Rudolph 10-Q 1 May 15 2015 Q1 Quarterly report Financial data

Document_and_Entity_Informatio

Document and Entity Information Document	3 Months Ended
	Mar. 31, 2015	Apr. 17, 2015
Entity Information [Line Items]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1094392
Current Fiscal Year End Date	-19
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	31-Mar-15
Document Fiscal Year Focus	2015
Document Fiscal Period Focus	Q1
Amendment Flag	FALSE
Entity Common Stock, Shares Outstanding		31,936,332

Statements_of_Financial_Positi

Statements of Financial Position Consolidated Balance Sheet (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Cash and Cash Equivalents, at Carrying Value	$35,365	$43,114
Marketable Securities, Current	123,045	113,871
Accounts Receivable, Net, Current	51,801	51,603
Inventory, Net	68,055	63,344
Deferred Tax Assets, Net, Current	8,986	8,986
Prepaid Expense and Other Assets	6,896	9,403
Assets, Current	294,148	290,321
Property, Plant and Equipment, Net	13,060	12,938
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	8,527	9,042
Other Assets, Noncurrent	31,605	31,841
Assets	369,835	366,637
Accounts Payable and Accrued Liabilities	22,174	17,747
Other Liabilities, Current	17,354	18,119
Liabilities, Current	39,528	35,866
Convertible senior notes	55,584	54,773
Other Liabilities, Noncurrent	9,191	8,670
Liabilities	104,303	99,309
Commitments and Contingencies
Common Stock, Value, Issued	32	32
Additional Paid in Capital, Common Stock	405,472	409,562
Accumulated Other Comprehensive Income (Loss), Net of Tax	-2,206	-2,652
Retained Earnings (Accumulated Deficit)	-137,766	-139,614
Stockholders' Equity Attributable to Parent	265,532	267,328
Liabilities and Equity	$369,835	$366,637

Statements_of_Financial_Positi1

Statements of Financial Position B/S Parenthetical (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Allowance for Doubtful Accounts Receivable, Current	$1,431	$1,279

Statements_of_Income_Statement

Statements of Income Statement (USD $)	3 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Revenues	$52,570	$41,649
Cost of Revenue	23,604	20,080
Gross Profit	28,966	21,569
Research and Development Expense	10,360	10,006
Selling, General and Administrative Expense	12,974	10,780
Amortization of Intangible Assets	515	670
Operating Expenses	23,849	21,456
Operating Income (Loss)	5,117	113
Interest Expense, net	1,382	1,281
Total other expenses (income)	638	-127
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	3,097	-1,041
Income Tax Expense (Benefit)	1,249	-317
Net Income (Loss) Attributable to Parent	$1,848	($724)
Earnings (Loss) Per Share, Basic	$0.06	($0.02)
Earnings (Loss) Per Share, Diluted	$0.06	($0.02)
Weighted Average Number of Shares Outstanding, Basic	31,928	33,092
Weighted Average Number of Shares Outstanding, Diluted	32,549	33,092

Statements_of_Comprehensive_In

Statements of Comprehensive Income (Loss) Statement (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Net Income (Loss) Attributable to Parent	$1,848	($724)
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	-1	3
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	447	-132
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$2,294	($853)

Statements_of_Cash_Flows_State

Statements of Cash Flows Statement (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Net Income (Loss) Attributable to Parent	$1,848	($724)
Amortization	515	672
Amortization of Financing Costs and Discounts	914	822
Depreciation	898	1,038
Foreign Currency Transaction Gain (Loss), before Tax	638	-127
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	-396	75
Share-based Compensation	4,410	1,445
Provision for doubtful accounts and inventory valuation	923	353
Increase (Decrease) in Deferred Income Taxes	0	65
Increase (Decrease) in Other Operating Assets and Liabilities, Net	-587	11,987
Net Cash Provided by (Used in) Operating Activities	9,163	15,606
Payments to Acquire Marketable Securities	-60,458	-69,634
Proceeds from Sale and Maturity of Marketable Securities	51,381	29,018
Payments to Acquire Property, Plant, and Equipment	-1,072	-390
Net Cash Provided by (Used in) Investing Activities	-10,149	-41,006
Payments for Repurchase of Common Stock	-6,786	0
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	61	93
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	93	49
Net Cash Provided by (Used in) Financing Activities	-6,632	142
Effect of Exchange Rate on Cash and Cash Equivalents	-131	74
Cash and Cash Equivalents, Period Increase (Decrease)	-7,749	-25,184
Cash and Cash Equivalents, at Carrying Value	35,365	55,606
Income Taxes Paid	356	567
Interest Paid	$1,125	$1,125

Basis_of_Presentation_Notes

Basis of Presentation (Notes)	3 Months Ended
	Mar. 31, 2015
Organization and Nature of Operations: [Abstract]
Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]	Basis of Presentation
	The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”).  Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes.  Actual amounts could differ materially from reported amounts.  The interim results for the three month period ended March 31, 2015 are not necessarily indicative of results to be expected for the entire year or any future periods.  This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2014 (“2014 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2014 has been derived from the audited consolidated financial statements included in the 2014 10-K.
	Recent Accounting Pronouncements
	In April 2015, the Financial Accounting Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2015-03, “Interest - Imputation of Interest (Subtopic 835-30), Simplifying the Presentation of Debt Issuance Costs.” This standard is intended to simplify the presentation of debt issuance costs. The amendment in this ASU requires that debt issuance cost related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of that debt liability, consistent with debt discounts. The standard is effective for financial statements issued for fiscal years beginning after December 15, 2015. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2015-03 will have on its consolidated financial position, results of operations, and cash flows.
	In December 2014, the FASB issued ASU No.2014-12, “Compensation - Stock Compensation (Topic 718), Accounting for Share-Based Payments When the Terms of an Award Provide That a Performance Target Could Be Achieved after the Requisite Service Period.” The guidance reflects the EITF consensus that an award with a performance target that affects vesting and that could be achieved after an employee completes the requisite service period (i.e., the employee would be eligible to vest in the award regardless of whether the employee is rendering service on the date the performance target could be achieved) should be treated as a performance condition. That is, the performance target is not reflected in the determination of the grant date fair value of the award. Compensation cost attributable to the period for which requisite service has been rendered would be recognized in the period it becomes probable that the performance condition will be achieved. The total amount of compensation cost recognized during and after the requisite service period would reflect the number of awards that are expected to vest and would be adjusted to reflect those awards that ultimately vest. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of this new standard did not have a material impact on the Company’s consolidated financial position, results of operations, and cash flows.
	In August 2014, the FASB issued ASU No. 2014-15, “Presentation of Financial Statements-Going Concern (Subtopic 205-40), Disclosure of Uncertainties about an Entity’s Ability to Continue as a Going Concern.” This standard sets forth management’s responsibility to evaluate, each reporting period, whether there is substantial doubt about our ability to continue as a going concern, and if so, to provide related footnote disclosures. The standard is effective for annual and interim reporting periods ending after December 15, 2016. The Company is currently evaluating this new standard and expects it to have no impact on its financial position, results of operations, and cash flows.
	In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers.” ASU 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. ASU 2014-09 will be effective for the Company starting in the first quarter of 2017. ASU 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU 2014-09 is recognized as an adjustment to the 2017 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2014-09 will have on its consolidated financial position, results of operations, and cash flows.
	In April 2014, the FASB issued ASU No. 2014-08, “Presentation of Financial Statements (Topic 205) and Property, Plant and Equipment (Topic 360): Reporting Discontinued Operations and Disclosure of Disposal of Components of an Entity.” ASU 2014-08 addresses issues with reporting by changing the criteria for reporting discontinued operations and enhancing convergence of the FASB’s and the International Accounting Standard Board’s (“IASB”) reporting requirements for discontinued operations. The standard is effective for all business activities that, on acquisition, are classified as held for sale or all disposals of components of an entity that occur within annual periods beginning on or after December 15, 2014, and interim periods within those years. The adoption of this new standard did not have a material impact on the Company’s consolidated financial position, results of operations, and cash flows.

Fair_Value_Measurements

Fair Value Measurements	3 Months Ended
	Mar. 31, 2015
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements
	The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels.  Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement.
	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at March 31, 2015 and December 31, 2014:
							Fair Value Measurements Using
			Carrying				Quoted Prices in		Significant Other		Significant
			Value				Active Markets for		Observable Inputs		Unobservable Inputs
							Identical Assets		(Level 2)		(Level 3)
							(Level 1)
	March 31, 2015
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	123,045			$	—	$	123,045	$	—
	Foreign currency forward contracts		144				$	—	144		$	—
	Total Assets		$	123,189			$	—	$	123,189	$	—
	Liabilities:
	Contingent consideration - acquisitions		$	4,668			$	—	$	—	$	4,668
	Total Liabilities		$	4,668			$	—	$	—	$	4,668
	December 31, 2014
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	113,871			$	—	$	113,871	$	—
	Foreign currency forward contracts		222				—		222		—
	Total Assets		$	114,093			$	—	$	114,093	$	—
	Liabilities:
	Contingent consideration - acquisitions		$	5,064			$	—	$	—	$	5,064
	Total Liabilities		$	5,064			$	—	$	—	$	5,064
	The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Available-for-sale debt securities prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class.
	Level 3 investments consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value investment. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 8.8% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration.
	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the three months ended March 31, 2015:
			Fair Value Measurements Using
			Significant Unobservable Inputs
			(Level 3)
	Balance at December 31, 2014		$	5,064
	Additions		—
	Total gain included in selling, general and administrative expense		(396		)
	Payments		—
	Transfers into (out of) Level 3		—
	Balance at March 31, 2015		$	4,668
	See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.
	Fair Value of Other Financial Instruments
	The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.
	The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value under an expected cash flow model incorporating the probabilities of the contingent events occurring.
	The following table reflects information pertaining to the Company’s convertible senior notes:
		March 31, 2015				December 31, 2014
	Net carrying value of convertible senior notes	$	55,584			$	54,773
	Estimated fair value of convertible senior notes	$	59,520			$	59,916
	Estimated interest rate used in discounted cash flow model	5		%		5		%
	Fair value of contingent interest	$	—			$	—

Marketable_Securities

Marketable Securities	3 Months Ended
	Mar. 31, 2015
Marketable Securities [Abstract]
Marketable Securities [Text Block]	Marketable Securities
	The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale.  Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.”  Realized gains and losses on available-for-sale securities are included in “Other expense (income)” in the Condensed Consolidated Statements of Operations.  The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities.  The cost of securities sold is based on the specific identification method.
	The Company has determined that the gross unrealized losses on its marketable securities at March 31, 2015 and December 31, 2014 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value.
	At March 31, 2015 and December 31, 2014, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses		Fair Value
	March 31, 2015
	Municipal notes and bonds	$	123,013	$	38	$	6	$	123,045
	Total marketable securities	$	123,013	$	38	$	6	$	123,045
	December 31, 2014
	Municipal notes and bonds	$	113,838	$	37	$	4	$	113,871
	Total marketable securities	$	113,838	$	37	$	4	$	113,871
	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at March 31, 2015 and December 31, 2014:
		March 31, 2015				December 31, 2014
		Amortized Cost		Fair Value		Amortized Cost		Fair Value
	Due within one year	$	108,018	$	108,039	$	107,151	$	107,177
	Due after one through five years	14,995		15,006		6,687		6,694
	Due after five through ten years	—		—		—		—
	Due after ten years	—		—		—		—
	Total marketable securities	$	123,013	$	123,045	$	113,838	$	113,871
	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at March 31, 2015 and December 31, 2014:
		Unrealized Loss Position For Less Than 12 Months				Unrealized Loss Position For Greater Than 12 Months
		Fair Value		Gross Unrealized Losses		Fair Value		Gross Unrealized Losses
	March 31, 2015
	Municipal notes and bonds	$	37,340	$	6	$	—	$	—
	Total	$	37,340	$	6	$	—	$	—
	December 31, 2014
	Municipal notes and bonds	$	26,698	$	4	$	—	$	—
	Total	$	26,698	$	4	$	—	$	—
	See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

Derivative_Instruments_and_Hed

Derivative Instruments and Hedging Activities	3 Months Ended
	Mar. 31, 2015
Derivative Instruments and Hedging Activities [Abstract]
Derivative Instruments and Hedging Activities Disclosure [Text Block]	Derivative Instruments and Hedging Activities
	The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At March 31, 2015 and December 31, 2014, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either prepaid expenses and other current assets or other current liabilities in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and a decrease in the fair value of $78 and $27 for the three month periods ended March 31, 2015 and 2014, respectively, are recorded within the caption Other expense (income) in the Condensed Consolidated Statements of Operations.
	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of March 31, 2015 and December 31, 2014 were as follows:
		March 31, 2015		December 31, 2014
	Notional amount	$	2,861	$	1,610
	Fair value of asset	$	144	$	222

Identifiable_Intangible_Assets

Identifiable Intangible Assets and Goodwill	3 Months Ended
	Mar. 31, 2015
Finite-Lived Intangible Assets [Line Items]
Goodwill and Intangible Assets Disclosure [Text Block]	Goodwill and Purchased Intangible Assets
	Goodwill
	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2014	$	22,495
	Goodwill acquired during period	—
	Other	—
	Balance at March 31, 2015	$	22,495
	Purchased Intangible Assets
	Purchased intangible assets as of March 31, 2015 and December 31, 2014 are as follows:
		Gross Carrying Amount		Accumulated Amortization		Net
	March 31, 2015
	Finite-lived intangibles:
	Developed technology	$	59,831	$	53,819	$	6,012
	Customer and distributor relationships	9,560		7,906		1,654
	Trade names	4,361		3,500		861
	Total identifiable intangible assets	$	73,752	$	65,225	$	8,527
	December 31, 2014
	Finite-lived intangibles:
	Developed technology	$	59,831	$	53,417	$	6,414
	Customer and distributor relationships	9,560		7,818		1,742
	Trade names	4,361		3,475		886
	Total identifiable intangible assets	$	73,752	$	64,710	$	9,042
	Intangible asset amortization expense for the three months ended March 31, 2015 and 2014 were $515 and $670, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2015 will be $1,535, and for each of the next five years estimated amortization expense amounts to $1,941 for 2016, $1,553 for 2017, $1,117 for 2018, $1,117 for 2019, and $914 for 2020.

Balance_Sheet_Details

Balance Sheet Details	3 Months Ended
	Mar. 31, 2015
Balance Sheet Detail [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details
	Inventories
	Inventories are comprised of the following:
			March 31, 2015			December 31, 2014
	Materials		$	33,611		$	29,092
	Work-in-process		21,480			20,424
	Finished goods		12,964			13,828
	Total inventories		$	68,055		$	63,344
	The Company has established reserves of $7,721 and $7,000 as of March 31, 2015 and December 31, 2014, respectively, for slow moving and obsolete inventory, which are included in the amounts above.
	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		March 31, 2015			December 31, 2014
	Land and building	$	5,024		$	5,024
	Machinery and equipment	21,213			20,277
	Furniture and fixtures	3,387			3,387
	Computer equipment	5,800			5,819
	Leasehold improvements	7,780			7,774
		43,204			42,281
	Less: Accumulated depreciation	30,144			29,343
	Total property, plant and equipment, net	$	13,060		$	12,938
	Other assets
	Other assets is comprised of the following:
			March 31, 2015			December 31, 2014
	Deferred income taxes		$	30,348		$	30,348
	Other		1,257			1,493
	Total other assets		$	31,605		$	31,841
	Other current liabilities
	Other current liabilities is comprised of the following:
			March 31, 2015			December 31, 2014
	Litigation accrual		$	3,252		$	3,252
	Deferred revenue		7,840			7,976
	Contingent consideration - acquisitions		795			1,267
	Other		5,467			5,624
	Total other current liabilities		$	17,354		$	18,119
	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
			March 31, 2015			December 31, 2014
	Unrecognized tax benefits (including interest)		$	3,196		$	3,178
	Contingent consideration - acquisitions		3,873			3,797
	Other		2,122			1,695
	Total other non-current liabilities		$	9,191		$	8,670

Debt_Obligations

Debt Obligations	3 Months Ended
	Mar. 31, 2015
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations
	On July 25, 2011, the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011, between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provide for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012, at an annual rate of 3.75% and will mature on July 15, 2016, unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is $17.00 per share subject to adjustment in accordance with the terms of the agreement. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant, were $50,249.
	The following table reflects the net carrying value of the Notes:
		March 31, 2015		December 31, 2014
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	4,416		5,227
	Net carrying value of convertible senior notes	$	55,584	$	54,773
	The following table presents the amount of interest cost recognized relating to the Notes during the three months ended March 31, 2015 and March 31, 2014.
		Three Months Ended March 31,
		2015		2014
	Contractual interest coupon	$	562	$	562
	Amortization of interest discount	811		735
	Amortization of debt issuance costs	103		87
	Total interest cost recognized	$	1,476	$	1,384
	The remaining bond discount of the Notes of $4,416, as of March 31, 2015, will be amortized over the remaining life of the Notes.

Commitments_and_Contingencies

Commitments and Contingencies	3 Months Ended
	Mar. 31, 2015
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies
	Warranty Reserves
	The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the year.
	Changes in the Company’s warranty reserves are as follows:
		Three Months Ended March 31,
		2015		2014
	Balance, beginning of the period	$	1,574	$	1,551
	Accruals	822		481
	Less: Usage	696		523
	Balance, end of the period	$	1,700	$	1,509
	Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.”
	Legal Matters
	From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The Company’s 2014 10-K reflects the status of the Company’s litigation with Integrated Technology Corporation (“ITC”) and Camtek, Ltd. (“Camtek”). The following reflects the material developments during the first quarter of 2015 with regard to these matters.
	Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182-PHX-ROS): This matter is fully resolved with the sole exception of the issue of remanded attorney’s fees which were set by the District Court at $3,252. The Company’s appeal of this order is currently pending review by the U.S. Federal Court of Appeals. The Company believes that it has meritorious defenses regarding this issue and intends to continue to vigorously prosecute the matter. The $3,252 is held in escrow and is recorded in “Prepaid expenses and other current assets” in the Consolidated Balance Sheet at March 31, 2015. The corresponding liability is recorded under the caption, “Other current liabilities,” in the Condensed Consolidated Balance Sheet at March 31, 2015. The Company expects this to be the maximum liability reasonably possible for the attorney’s fees, excluding interest, for this lawsuit with respect to both the pre-August 2007 and the post-2007 August tools which were the subject of this action.
	August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 05-CV-01396 (JRT/FLN): Subsequent to the District Court’s ruling in the Company’s favor that Camtek’s Falcon tools continue to infringe the Company’s patent under the revised claim construction of the patent determined by the U.S. Federal Court of Appeals, the District Court, on February 9, 2015, issued an Order granting the Company’s Motion for Final Judgment, reinstating the original damages and applying prejudgment interest for a total award of $14,512. In addition, the District Court issued a permanent injunction against Camtek from “making, using, selling and offering to sell any of its Falcon machines and any machines that are colorable imitations thereof in the United States, intended for sale and use within the United States, until the expiration of the ‘6,298 patent [projected to be in 2020].” Camtek filed a notice of appeal of the District Court’s Order on March 11, 2015.
	August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 10-CV-2202 (MJD/FLN): With regard to the Company’s subsequently filed lawsuit against Camtek alleging infringement of its U.S. Patent No. 7,729,528, this lawsuit continues to be stayed pending resolution of a re-examination petition filed by Camtek with the U.S. Patent and Trademark Office.
	Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT): On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph ‘6,298 patent by Camtek’s Eagle product with the U.S. District Court in Minnesota. On April 21, 2015, the Company then filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States which is currently pending. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota court and seeking to have the court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. The Company is currently in the process of responding to Camtek’s complaint.

ShareBased_Compensation

Share-Based Compensation	3 Months Ended
	Mar. 31, 2015
Share-based Compensation [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation
	Restricted Stock Unit Activity
	A summary of the Company’s nonvested restricted stock unit activity with respect to the three months ended March 31, 2015 is as follows:
		Number of Shares	Weighted Average Grant Date Fair Value
	Nonvested at December 31, 2014	805	$	11.07
	Granted	509	$	10.25
	Less: Vested	468	$	10.18
	Less: Forfeited	8	$	10.95
	Nonvested at March 31, 2015	838	$	11.07
	As of March 31, 2015 and December 31, 2014, there was $6,207 and $5,492 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively.  That cost is expected to be recognized over a weighted average period of 3.0 years and 3.3 years for the respective periods.

Other_Expense_Income

Other Expense (Income)	3 Months Ended
	Mar. 31, 2015
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other Expense (Income)
		Three Months Ended
		March 31,
		2015		2014
	Foreign currency exchange losses (gains), net	$	638	$	(127	)
	Total other expense (income)	$	638	$	(127	)

Income_Taxes

Income Taxes	3 Months Ended
	Mar. 31, 2015
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes
	The following table provides details of income taxes:
		Three Months Ended
		March 31,
		2015			2014
	Income (loss) before income taxes	$	3,097		$	(1,041	)
	Provision (benefit) for income taxes	$	1,249		$	(317	)
	Effective tax rate	40.3		%	30.5		%
	The income tax provision for the three months ended March 31, 2015 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the three months ended March 31, 2015 compared to the same period for the prior year are primarily due an increase in foreign tax expense in excess of foreign tax credits generated in 2015.
	The Company currently has a partial valuation allowance recorded against certain deferred tax assets. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including prudent and feasible tax planning strategies in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a valuation allowance of $2,445 as of March 31, 2015 and December 31, 2014.

Restructuring_and_asset_impair

Restructuring and asset impairment (Notes)	3 Months Ended
	Mar. 31, 2015
Restructuring and Related Activities [Abstract]
Restructuring, Impairment, and Other Activities Disclosure [Text Block]	Restructuring and Asset Impairment Charges
	The table below provides the activity related to restructuring charges and the remaining liability as of March 31, 2015:
	Restructuring obligations at December 31, 2014	$	764
	Restructuring costs incurred	—
	Cash payments	(203		)
	Restructuring obligations at March 31, 2015	$	561
	During 2014, the Company implemented restructuring initiatives designed to reduce the Company’s cost structure. In connection with this strategy, the Company reduced its global headcount by approximately 9.0% and closed its facility in Mainz, Germany relocating the operations to its facilities in Snoqualmie, Washington and Bloomington, Minnesota, which was completed as of March 31, 2015.
	The Company anticipates the remaining restructuring obligation to be paid by December 31, 2015.

Earnings_Per_Share

Earnings Per Share	3 Months Ended
	Mar. 31, 2015
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings (Loss) Per Share
	Basic earnings (loss) per share is calculated using the weighted average number of shares of common stock outstanding during the period.  Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period.  Potential common shares that would have the effect of increasing diluted earnings per share are considered to be antidilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the three months ended March 31, 2015, the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 299 and 0, respectively. For the three months ended March 31, 2014, all outstanding stock options and restricted stock units totaling 739 and 1,377, respectively, were excluded from the computation of diluted loss per share because the effect in the periods would be anti-dilutive. Diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes and warrants as their impact would be anti-dilutive.
	The Company’s basic and diluted earnings (loss) per share amounts are as follows:
		Three Months Ended March 31,
		2015		2014
	Numerator:
	Net income (loss)	$	1,848	$	(724	)
	Denominator:
	Basic earnings (loss) per share - weighted average shares outstanding	31,928		33,092
	Effect of potential dilutive securities:
	Employee stock options and restricted stock units - dilutive shares	621		—
	Diluted earnings (loss) per share - weighted average shares outstanding	32,549		33,092
	Earnings (loss) per share:
	Basic	$	0.06	$	(0.02	)
	Diluted	$	0.06	$	(0.02	)

Accumulated_Other_Comprehensiv

Accumulated Other Comprehensive Loss (Notes)	3 Months Ended
	Mar. 31, 2015
Accumulated Other Comprehensive Loss [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss
	Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income to our net income.
	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments			Accumulated other comprehensive loss
	Beginning Balance, December 31, 2014	$	2,685		$	(33	)	$	2,652
	Net current period other comprehensive loss	(447		)	1			(446		)
	Reclassifications	—			—			—
	Ending balance, March 31, 2015	$	2,238		$	(32	)	$	2,206

Segment_Reporting_and_Geograph

Segment Reporting and Geographic Information	3 Months Ended
	Mar. 31, 2015
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information
	The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection, metrology, and process control software systems used by microelectronics device manufacturers, and therefore have one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level.
	The following table lists the different sources of revenue:
			Three Months Ended
			March 31,
			2015						2014
	Systems and Software:
	Inspection		$	28,462			54	%	$	18,002	43	%
	Metrology		7,599				15	%	5,749		14	%
	Data Analysis and Review		7,794				15	%	5,974		14	%
	Lithography		21				—	%	3,657		9	%
	Parts		5,655				10	%	5,040		12	%
	Services		3,039				6	%	3,227		8	%
	Total revenue		$	52,570			100	%	$	41,649	100	%
	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:
		Three Months Ended
		March 31,
		2015				2014
	United States	$	17,648			$	9,934
	Taiwan	13,329				7,930
	Japan	1,314				1,284
	China	6,088				4,830
	South Korea	3,531				7,552
	Other Asia	1,777				6,591
	Germany	7,055				1,344
	Other Europe	1,828				2,184
	Total revenue	$	52,570			$	41,649
	The following customers each accounted for more than 10% of total revenues for the indicated periods.
		Three Months Ended
		March 31,
		2015			2014
	Customer A	11.1	%		4.5	%
	Customer B	10.2	%		—	%
	Customer C	2.2	%		14	%
	Customer D	0.9	%		17	%

Share_Repurchase_Program

Share Repurchase Program	3 Months Ended
	Mar. 31, 2015
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Share Repurchase Authorization
	In 2008, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. As of December 31, 2014, the Company had repurchased 1,353 shares of common stock. In January 2015, the Board of Directors approved an additional 1,353 shares to the existing repurchase authorization, bringing the total current authorization back to 3,000 shares as of such date. At March 31, 2015, there were 2,430 shares available for future stock repurchases under this repurchase authorization. The shares of common stock purchased under the share repurchase authorization are being retired.
	The Company did not repurchase any shares of its common stock during the three month period ended March 31, 2014. The following table summarizes the Company’s stock repurchases for the three month period ended March 31, 2015:
		Three Months Ended
		31-Mar-15
	Shares of common stock repurchased	570
	Cost of stock repurchased		$6,786
	Average price paid per share		$11.91

Fair_Value_Measurements_Tables

Fair Value Measurements - (Tables)	3 Months Ended
	Mar. 31, 2015
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Table Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at March 31, 2015 and December 31, 2014:
							Fair Value Measurements Using
			Carrying				Quoted Prices in		Significant Other		Significant
			Value				Active Markets for		Observable Inputs		Unobservable Inputs
							Identical Assets		(Level 2)		(Level 3)
							(Level 1)
	March 31, 2015
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	123,045			$	—	$	123,045	$	—
	Foreign currency forward contracts		144				$	—	144		$	—
	Total Assets		$	123,189			$	—	$	123,189	$	—
	Liabilities:
	Contingent consideration - acquisitions		$	4,668			$	—	$	—	$	4,668
	Total Liabilities		$	4,668			$	—	$	—	$	4,668
	December 31, 2014
	Assets:
	Available-for-sale debt securities:
	Municipal notes and bonds		$	113,871			$	—	$	113,871	$	—
	Foreign currency forward contracts		222				—		222		—
	Total Assets		$	114,093			$	—	$	114,093	$	—
	Liabilities:
	Contingent consideration - acquisitions		$	5,064			$	—	$	—	$	5,064
	Total Liabilities		$	5,064			$	—	$	—	$	5,064
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the three months ended March 31, 2015:
			Fair Value Measurements Using
			Significant Unobservable Inputs
			(Level 3)
	Balance at December 31, 2014		$	5,064
	Additions		—
	Total gain included in selling, general and administrative expense		(396		)
	Payments		—
	Transfers into (out of) Level 3		—
	Balance at March 31, 2015		$	4,668
Fair value convertible senior notes [Table Text Block]	The following table reflects information pertaining to the Company’s convertible senior notes:
		March 31, 2015				December 31, 2014
	Net carrying value of convertible senior notes	$	55,584			$	54,773
	Estimated fair value of convertible senior notes	$	59,520			$	59,916
	Estimated interest rate used in discounted cash flow model	5		%		5		%
	Fair value of contingent interest	$	—			$	—

Marketable_Securities_Tables

Marketable Securities - (Tables)	3 Months Ended
	Mar. 31, 2015
Schedule of Available-for-sale Securities [Line Items]
Schedule of marketable securities by category [Table Text Block]	At March 31, 2015 and December 31, 2014, marketable securities are categorized as follows:
		Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses		Fair Value
	March 31, 2015
	Municipal notes and bonds	$	123,013	$	38	$	6	$	123,045
	Total marketable securities	$	123,013	$	38	$	6	$	123,045
	December 31, 2014
	Municipal notes and bonds	$	113,838	$	37	$	4	$	113,871
	Total marketable securities	$	113,838	$	37	$	4	$	113,871
Schedule of marketable securities classified by contractual maturity date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at March 31, 2015 and December 31, 2014:
		March 31, 2015				December 31, 2014
		Amortized Cost		Fair Value		Amortized Cost		Fair Value
	Due within one year	$	108,018	$	108,039	$	107,151	$	107,177
	Due after one through five years	14,995		15,006		6,687		6,694
	Due after five through ten years	—		—		—		—
	Due after ten years	—		—		—		—
	Total marketable securities	$	123,013	$	123,045	$	113,838	$	113,871
Schedule of marketable securities in unrealized loss positions [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at March 31, 2015 and December 31, 2014:
		Unrealized Loss Position For Less Than 12 Months				Unrealized Loss Position For Greater Than 12 Months
		Fair Value		Gross Unrealized Losses		Fair Value		Gross Unrealized Losses
	March 31, 2015
	Municipal notes and bonds	$	37,340	$	6	$	—	$	—
	Total	$	37,340	$	6	$	—	$	—
	December 31, 2014
	Municipal notes and bonds	$	26,698	$	4	$	—	$	—
	Total	$	26,698	$	4	$	—	$	—

Derivative_Instruments_and_Hed1

Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)	3 Months Ended
	Mar. 31, 2015
Derivative Instruments and Hedging Activities [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of March 31, 2015 and December 31, 2014 were as follows:
		March 31, 2015		December 31, 2014
	Notional amount	$	2,861	$	1,610
	Fair value of asset	$	144	$	222

Identifiable_Intangible_Assets1

Identifiable Intangible Assets and Goodwill - (Tables)	3 Months Ended
	Mar. 31, 2015
Identifiable Intangible Assets and Goodwill [Abstract]
Schedule of Goodwill [Table Text Block]	The changes in the carrying amount of goodwill are as follows:
	Balance at December 31, 2014	$	22,495
	Goodwill acquired during period	—
	Other	—
	Balance at March 31, 2015	$	22,495
Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]	Purchased intangible assets as of March 31, 2015 and December 31, 2014 are as follows:
		Gross Carrying Amount		Accumulated Amortization		Net
	March 31, 2015
	Finite-lived intangibles:
	Developed technology	$	59,831	$	53,819	$	6,012
	Customer and distributor relationships	9,560		7,906		1,654
	Trade names	4,361		3,500		861
	Total identifiable intangible assets	$	73,752	$	65,225	$	8,527
	December 31, 2014
	Finite-lived intangibles:
	Developed technology	$	59,831	$	53,417	$	6,414
	Customer and distributor relationships	9,560		7,818		1,742
	Trade names	4,361		3,475		886
	Total identifiable intangible assets	$	73,752	$	64,710	$	9,042

Balance_Sheet_Details_Tables

Balance Sheet Details - (Tables)	3 Months Ended
	Mar. 31, 2015
Balance Sheet Detail [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories
	Inventories are comprised of the following:
			March 31, 2015			December 31, 2014
	Materials		$	33,611		$	29,092
	Work-in-process		21,480			20,424
	Finished goods		12,964			13,828
	Total inventories		$	68,055		$	63,344
Property, Plant and Equipment [Table Text Block]	Property, Plant and Equipment
	Property, plant and equipment, net is comprised of the following:
		March 31, 2015			December 31, 2014
	Land and building	$	5,024		$	5,024
	Machinery and equipment	21,213			20,277
	Furniture and fixtures	3,387			3,387
	Computer equipment	5,800			5,819
	Leasehold improvements	7,780			7,774
		43,204			42,281
	Less: Accumulated depreciation	30,144			29,343
	Total property, plant and equipment, net	$	13,060		$	12,938
Schedule of Other Assets [Table Text Block]	Other assets
	Other assets is comprised of the following:
			March 31, 2015			December 31, 2014
	Deferred income taxes		$	30,348		$	30,348
	Other		1,257			1,493
	Total other assets		$	31,605		$	31,841
Other Current liabilities [Table Text Block]	Other current liabilities
	Other current liabilities is comprised of the following:
			March 31, 2015			December 31, 2014
	Litigation accrual		$	3,252		$	3,252
	Deferred revenue		7,840			7,976
	Contingent consideration - acquisitions		795			1,267
	Other		5,467			5,624
	Total other current liabilities		$	17,354		$	18,119
Other Non-current liabilities [Table Text Block]	Other non-current liabilities
	Other non-current liabilities is comprised of the following:
			March 31, 2015			December 31, 2014
	Unrecognized tax benefits (including interest)		$	3,196		$	3,178
	Contingent consideration - acquisitions		3,873			3,797
	Other		2,122			1,695
	Total other non-current liabilities		$	9,191		$	8,670

Debt_Obligations_Tables

Debt Obligations - (Tables)	3 Months Ended
	Mar. 31, 2015
Debt Obligations [Abstract]
Schedule of carrying value of convertible senior notes [Table Text Block]	The following table reflects the net carrying value of the Notes:
		March 31, 2015		December 31, 2014
	Convertible senior notes	$	60,000	$	60,000
	Less: Unamortized interest discount	4,416		5,227
	Net carrying value of convertible senior notes	$	55,584	$	54,773
Schedule of interest cost recognized on convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the three months ended March 31, 2015 and March 31, 2014.
		Three Months Ended March 31,
		2015		2014
	Contractual interest coupon	$	562	$	562
	Amortization of interest discount	811		735
	Amortization of debt issuance costs	103		87
	Total interest cost recognized	$	1,476	$	1,384

Commitments_and_Contingencies_

Commitments and Contingencies - (Tables)	3 Months Ended
	Mar. 31, 2015
Commitments and Contingencies [Abstract]
Schedule of changes product warranty liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows:
		Three Months Ended March 31,
		2015		2014
	Balance, beginning of the period	$	1,574	$	1,551
	Accruals	822		481
	Less: Usage	696		523
	Balance, end of the period	$	1,700	$	1,509

ShareBased_Compensation_Tables

Share-Based Compensation - (Tables)	3 Months Ended
	Mar. 31, 2015
Share-based Compensation [Abstract]
Summary of restricted stock unit activity [Table Text Block]	A summary of the Company’s nonvested restricted stock unit activity with respect to the three months ended March 31, 2015 is as follows:
		Number of Shares	Weighted Average Grant Date Fair Value
	Nonvested at December 31, 2014	805	$	11.07
	Granted	509	$	10.25
	Less: Vested	468	$	10.18
	Less: Forfeited	8	$	10.95
	Nonvested at March 31, 2015	838	$	11.07

Other_Income_Tables

Other Income - (Tables)	3 Months Ended
	Mar. 31, 2015
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]
		Three Months Ended
		March 31,
		2015		2014
	Foreign currency exchange losses (gains), net	$	638	$	(127	)
	Total other expense (income)	$	638	$	(127	)

Income_Taxes_Tables

Income Taxes - (Tables)	3 Months Ended
	Mar. 31, 2015
Income Taxes [Abstract]
Schedule of effective tax rate [Table Text Block]	The following table provides details of income taxes:
		Three Months Ended
		March 31,
		2015			2014
	Income (loss) before income taxes	$	3,097		$	(1,041	)
	Provision (benefit) for income taxes	$	1,249		$	(317	)
	Effective tax rate	40.3		%	30.5		%

Restructuring_and_asset_impair1

Restructuring and asset impairment (Tables)	3 Months Ended
	Mar. 31, 2015
Restructuring and Related Activities [Abstract]
Restructuring and Related Costs [Table Text Block]	The table below provides the activity related to restructuring charges and the remaining liability as of March 31, 2015:
	Restructuring obligations at December 31, 2014	$	764
	Restructuring costs incurred	—
	Cash payments	(203		)
	Restructuring obligations at March 31, 2015	$	561

Earnings_Per_Share_Tables

Earnings Per Share - (Tables)	3 Months Ended
	Mar. 31, 2015
Earnings Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The Company’s basic and diluted earnings (loss) per share amounts are as follows:
		Three Months Ended March 31,
		2015		2014
	Numerator:
	Net income (loss)	$	1,848	$	(724	)
	Denominator:
	Basic earnings (loss) per share - weighted average shares outstanding	31,928		33,092
	Effect of potential dilutive securities:
	Employee stock options and restricted stock units - dilutive shares	621		—
	Diluted earnings (loss) per share - weighted average shares outstanding	32,549		33,092
	Earnings (loss) per share:
	Basic	$	0.06	$	(0.02	)
	Diluted	$	0.06	$	(0.02	)

Accumulated_Other_Comprehensiv1

Accumulated Other Comprehensive Loss (Tables)	3 Months Ended
	Mar. 31, 2015
Accumulated Other Comprehensive Loss [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows:
		Foreign currency translation adjustments			Net unrealized losses on available-for-sale investments			Accumulated other comprehensive loss
	Beginning Balance, December 31, 2014	$	2,685		$	(33	)	$	2,652
	Net current period other comprehensive loss	(447		)	1			(446		)
	Reclassifications	—			—			—
	Ending balance, March 31, 2015	$	2,238		$	(32	)	$	2,206

Segment_Reporting_and_Geograph1

Segment Reporting and Geographic Information - (Tables)	3 Months Ended
	Mar. 31, 2015
Segment Reporting and Geographic Information [Abstract]
Schedule of revenue from external customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue:
			Three Months Ended
			March 31,
			2015						2014
	Systems and Software:
	Inspection		$	28,462			54	%	$	18,002	43	%
	Metrology		7,599				15	%	5,749		14	%
	Data Analysis and Review		7,794				15	%	5,974		14	%
	Lithography		21				—	%	3,657		9	%
	Parts		5,655				10	%	5,040		12	%
	Services		3,039				6	%	3,227		8	%
	Total revenue		$	52,570			100	%	$	41,649	100	%
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:
		Three Months Ended
		March 31,
		2015				2014
	United States	$	17,648			$	9,934
	Taiwan	13,329				7,930
	Japan	1,314				1,284
	China	6,088				4,830
	South Korea	3,531				7,552
	Other Asia	1,777				6,591
	Germany	7,055				1,344
	Other Europe	1,828				2,184
	Total revenue	$	52,570			$	41,649
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	The following customers each accounted for more than 10% of total revenues for the indicated periods.
		Three Months Ended
		March 31,
		2015			2014
	Customer A	11.1	%		4.5	%
	Customer B	10.2	%		—	%
	Customer C	2.2	%		14	%
	Customer D	0.9	%		17	%

Share_Repurchase_Program_Table

Share Repurchase Program - (Tables)	3 Months Ended
	Mar. 31, 2015
Schedule of common stock repurchased [Abstract]
share repurchase program [Table Text Block]	The Company did not repurchase any shares of its common stock during the three month period ended March 31, 2014. The following table summarizes the Company’s stock repurchases for the three month period ended March 31, 2015:
		Three Months Ended
		31-Mar-15
	Shares of common stock repurchased	570
	Cost of stock repurchased		$6,786
	Average price paid per share		$11.91

Fair_Value_Measurements_Detail

Fair Value Measurements - (Details) (USD $)	3 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
	Rate	Rate
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$123,045	$113,871
Foreign Currency Contract, Asset, Fair Value Disclosure	144	222
Assets, Fair Value Disclosure	123,189	114,093
Business Combination, Contingent Consideration, Liability	4,668	5,064
Liabilities, Fair Value Disclosure	4,668	5,064
Fair Value, Level 3 Transfers out, Description	0
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	4,668	5,064
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	-396
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	0
Convertible Debt	55,584	54,773
Long-term Debt, Fair Value	59,520	59,916
Fair Value Inputs Discount Rate 2	5.00%	5.00%
Fair Value Inputs Discount Rate 3	8.80%
Long-term Debt, Contingent Payment of Principal or Interest	0	0
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Foreign Currency Contract, Asset, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	123,045	113,871
Foreign Currency Contract, Asset, Fair Value Disclosure	144	222
Assets, Fair Value Disclosure	123,189	114,093
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Foreign Currency Contract, Asset, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Combination, Contingent Consideration, Liability	4,668	5,064
Liabilities, Fair Value Disclosure	$4,668	$5,064

Marketable_Securities_Details

Marketable Securities - (Details) (USD $)	3 Months Ended	12 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	$123,013	$113,838
Available-for-sale Securities, Fair Value Disclosure	123,045	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	108,018	107,151
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	108,039	107,177
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	14,995	6,687
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	15,006	6,694
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	0	0
Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value	0	0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	123,013	113,838
Available-for-sale Securities, Gross Unrealized Gains	38	37
Available-for-sale Securities, Gross Unrealized Losses	6	4
Available-for-sale Securities, Fair Value Disclosure	123,045	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	37,340	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	6	4
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	123,013	113,838
Available-for-sale Securities, Gross Unrealized Gains	38	37
Available-for-sale Securities, Gross Unrealized Losses	6	4
Available-for-sale Securities, Fair Value Disclosure	123,045	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	37,340	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	6	4
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$0	$0

Derivative_Instruments_and_Hed2

Derivative Instruments and Hedging Activities - (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014
Derivative [Line Items]
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	$78	$27
Derivative, Notional Amount	2,861		1,610
Derivative Asset, Fair Value, Gross Asset	$144		$222

Identifiable_Intangible_Assets2

Identifiable Intangible Assets - (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014
Finite-Lived Intangible Assets and Goodwill [Line Items]
Goodwill	$22,495		$22,495
Goodwill, Acquired During Period	0
Business Acquisition Purchase Price Allocation Goodwill Amount 2	0
Finite-Lived Intangible Assets, Gross	73,752		73,752
Finite-Lived Intangible Assets, Accumulated Amortization	65,225		64,710
Intangible Assets, Net (Excluding Goodwill)	8,527		9,042
Amortization of Intangible Assets	515	670
Future Amortization Expense, Remainder of Fiscal Year	1,535
Future Amortization Expense, Year One	1,941
Future Amortization Expense, Year Two	1,553
Future Amortization Expense, Year Three	1,117
Future Amortization Expense, Year Four	1,117
Future Amortization Expense, Year Five	914
Developed Technology Rights [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	59,831		59,831
Finite-Lived Intangible Assets, Accumulated Amortization	53,819		53,417
Intangible Assets, Net (Excluding Goodwill)	6,012		6,414
Customer Relationships [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	9,560		9,560
Finite-Lived Intangible Assets, Accumulated Amortization	7,906		7,818
Intangible Assets, Net (Excluding Goodwill)	1,654		1,742
Trade Names [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	4,361		4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,500		3,475
Intangible Assets, Net (Excluding Goodwill)	$861		$886

Balance_Sheet_Details_Inventor

Balance Sheet Details - Inventory (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Inventory Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$33,611	$29,092
Inventory, Work in Process, Net of Reserves	21,480	20,424
Inventory, Finished Goods, Net of Reserves	12,964	13,828
Inventory, Net	68,055	63,344
Inventory Valuation Reserves	$7,721	$7,000

Balance_Sheet_Details_Property

Balance Sheet Details - Property Plant & Equipment (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Property Plant & Equipment [Abstract]
Buildings and Land Gross	$5,024	$5,024
Machinery and Equipment, Gross	21,213	20,277
Furniture and Fixtures, Gross	3,387	3,387
Computer Equipments And Software Gross	5,800	5,819
Leasehold Improvements, Gross	7,780	7,774
Property, Plant and Equipment, Gross	43,204	42,281
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	30,144	29,343
Property, Plant and Equipment, Net	$13,060	$12,938

Balance_Sheet_Details_Other_As

Balance Sheet Details - Other Assets (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Other Assets [Abstract]
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$30,348	$30,348
Other	1,257	1,493
Total Other Assets	$31,605	$31,841

Balance_Sheet_Details_Other_Cu

Balance Sheet Details - Other Current Liabilities (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Other Current Liabilities [Abstract]
Estimated Litigation Liability, Current		$3,252
Taxes Payable	305	0
Deferred Revenue	7,840	7,976
Contingent Consideration Current Liability	795	1,267
Other Current Liabilities Subtotal	5,467	5,624
Other Liabilities, Current	$17,354	$18,119

Balance_Sheet_Details_Other_No

Balance Sheet Details - Other Non-Current Liabilities (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$3,196	$3,178
Contingent consideration - Acquisition non-current liability	3,873	3,797
Other Liabilities	2,122	1,695
Other Liabilities, Noncurrent	$9,191	$8,670

Debt_Obligations_Details

Debt Obligations - (Details) (USD $)	1 Months Ended	3 Months Ended
In Thousands, except Share data, unless otherwise specified	Jul. 31, 2011	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014	Jul. 25, 2011
Debt Obligations [Abstract]
Convertible Debt		$60,000		$60,000	$60,000
Debt Instrument, Interest Rate, Stated Percentage					3.75%
Convertible Preferred Stock, Shares Issued upon Conversion					77.241
Note increment for which conversion amount of Common Stock based					1
Debt Instrument, Convertible, Conversion Price					$12.95
Class of Warrant or Right, Exercise Price of Warrants or Rights					$17
Proceeds from Convertible Debt	50,249
Debt Instrument, Unamortized Discount		4,416		5,227
Convertible senior notes		55,584		54,773
Contractual Interest Coupon		562	562
Amortization of Debt Discount (Premium)		811	735
Amortization of Financing Costs		103	87
Interest Expense, Debt		$1,476	$1,384

Commitments_and_Contingencies_1

Commitments and Contingencies - (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014	Dec. 31, 2013
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$1,700	$1,509	$1,574	$1,551
Product Warranty Accrual, Warranties Issued	822	481
Product Warranty Accrual, Payments	$696	$523

Legal_Matters_Details

Legal Matters (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Aug. 08, 2014
Subsequent Event [Line Items]
Loss Contingency, Damages Awarded, Value	$14,512
Estimated Litigation Liability	$3,252	$3,252

ShareBased_Compensation_Restri

Share-Based Compensation Restricted Stock Units (Details) (USD $)	3 Months Ended	12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
Restricted Stock Units Activity [Abstract]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	838	805
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$11.07	$11.07
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	509
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$10.25
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	468
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$10.18
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	8
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$10.95
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$6,207	$5,492
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 11 months 30 days	3 years 4 months 0 days

Other_Income_Details

Other Income - (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Other Income (Expense) [Abstract]
Foreign currency exchange losses (gains), net	$638	($127)
Total other expenses (income)	$638	($127)

Income_Taxes_Details

Income Taxes - (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014
Income Taxes [Abstract]
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	$3,097	($1,041)
Income Tax Expense (Benefit)	1,249	-317
Effective Income Tax Rate	40.30%	30.50%
Valuation Allowance, Amount	$2,445		$2,445

Restructuring_and_asset_impair2

Restructuring and asset impairment (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
Restructuring and Related Activities [Abstract]
Restructuring Reserve, Current	$561	$764
Restructuring Costs	0
Payments for Restructuring	($203)

Earnings_Per_Share_Details

Earnings Per Share - (Details) (USD $)	3 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Earnings Per Share [Abstract]
Stock Options Antidilutive securities excluded from computation	299
Restricted Stock Unit Antidilutive excluded from computation	0
Restricted stock units excluded from Computation of diluted loss per share		1,377
Net Income (Loss) Attributable to Parent	$1,848	($724)
Weighted Average Number of Shares Outstanding, Basic	31,928	33,092
Weighted Average Number Diluted Shares Outstanding Adjustment	621	0
Weighted Average Number of Shares Outstanding, Diluted	32,549	33,092
Earnings (Loss) Per Share, Basic	$0.06	($0.02)
Earnings (Loss) Per Share, Diluted	$0.06	($0.02)
Stock Options Excluded from Computation of diluted loss per share		739

Accumulated_Other_Comprehensiv2

Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) (USD $)	Mar. 31, 2015	Dec. 31, 2014
In Thousands, unless otherwise specified
Stockholders' Equity Attributable to Parent	$265,532	$267,328
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	2,238	2,685
Net current period other comprehensive gain (loss)	-447
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	-32	-33
Net current period other comprehensive gain (loss)	1
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	2,206	2,652
Net current period other comprehensive gain (loss)	-446
Reclassification of accumulated other comprehensive income (loss)	$0

Segment_Reporting_Details

Segment Reporting (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
	Rate	Rate
Segment Reporting Information [Line Items]
Revenues	$52,570	$41,649
Concentration Risk, Percentage	11.10%	4.50%
Inspection Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	28,462	18,002
Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	7,599	5,749
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues	21	3,657
Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Revenues	7,794	5,974
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues	5,655	5,040
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues	3,039	3,227
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues	$52,570	$41,649
Sales [Member] | Percentage of Inspection Revenues [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	54.00%	43.00%
Sales [Member] | Percentage of Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	15.00%	14.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	0.00%	9.00%
Sales [Member] | Percentage of Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	15.00%	14.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	10.00%	12.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	6.00%	8.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	100.00%	100.00%

Segment_Reporting_and_Geograph2

Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended
In Thousands, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014
Segment Reporting Information [Line Items]
Revenues	$52,570	$41,649
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	17,648	9,934
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	13,329	7,930
JAPAN
Segment Reporting Information [Line Items]
Revenues	1,314	1,284
CHINA
Segment Reporting Information [Line Items]
Revenues	6,088	4,830
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	3,531	7,552
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	1,777	6,591
GERMANY
Segment Reporting Information [Line Items]
Revenues	7,055	1,344
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	1,828	2,184
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$52,570	$41,649

Segment_Reporting_and_Geograph3

Segment Reporting and Geographic Information Customer Reporting (Details)	3 Months Ended
	Mar. 31, 2015	Mar. 31, 2014
	Rate	Rate
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	11.10%	4.50%
Major Customers Two [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	10.20%	0.00%
Major Customer Three [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	2.20%	14.00%
Major Customer Four [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	0.90%	17.00%

Share_Repurchase_Program_Detai

Share Repurchase Program - (Details) (USD $)	3 Months Ended		12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Mar. 31, 2015	Mar. 31, 2014	Dec. 31, 2014	Jan. 28, 2015
Share Repurchase Program [Abstract]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000
Restricted stock units excluded from Computation of diluted loss per share		1,377
Stock Repurchased and Retired During Period, Shares	570		1,353
Stock Repurchased During Period, Value	$6,786
StockRepurchasedAndRetired-AveragePricePerShare	$11.91
Additional shares available for future purchase				1,353
Shares available for future repurchase	2,430