Rudolph 10-Q 4 Aug 15 2015 Q2 Quarterly report Financial data

Document and Entity Information

Document and Entity Information Document - shares	6 Months Ended
	Jun. 30, 2015	Jul. 20, 2015
Entity Information [Line Items]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1,094,392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Jun. 30, 2015
Document Fiscal Year Focus	2,015
Document Fiscal Period Focus	Q2
Amendment Flag	false
Entity Common Stock, Shares Outstanding		31,618,195

Statements of Financial Positio

Statements of Financial Position Consolidated Balance Sheet - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Cash and Cash Equivalents, at Carrying Value	$ 36,735	$ 43,114
Marketable Securities, Current	119,444	113,871
Accounts Receivable, Net, Current	61,185	51,603
Inventory, Net	69,266	63,344
Deferred Tax Assets, Net, Current	8,986	8,986
Prepaid Expense and Other Assets	7,512	9,403
Assets, Current	303,128	290,321
Property, Plant and Equipment, Net	12,787	12,938
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	8,013	9,042
Other Assets, Noncurrent	31,449	31,841
Assets	377,872	366,637
Liabilities, Current [Abstract]
Accounts Payable and Accrued Liabilities	25,451	17,747
Other Liabilities, Current	17,884	17,188
Liabilities, Current	43,335	34,935
Convertible senior notes	56,399	54,773
Other Liabilities, Noncurrent	9,937	9,601
Liabilities	$ 109,671	$ 99,309
Commitments and Contingencies
Stockholders' Equity Attributable to Parent [Abstract]
Common Stock, Value, Issued	$ 32	$ 32
Additional Paid in Capital, Common Stock	402,110	409,562
Accumulated Other Comprehensive Income (Loss), Net of Tax	(2,202)	(2,652)
Retained Earnings (Accumulated Deficit)	(131,739)	(139,614)
Stockholders' Equity Attributable to Parent	268,201	267,328
Liabilities and Equity	$ 377,872	$ 366,637

Statements of Financial Positi3

Statements of Financial Position B/S Parenthetical - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Allowance for Doubtful Accounts Receivable, Current	$ 1,856	$ 1,279

Statements of Income Statement

Statements of Income Statement - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667
Cost of Revenue	27,582	19,714	51,186	39,794
Gross Profit	31,884	23,304	60,850	44,873
Operating Expenses [Abstract]
Research and Development Expense	10,507	10,841	20,867	20,846
Selling, General and Administrative Expense	11,033	21,285	24,007	32,066
Amortization of Intangible Assets	515	670	1,030	1,340
Operating Expenses	22,055	32,796	45,904	54,252
Operating Income (Loss)	9,829	(9,492)	14,946	(9,379)
Interest Expense, net	1,385	1,341	2,767	2,622
Total other expenses (income)	(212)	162	426	35
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	8,656	(10,995)	11,753	(12,036)
Income Tax Expense (Benefit)	2,629	(6,583)	3,878	(6,900)
Net Income (Loss) Attributable to Parent	$ 6,027	$ (4,412)	$ 7,875	$ (5,136)
Earnings (Loss) Per Share, Basic	$ 0.19	$ (0.13)	$ 0.25	$ (0.15)
Earnings (Loss) Per Share, Diluted	$ 0.19	$ (0.13)	$ 0.24	$ (0.15)
Weighted Average Number of Shares Outstanding, Basic	31,663	33,240	31,724	33,186
Weighted Average Number of Shares Outstanding, Diluted	32,339	33,240	32,373	33,186

Statements of Comprehensive Inc

Statements of Comprehensive Income (Loss) Statement - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Net Income (Loss) Attributable to Parent	$ 6,027	$ (4,412)	$ 7,875	$ (5,136)
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	(5)	24	(6)	27
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	9	359	456	227
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 6,031	$ (4,029)	$ 8,325	$ (4,882)

Statements of Cash Flows Statem

Statements of Cash Flows Statement - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014
Net Income (Loss) Attributable to Parent	$ 7,875	$ (5,136)
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Amortization	1,030	1,344
Amortization of Financing Costs and Discounts	1,833	1,648
Depreciation	1,907	2,038
Foreign Currency Transaction Gain (Loss), before Tax	426	35
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	(319)	145
Share-based Compensation	5,430	3,162
Provision for doubtful accounts and inventory valuation	2,521	1,398
Increase (Decrease) in Deferred Income Taxes	0	65
Increase (Decrease) in Other Operating Assets and Liabilities, Net	(8,602)	6,047
Net Cash Provided by (Used in) Operating Activities	12,101	10,746
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities	(109,466)	(110,591)
Proceeds from Sale and Maturity of Marketable Securities	104,160	75,389
Payments to Acquire Property, Plant, and Equipment	(1,744)	(1,020)
Net Cash Provided by (Used in) Investing Activities	(7,050)	(36,222)
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for Repurchase of Common Stock	(11,197)	(986)
Proceeds from (Payments for) Other Financing Activities	(141)	(194)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	174	182
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	36	118
Net Cash Provided by (Used in) Financing Activities	(11,128)	(880)
Effect of Exchange Rate on Cash and Cash Equivalents	(302)	224
Cash and Cash Equivalents, Period Increase (Decrease)	(6,379)	(26,132)
Cash and Cash Equivalents, at Carrying Value	36,735	54,658
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid	139	893
Interest Paid	$ 1,125	$ 1,125

Basis of Presentation (Notes)

Basis of Presentation (Notes)	6 Months Ended
	Jun. 30, 2015
Organization and Nature of Operations: [Abstract]
Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]	Basis of Presentation The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”). Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes. Actual amounts could differ materially from reported amounts. The interim results for the three and six month periods ended June 30, 2015 are not necessarily indicative of results to be expected for the entire year or any future periods. This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2014 (“2014 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2014 has been derived from the audited consolidated financial statements included in the 2014 10-K. Summary of Significant Accounting Policies: Except as set forth below, there were no material changes to the Company’s summary of significant accounting policies as discussed in Note 2 of its 2014 10-K. The disclosure of the following significant accounting policy has been updated from that as originally presented in Note 2 of the Company’s 2014 10-K. Inventories: Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out basis, and include material, labor and manufacturing overhead costs. The Company reviews and sets standard costs as needed, but at a minimum on an annual basis, at current manufacturing costs in order to approximate actual costs. Demonstration units, which are available for sale, are stated at their manufacturing costs and reserves are recorded to adjust the demonstration units to their net realizable value, if lower than cost. The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been established, it is maintained until the item to which it relates is scrapped or sold. The disclosure of the following significant accounting policy has been added. Contingencies and Litigation: The Company is subject to the possibility of losses from various contingencies, including certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See Note 8, “Commitments and Contingencies” for a detailed description. Reclassifications Certain prior period amounts have been reclassified to conform to current financial statement presentation. These amounts include the reclassification of a portion of deferred revenue from Other current liabilities to Other non-current liabilities in the Condensed Consolidated Balance Sheets. Recent Accounting Pronouncements In April 2015, the Financial Accounting Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2015-03, “Interest - Imputation of Interest (Subtopic 835-30), Simplifying the Presentation of Debt Issuance Costs.” This standard is intended to simplify the presentation of debt issuance costs. The amendment in this ASU requires that debt issuance cost related to a recognized debt liability be presented in the balance sheet as a direct deduction from the carrying amount of that debt liability, consistent with debt discounts. The standard is effective for financial statements issued for fiscal years beginning after December 15, 2015. The Company is in the process of determining the effects the adoption of ASU 2015-03 will have on its consolidated financial position, results of operations, and cash flows. In December 2014, the FASB issued ASU No.2014-12, “Compensation - Stock Compensation (Topic 718), Accounting for Share-Based Payments When the Terms of an Award Provide That a Performance Target Could Be Achieved after the Requisite Service Period.” The guidance reflects the EITF consensus that an award with a performance target that affects vesting and that could be achieved after an employee completes the requisite service period (i.e., the employee would be eligible to vest in the award regardless of whether the employee is rendering service on the date the performance target could be achieved) should be treated as a performance condition. That is, the performance target is not reflected in the determination of the grant date fair value of the award. Compensation cost attributable to the period for which requisite service has been rendered would be recognized in the period it becomes probable that the performance condition will be achieved. The total amount of compensation cost recognized during and after the requisite service period would reflect the number of awards that are expected to vest and would be adjusted to reflect those awards that ultimately vest. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of this new standard will not have a material impact on the Company’s consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers.” ASU 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. In July 2015, the FASB deferred for one year the effective date of the new revenue standard, but early adoption will be permitted. The new standard will be effective for the Company on January 1, 2018. ASU 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Fair Value Measurements

Fair Value Measurements	6 Months Ended
	Jun. 30, 2015
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement. The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2015 and December 31, 2014 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant June 30, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 119,444 $ — $ 119,444 $ — Foreign currency forward contracts 19 $ — 19 $ — Total Assets $ 119,463 $ — $ 119,463 $ — Liabilities: Contingent consideration - acquisitions $ 4,604 $ — $ — $ 4,604 Total Liabilities $ 4,604 $ — $ — $ 4,604 December 31, 2014 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 113,871 $ — $ 113,871 $ — Foreign currency forward contracts 222 — 222 — Total Assets $ 114,093 $ — $ 114,093 $ — Liabilities: Contingent consideration - acquisitions $ 5,064 $ — $ — $ 5,064 Total Liabilities $ 5,064 $ — $ — $ 5,064 The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Available-for-sale debt securities prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class. Level 3 investments consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value investment. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 8.3% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration. This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2015 : Fair Value Measurements Using Balance at December 31, 2014 $ 5,064 Additions — Total gain included in selling, general and administrative expense (319 ) Payments (141 ) Transfers into (out of) Level 3 — Balance at June 30, 2015 $ 4,604 See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities. Fair Value of Other Financial Instruments The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model, included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value under an expected cash flow model incorporating the probabilities of the contingent events occurring. The following table reflects information pertaining to the Company’s convertible senior notes: June 30, 2015 December 31, 2014 Net carrying value of convertible senior notes $ 56,399 $ 54,773 Estimated fair value of convertible senior notes $ 60,264 $ 59,916 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities

Marketable Securities	6 Months Ended
	Jun. 30, 2015
Marketable Securities [Abstract]
Marketable Securities [Text Block]	Marketable Securities The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other expense (income)” in the Condensed Consolidated Statements of Operations. The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost of securities sold is based on the specific identification method. The Company has determined that the gross unrealized losses on its marketable securities at June 30, 2015 and December 31, 2014 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. At June 30, 2015 and December 31, 2014 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value June 30, 2015 Municipal notes and bonds $ 119,417 $ 32 $ 5 $ 119,444 Total marketable securities $ 119,417 $ 32 $ 5 $ 119,444 December 31, 2014 Municipal notes and bonds $ 113,838 $ 37 $ 4 $ 113,871 Total marketable securities $ 113,838 $ 37 $ 4 $ 113,871 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2015 and December 31, 2014 : June 30, 2015 December 31, 2014 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 106,124 $ 106,146 $ 107,151 $ 107,177 Due after one through five years 13,293 13,298 6,687 6,694 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 119,417 $ 119,444 $ 113,838 $ 113,871 The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2015 and December 31, 2014 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses June 30, 2015 Municipal notes and bonds $ 32,731 $ 5 $ — $ — Total $ 32,731 $ 5 $ — $ — December 31, 2014 Municipal notes and bonds $ 26,698 $ 4 $ — $ — Total $ 26,698 $ 4 $ — $ — See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

Derivative Instruments and Hedg

Derivative Instruments and Hedging Activities	6 Months Ended
	Jun. 30, 2015
Derivative Instruments and Hedging Activities [Abstract]
Derivative Instruments and Hedging Activities Disclosure [Text Block]	Derivative Instruments and Hedging Activities The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At June 30, 2015 and December 31, 2014 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either prepaid expenses and other current assets or other current liabilities in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $203 and $53 for the six month periods ended June 30, 2015 and 2014 , respectively, are recorded within the caption “Other expense (income)” in the Condensed Consolidated Statements of Operations. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2015 and December 31, 2014 were as follows: June 30, 2015 December 31, 2014 Notional amount $ 2,482 $ 1,610 Fair value of asset $ 19 $ 222

Identifiable Intangible Assets

Identifiable Intangible Assets and Goodwill	6 Months Ended
	Jun. 30, 2015
Finite-Lived Intangible Assets [Line Items]
Goodwill and Intangible Assets Disclosure [Text Block]	Goodwill and Purchased Intangible Assets Goodwill The changes in the carrying amount of goodwill are as follows: Balance at December 31, 2014 $ 22,495 Goodwill acquired during period — Balance at June 30, 2015 $ 22,495 Purchased Intangible Assets Purchased intangible assets as of June 30, 2015 and December 31, 2014 are as follows: Gross Carrying Amount Accumulated Amortization Net June 30, 2015 Finite-lived intangibles: Developed technology $ 59,831 $ 54,221 $ 5,610 Customer and distributor relationships 9,560 7,993 1,567 Trade names 4,361 3,525 836 Total identifiable intangible assets $ 73,752 $ 65,739 $ 8,013 December 31, 2014 Finite-lived intangibles: Developed technology $ 59,831 $ 53,417 $ 6,414 Customer and distributor relationships 9,560 7,818 1,742 Trade names 4,361 3,475 886 Total identifiable intangible assets $ 73,752 $ 64,710 $ 9,042 Intangible asset amortization expense for the three and six months ended June 30, 2015 was $515 and $1,030 , respectively. For the three and six months ended June 30, 2014 , intangible assets amortization expense was $670 and $1,340 , respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2015 will be $1,020 , and for each of the next five years estimated amortization expense amounts to $1,941 for 2016 , $1,553 for 2017 , $1,117 for 2018 , $1,117 for 2019 , and $914 for 2020 .

Balance Sheet Details

Balance Sheet Details	6 Months Ended
	Jun. 30, 2015
Balance Sheet Detail [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details Inventories Inventories are comprised of the following: June 30, 2015 December 31, 2014 Materials $ 35,091 $ 29,092 Work-in-process 20,866 20,424 Finished goods 13,309 13,828 Total inventories $ 69,266 $ 63,344 The Company has established reserves of $8,808 and $7,000 as of June 30, 2015 and December 31, 2014 , respectively, for slow moving and obsolete inventory, which are included in the amounts above. Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: June 30, 2015 December 31, 2014 Land and building $ 5,024 $ 5,024 Machinery and equipment 21,580 20,277 Furniture and fixtures 3,412 3,387 Computer equipment 6,129 5,819 Leasehold improvements 7,782 7,774 43,927 42,281 Less: Accumulated depreciation 31,140 29,343 Total property, plant and equipment, net $ 12,787 $ 12,938 Other assets Other assets is comprised of the following: June 30, 2015 December 31, 2014 Deferred income taxes $ 30,348 $ 30,348 Other 1,101 1,493 Total other assets $ 31,449 $ 31,841 Other current liabilities Other current liabilities is comprised of the following: June 30, 2015 December 31, 2014 Litigation accrual $ 3,252 $ 3,252 Deferred revenue 6,605 7,045 Contingent consideration - acquisitions 1,299 1,267 Other 6,728 5,624 Total other current liabilities $ 17,884 $ 17,188 Other non-current liabilities Other non-current liabilities is comprised of the following: June 30, 2015 December 31, 2014 Unrecognized tax benefits (including interest) $ 3,226 $ 3,178 Contingent consideration - acquisitions 3,305 3,797 Other 3,406 2,626 Total other non-current liabilities $ 9,937 $ 9,601

Debt Obligations

Debt Obligations	6 Months Ended
	Jun. 30, 2015
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations On July 25, 2011 , the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 , between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provide for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012 , at an annual rate of 3.75% and will mature on July 15, 2016 , unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is $17.00 per share subject to adjustment in accordance with the terms of the agreement. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant, were $50,249 . The following table reflects the net carrying value of the Notes: June 30, 2015 December 31, 2014 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 3,601 5,227 Net carrying value of convertible senior notes $ 56,399 $ 54,773 The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2015 and June 30, 2014 : Three Months Ended June 30, Six Months Ended June 30, 2015 2014 2015 2014 Contractual interest coupon $ 563 $ 563 $ 1,125 $ 1,125 Amortization of interest discount 815 739 1,626 1,474 Amortization of debt issuance costs 104 87 207 174 Total interest cost recognized $ 1,482 $ 1,389 $ 2,958 $ 2,773 The remaining bond discount of the Notes of $3,601 , as of June 30, 2015 , will be amortized over the remaining life of the Notes.

Commitments and Contingencies

Commitments and Contingencies	6 Months Ended
	Jun. 30, 2015
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies Warranty Reserves The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the year. Changes in the Company’s warranty reserves are as follows: Six Months Ended June 30, 2015 2014 Balance, beginning of the period $ 1,574 $ 1,551 Accruals 1,300 961 Less: Usage 1,051 1,035 Balance, end of the period $ 1,823 $ 1,477 Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.” Legal Matters From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The Company’s 2014 10-K reflects the status of the Company’s litigation with Integrated Technology Corporation (“ITC”) and Camtek, Ltd. (“Camtek”). The following reflects the material developments during the six months ended June 30, 2015 with regard to these matters. Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182-PHX-ROS) : This matter is fully resolved with the sole exception of the issue of remanded attorney’s fees which were set by the District Court at $3,252 . The Company’s appeal of this order is currently pending review by the U.S. Federal Court of Appeals. The Company believes that it has meritorious defenses regarding this issue and intends to continue to vigorously prosecute the matter. The $3,252 is held in escrow and is recorded in “Prepaid expenses and other current assets” in the Consolidated Balance Sheet at June 30, 2015 . The corresponding liability is recorded under the caption “Other current liabilities” in the Condensed Consolidated Balance Sheet at June 30, 2015 . The Company expects this to be the maximum liability reasonably possible for the attorney’s fees, excluding interest, for this lawsuit with respect to both the pre-August 2007 and the post-2007 August tools which were the subject of this action. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 05-CV-01396 (JRT/FLN) : Subsequent to the District Court’s ruling in the Company’s favor that Camtek’s Falcon tools continue to infringe the Company’s patent under the revised claim construction of the patent determined by the U.S. Federal Court of Appeals, the District Court, on February 9, 2015, issued an Order granting the Company’s Motion for Final Judgment, reinstating the original damages and applying prejudgment interest for a total award of $14,512 . In addition, the District Court issued a permanent injunction against Camtek from “making, using, selling and offering to sell any of its Falcon machines and any machines that are colorable imitations thereof in the United States, intended for sale and use within the United States, until the expiration of the ‘6,298 patent,” which is projected to be in 2020. Camtek filed a notice of appeal of the District Court’s Order on March 11, 2015. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 10-CV-2202 (MJD/FLN) : With regard to the Company’s subsequently filed lawsuit against Camtek alleging infringement of its U.S. Patent No. 7,729,528, this lawsuit continues to be stayed pending resolution of a re-examination petition filed by Camtek with the U.S. Patent and Trademark Office. Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT) : On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph ‘6,298 patent by Camtek’s Eagle product with the U.S. District Court in Minnesota. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States which is currently pending. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota court and seeking to have the court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. The jurisdiction matter is currently before the U.S. District Court in Minnesota for resolution.

Share-Based Compensation

Share-Based Compensation	6 Months Ended
	Jun. 30, 2015
Share-based Compensation [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation Restricted Stock Unit Activity A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2015 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2014 805 $ 11.07 Granted 792 $ 10.57 Less: Vested 503 $ 10.32 Less: Forfeited 13 $ 10.99 Nonvested at June 30, 2015 1,081 $ 11.06 As of June 30, 2015 and December 31, 2014 , there was $7,990 and $5,492 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively. That cost is expected to be recognized over a weighted average period of 2.6 years and 3.3 years for the respective periods.

Other Expense (Income)

Other Expense (Income)	6 Months Ended
	Jun. 30, 2015
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other Expense (Income) Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Foreign currency exchange losses (gains), net $ (212 ) $ 162 $ 426 $ 35 Total other expense (income) $ (212 ) $ 162 $ 426 $ 35

Income Taxes

Income Taxes	6 Months Ended
	Jun. 30, 2015
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes The following table provides details of income taxes: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Income (loss) before income taxes $ 8,656 $ (10,995 ) $ 11,753 $ (12,036 ) Provision (benefit) for income taxes $ 2,629 $ (6,583 ) $ 3,878 $ (6,900 ) Effective tax rate 30.4 % 59.9 % 33.0 % 57.3 % The income tax provision for the three and six months ended June 30, 2015 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the six months ended June 30, 2015 compared to the same period for the prior year are primarily due to the mix of forecasted earnings by jurisdictions generated in 2015 and the availability of utilizing the Section 199 manufacturing deduction compared to a book loss in 2014 and the impact of foreign tax expense in excess of foreign tax credits generated in 2014. The Company currently has a partial valuation allowance recorded for certain foreign and state loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including prudent and feasible tax planning strategies and forecasted earnings in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a valuation allowance of $1,910 as of June 30, 2015 and $2,445 as of December 31, 2014.

Restructuring and asset impairm

Restructuring and asset impairment (Notes)	6 Months Ended
	Jun. 30, 2015
Restructuring and Related Activities [Abstract]
Restructuring, Impairment, and Other Activities Disclosure [Text Block]	Restructuring and Asset Impairment Charges The table below provides the activity related to restructuring charges and the remaining liability as of June 30, 2015 : Restructuring obligations at December 31, 2014 $ 764 Restructuring costs incurred — Cash payments (540 ) Restructuring obligations at June 30, 2015 $ 224 During 2014, the Company implemented restructuring initiatives designed to reduce the Company’s cost structure. In connection with this strategy, the Company reduced its global headcount by approximately 9.0% and closed its facility in Mainz, Germany relocating the operations to its facilities in Snoqualmie, Washington and Bloomington, Minnesota, which was completed as of March 31, 2015. The Company anticipates the remaining restructuring obligation to be paid by December 31, 2015 .

Earnings Per Share

Earnings Per Share	6 Months Ended
	Jun. 30, 2015
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings (Loss) Per Share Basic earnings (loss) per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be anti-dilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the six months ended June 30, 2015 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 260 and 0 , respectively. For the six months ended June 30, 2014 , all outstanding stock options and restricted stock units totaling 714 and 1,265 , respectively, were excluded from the computation of diluted loss per share because the effect in the periods would be anti-dilutive. Diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes and warrants as their impact would be anti-dilutive. The Company’s basic and diluted earnings (loss) per share amounts are as follows: Three Months Ended June 30, Six Months Ended June 30, 2015 2014 2015 2014 Numerator: Net income (loss) $ 6,027 $ (4,412 ) $ 7,875 $ (5,136 ) Denominator: Basic earnings (loss) per share - weighted average shares outstanding 31,663 33,240 31,724 33,186 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 676 — 649 — Diluted earnings (loss) per share - weighted average shares outstanding 32,339 33,240 32,373 33,186 Earnings (loss) per share: Basic $ 0.19 $ (0.13 ) $ 0.25 $ (0.15 ) Diluted $ 0.19 $ (0.13 ) $ 0.24 $ (0.15 )

Accumulated Other Comprehensive

Accumulated Other Comprehensive Loss (Notes)	6 Months Ended
	Jun. 30, 2015
Accumulated Other Comprehensive Loss [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income on the Company’s net income. The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (income) (456 ) 6 (450 ) Reclassifications — — — Ending balance, June 30, 2015 $ 2,229 $ (27 ) $ 2,202

Segment Reporting and Geographi

Segment Reporting and Geographic Information	6 Months Ended
	Jun. 30, 2015
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection, metrology, advanced packaging lithography, and process control software systems used by microelectronics device manufacturers, and therefore the Company has one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level. The following table lists the different sources of revenue: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Systems and Software: Inspection $ 32,225 54 % $ 22,852 53 % $ 60,686 54 % $ 40,853 48 % Metrology 9,645 16 % 4,652 11 % 17,245 16 % 10,401 12 % Data Analysis and Review 5,142 9 % 6,956 16 % 12,936 12 % 12,930 15 % Lithography 3,826 6 % — — % 3,847 3 % 3,657 5 % Parts 5,796 10 % 5,072 12 % 11,451 10 % 10,112 12 % Services 2,832 5 % 3,486 8 % 5,871 5 % 6,714 8 % Total revenue $ 59,466 100 % $ 43,018 100 % $ 112,036 100 % $ 84,667 100 % For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 United States $ 11,773 $ 9,704 $ 29,420 $ 19,638 Taiwan 16,259 12,252 29,588 20,182 Japan 3,918 5,068 5,232 6,353 China 858 2,295 6,945 7,125 South Korea 6,709 887 10,240 8,439 Other Asia 9,359 5,995 11,137 12,586 Germany 8,970 3,908 16,025 5,251 Other Europe 1,620 2,909 3,449 5,093 Total revenue $ 59,466 $ 43,018 $ 112,036 $ 84,667 The following customer accounted for more than 10% of total revenues for the indicated periods. Six Months Ended June 30, 2015 2014 Customer A 6.4 % 11.1 %

Share Repurchase Program

Share Repurchase Program	6 Months Ended
	Jun. 30, 2015
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Share Repurchase Authorization In 2008, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. As of December 31, 2014, the Company had repurchased 1,353 shares of common stock. In January 2015, the Board of Directors authorized the purchase of an additional 1,353 shares to the existing repurchase authorization, bringing the total current authorization back to 3,000 shares as of such date. At June 30, 2015 , there were 2,067 shares available for future stock repurchases under this repurchase authorization. The shares of common stock purchased under the share repurchase authorization are being retired. The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2015 and 2014, respectively: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Shares of common stock repurchased 363 100 933 100 Cost of stock repurchased $4,411 $986 $11,197 $986 Average price paid per share $12.17 $9.86 $12.01 $9.86

Fair Value Measurements - (Tabl

Fair Value Measurements - (Tables)	6 Months Ended
	Jun. 30, 2015
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Table Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2015 and December 31, 2014 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant June 30, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 119,444 $ — $ 119,444 $ — Foreign currency forward contracts 19 $ — 19 $ — Total Assets $ 119,463 $ — $ 119,463 $ — Liabilities: Contingent consideration - acquisitions $ 4,604 $ — $ — $ 4,604 Total Liabilities $ 4,604 $ — $ — $ 4,604 December 31, 2014 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 113,871 $ — $ 113,871 $ — Foreign currency forward contracts 222 — 222 — Total Assets $ 114,093 $ — $ 114,093 $ — Liabilities: Contingent consideration - acquisitions $ 5,064 $ — $ — $ 5,064 Total Liabilities $ 5,064 $ — $ — $ 5,064
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2015 : Fair Value Measurements Using Balance at December 31, 2014 $ 5,064 Additions — Total gain included in selling, general and administrative expense (319 ) Payments (141 ) Transfers into (out of) Level 3 — Balance at June 30, 2015 $ 4,604
Fair value convertible senior notes [Table Text Block]	The following table reflects information pertaining to the Company’s convertible senior notes: June 30, 2015 December 31, 2014 Net carrying value of convertible senior notes $ 56,399 $ 54,773 Estimated fair value of convertible senior notes $ 60,264 $ 59,916 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities - (Tables

Marketable Securities - (Tables)	6 Months Ended
	Jun. 30, 2015
Schedule of Available-for-sale Securities [Line Items]
Schedule of marketable securities by category [Table Text Block]	At June 30, 2015 and December 31, 2014 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value June 30, 2015 Municipal notes and bonds $ 119,417 $ 32 $ 5 $ 119,444 Total marketable securities $ 119,417 $ 32 $ 5 $ 119,444 December 31, 2014 Municipal notes and bonds $ 113,838 $ 37 $ 4 $ 113,871 Total marketable securities $ 113,838 $ 37 $ 4 $ 113,871
Schedule of marketable securities classified by contractual maturity date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2015 and December 31, 2014 : June 30, 2015 December 31, 2014 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 106,124 $ 106,146 $ 107,151 $ 107,177 Due after one through five years 13,293 13,298 6,687 6,694 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 119,417 $ 119,444 $ 113,838 $ 113,871
Schedule of marketable securities in unrealized loss positions [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2015 and December 31, 2014 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses June 30, 2015 Municipal notes and bonds $ 32,731 $ 5 $ — $ — Total $ 32,731 $ 5 $ — $ — December 31, 2014 Municipal notes and bonds $ 26,698 $ 4 $ — $ — Total $ 26,698 $ 4 $ — $ —

Derivative Instruments and He25

Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)	6 Months Ended
	Jun. 30, 2015
Derivative Instruments and Hedging Activities [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2015 and December 31, 2014 were as follows: June 30, 2015 December 31, 2014 Notional amount $ 2,482 $ 1,610 Fair value of asset $ 19 $ 222

Identifiable Intangible Asset26

Identifiable Intangible Assets and Goodwill - (Tables)	6 Months Ended
	Jun. 30, 2015
Identifiable Intangible Assets and Goodwill [Abstract]
Schedule of Goodwill [Table Text Block]	The changes in the carrying amount of goodwill are as follows: Balance at December 31, 2014 $ 22,495 Goodwill acquired during period — Balance at June 30, 2015 $ 22,495
Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]	Purchased intangible assets as of June 30, 2015 and December 31, 2014 are as follows: Gross Carrying Amount Accumulated Amortization Net June 30, 2015 Finite-lived intangibles: Developed technology $ 59,831 $ 54,221 $ 5,610 Customer and distributor relationships 9,560 7,993 1,567 Trade names 4,361 3,525 836 Total identifiable intangible assets $ 73,752 $ 65,739 $ 8,013 December 31, 2014 Finite-lived intangibles: Developed technology $ 59,831 $ 53,417 $ 6,414 Customer and distributor relationships 9,560 7,818 1,742 Trade names 4,361 3,475 886 Total identifiable intangible assets $ 73,752 $ 64,710 $ 9,042

Balance Sheet Details - (Tables

Balance Sheet Details - (Tables)	6 Months Ended
	Jun. 30, 2015
Balance Sheet Detail [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories Inventories are comprised of the following: June 30, 2015 December 31, 2014 Materials $ 35,091 $ 29,092 Work-in-process 20,866 20,424 Finished goods 13,309 13,828 Total inventories $ 69,266 $ 63,344
Property, Plant and Equipment [Table Text Block]	Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: June 30, 2015 December 31, 2014 Land and building $ 5,024 $ 5,024 Machinery and equipment 21,580 20,277 Furniture and fixtures 3,412 3,387 Computer equipment 6,129 5,819 Leasehold improvements 7,782 7,774 43,927 42,281 Less: Accumulated depreciation 31,140 29,343 Total property, plant and equipment, net $ 12,787 $ 12,938
Schedule of Other Assets [Table Text Block]	Other assets Other assets is comprised of the following: June 30, 2015 December 31, 2014 Deferred income taxes $ 30,348 $ 30,348 Other 1,101 1,493 Total other assets $ 31,449 $ 31,841
Other Current liabilities [Table Text Block]	Other current liabilities Other current liabilities is comprised of the following: June 30, 2015 December 31, 2014 Litigation accrual $ 3,252 $ 3,252 Deferred revenue 6,605 7,045 Contingent consideration - acquisitions 1,299 1,267 Other 6,728 5,624 Total other current liabilities $ 17,884 $ 17,188
Other Non-current liabilities [Table Text Block]	Other non-current liabilities Other non-current liabilities is comprised of the following: June 30, 2015 December 31, 2014 Unrecognized tax benefits (including interest) $ 3,226 $ 3,178 Contingent consideration - acquisitions 3,305 3,797 Other 3,406 2,626 Total other non-current liabilities $ 9,937 $ 9,601

Debt Obligations - (Tables)

Debt Obligations - (Tables)	6 Months Ended
	Jun. 30, 2015
Debt Obligations [Abstract]
Schedule of carrying value of convertible senior notes [Table Text Block]	The following table reflects the net carrying value of the Notes: June 30, 2015 December 31, 2014 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 3,601 5,227 Net carrying value of convertible senior notes $ 56,399 $ 54,773
Schedule of interest cost recognized on convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2015 and June 30, 2014 : Three Months Ended June 30, Six Months Ended June 30, 2015 2014 2015 2014 Contractual interest coupon $ 563 $ 563 $ 1,125 $ 1,125 Amortization of interest discount 815 739 1,626 1,474 Amortization of debt issuance costs 104 87 207 174 Total interest cost recognized $ 1,482 $ 1,389 $ 2,958 $ 2,773

Commitments and Contingencies -

Commitments and Contingencies - (Tables)	6 Months Ended
	Jun. 30, 2015
Commitments and Contingencies [Abstract]
Schedule of changes product warranty liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows: Six Months Ended June 30, 2015 2014 Balance, beginning of the period $ 1,574 $ 1,551 Accruals 1,300 961 Less: Usage 1,051 1,035 Balance, end of the period $ 1,823 $ 1,477

Share-Based Compensation - (Tab

Share-Based Compensation - (Tables)	6 Months Ended
	Jun. 30, 2015
Share-based Compensation [Abstract]
Summary of restricted stock unit activity [Table Text Block]	A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2015 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2014 805 $ 11.07 Granted 792 $ 10.57 Less: Vested 503 $ 10.32 Less: Forfeited 13 $ 10.99 Nonvested at June 30, 2015 1,081 $ 11.06

Other Income - (Tables)

Other Income - (Tables)	6 Months Ended
	Jun. 30, 2015
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Foreign currency exchange losses (gains), net $ (212 ) $ 162 $ 426 $ 35 Total other expense (income) $ (212 ) $ 162 $ 426 $ 35

Income Taxes - (Tables)

Income Taxes - (Tables)	6 Months Ended
	Jun. 30, 2015
Income Taxes [Abstract]
Schedule of effective tax rate [Table Text Block]	The following table provides details of income taxes: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Income (loss) before income taxes $ 8,656 $ (10,995 ) $ 11,753 $ (12,036 ) Provision (benefit) for income taxes $ 2,629 $ (6,583 ) $ 3,878 $ (6,900 ) Effective tax rate 30.4 % 59.9 % 33.0 % 57.3 %

Restructuring and asset impai33

Restructuring and asset impairment (Tables)	6 Months Ended
	Jun. 30, 2015
Restructuring and Related Activities [Abstract]
Restructuring and Related Costs [Table Text Block]	The table below provides the activity related to restructuring charges and the remaining liability as of June 30, 2015 : Restructuring obligations at December 31, 2014 $ 764 Restructuring costs incurred — Cash payments (540 ) Restructuring obligations at June 30, 2015 $ 224

Earnings Per Share - (Tables)

Earnings Per Share - (Tables)	6 Months Ended
	Jun. 30, 2015
Earnings Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The Company’s basic and diluted earnings (loss) per share amounts are as follows: Three Months Ended June 30, Six Months Ended June 30, 2015 2014 2015 2014 Numerator: Net income (loss) $ 6,027 $ (4,412 ) $ 7,875 $ (5,136 ) Denominator: Basic earnings (loss) per share - weighted average shares outstanding 31,663 33,240 31,724 33,186 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 676 — 649 — Diluted earnings (loss) per share - weighted average shares outstanding 32,339 33,240 32,373 33,186 Earnings (loss) per share: Basic $ 0.19 $ (0.13 ) $ 0.25 $ (0.15 ) Diluted $ 0.19 $ (0.13 ) $ 0.24 $ (0.15 )

Accumulated Other Comprehensi35

Accumulated Other Comprehensive Loss (Tables)	6 Months Ended
	Jun. 30, 2015
Accumulated Other Comprehensive Loss [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (income) (456 ) 6 (450 ) Reclassifications — — — Ending balance, June 30, 2015 $ 2,229 $ (27 ) $ 2,202

Segment Reporting and Geograp36

Segment Reporting and Geographic Information - (Tables)	6 Months Ended
	Jun. 30, 2015
Segment Reporting and Geographic Information [Abstract]
Schedule of revenue from external customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Systems and Software: Inspection $ 32,225 54 % $ 22,852 53 % $ 60,686 54 % $ 40,853 48 % Metrology 9,645 16 % 4,652 11 % 17,245 16 % 10,401 12 % Data Analysis and Review 5,142 9 % 6,956 16 % 12,936 12 % 12,930 15 % Lithography 3,826 6 % — — % 3,847 3 % 3,657 5 % Parts 5,796 10 % 5,072 12 % 11,451 10 % 10,112 12 % Services 2,832 5 % 3,486 8 % 5,871 5 % 6,714 8 % Total revenue $ 59,466 100 % $ 43,018 100 % $ 112,036 100 % $ 84,667 100 %
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 United States $ 11,773 $ 9,704 $ 29,420 $ 19,638 Taiwan 16,259 12,252 29,588 20,182 Japan 3,918 5,068 5,232 6,353 China 858 2,295 6,945 7,125 South Korea 6,709 887 10,240 8,439 Other Asia 9,359 5,995 11,137 12,586 Germany 8,970 3,908 16,025 5,251 Other Europe 1,620 2,909 3,449 5,093 Total revenue $ 59,466 $ 43,018 $ 112,036 $ 84,667
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	The following customer accounted for more than 10% of total revenues for the indicated periods. Six Months Ended June 30, 2015 2014 Customer A 6.4 % 11.1 %

Share Repurchase Program - (Tab

Share Repurchase Program - (Tables)	6 Months Ended
	Jun. 30, 2015
Schedule of common stock repurchased [Abstract]
share repurchase program [Table Text Block]	The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2015 and 2014, respectively: Three Months Ended Six Months Ended June 30, June 30, 2015 2014 2015 2014 Shares of common stock repurchased 363 100 933 100 Cost of stock repurchased $4,411 $986 $11,197 $986 Average price paid per share $12.17 $9.86 $12.01 $9.86

Fair Value Measurements - (Deta

Fair Value Measurements - (Details) - USD ($) $ in Thousands	6 Months Ended	12 Months Ended
	Jun. 30, 2015	Dec. 31, 2014
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 119,444	$ 113,871
Foreign Currency Contract, Asset, Fair Value Disclosure	19	222
Assets, Fair Value Disclosure	119,463	114,093
Business Combination, Contingent Consideration, Liability	4,604	5,064
Liabilities, Fair Value Disclosure	$ 4,604	5,064
Fair Value Inputs Discount Rate 3	8.30%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	$ 4,604	5,064
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	(319)
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	$ (141)
Fair Value, Level 3 Transfers out, Description	0
Convertible Debt	$ 56,399	54,773
Long-term Debt, Fair Value	$ 60,264	$ 59,916
Fair Value Inputs Discount Rate 2	5.00%	5.00%
Long-term Debt, Contingent Payment of Principal or Interest	0	0
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 0	$ 0
Foreign Currency Contract, Asset, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	119,444	113,871
Foreign Currency Contract, Asset, Fair Value Disclosure	19	222
Assets, Fair Value Disclosure	119,463	114,093
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Foreign Currency Contract, Asset, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Combination, Contingent Consideration, Liability	4,604	5,064
Liabilities, Fair Value Disclosure	$ 4,604	$ 5,064

Marketable Securities - (Detail

Marketable Securities - (Details) - USD ($) $ in Thousands	6 Months Ended	12 Months Ended
	Jun. 30, 2015	Dec. 31, 2014
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	$ 119,417	$ 113,838
Available-for-sale Securities, Fair Value Disclosure	119,444	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	106,124	107,151
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	106,146	107,177
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	13,293	6,687
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	13,298	6,694
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Fair Value	0	0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	119,417	113,838
Available-for-sale Securities, Gross Unrealized Gains	32	37
Available-for-sale Securities, Gross Unrealized Losses	5	4
Available-for-sale Securities, Fair Value Disclosure	119,444	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	32,731	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	5	4
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	119,417	113,838
Available-for-sale Securities, Gross Unrealized Gains	32	37
Available-for-sale Securities, Gross Unrealized Losses	5	4
Available-for-sale Securities, Fair Value Disclosure	119,444	113,871
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	32,731	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	5	4
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$ 0	$ 0

Derivative Instruments and He40

Derivative Instruments and Hedging Activities - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014
Derivative [Line Items]
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	$ 203	$ 53
Derivative, Notional Amount	2,482		$ 1,610
Derivative Asset, Fair Value, Gross Asset	$ 19		$ 222

Identifiable Intangible Asset41

Identifiable Intangible Assets - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014
Finite-Lived Intangible Assets and Goodwill [Line Items]
Goodwill	$ 22,495		$ 22,495		$ 22,495
Goodwill, Acquired During Period			0
Finite-Lived Intangible Assets, Gross	73,752		73,752		73,752
Finite-Lived Intangible Assets, Accumulated Amortization	65,739		65,739		64,710
Intangible Assets, Net (Excluding Goodwill)	8,013		8,013		9,042
Amortization of Intangible Assets	515	$ 670	1,030	$ 1,340
Future Amortization Expense, Remainder of Fiscal Year	1,020		1,020
Future Amortization Expense, Year One	1,941		1,941
Future Amortization Expense, Year Two	1,553		1,553
Future Amortization Expense, Year Three	1,117		1,117
Future Amortization Expense, Year Four	1,117		1,117
Future Amortization Expense, Year Five	914		914
Developed Technology Rights [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	59,831		59,831		59,831
Finite-Lived Intangible Assets, Accumulated Amortization	54,221		54,221		53,417
Intangible Assets, Net (Excluding Goodwill)	5,610		5,610		6,414
Customer Relationships [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	9,560		9,560		9,560
Finite-Lived Intangible Assets, Accumulated Amortization	7,993		7,993		7,818
Intangible Assets, Net (Excluding Goodwill)	1,567		1,567		1,742
Trade Names [Member]
Finite-Lived Intangible Assets and Goodwill [Line Items]
Finite-Lived Intangible Assets, Gross	4,361		4,361		4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,525		3,525		3,475
Intangible Assets, Net (Excluding Goodwill)	$ 836		$ 836		$ 886

Balance Sheet Details - Invento

Balance Sheet Details - Inventory (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Inventory Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 35,091	$ 29,092
Inventory, Work in Process, Net of Reserves	20,866	20,424
Inventory, Finished Goods, Net of Reserves	13,309	13,828
Inventory, Net	69,266	63,344
Inventory Valuation Reserves	$ 8,808	$ 7,000

Balance Sheet Details - Propert

Balance Sheet Details - Property Plant & Equipment (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Property Plant & Equipment [Abstract]
Buildings and Land Gross	$ 5,024	$ 5,024
Machinery and Equipment, Gross	21,580	20,277
Furniture and Fixtures, Gross	3,412	3,387
Computer Equipments And Software Gross	6,129	5,819
Leasehold Improvements, Gross	7,782	7,774
Property, Plant and Equipment, Gross	43,927	42,281
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	31,140	29,343
Property, Plant and Equipment, Net	$ 12,787	$ 12,938

Balance Sheet Details - Other A

Balance Sheet Details - Other Assets (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Other Assets [Abstract]
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$ 30,348	$ 30,348
Other	1,101	1,493
Total Other Assets	$ 31,449	$ 31,841

Balance Sheet Details - Other C

Balance Sheet Details - Other Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Other Current Liabilities [Abstract]
Estimated Litigation Liability, Current	$ 3,252	$ 3,252
Deferred Revenue	6,605	7,045
Contingent Consideration Current Liability	1,299	1,267
Other Current Liabilities Subtotal	6,728	5,624
Other Liabilities, Current	$ 17,884	$ 17,188

Balance Sheet Details - Other N

Balance Sheet Details - Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$ 3,226	$ 3,178
Contingent consideration - Acquisition non-current liability	3,305	3,797
Other Liabilities	3,406	2,626
Other Liabilities, Noncurrent	$ 9,937	$ 9,601

Debt Obligations - (Details)

Debt Obligations - (Details) - USD ($) $ / shares in Units, $ in Thousands	1 Months Ended	3 Months Ended		6 Months Ended
	Jul. 31, 2011	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014	Jul. 25, 2011
Debt Obligations [Abstract]
Convertible Debt		$ 60,000		$ 60,000		$ 60,000	$ 60,000
Debt Instrument, Interest Rate, Stated Percentage							3.75%
Convertible Preferred Stock, Shares Issued upon Conversion							77.241
Note increment for which conversion amount of Common Stock based							$ 1
Debt Instrument, Convertible, Conversion Price							$ 12.95
Class of Warrant or Right, Exercise Price of Warrants or Rights							$ 17
Proceeds from Convertible Debt	$ 50,249
Debt Instrument, Unamortized Discount		3,601		3,601		5,227
Convertible senior notes		56,399		56,399		$ 54,773
Contractual Interest Coupon		563	$ 563	1,125	$ 1,125
Amortization of Debt Discount (Premium)		815	739	1,626	1,474
Amortization of Financing Costs		104	87	207	174
Interest Expense, Debt		$ 1,482	$ 1,389	$ 2,958	$ 2,773

Commitments and Contingencies48

Commitments and Contingencies - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014	Dec. 31, 2013
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$ 1,823	$ 1,477	$ 1,574	$ 1,551
Product Warranty Accrual, Warranties Issued	1,300	961
Product Warranty Accrual, Payments	$ 1,051	$ 1,035

Legal Matters (Details)

Legal Matters (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2015	Aug. 08, 2014
Commitments and Contingencies [Abstract]
Estimated Litigation Liability		$ 3,252
Subsequent Event [Line Items]
Loss Contingency, Damages Awarded, Value	$ 14,512

Share-Based Compensation Restri

Share-Based Compensation Restricted Stock Units (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	6 Months Ended	12 Months Ended
	Jun. 30, 2015	Dec. 31, 2014
Restricted Stock Units Activity [Abstract]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,081	805
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 11.06	$ 11.07
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	792
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 10.57
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	503
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 10.32
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	13
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 10.99
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$ 7,990	$ 5,492
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 7 months	3 years 4 months

Other Income - (Details)

Other Income - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Other Income (Expense) [Abstract]
Foreign currency exchange losses (gains), net	$ (212)	$ 162	$ 426	$ 35
Total other expenses (income)	$ (212)	$ 162	$ 426	$ 35

Income Taxes - (Details)

Income Taxes - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014
Income Taxes [Abstract]
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	$ 8,656	$ (10,995)	$ 11,753	$ (12,036)
Income Tax Expense (Benefit)	$ 2,629	$ (6,583)	$ 3,878	$ (6,900)
Effective Income Tax Rate	30.40%	59.90%	33.00%	57.30%
Valuation Allowance, Amount	$ 1,910		$ 1,910		$ 2,445

Restructuring and asset impai53

Restructuring and asset impairment (Details) - USD ($) $ in Thousands	3 Months Ended
	Jun. 30, 2015	Dec. 31, 2014
Restructuring and Related Activities [Abstract]
Restructuring Reserve, Current	$ 224	$ 764
Restructuring Costs	0
Payments for Restructuring	$ (540)

Earnings Per Share - (Details)

Earnings Per Share - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Earnings Per Share [Abstract]
Stock Options Antidilutive securities excluded from computation	260
Restricted Stock Unit Antidilutive excluded from computation	0
Stock Options Excluded from Computation of diluted loss per share		714
Restricted stock units excluded from Computation of diluted loss per share		1,265
Net Income (Loss) Attributable to Parent	$ 6,027	$ (4,412)	$ 7,875	$ (5,136)
Weighted Average Number of Shares Outstanding, Basic	31,663	33,240	31,724	33,186
Weighted Average Number Diluted Shares Outstanding Adjustment	676	0	649	0
Weighted Average Number of Shares Outstanding, Diluted	32,339	33,240	32,373	33,186
Earnings (Loss) Per Share, Basic	$ 0.19	$ (0.13)	$ 0.25	$ (0.15)
Earnings (Loss) Per Share, Diluted	$ 0.19	$ (0.13)	$ 0.24	$ (0.15)

Accumulated Other Comprehensi55

Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Jun. 30, 2015	Dec. 31, 2014
Stockholders' Equity Attributable to Parent	$ 268,201	$ 267,328
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	2,229	2,685
Net current period other comprehensive gain (loss)	(456)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	(27)	(33)
Net current period other comprehensive gain (loss)	6
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	2,202	$ 2,652
Net current period other comprehensive gain (loss)	(450)
Reclassification of accumulated other comprehensive income (loss)	$ 0

Segment Reporting (Details)

Segment Reporting (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Segment Reporting Information [Line Items]
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667
Concentration Risk, Percentage			6.40%	11.10%
Inspection Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	32,225	22,852	$ 60,686	$ 40,853
Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	9,645	4,652	17,245	10,401
Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Revenues	5,142	6,956	12,936	12,930
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues	3,826	0	3,847	3,657
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues	5,796	5,072	11,451	10,112
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues	2,832	3,486	5,871	6,714
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667
Sales [Member] | Percentage of Inspection Revenues [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	54.00%	53.00%	54.00%	48.00%
Sales [Member] | Percentage of Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	16.00%	11.00%	16.00%	12.00%
Sales [Member] | Percentage of Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	9.00%	16.00%	12.00%	15.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	6.00%	0.00%	3.00%	5.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	10.00%	12.00%	10.00%	12.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	5.00%	8.00%	5.00%	8.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	100.00%	100.00%	100.00%	100.00%
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 11,773	$ 9,704	$ 29,420	$ 19,638
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	16,259	12,252	29,588	20,182
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,918	5,068	5,232	6,353
CHINA
Segment Reporting Information [Line Items]
Revenues	858	2,295	6,945	7,125
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	6,709	887	10,240	8,439
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	9,359	5,995	11,137	12,586
GERMANY
Segment Reporting Information [Line Items]
Revenues	8,970	3,908	16,025	5,251
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	1,620	2,909	3,449	5,093
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667

Segment Reporting and Geograp57

Segment Reporting and Geographic Information Geographic Information (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Segment Reporting Information [Line Items]
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	11,773	9,704	29,420	19,638
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	16,259	12,252	29,588	20,182
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,918	5,068	5,232	6,353
CHINA
Segment Reporting Information [Line Items]
Revenues	858	2,295	6,945	7,125
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	6,709	887	10,240	8,439
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	9,359	5,995	11,137	12,586
GERMANY
Segment Reporting Information [Line Items]
Revenues	8,970	3,908	16,025	5,251
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	1,620	2,909	3,449	5,093
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 59,466	$ 43,018	$ 112,036	$ 84,667

Segment Reporting and Geograp58

Segment Reporting and Geographic Information Customer Reporting (Details)	6 Months Ended
	Jun. 30, 2015	Jun. 30, 2014
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	6.40%	11.10%

Share Repurchase Program - (Det

Share Repurchase Program - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended		12 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014	Dec. 31, 2014	Jan. 28, 2015
Share Repurchase Program [Abstract]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000		3,000
Stock Repurchased and Retired During Period, Shares	363	100	933	100	1,353
Additional shares available for future purchase						1,353
Shares available for future repurchase	2,067		2,067
Stock Repurchased During Period, Value	$ 4,411	$ 986	$ 11,197	$ 986
StockRepurchasedAndRetired-AveragePricePerShare	$ 12.17	$ 9.86	$ 12.01	$ 9.86