2013
	Foreign currency exchange losses (gains), net	$	162	$	(398	)	$	35	$	(49	)
	Total other expense (income)	$	162	$	(398	)	$	35	$	(49	)

Income_Taxes

Income Taxes	6 Months Ended
	Jun. 30, 2014
Income Taxes [Abstract]	'
Income Tax Disclosure [Text Block]	'
	Income Taxes
	The following table provides details of income taxes:
		Three Months Ended						Six Months Ended
		June 30,						June 30,
		2014			2013			2014			2013
	Income (loss) before income taxes	$	(10,995	)	$	1,332		$	(12,036	)	$	1,077
	Provision (benefit) for income taxes	$	(6,583	)	$	573		$	(6,900	)	$	(75	)
	Effective tax rate	59.9		%	43		%	57.3		%	(7.0		)%
	The income tax provision for the three and six months ended June 30, 2014 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the six months ended June 30, 2014 compared to the same period for the prior year are primarily due to the generation of federal R&D credits for both 2012 and 2013 recognized in 2013, which are not available in the 2014 period as a result of legislation, and an increase in foreign tax expense in excess of foreign tax credits generated in 2014.
	The Company currently has a partial valuation allowance recorded against certain deferred tax assets. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including prudent and feasible tax planning strategies in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to closely monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a valuation allowance of $1,646 as of June 30, 2014 and December 31, 2013.

Earnings_Per_Share

Earnings Per Share	6 Months Ended
	Jun. 30, 2014
Earnings (Loss) Per Share [Abstract]	'
Earnings Per Share [Text Block]	'
	Earnings (Loss) Per Share
	Basic earnings (loss) per share is calculated using the weighted average number of shares of common stock outstanding during the period.  Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period.  Potential common shares that would have the effect of increasing diluted earnings per share are considered to be antidilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the three and six months ended June 30, 2014, all outstanding restricted stock units of 1,265 and stock options of 714 were excluded from the computation of diluted loss per share because the effect in the period would be antidilutive. For the three and six months ended June 30, 2013, the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share totaled 711and 760, respectively, because their effect was antidilutive. Diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes and warrants as their impact would be anti-dilutive.
	The Company’s basic and diluted earnings (loss) per share amounts are as follows:
		Three Months Ended June 30,					Six Months Ended June 30,
		2014			2013		2014			2013
	Numerator:
	Net income (loss)	$	(4,412	)	$	759	$	(5,136	)	$	1,152
	Denominator:
	Basic earnings (loss) per share - weighted average shares outstanding	33,240			32,567		33,186			32,633
	Effect of potential dilutive securities:
	Employee stock options and restricted stock units - dilutive shares	—			588		—			651
	Diluted earnings (loss) per share - weighted average shares outstanding	33,240			33,155		33,186			33,284
	Earnings (loss) per share:
	Basic	$	(0.13	)	$	0.02	$	(0.15	)	$	0.04
	Diluted	$	(0.13	)	$	0.02	$	(0.15	)	$	0.03

Accumulated_Other_Comprehensiv

Accumulated Other Comprehensive Loss (Notes)	6 Months Ended
	Jun. 30, 2014
Accumulated Other Comprehensive Loss [Abstract]	'
Comprehensive Income (Loss) Note [Text Block]	'
	Accumulated Other Comprehensive Loss
	Comprehensive income includes net income (loss), foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the unaudited Condensed Consolidated Statements of Comprehensive Income (Loss) for the effect of the components of comprehensive loss to our net income (loss).
	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments			Accumulated other comprehensive loss
	Beginning Balance, December 31, 2012	$	985		$	100		$	1,085
	Net current period other comprehensive loss	660			50			710
	Reclassifications	—			—			—
	Beginning Balance, December 31, 2013	$	1,645		$	150		$	1,795
	Net current period other comprehensive gain	(227		)	(27		)	(254		)
	Reclassifications	—			—			—
	Ending balance, June 30, 2014	$	1,418		$	123		$	1,541

Segment_Reporting_and_Geograph

Segment Reporting and Geographic Information	6 Months Ended
	Jun. 30, 2014
Segment Reporting and Geographic Information [Abstract]	'
Segment Reporting Disclosure [Text Block]	'
	Segment Reporting and Geographic Information
	The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection, metrology, and process control software systems used by microelectronics device manufacturers, and therefore have one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level.
	The following table lists the different sources of revenue:
			Three Months Ended										Six Months Ended
			June 30,										June 30,
			2014						2013				2014				2013
	Systems and Software:
	Inspection		$	22,852			53	%	$	26,829	58	%	$	40,853	48	%	$	51,708	59	%
	Metrology		4,652				11	%	5,869		13	%	10,401		12	%	6,157		7	%
	Lithography		—				—	%	—		—	%	3,657		5	%	3,700		4	%
	Data Analysis and Review		6,956				16	%	4,856		11	%	12,930		15	%	9,013		10	%
	Parts		5,072				12	%	5,255		11	%	10,112		12	%	10,801		13	%
	Services		3,486				8	%	3,250		7	%	6,714		8	%	6,330		7	%
	Total revenue		$	43,018			100	%	$	46,059	100	%	$	84,667	100	%	$	87,709	100	%
	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:
		Three Months Ended							Six Months Ended
		June 30,							June 30,
		2014				2013			2014		2013
	United States	$	9,704			$	10,077		$	19,638	$	19,478
	Taiwan	12,252				19,490			20,182		32,621
	Japan	5,068				1,319			6,353		3,707
	China	2,295				4,520			7,125		7,269
	South Korea	887				1,644			8,439		5,067
	Other Asia	5,995				3,167			12,586		8,575
	Germany	3,908				1,550			5,251		4,075
	Other Europe	2,909				4,292			5,093		6,917
	Total revenue	$	43,018			$	46,059		$	84,667	$	87,709
	The following customers each accounted for more than 10% of total revenues for the indicated periods.
		Six Months Ended
		June 30,
		2014			2013
	Customer A	11.1	%		10.8	%
	Customer B	6.2	%		11	%
	Customer C	4.1	%		10	%

Share_Repurchase_Program

Share Repurchase Program	6 Months Ended
	Jun. 30, 2014
Share Repurchase Program [Abstract]	'
Share Repurchase [Text Block]	'
	Share Repurchase Program
	In 2008, the Board of Directors authorized a share repurchase program of up to 3,000 shares of the Company’s common stock with no established end date.  The program allows for repurchases to be made in the open market or through negotiated transactions from time to time. At June 30, 2014, 2,900 shares remained available for future stock repurchases under this repurchase program. The shares of common stock purchased under the share repurchase program are being retired.
	The Company did not repurchase any shares of its common stock during the three and six month periods ended June 30, 2013. The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2014:
		Three and Six Months Ended
		June 30, 2014
	Shares of common stock repurchased	100
	Cost of stock repurchased		$986
	Average price paid per share		$9.86

Fair_Value_Measurements_Tables

Fair Value Measurements - (Tables)	6 Months Ended
	Jun. 30, 2014
Fair Value Measurements [Abstract]	'
Fair Value, Measurement Inputs, Disclosure [Table Text Block]	'
	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2014 and December 31, 2013:
							Fair Value Measurements Using
			Carrying				Quoted Prices in		Significant Other		Significant
			Value				Active Markets for		Observable Inputs		Unobservable Inputs
							Identical Assets		(Level 2)		(Level 3)
							(Level 1)
	June 30, 2014
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	122,335			$	—	$	122,335	$	—
	Auction rate securities		308				—		—		308
	Total Assets		$	122,643			$	—	$	122,335	$	308
	Liabilities:
	Contingent consideration - acquisitions		$	5,159			$	—	$	—	$	5,159
	Foreign currency forward contracts		47				—		47		—
	Total Liabilities		$	5,206			$	—	$	47	$	5,159
	December 31, 2013
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	86,305			$	—	$	86,305	$	—
	Auction rate securities		277				—		—		277
	Foreign currency forward contracts		6				—		6		—
	Total Assets		$	86,588			$	—	$	86,311	$	277
	Liabilities:
	Contingent consideration - acquisitions		$	5,208			$	—	$	—	$	5,208
	Total Liabilities		$	5,208			$	—	$	—	$	5,208
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	'
	This table presents a reconciliation for all assets and liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2014:
			Fair Value Measurements Using
			Significant Unobservable Inputs
			(Level 3)
	Assets:
	Balance at December 31, 2013		$	277
	Unrealized gain in accumulated other comprehensive loss		31
	Purchases		—
	Sales, issuances, and settlements		—
	Transfers into (out of) Level 3		—
	Balance at June 30, 2014		$	308
	Liabilities:
	Balance at December 31, 2013		$	5,208
	Additions		—
	Total gain included in earnings		145
	Payments		(194		)
	Transfers into (out of) Level 3		—
	Balance at June 30, 2014		$	5,159
Fair value convertible senior notes [Table Text Block]	'
	The following table reflects information pertaining to the Company’s convertible senior notes:
		June 30, 2014				December 31, 2013
	Net carrying value of convertible senior notes	$	53,225			$	51,751
	Estimated fair value of convertible senior notes	$	61,692			$	59,340
	Estimated interest rate used in discounted cash flow model	3.2		%		4.2		%

Marketable_Securities_Tables

Marketable Securities - (Tables)	6 Months Ended
	Jun. 30, 2014
Schedule of Available-for-sale Securities [Line Items]	'
Schedule of marketable securities by category [Table Text Block]	'
	At June 30, 2014 and December 31, 2013, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses		Fair Value
	June 30, 2014
	Municipal notes and bonds	$	122,292	$	44	$	1	$	122,335
	Auction rate securities	475		—		167		308
	Total marketable securities	$	122,767	$	44	$	168	$	122,643
	December 31, 2013
	Municipal notes and bonds	$	86,257	$	50	$	2	$	86,305
	Auction rate securities	475		—		198		277
	Total marketable securities	$	86,732	$	50	$	200	$	86,582
Schedule of marketable securities classified by contractual maturity date [Table Text Block]	'
	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2014 and December 31, 2013:
		June 30, 2014				December 31, 2013
		Amortized Cost		Fair Value		Amortized Cost		Fair Value
	Due within one year	$	110,226	$	110,253	$	81,495	$	81,533
	Due after one through five years	12,066		12,082		4,762		4,772
	Due after five through ten years	—		—		—		—
	Due after ten years	475		308		475		277
	Total marketable securities	$	122,767	$	122,643	$	86,732	$	86,582
Schedule of marketable securities in unrealized loss positions [Table Text Block]	'
	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2014 and December 31, 2013:
		In Unrealized Loss Position For Less Than 12 Months				In Unrealized Loss Position For Greater Than 12 Months
		Fair Value		Gross Unrealized Losses		Fair Value		Gross Unrealized Losses
	June 30, 2014
	Municipal notes and bonds	$	15,122	$	1	$	—	$	—
	Auction rate securities	—		—		308		167
	Total	$	15,122	$	1	$	308	$	167
	December 31, 2013
	Municipal notes and bonds	$	16,448	$	2	$	—	$	—
	Auction rate securities	—		—		277		198
	Total	$	16,448	$	2	$	277	$	198

Derivative_Instruments_and_Hed1

Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)	6 Months Ended
	Jun. 30, 2014
Derivative Instruments and Hedging Activities [Abstract]	'
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	'
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2014 and December 31, 2013 were as follows:
		June 30, 2014			December 31, 2013
	Notional amount	$	1,675		$	1,029
	Fair value of asset (liability)	$	(47	)	$	6

Identifiable_Intangible_Assets1

Identifiable Intangible Assets and Goodwill - (Tables)	6 Months Ended
	Jun. 30, 2014
Identifiable Intangible Assets and Goodwill [Abstract]	'
Schedule of Goodwill [Table Text Block]	'
	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2012	$	15,361
	Goodwill acquired during period	6,989
	Other, primarily currency translation	203
	Balance at December 31, 2013	$	22,553
	Goodwill acquired during period	—
	Other	(58		)
	Balance at June 30, 2014	$	22,495
Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]	'
	Purchased intangible assets as of  June 30, 2014 and December 31, 2013 are as follows:
		Gross Carrying Amount			Accumulated Amortization		Net
	June 30, 2014
	Finite-lived intangibles:
	Developed technology	$	59,831		$	52,569	$	7,262
	Customer and distributor relationships	9,560			7,639		1,921
	Trade names	4,361			3,420		941
	Total identifiable intangible assets	$	73,752		$	63,628	$	10,124
	December 31, 2013
	Finite-lived intangibles:
	Developed technology	$	59,831		$	51,496	$	8,335
	Customer and distributor relationships	9,560			7,449		2,111
	Trade names	4,361			3,343		1,018
	Total identifiable intangible assets	$	73,752		$	62,288	$	11,464

Balance_Sheet_Details_Tables

Balance Sheet Details - (Tables)	6 Months Ended
	Jun. 30, 2014
Balance Sheet Detail [Abstract]	'
Schedule of Inventory, Current [Table Text Block]	'
	Inventories
	Inventories are comprised of the following:
			June 30, 2014			December 31, 2013
	Materials		$	29,464		$	31,194
	Work-in-process		24,679			19,867
	Finished goods		11,481			10,290
	Total inventories		$	65,624		$	61,351
Property, Plant and Equipment [Table Text Block]	'
	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		June 30, 2014			December 31, 2013
	Land and building	$	5,024		$	5,024
	Machinery and equipment	21,314			20,827
	Furniture and fixtures	3,484			4,043
	Computer equipment	6,088			5,568
	Leasehold improvements	7,811			7,744
		43,721			43,206
	Less: Accumulated depreciation	31,884			30,148
	Total property, plant and equipment, net	$	11,837		$	13,058
Schedule of Other Assets [Table Text Block]	'
	Other assets
	Other assets is comprised of the following:
			June 30, 2014			December 31, 2013
	Deferred income taxes		$	27,087		$	25,547
	Other		1,598			1,776
	Total other assets		$	28,685		$	27,323
Other Current liabilities [Table Text Block]	'
	Other current liabilities
	Other current liabilities is comprised of the following:
			June 30, 2014			December 31, 2013
	Litigation accrual		$	13,833		$	4,293
	Deferred revenue		10,363			8,383
	Contingent consideration - acquisitions		1,197			868
	Other		8,116			5,374
	Total other current liabilities		$	33,509		$	18,918
Other Non-current liabilities [Table Text Block]	'
	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
			June 30, 2014			December 31, 2013
	Unrecognized tax benefits (including interest)		$	3,526		$	2,806
	Contingent consideration - acquisitions		3,962			4,340
	Other		1,915			1,772
	Total other non-current liabilities		$	9,403		$	8,918

Debt_Obligations_Tables

Debt Obligations - (Tables)	6 Months Ended
	Jun. 30, 2014
Debt Obligations [Abstract]	'
Schedule of carrying value of convertible senior notes [Table Text Block]	'
	The following table reflects the net carrying value of the Notes:
		June 30, 2014		December 31, 2013
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	6,775		8,249
	Net carrying value of convertible senior notes	$	53,225	$	51,751
Schedule of interest cost recognized on convertible senior notes [Table Text Block]	'
	The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2014 and June 30, 2013.
		Three Months Ended June 30,				Six Months Ended June 30,
		2014		2013		2014		2013
	Contractual interest coupon	$	563	$	562	$	1,125	$	1,124
	Amortization of interest discount	739		670		1,474		1,337
	Amortization of debt issuance costs	87		73		174		145
	Total interest cost recognized	$	1,389	$	1,305	$	2,773	$	2,606

Commitments_and_Contingencies_

Commitments and Contingencies - (Tables)	6 Months Ended
	Jun. 30, 2014
Commitments and Contingencies [Abstract]	'
Schedule of changes product warranty liability [Table Text Block]	'
	Changes in the Company’s warranty reserves are as follows:
		Six Months Ended June 30,
		2014		2013
	Balance, beginning of the period	$	1,551	$	2,024
	Accruals	961		1,033
	Less: Usage	1,035		1,365
	Balance, end of the period	$	1,477	$	1,692

ShareBased_Compensation_Tables

Share-Based Compensation - (Tables)	6 Months Ended
	Jun. 30, 2014
Share-based Compensation [Abstract]	'
Summary of restricted stock unit activity [Table Text Block]	'
	A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2014 is as follows:
		Number of Shares	Weighted Average Grant Date Fair Value
	Nonvested at December 31, 2013	1,116	$	9.73
	Granted	577	$	11.04
	Less: Vested	395	$	8.18
	Less: Forfeited	33	$	10.39
	Nonvested at June 30, 2014	1,265	$	10.79

Other_Income_Tables

Other Income - (Tables)	6 Months Ended
	Jun. 30, 2014
Other Income (Expense) [Abstract]	'
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	'
		Three Months Ended					Six Months Ended
		June 30,					June 30,
		2014		2013			2014		2013
	Foreign currency exchange losses (gains), net	$	162	$	(398	)	$	35	$	(49	)
	Total other expense (income)	$	162	$	(398	)	$	35	$	(49	)

Income_Taxes_Tables

Income Taxes - (Tables)	6 Months Ended
	Jun. 30, 2014
Income Taxes [Abstract]	'
Schedule of effective tax rate [Table Text Block]	'
	The following table provides details of income taxes:
		Three Months Ended						Six Months Ended
		June 30,						June 30,
		2014			2013			2014			2013
	Income (loss) before income taxes	$	(10,995	)	$	1,332		$	(12,036	)	$	1,077
	Provision (benefit) for income taxes	$	(6,583	)	$	573		$	(6,900	)	$	(75	)
	Effective tax rate	59.9		%	43		%	57.3		%	(7.0		)%

Earnings_Per_Share_Tables

Earnings Per Share - (Tables)	6 Months Ended
	Jun. 30, 2014
Earnings Per Share [Abstract]	'
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	'
	The Company’s basic and diluted earnings (loss) per share amounts are as follows:
		Three Months Ended June 30,					Six Months Ended June 30,
		2014			2013		2014			2013
	Numerator:
	Net income (loss)	$	(4,412	)	$	759	$	(5,136	)	$	1,152
	Denominator:
	Basic earnings (loss) per share - weighted average shares outstanding	33,240			32,567		33,186			32,633
	Effect of potential dilutive securities:
	Employee stock options and restricted stock units - dilutive shares	—			588		—			651
	Diluted earnings (loss) per share - weighted average shares outstanding	33,240			33,155		33,186			33,284
	Earnings (loss) per share:
	Basic	$	(0.13	)	$	0.02	$	(0.15	)	$	0.04
	Diluted	$	(0.13	)	$	0.02	$	(0.15	)	$	0.03

Accumulated_Other_Comprehensiv1

Accumulated Other Comprehensive Loss (Tables)	6 Months Ended
	Jun. 30, 2014
Accumulated Other Comprehensive Loss [Abstract]	'
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	'
	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments			Accumulated other comprehensive loss
	Beginning Balance, December 31, 2012	$	985		$	100		$	1,085
	Net current period other comprehensive loss	660			50			710
	Reclassifications	—			—			—
	Beginning Balance, December 31, 2013	$	1,645		$	150		$	1,795
	Net current period other comprehensive gain	(227		)	(27		)	(254		)
	Reclassifications	—			—			—
	Ending balance, June 30, 2014	$	1,418		$	123		$	1,541

Segment_Reporting_and_Geograph1

Segment Reporting and Geographic Information - (Tables)	6 Months Ended
	Jun. 30, 2014
Segment Reporting and Geographic Information [Abstract]	'
Schedule of revenue from external customers by Products and Services [Table Text Block]	'
	The following table lists the different sources of revenue:
			Three Months Ended										Six Months Ended
			June 30,										June 30,
			2014						2013				2014				2013
	Systems and Software:
	Inspection		$	22,852			53	%	$	26,829	58	%	$	40,853	48	%	$	51,708	59	%
	Metrology		4,652				11	%	5,869		13	%	10,401		12	%	6,157		7	%
	Lithography		—				—	%	—		—	%	3,657		5	%	3,700		4	%
	Data Analysis and Review		6,956				16	%	4,856		11	%	12,930		15	%	9,013		10	%
	Parts		5,072				12	%	5,255		11	%	10,112		12	%	10,801		13	%
	Services		3,486				8	%	3,250		7	%	6,714		8	%	6,330		7	%
	Total revenue		$	43,018			100	%	$	46,059	100	%	$	84,667	100	%	$	87,709	100	%
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	'
	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:
		Three Months Ended							Six Months Ended
		June 30,							June 30,
		2014				2013			2014		2013
	United States	$	9,704			$	10,077		$	19,638	$	19,478
	Taiwan	12,252				19,490			20,182		32,621
	Japan	5,068				1,319			6,353		3,707
	China	2,295				4,520			7,125		7,269
	South Korea	887				1,644			8,439		5,067
	Other Asia	5,995				3,167			12,586		8,575
	Germany	3,908				1,550			5,251		4,075
	Other Europe	2,909				4,292			5,093		6,917
	Total revenue	$	43,018			$	46,059		$	84,667	$	87,709
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	'
	The following customers each accounted for more than 10% of total revenues for the indicated periods.
		Six Months Ended
		June 30,
		2014			2013
	Customer A	11.1	%		10.8	%
	Customer B	6.2	%		11	%
	Customer C	4.1	%		10	%

Share_Repurchase_Program_Table

Share Repurchase Program - (Tables)	6 Months Ended
	Jun. 30, 2014
Schedule of common stock repurchased [Abstract]	'
share repurchase program [Table Text Block]	'
	The Company did not repurchase any shares of its common stock during the three and six month periods ended June 30, 2013. The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2014:
		Three and Six Months Ended
		June 30, 2014
	Shares of common stock repurchased	100
	Cost of stock repurchased		$986
	Average price paid per share		$9.86

Fair_Value_Measurements_Detail

Fair Value Measurements - (Details) (USD $)	6 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Dec. 31, 2013
	Rate	Rate
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$122,335	$86,305
Available-for-sale Securities, Failed Auction, Value	308	277
Foreign Currency Contracts, Liability, Fair Value Disclosure	47	'
Foreign Currency Contract, Asset, Fair Value Disclosure	'	6
Assets, Fair Value Disclosure	122,643	86,588
Business Combination, Contingent Consideration, Liability	-5,159	5,208
Liabilities, Fair Value Disclosure	5,206	5,208
Fair Value Input Discount Rate	3.10%	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset Value	308	277
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Other Comprehensive Income (Loss)	31	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Purchases, Sales, Issues, Settlements	0	'
Fair Value Measurement With Unobservable Inputs Reconciliation Recurring Basis Asset Sales, Issues, Settlements	0	'
Fair Value, Level 3 Transfers out, Description	'0	'
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	5,159	5,208
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	145	'
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	-194	'
Convertible Debt	53,225	51,751
Long-term Debt, Fair Value	61,692	59,340
Fair Value Inputs Discount Rate 2	3.20%	4.20%
Fair Value Inputs Discount Rate 3	5.30%	'
Fair Value, Inputs, Level 1 [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Available-for-sale Securities, Failed Auction, Value	0	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	'
Foreign Currency Contract, Asset, Fair Value Disclosure	'	0
Assets, Fair Value Disclosure	0	0
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 2 [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	122,335	86,305
Available-for-sale Securities, Failed Auction, Value	0	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	47	'
Foreign Currency Contract, Asset, Fair Value Disclosure	'	6
Assets, Fair Value Disclosure	122,335	86,311
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	-47	0
Fair Value, Inputs, Level 3 [Member]	'	'
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]	'	'
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Available-for-sale Securities, Failed Auction, Value	308	277
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	'
Foreign Currency Contract, Asset, Fair Value Disclosure	'	0
Assets, Fair Value Disclosure	308	277
Business Combination, Contingent Consideration, Liability	-5,159	5,208
Liabilities, Fair Value Disclosure	$5,159	$5,208

Marketable_Securities_Details

Marketable Securities - (Details) (USD $)	6 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Dec. 31, 2013
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Failed Auction, Value	$308	$277
Unrealized Gain (Loss) on Investments	167	'
Available-for-sale Securities, Amortized Cost Basis	122,767	86,732
Available-for-sale Securities, Fair Value Disclosure	122,643	86,582
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]	'	'
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	110,226	81,495
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	110,253	81,533
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	12,066	4,762
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	12,082	4,772
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	475	475
Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value	308	277
US Government and Government Agencies and Authorities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	122,292	86,257
Available-for-sale Securities, Gross Unrealized Gains	44	50
Available-for-sale Securities, Gross Unrealized Losses	1	2
Available-for-sale Securities, Fair Value Disclosure	122,335	86,305
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]	'	'
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	15,122	16,448
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	1	2
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Auction Rate Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	475	475
Available-for-sale Securities, Gross Unrealized Gains	0	0
Available-for-sale Securities, Gross Unrealized Losses	167	198
Available-for-sale Securities, Fair Value Disclosure	308	277
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]	'	'
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	308	277
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	167	198
Available-for-sale Securities [Member]	'	'
Schedule of Available-for-sale Securities [Line Items]	'	'
Available-for-sale Securities, Amortized Cost Basis	122,767	86,732
Available-for-sale Securities, Gross Unrealized Gains	44	50
Available-for-sale Securities, Gross Unrealized Losses	168	200
Available-for-sale Securities, Fair Value Disclosure	122,643	86,582
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]	'	'
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	15,122	16,448
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	1	2
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	308	277
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$167	$198

Derivative_Instruments_and_Hed2

Derivative Instruments and Hedging Activities - (Details) (USD $)	6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013
Derivative [Line Items]	'	'	'
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	($53)	($255)	'
Derivative, Notional Amount	1,675	'	1,029
Derivative Asset, Fair Value, Gross Asset	($47)	'	$6

Identifiable_Intangible_Assets2

Identifiable Intangible Assets - (Details) (USD $)	3 Months Ended		6 Months Ended		12 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013	Dec. 31, 2012
Finite-Lived Intangible Assets and Goodwill [Line Items]	'	'	'	'	'	'
Goodwill	$22,495	'	$22,495	'	$22,553	$15,361
Goodwill, Acquired During Period	'	'	0	'	6,989	'
Goodwill, Translation and Purchase Accounting Adjustments	'	'	'	'	203	'
Business Acquisition Purchase Price Allocation Goodwill Amount 2	'	'	-58	'	'	'
Finite-Lived Intangible Assets, Gross	73,752	'	73,752	'	73,752	'
Finite-Lived Intangible Assets, Accumulated Amortization	63,628	'	63,628	'	62,288	'
Intangible Assets, Net (Excluding Goodwill)	10,124	'	10,124	'	11,464	'
Amortization of Intangible Assets	670	648	1,340	1,264	'	'
Future Amortization Expense, Remainder of Fiscal Year	1,081	'	1,081	'	'	'
Future Amortization Expense, Year One	2,050	'	2,050	'	'	'
Future Amortization Expense, Year Two	1,941	'	1,941	'	'	'
Future Amortization Expense, Year Three	1,553	'	1,553	'	'	'
Future Amortization Expense, Year Four	1,117	'	1,117	'	'	'
Future Amortization Expense, Year Five	1,117	'	1,117	'	'	'
Developed Technology Rights [Member]	'	'	'	'	'	'
Finite-Lived Intangible Assets and Goodwill [Line Items]	'	'	'	'	'	'
Finite-Lived Intangible Assets, Gross	59,831	'	59,831	'	59,831	'
Finite-Lived Intangible Assets, Accumulated Amortization	52,569	'	52,569	'	51,496	'
Intangible Assets, Net (Excluding Goodwill)	7,262	'	7,262	'	8,335	'
Customer Relationships [Member]	'	'	'	'	'	'
Finite-Lived Intangible Assets and Goodwill [Line Items]	'	'	'	'	'	'
Finite-Lived Intangible Assets, Gross	9,560	'	9,560	'	9,560	'
Finite-Lived Intangible Assets, Accumulated Amortization	7,639	'	7,639	'	7,449	'
Intangible Assets, Net (Excluding Goodwill)	1,921	'	1,921	'	2,111	'
Trade Names [Member]	'	'	'	'	'	'
Finite-Lived Intangible Assets and Goodwill [Line Items]	'	'	'	'	'	'
Finite-Lived Intangible Assets, Gross	4,361	'	4,361	'	4,361	'
Finite-Lived Intangible Assets, Accumulated Amortization	3,420	'	3,420	'	3,343	'
Intangible Assets, Net (Excluding Goodwill)	$941	'	$941	'	$1,018	'

Balance_Sheet_Details_Inventor

Balance Sheet Details - Inventory (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Inventory Details [Abstract]	'	'
Inventory, Raw Materials, Net of Reserves	$29,464	$31,194
Inventory, Work in Process, Net of Reserves	24,679	19,867
Inventory, Finished Goods, Net of Reserves	11,481	10,290
Inventory, Net	65,624	61,351
Inventory Valuation Reserves	$7,056	$6,101

Balance_Sheet_Details_Property

Balance Sheet Details - Property Plant & Equipment (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Property Plant & Equipment [Abstract]	'	'
Buildings and Land Gross	$5,024	$5,024
Machinery and Equipment, Gross	21,314	20,827
Furniture and Fixtures, Gross	3,484	4,043
Computer Equipments And Software Gross	6,088	5,568
Leasehold Improvements, Gross	7,811	7,744
Property, Plant and Equipment, Gross	43,721	43,206
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	31,884	30,148
Property, Plant and Equipment, Net	$11,837	$13,058

Balance_Sheet_Details_Other_As

Balance Sheet Details - Other Assets (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Other Assets [Abstract]	'	'
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$27,087	$25,547
Other	1,598	1,776
Total Other Assets	$28,685	$27,323

Balance_Sheet_Details_Other_Cu

Balance Sheet Details - Other Current Liabilities (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Other Current Liabilities [Abstract]	'	'
Estimated Litigation Liability, Current	'	$4,293
Deferred Revenue	10,363	8,383
Contingent Consideration Current Liability	1,197	868
Other Current Liabilities Subtotal	8,116	5,374
Other Liabilities, Current	$33,509	$18,918

Balance_Sheet_Details_Other_No

Balance Sheet Details - Other Non-Current Liabilities (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013
In Thousands, unless otherwise specified
Other Non-current Liabilities [Abstract]	'	'
Unrecognized Tax Benefits	$3,526	$2,806
Contingent consideration - Acquisition non-current liability	3,962	4,340
Other Liabilities	1,915	1,772
Other Liabilities, Noncurrent	$9,403	$8,918

Debt_Obligations_Details

Debt Obligations - (Details) (USD $)	1 Months Ended	3 Months Ended		6 Months Ended
In Thousands, except Share data, unless otherwise specified	Jul. 31, 2011	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013	Jul. 25, 2011
Debt Obligations [Abstract]	'	'	'	'	'	'	'
Convertible Debt	'	$60,000	'	$60,000	'	$60,000	$60,000
Debt Instrument, Interest Rate, Stated Percentage	'	'	'	'	'	'	3.75%
Convertible Preferred Stock, Shares Issued upon Conversion	'	'	'	'	'	'	77.241
Note increment for which conversion amount of Common Stock based	'	'	'	'	'	'	1
Debt Instrument, Convertible, Conversion Price	'	'	'	'	'	'	$12.95
Class of Warrant or Right, Exercise Price of Warrants or Rights	'	'	'	'	'	'	$17
Proceeds from Convertible Debt	50,249	'	'	'	'	'	'
Debt Instrument, Unamortized Discount	'	6,775	'	6,775	'	8,249	'
Convertible senior notes	'	53,225	'	53,225	'	51,751	'
Contractual Interest Coupon	'	563	562	1,125	1,124	'	'
Amortization of Debt Discount (Premium)	'	739	670	1,474	1,337	'	'
Amortization of Financing Costs	'	87	73	174	145	'	'
Interest Expense, Debt	'	$1,389	$1,305	$2,773	$2,606	'	'

Commitments_and_Contingencies_1

Commitments and Contingencies - (Details) (USD $)	6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013	Dec. 31, 2012
Commitments and Contingencies [Abstract]	'	'	'	'
Standard Product Warranty Accrual	$1,477	$1,692	$1,551	$2,024
Product Warranty Accrual, Warranties Issued	961	1,033	'	'
Product Warranty Accrual, Payments	$1,035	$1,365	'	'

Commitments_and_Contingencies_2

Commitments and Contingencies Letter of Credit (Details) (USD $)	6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014
Loss Contingencies [Line Items]	'
MaximumCapacityToGuaranteeUnderExistingLettersOfCredit	$40,000

Legal_Matters_Details

Legal Matters (Details) (USD $)	0 Months Ended	6 Months Ended
In Thousands, unless otherwise specified	Jul. 22, 2014	Jun. 30, 2014	Jul. 22, 2014
Commitments and Contingencies [Abstract]	'	'	'
Loss Contingency, Damages Awarded, Value	'	$15,475	'
significant change in litigation accrual	'	9,622	'
Estimated Litigation Liability	'	13,833	3,250
Payments for Legal Settlements	$10,613	'	'

ShareBased_Compensation_Restri

Share-Based Compensation Restricted Stock Units (Details) (USD $)	3 Months Ended	6 Months Ended		12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013	Dec. 31, 2013
Restricted Stock Units Activity [Abstract]	'	'	'	'
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount	711	'	760	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	'	1,265	'	1,116
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	'	$10.79	'	$9.73
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	'	577	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	'	$11.04	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	'	395	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	'	$8.18	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	'	33	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	'	$10.39	'	'
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	'	$9,157	'	$5,755
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	'	'2 years 6 months 0 days	'	'2 years 0 months 1 day

Other_Income_Details

Other Income - (Details) (USD $)	3 Months Ended		6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Other Income (Expense) [Abstract]	'	'	'	'
Foreign currency exchange losses (gains), net	$162	($398)	$35	($49)
Total other expenses (income)	$162	($398)	$35	($49)

Income_Taxes_Details

Income Taxes - (Details) (USD $)	3 Months Ended		6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Income Taxes [Abstract]	'	'	'	'
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	($10,995)	$1,332	($12,036)	$1,077
Income Tax Expense (Benefit)	-6,583	573	-6,900	-75
Effective Income Tax Rate	59.90%	43.00%	57.30%	-7.00%
Valuation Allowance, Amount	$1,646	'	$1,646	'

Earnings_Per_Share_Details

Earnings Per Share - (Details) (USD $)	3 Months Ended		6 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Earnings Per Share [Abstract]	'	'	'	'
Restricted stock units excluded from Computation of diluted loss per share	1,265	'	1,265	'
Net Income (Loss) Attributable to Parent	($4,412)	$759	($5,136)	$1,152
Weighted Average Number of Shares Outstanding, Basic	33,240	32,567	33,186	32,633
Weighted Average Number Diluted Shares Outstanding Adjustment	0	588	0	651
Weighted Average Number of Shares Outstanding, Diluted	33,240	33,155	33,186	33,284
Earnings (Loss) Per Share, Basic	($0.13)	$0.02	($0.15)	$0.04
Earnings (Loss) Per Share, Diluted	($0.13)	$0.02	($0.15)	$0.03
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount	'	711	'	760
Stock Options Excluded from Computation of diluted loss per share	714	'	714	'

Accumulated_Other_Comprehensiv2

Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) (USD $)	Jun. 30, 2014	Dec. 31, 2013	Dec. 31, 2012
In Thousands, unless otherwise specified
Stockholders' Equity Attributable to Parent	$276,597	$279,003	'
Accumulated Translation Adjustment [Member]	'	'	'
Stockholders' Equity Attributable to Parent	1,418	1,645	985
Net current period other comprehensive gain (loss)	-227	660	'
Reclassification of accumulated other comprehensive income (loss)	0	0	'
Accumulated Net Unrealized Investment Gain (Loss) [Member]	'	'	'
Stockholders' Equity Attributable to Parent	123	150	100
Net current period other comprehensive gain (loss)	-27	50	'
Reclassification of accumulated other comprehensive income (loss)	0	0	'
Accumulated Other Comprehensive Income (Loss) [Member]	'	'	'
Stockholders' Equity Attributable to Parent	1,541	1,795	1,085
Net current period other comprehensive gain (loss)	-254	710	'
Reclassification of accumulated other comprehensive income (loss)	$0	$0	'

Segment_Reporting_Details

Segment Reporting (Details) (USD $)	3 Months Ended		6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
			Rate	Rate
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	$43,018	$46,059	$84,667	$87,709
Concentration Risk, Percentage	'	'	11.10%	10.80%
Inspection Revenue [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	22,852	26,829	40,853	51,708
Metrology Revenue [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	4,652	5,869	10,401	6,157
Lithography Revenue [Domain]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	0	0	3,657	3,700
Data Analysis & Review [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	6,956	4,856	12,930	9,013
Sales Revenue, Goods, Net [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	5,072	5,255	10,112	10,801
Sales Revenue, Services, Net [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	3,486	3,250	6,714	6,330
Sales Revenue, Segment [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	$43,018	$46,059	$84,667	$87,709
Sales [Member] | Percentage of Inspection Revenues [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	53.00%	58.00%	48.00%	59.00%
Sales [Member] | Percentage of Metrology Revenue [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	11.00%	13.00%	12.00%	7.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	0.00%	0.00%	5.00%	4.00%
Sales [Member] | Percentage of Data Analysis & Review [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	16.00%	11.00%	15.00%	10.00%
Sales [Member] | Percentage of Parts [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	12.00%	11.00%	12.00%	13.00%
Sales [Member] | Percentage of Service [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	8.00%	7.00%	8.00%	7.00%
Sales [Member] | Percentage of Total Revenue [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Concentration Risk, Percentage	100.00%	100.00%	100.00%	100.00%

Segment_Reporting_and_Geograph2

Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended		6 Months Ended
In Thousands, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	$43,018	$46,059	$84,667	$87,709
UNITED STATES	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	9,704	10,077	19,638	19,478
TAIWAN, PROVINCE OF CHINA	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	12,252	19,490	20,182	32,621
JAPAN	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	5,068	1,319	6,353	3,707
CHINA	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	2,295	4,520	7,125	7,269
South Korea [Domain]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	887	1,644	8,439	5,067
Asia [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	5,995	3,167	12,586	8,575
GERMANY	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	3,908	1,550	5,251	4,075
Other Europe [Domain]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	2,909	4,292	5,093	6,917
Sales [Member]	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'
Revenues	$43,018	$46,059	$84,667	$87,709

Segment_Reporting_and_Geograph3

Segment Reporting and Geographic Information Customer Reporting (Details)	6 Months Ended
	Jun. 30, 2014	Jun. 30, 2013
	Rate	Rate
Segment Reporting Information [Line Items]	'	'
Entity-Wide Revenue, Major Customer, Percentage	11.10%	10.80%
Major Customers Two [Domain]	'	'
Segment Reporting Information [Line Items]	'	'
Entity-Wide Revenue, Major Customer, Percentage	6.20%	11.00%
Major Customer Three [Domain]	'	'
Segment Reporting Information [Line Items]	'	'
Entity-Wide Revenue, Major Customer, Percentage	4.10%	10.00%

Share_Repurchase_Program_Detai

Share Repurchase Program - (Details) (USD $)	3 Months Ended	6 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Jun. 30, 2014	Jun. 30, 2014	Jul. 30, 2008
Share Repurchase Program [Abstract]	'	'	'
Restricted stock units excluded from Computation of diluted loss per share	1,265	1,265	'
Stock Repurchased and Retired During Period, Shares	'	100	'
Stock Repurchased During Period, Value	'	$986	'
Share repurchase program, authorized amount of shares	'	'	3,000
Stock Repurchase Program, Remaining Number of Shares Authorized to be Repurchased	2,900	2,900	'
StockRepurchasedAndRetired-AveragePricePerShare	'	$9.86	'