Rudolph 10-K 19 Feb 16 2015 FY Annual report Financial data

Document and Entity Information

Document and Entity Information Document - USD ($)	12 Months Ended
	Dec. 31, 2015	Feb. 12, 2016	Jun. 30, 2015
Document Information [Abstract]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1,094,392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-K
Document Period End Date	Dec. 31, 2015
Document Fiscal Year Focus	2,015
Document Fiscal Period Focus	FY
Amendment Flag	false
Entity Common Stock, Shares Outstanding		31,025,779
Entity Well-known Seasoned Issuer	No
Entity Voluntary Filers	No
Entity Current Reporting Status	Yes
Entity Public Float			$ 360,777,157

Statement of Financial Position

Statement of Financial Position - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Assets, Current [Abstract]
Cash and Cash Equivalents, at Carrying Value	$ 44,554	$ 43,114
Marketable Securities, Current	116,924	113,871
Accounts Receivable, Net, Current	55,492	51,603
Inventory, Net	71,490	63,344
Income Taxes Receivable	0	1,458
Prepaid Expense and Other Assets	8,137	7,945
Assets, Current	296,597	281,335
Property, Plant and Equipment, Net	12,346	12,938
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	12,593	9,042
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	34,973	39,334
Other Assets, Noncurrent	820	1,493
Assets	379,824	366,637
Liabilities, Current [Abstract]
Accounts Payable, Current	9,094	6,843
Accrued Liabilities, Current [Abstract]
Employee-related Liabilities, Current	10,142	8,831
Accrued Royalties	336	499
Product Warranty Accrual, Current	1,894	1,574
Convertible Debt, Current	58,107	0
Taxes Payable, Current	1,163	0
Deferred Revenue	6,441	7,045
Other Liabilities, Current	12,415	10,143
Liabilities, Current	99,592	34,935
Convertible Debt, Noncurrent	0	54,773
Other Liabilities, Noncurrent	9,554	9,601
Liabilities	109,146	99,309
Stockholders' Equity Attributable to Parent [Abstract]
Preferred stock issued and outstanding	0	0
Common Stock, Value, Issued	31	32
Additional Paid in Capital, Common Stock	394,928	409,562
Accumulated Other Comprehensive Income (Loss), Net of Tax	(2,623)	(2,652)
Retained Earnings (Accumulated Deficit)	(121,658)	(139,614)
Stockholders' Equity Attributable to Parent	270,678	267,328
Liabilities and Equity	$ 379,824	$ 366,637

Statement of Financial Positio3

Statement of Financial Position B/S Parathetical - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Allowance for Doubtful Accounts Receivable, Current	$ 713	$ 1,279
Preferred Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001
Preferred Stock, Shares Authorized	5,000,000	5,000,000
Preferred Stock, Shares Issued	0	0
Preferred Stock, Shares Outstanding	0	0
Common Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001
Common Stock, Shares Authorized	100,000,000	100,000,000
Common Stock, Shares, Issued	30,949,000	32,093,000
Common Stock, Shares, Outstanding	30,949,000	32,093,000

Statement of Income

Statement of Income - USD ($) shares in Thousands, $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Revenues	$ 221,690	$ 181,218	$ 176,238
Cost of Revenue	102,284	85,730	85,506
Gross Profit	119,406	95,488	90,732
Operating Expenses [Abstract]
Research and Development Expense	41,233	40,576	39,994
Selling, General and Administrative Expense	43,235	53,799	41,542
Amortization of Intangible Assets	2,145	2,422	2,592
Operating Expenses	86,613	96,797	84,128
Operating Income (Loss)	32,793	(1,309)	6,604
Interest Income (Expense), Net	5,688	5,317	5,079
Other Nonoperating Expense (Income)	293	65	(8)
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	26,812	(6,691)	1,533
Income Tax Expense (Benefit)	8,856	(2,051)	(1,925)
Net Income (Loss) Attributable to Parent	$ 17,956	$ (4,640)	$ 3,458
Earnings Per Share, Basic	$ 0.57	$ (0.14)	$ 0.11
Earnings Per Share, Diluted	$ 0.56	$ (0.14)	$ 0.10
Weighted Average Number of Shares Outstanding, Basic	31,408	33,124	32,783
Weighted Average Number of Shares Outstanding, Diluted	32,166	33,124	33,388

Statement of Comprehensive Inco

Statement of Comprehensive Income - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Net Income (Loss) Attributable to Parent	$ 17,956	$ (4,640)	$ 3,458
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Other Comprehensive Income (Loss), Unrealized Holding Gain (Loss) on Securities Arising During Period, Net of Tax	(33)	183	(50)
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	62	(1,040)	(660)
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 17,985	$ (5,497)	$ 2,748

Statement of Shareholders' Equi

Statement of Shareholders' Equity - USD ($) shares in Thousands, $ in Thousands	Total	Common Stock [Member]	Additional Paid-in Capital [Member]	Accumulated Other Comprehensive Income (Loss) [Member]	Retained Earnings [Member]
Shares, Issued		32,367
Stockholders' Equity Attributable to Parent	$ 270,489	$ 32	$ 409,974	$ (1,085)	$ (138,432)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		586
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	1,012	$ 1	1,011	0	0
Payments for Repurchase of Common Stock	0
Net Income (Loss) Attributable to Parent	3,458				3,458
Stock Issued During Period, Value, New Issues	4,106		4,106
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	648		648
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	(660)			(660)
Unrealized Gain (Loss) on Investments	(50)			(50)
Shares, Issued		32,953
Stockholders' Equity Attributable to Parent	279,003	$ 33	415,739	(1,795)	(134,974)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		493
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	362	$ 0	362	0	0
Stock Repurchased During Period, Shares		(1,353)
Stock Repurchased During Period, Value		$ (1)	(12,844)
Payments for Repurchase of Common Stock	(12,845)
Net Income (Loss) Attributable to Parent	(4,640)				(4,640)
Stock Issued During Period, Value, New Issues	6,242		6,242
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	63		63
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	(1,040)			(1,040)
Unrealized Gain (Loss) on Investments	183			183
Shares, Issued		32,093
Stockholders' Equity Attributable to Parent	267,328	$ 32	409,562	(2,652)	(139,614)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		530
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	330	$ 0	330	0	0
Stock Repurchased During Period, Shares		(1,674)
Stock Repurchased During Period, Value		$ (1)	(20,667)
Payments for Repurchase of Common Stock	(20,668)
Net Income (Loss) Attributable to Parent	17,956				17,956
Stock Issued During Period, Value, New Issues	7,603		7,603
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	16		16
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	62			62
Unrealized Gain (Loss) on Investments	(33)			(33)
Shares, Issued		30,949
Stockholders' Equity Attributable to Parent	$ 270,678	$ 31	$ 394,928	$ (2,623)	$ (121,658)

Statement of Cash Flows

Statement of Cash Flows $ in Thousands	12 Months Ended
	Dec. 31, 2015USD ($)	Dec. 31, 2014USD ($)	Dec. 31, 2013USD ($)
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Net Income (Loss) Attributable to Parent	$ 17,956	$ (4,640)	$ 3,458
Depreciation	3,951	4,686	4,150
Amortization of Financing Costs and Discounts	3,766	3,385	3,044
Amortization	2,145	2,427	2,786
Foreign Currency Transaction Loss (Gain), before tax	293	65	(8)
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	(630)	120	138
Share-based Compensation	7,603	6,242	4,106
Provision for doubtful accounts and inventory valuation	3,826	4,064	3,608
Increase (Decrease) in Deferred Income Taxes	3,980	(3,937)	(1,510)
Increase (Decrease) in Accounts Receivable	(4,336)	1,147	2,631
Increase (Decrease) in Income Taxes Receivable	2,610	1,196	(4,605)
Increase (Decrease) in Inventories	(12,529)	(9,393)	(6,758)
Increase (Decrease) in Prepaid Expense and Other Assets	953	(4,690)	1,383
Increase (Decrease) in Accounts Payable	2,254	3,758	(912)
Increase (Decrease) in Deferred Revenue	(1,535)	363	(1,655)
Increase (Decrease) in Other Operating Liabilities	3,486	(503)	(3,772)
Net Cash Provided by (Used in) Operating Activities	33,793	4,290	6,084
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities	(237,127)	(243,656)	(119,068)
Proceeds from Sale and Maturity of Marketable Securities	234,105	217,212	97,289
Payments to Acquire Property, Plant, and Equipment	(3,359)	(2,084)	(4,880)
Payments to Acquire Intangible Assets	(2,696)	0	0
Payments to Acquire Businesses, Net of Cash Acquired	0	0	(3,365)
Net Cash Provided by (Used in) Investing Activities	(9,077)	(28,528)	(30,024)
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for (Proceeds from) Derivative Instrument, Financing Activities	(20,668)	(12,845)	0
Payments Related to Tax Withholding for Share-based Compensation	(1,916)	0	0
Proceeds from (Payments for) Other Financing Activities	(731)	(264)	(224)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	330	362	1,012
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	16	63	648
Net Cash Provided by (Used in) Financing Activities	(22,969)	(12,684)	1,436
Effect of Exchange Rate on Cash and Cash Equivalents	(307)	(754)	(959)
Cash and Cash Equivalents, Period Increase (Decrease)	1,440	(37,676)	(23,463)
Cash and Cash Equivalents, at Carrying Value	44,554	43,114	80,790
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid	2,013	1,067	5,492
Interest Paid	2,250	2,250	2,250
Payments for Legal Settlements	0	10,613	0
Noncash or Part Noncash Acquisition, Intangible Assets Acquired	$ 3,000	$ 0	$ 0

Organization and Nature of Oper

Organization and Nature of Operations	12 Months Ended
	Dec. 31, 2015
Organization and Nature of Operations: [Abstract]
Nature of Operations [Text Block]	Organization and Nature of Operations: Rudolph Technologies, Inc. (the “Company”) designs, develops, manufactures and supports high-performance process control defect inspection, advanced packaging lithography, metrology and process control software systems used in semiconductor device manufacturing. The Company has branch sales and service offices in South Korea, Taiwan and Singapore and wholly-owned sales and service subsidiaries in the United States, Europe, Japan and China. The Company operates in a single segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities.

Summary of Significant Accounti

Summary of Significant Accounting Policies	12 Months Ended
	Dec. 31, 2015
Summary of Significant Accounting Policies [Abstract]
Significant Accounting Policies [Text Block]	Summary of Significant Accounting Policies: A. Consolidation: The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated. B. Revenue Recognition: Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions with arrangements with multiple elements, such as sales of products that include software and services, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies. Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized. Revenue from software license fees is recognized upon shipment or customer acknowledgment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period. Deferred revenue represents undelivered items, prepaid service contract revenue and prepaid license support and maintenance revenue. Deferred revenue is recognized in accordance with the Company’s revenue recognition policies described above. C. Estimates: The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, fair value of assets acquired and liabilities assumed in a business combination (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates. D. Cash and Cash Equivalents: Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased. E. Marketable Securities: The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities. For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial Statements. F. Allowance for Doubtful Accounts: The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience. G. Inventories: Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out basis, and include material, labor and manufacturing overhead costs. The Company reviews and sets standard costs as needed, but at a minimum on an annual basis, at current manufacturing costs in order to approximate actual costs. The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been established, it is maintained until the item to which it relates is scrapped or sold. H. Property, Plant and Equipment: Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are thirty years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized. I. Impairment of Long-Lived Assets: Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows. J. Goodwill and Intangible Assets: Intangible assets with finite useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. The Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of its reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company also obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2015 . No impairments were noted. For additional information on the Company’s goodwill and purchased intangible assets, see Note 5 of Notes to the Consolidated Financial Statements. K. Concentration of Credit Risk: Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer. L. Warranties: The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized. M. Income Taxes: The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings. The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current as the Company has early adopted the new ASU No. 2015-17 Balance Sheet Classification of Deferred Taxes to classify all deferred tax assets and liabilities as non-current. For additional information on the Company’s income taxes, see Note 11 of Notes to the Consolidated Financial Statements. N. Translation of Foreign Currencies: The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in the United States, Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. These foreign branches and subsidiaries are limited in their operations and level of investment so that the risk of currency fluctuations is not material. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales. Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $2,623 and $2,685 as of December 31, 2015 and 2014 , respectively. O. Share-based Compensation: The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method. For additional information on the Company’s share-based compensation plans, see Note 9 of Notes to the Consolidated Financial Statements. P. Research and Development and Software Development Costs: Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2015 and 2014 , the Company did not have any capitalized software development costs. During the years ended December 31, 2015 , 2014 and 2013 , software development cost amortization totaled $0 , $5 and $185 , respectively. Q. Shipping and Handling Costs: Shipping and handling cost are included as a component of cost of revenues. R. Fair Value of Financial Instruments: The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The carrying amount of our convertible senior notes was $58,107 and $54,773 as of December 31, 2015 and 2014 , respectively. The fair value of our convertible senior notes was $60,630 and $59,916 as of December 31, 2015 and 2014 , respectively. The Company’s convertible senior notes are not publicly traded. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. For additional information on the Company’s fair value of financial instruments, see Note 3 of Notes to the Consolidated Financial Statements. S. Derivative Instruments and Hedging Activities: The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2015 and 2014 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2015 and 2014 were as follows: December 31, 2015 2014 Notional amount $ 5,423 $ 1,610 Fair value of (liability) asset $ (85 ) $ 222 In 2015 , 2014 and 2013 , the Company recognized gains of $221 , $150 and $374 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $2,484 , $1,456 and $2,922 , for 2015 , 2014 and 2013 , respectively. T. Contingencies and Litigation The Company is subject to the possibility of losses from various contingencies, including certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See Note 8, “Commitments and Contingencies” for a detailed description. U. Reclassifications: Certain prior year amounts have been reclassified to conform to the 2015 financial statement presentation. These amounts include reclassification of a portion of deferred revenue to other non-current liabilities in the Consolidated Balance Sheets. These reclassifications were not considered material to the prior year financial statements. V. Recent Accounting Pronouncements: In November 2015, the Financial Account Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2015-17, “Income Taxes (Topic 740), Balance Sheet Classification of Deferred Taxes.” This standard requires that deferred tax liabilities and assets be classified as non-current in a classified statement of financial position. The standard is effective for annual periods beginning after December 15, 2017. Early adoption is permitted and the Company adopted this ASU retrospectively in its year ended December 31, 2015 consolidated statement of financial position resulting in the reclassification of $8,986 from net current deferred income tax assets to net long term deferred income tax assets as of December 31, 2014. In September 2015, the FASB issued ASU No. 2015-16, “Business Combinations (Topic 805), Simplifying the Accounting for Measurement-Period Adjustments.” This standard requires that an acquirer recognize adjustments to provisional amounts that are identified during the measurement period in the reporting period in which the adjustment amounts are determined. The ASU requires an entity to present separately on the face of the income statement or disclose in the notes the portion of the amount recorded in current-period earnings by line item that would have been recorded in previous reporting periods if the adjustment to the provisional amounts had been recognized as of the acquisition date. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of ASU 2015-16 is not expected to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows. In July 2015, the FASB issued ASU No. 2015-11, “Inventory (Topic 330), Simplifying the Measurement of Inventory.” This ASU is intended to simplify subsequent measurement of inventory. An entity should measure inventory within a scope of this ASU at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2016. The adoption of ASU 2015-11 is not expected to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows. In December 2014, the FASB issued ASU No.2014-12, “Compensation - Stock Compensation (Topic 718), Accounting for Share-Based Payments When the Terms of an Award Provide That a Performance Target Could Be Achieved after the Requisite Service Period.” The guidance reflects the EITF consensus that an award with a performance target that affects vesting and that could be achieved after an employee completes the requisite service period (i.e., the employee would be eligible to vest in the award regardless of whether the employee is rendering service on the date the performance target could be achieved) should be treated as a performance condition. That is, the performance target is not reflected in the determination of the grant date fair value of the award. Compensation cost attributable to the period for which requisite service has been rendered would be recognized in the period it becomes probable that the performance condition will be achieved. The total amount of compensation cost recognized during and after the requisite service period would reflect the number of awards that are expected to vest and would be adjusted to reflect those awards that ultimately vest. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of this new standard will not have a material impact on the Company’s consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers.” ASU 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. In July 2015, the FASB deferred for one year the effective date of the new revenue standard, but early adoption will be permitted. The new standard will be effective for the Company on January 1, 2018. ASU 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Fair Value Measurements

Fair Value Measurements	12 Months Ended
	Dec. 31, 2015
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements: The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement. The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2015 and December 31, 2014 : Fair Value Measurements Using Carrying Value Quoted Prices in Active Markets for Identical Assets (Level 1) Significant Other Observable Inputs (Level 2) Significant Unobservable Inputs (Level 3) December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703 December 31, 2014 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 113,871 $ — $ 113,871 $ — Foreign currency forward contracts 222 — 222 — Total Assets $ 114,093 $ — $ 114,093 $ — Liabilities: Contingent consideration - acquisitions $ 5,064 $ — $ — $ 5,064 Total Liabilities $ 5,064 $ — $ — $ 5,064 The Company’s investments classified as Level 1 are based on quoted prices that are available in active markets. The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class. Level 3 investments consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these investments. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 18.0% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration. This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2015 : Fair Value Measurements Using Significant Unobservable Inputs (Level 3) Liabilities: Balance at December 31, 2014 $ 5,064 Additions — Total gain due to remeasurement included in selling, general and administrative expense (630 ) Payments (731 ) Transfer into (out of) Level 3 — Balance at December 31, 2015 $ 3,703 See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities. Fair Value of Other Financial Instruments The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value of expected cash flow model incorporating the probabilities of the contingent events occurring. The following table reflects information pertaining to the Company’s convertible senior notes: December 31, 2015 2014 Net carrying value of convertible senior notes $ 58,107 $ 54,773 Estimated fair value of convertible senior notes $ 60,630 $ 59,916 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities

Marketable Securities	12 Months Ended
	Dec. 31, 2015
Marketable Securities [Abstract]
Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]	Marketable Securities: The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other expense (income).” The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost of securities sold is based on the specific identification method. The Company has determined that the gross unrealized losses on its marketable securities at December 31, 2015 and 2014 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. At December 31, 2015 and 2014 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ (15 ) $ 116,089 Corporate bonds $ 838 $ — $ (3 ) $ 835 Total marketable securities $ 116,924 $ 18 $ (18 ) $ 116,924 December 31, 2014 Municipal notes and bonds $ 113,838 $ 37 $ (4 ) $ 113,871 Total marketable securities $ 113,838 $ 37 $ (4 ) $ 113,871 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2015 and 2014 : December 31, 2015 December 31, 2014 Amortized Fair Amortized Fair Due within one year $ 113,542 $ 113,549 $ 107,151 $ 107,177 Due after one through five years 3,382 3,375 6,687 6,694 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 116,924 $ 116,924 $ 113,838 $ 113,871 The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2015 and 2014 . In Unrealized Loss Position In Unrealized Loss Position Fair Gross Fair Gross December 31, 2015 Municipal notes and bonds $ 52,638 $ (15 ) $ 305 $ (1 ) Corporate bonds $ 835 $ (3 ) $ — $ — Total marketable securities $ 53,473 $ (18 ) $ 305 $ (1 ) December 31, 2014 Municipal notes and bonds $ 26,698 $ (4 ) $ — $ — Total marketable securities $ 26,698 $ (4 ) $ — $ — See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

Goodwill and Purchased Intangib

Goodwill and Purchased Intangible Assets	12 Months Ended
	Dec. 31, 2015
Identifiable Intangible Assets [Abstract]
Goodwill and Intangible Assets Disclosure [Text Block]	Goodwill and Purchased Intangible Assets: Goodwill The changes in the carrying amount of goodwill are as follows: Balance at December 31, 2013 $ 22,553 Goodwill acquired during the period (58 ) Balance at December 31, 2014 22,495 Goodwill acquired during the period — Balance at December 31, 2015 $ 22,495 Purchased Intangible Assets Purchased intangible assets as of December 31, 2015 and 2014 are as follows: Gross Carrying Amount Accumulated Amortization Net December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593 December 31, 2014 Finite-lived intangibles: Developed technology $ 59,831 $ 53,417 $ 6,414 Customer and distributor relationships 9,560 7,818 1,742 Trade names 4,361 3,475 886 Total identifiable intangible assets $ 73,752 $ 64,710 $ 9,042 Intangible asset amortization expense amounted to $2,145 , $2,422 and $2,592 for the years ended December 31, 2015 , 2014 and 2013 , respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense will be $2,321 for 2016 , $1,933 for 2017 , $1,496 for 2018 , $1,496 for 2019 , and $1,294 for 2020 . In September 2015, the Company announced that it purchased Stella Alliance, LLC, a Massachusetts-based semiconductor inspection technology intellectual property portfolio company. The acquired intellectual property is being integrated into the Company’s process control group. The Company accounted for the transaction as an asset acquisition and assigned a fair value to the intellectual property of $5,696 , which is included in the asset class of developed technology. The intellectual property will be amortized on a straight line basis over its estimated useful life of fifteen years.

Balance Sheet Details

Balance Sheet Details	12 Months Ended
	Dec. 31, 2015
Balance Sheet Details [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details: Inventories Inventories are comprised of the following: December 31, 2015 2014 Materials $ 39,022 $ 29,092 Work-in-process 18,918 20,424 Finished goods 13,550 13,828 Total inventories $ 71,490 $ 63,344 The Company has established reserves of $8,896 and $7,000 at December 31, 2015 and 2014 , respectively, for slow moving and obsolete inventory. During 2015 , the Company recorded a net charge in cost of revenues of $3,676 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2015 , the Company disposed of $1,780 of inventory. During 2014 , the Company recorded a net charge in cost of revenues of $3,910 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2014 , the Company disposed of $3,011 of inventory. Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: December 31, 2015 2014 Land and building $ 5,024 $ 5,024 Machinery and equipment 21,683 20,277 Furniture and fixtures 3,414 3,387 Computer equipment 5,304 5,819 Leasehold improvements 7,884 7,774 43,309 42,281 Accumulated depreciation (30,963 ) (29,343 ) Total property, plant and equipment, net $ 12,346 $ 12,938 Depreciation expense amounted to $3,951 , $4,686 and $4,150 for the years ended December 31, 2015 , 2014 and 2013 , respectively. In February 2016, the Company consolidated its New Jersey locations into its Budd Lake, NJ facility and vacated its corporate offices in Flanders, NJ. The Flanders, NJ corporate office location will be considered a long-lived asset held for sale and the land and building have a carrying value of $231 . Other current liabilities Other current liabilities is comprised of the following: December 31, 2015 2014 Litigation accrual $ 3,252 $ 3,252 Contingent consideration - acquisitions 1,407 1,267 Other 7,756 5,624 Total other current liabilities $ 12,415 $ 10,143 Other non-current liabilities Other non-current liabilities is comprised of the following: December 31, 2015 2014 Unrecognized tax benefits (including interest) $ 3,152 $ 3,178 Contingent consideration - acquisitions 2,296 3,797 Deferred revenue 1,206 931 Other 2,900 1,695 Total non-current liabilities $ 9,554 $ 9,601

Debt Obligations

Debt Obligations	12 Months Ended
	Dec. 31, 2015
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations: On July 25, 2011 , the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 (the “Indenture”), between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes pay interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012 , at an annual rate of 3.75% and will mature on July 15, 2016 , unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant discussed below, were $50,249 . The following table reflects the net carrying value of the Notes as of December 31, 2015 and 2014 : December 31, 2015 2014 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 1,893 5,227 Net carrying value of convertible senior notes $ 58,107 $ 54,773 The Notes may be converted at any time prior to the close of business on the business day immediately preceding April 15, 2016 , at the option of the holder, upon satisfaction of one or more of the following conditions: 1) during any calendar quarter commencing after September 30, 2011, if the last reported sale price of the Company’s common stock for at least 20 trading days (whether or not consecutive) during the period of 30 consecutive trading days ending on the last trading day of the immediately preceding calendar quarter exceeds 130% of the applicable conversion price on each applicable trading day; 2) during the five business day period after any five consecutive trading-day period (the “measurement period”) in which the “trading price” (as defined in the Indenture) per $1 principal amount of the Notes for each trading day of such measurement period was less than 98% of the product of the last reported sale price of the Company’s common stock and the applicable conversion rate on such trading day; or 3) upon the occurrence of specified corporate events. On and after April 15, 2016 , until the close of business on the second scheduled trading day immediately preceding the maturity date of July 15, 2016 , holders may convert their notes, in multiples of $1 principal amount, regardless of whether any of the foregoing conditions have been met. Upon conversion, the Company will deliver to holders in respect of each $1 principal amount of Notes being converted a “settlement amount” equal to the sum of the daily settlement amounts for each of the 40 consecutive trading days during the applicable cash settlement averaging period. The conversion value of each Note will be paid in: 1) cash equal to the principal amount of the Notes to be converted, and 2) to the extent the conversion value exceeds the aggregate principal amount of the Notes being converted, the Company’s common stock in respect of the remainder (plus cash in lieu of any fractional shares of common stock). The conversion rate will be subject to adjustment in certain circumstances but will not be adjusted for any accrued and unpaid interest. Upon a “fundamental change” at any time, as defined in the Indenture, the Company will, under certain circumstances, increase the conversion rate for a holder who elects to convert its Notes in connection with a “make whole fundamental change,” as defined in the Indenture. In addition, the holders may, subject to certain conditions, require the Company to repurchase for cash all or a portion of their Notes upon a “fundamental change” at a price equal to 100% of the principal amount of the Notes being repurchased plus accrued and unpaid interest, if any. The Company separately accounts for the liability and equity components of the Notes. The initial debt component of the Notes were valued at $45,493 based on the present value of the future cash flows using a discount rate of 10% , the Company’s assumed borrowing rate at the date of issuance for similar debt instruments without the conversion feature. The equity component was valued at $14,507 . Total issuance costs were $2,251 , of which $544 was allocated to the equity component and $1,707 was allocated to debt issuance costs and will be amortized to interest expense over the term of the Notes. The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2015 , 2014 and 2013 . December 31, 2015 2014 2013 Contractual interest coupon $ 2,250 $ 2,250 $ 2,250 Amortization of interest discount 3,334 3,022 2,740 Amortization of debt issuance costs 432 363 303 Total interest cost recognized $ 6,016 $ 5,635 $ 5,293 The remaining bond discount of the Notes of $1,893 , as of December 31, 2015 will be amortized over the remaining life of the Notes. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes (the “Option Counterparty”). The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is initially $17.00 per share. Each of these components is discussed separately below: Convertible Note Hedge . The Option Counterparty agreed to sell to the Company up to approximately 4,634 shares of the Company’s common stock, which is the maximum number of shares issuable upon conversion of the Notes, at a price of $12.95 per share. The convertible note hedge transaction will be settled in shares of the Company’s common stock (and cash in lieu of fractional shares) and will expire on the earlier of the “second scheduled trading day” (as defined in the Indenture) prior to the maturity date of the Notes or the last day any of the Notes remain outstanding. Subject to certain terms and conditions, settlement of the convertible note hedge would result in the Company receiving shares of the Company’s common stock equivalent to the number of shares that the Company is obligated to deliver to holders of the Notes upon conversion of the Notes. The Company will not be required to make any cash payments to the Option Counterparty or its affiliates upon the exercise of the options that are a part of the convertible note hedge transaction, but will be entitled to receive from the Option Counterparty a number of shares of Company common stock generally based on the amount by which the market price per share of Company common stock, as measured under the terms of the convertible note hedge transaction, is greater than the strike price of the convertible note hedge transaction during the relevant valuation period under the convertible note hedge transaction. The convertible note hedge transaction cost of $14,507 has been accounted for as an equity transaction. Warrant. The Company received $7,007 from the Option Counterparty from the sale of the warrant to purchase up to approximately 4,634 shares of the Company’s common stock at a strike price of $17.00 per share. As of December 31, 2015 , the warrant expires between October 13, 2016 and January 9, 2017 . As of December 31, 2015 , the warrant had not been exercised and remained outstanding. Additionally, if the market price per share of Company common stock, as measured under the terms of the warrant transaction, exceeds the strike price of the warrant during the valuation period at the maturity of the warrant, the Company will owe the Option Counterparty a number of shares of Company common stock in an amount based on the excess of such market price per share of Company common stock over the strike price of the warrant. The fair value of the warrant was initially recorded in equity and continues to be classified as equity. The convertible note hedge transaction and the warrant transaction are separate transactions entered into by the Company. Holders of the Notes will not have any rights with respect to the convertible note hedge transaction and the warrant transaction.

Commitments and Contingencies

Commitments and Contingencies	12 Months Ended
	Dec. 31, 2015
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies: Intellectual Property Indemnification Obligations The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees. Warranty Reserves The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the year-end and warranty accruals are related to sales during the year. Changes in the Company’s warranty reserves are as follows: Year Ended December 31, 2015 2014 2013 Balance, beginning of the year $ 1,574 $ 1,551 $ 2,024 Accruals 2,640 2,048 1,956 Usage (2,320 ) (2,025 ) (2,429 ) Balance, end of the year $ 1,894 $ 1,574 $ 1,551 Legal Matters From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The following reflects an overview of the material activities with regard to these matters through December 31, 2015. Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182 (PHX-ROS) : As previously disclosed, in December 2007, the Company completed the acquisition of specific assets and liabilities of the semiconductor division of Applied Precision LLC (“Applied”). As a result of the acquisition, the Company assumed certain liabilities of Applied including a lawsuit filed in the United States District Court, District of Arizona, by Integrated Technology Corporation (“ITC”) which alleged Applied’s PrecisionPoint™, PrecisionWoRx ® and ProbeWoRx ® products infringed an ITC patent. Prior to trial, the District Court ruled that such products sold prior to August of 2007 (the “pre-August 2007 tools”) infringed the ITC patent. At trial in December of 2011, a trial verdict was rendered in which the jury found that while the Company’s products manufactured after August of 2007 (the “post-August 2007 tools”) did not literally infringe ITC’s patent, the products were found to infringe under a rule known as the doctrine of equivalents, a legal principle which expands the language of patent claims to encompass products or processes which may otherwise be found not to literally infringe the patent. The jury awarded $15,475 to ITC in damages for sales made during the years 2000-2011, of which approximately one-half related to sales for pre-August 2007 tools. The jury found that for the sales of the post-August 2007 tools, the infringement was willful. On July 23, 2012, the District Court issued an Order which affirmed the jury’s award, applied treble damages to the portion of the jury award related to post-August 2007 tool sales and granted ITC’s motion for attorney’s fees and prejudgment interest on the verdict and attorney’s fees. At that time, the District Court also enjoined the Company from future infringement of the ITC patent and from selling or supplying the applicable products with the applicable features from or into the United States. The Company appealed the injunction, the District Court Order and the damages assessment. In October 2012, the injunction was stayed by the U.S. Federal Court of Appeals and thereafter in June of 2013, the patent expired. On November 4, 2013, the U.S. Federal Court of Appeals issued a ruling which reversed the judgment of infringement against all post-August 2007 tools, reversed the finding of willfulness, vacated the treble damages award, vacated the award of attorney’s fees and costs, remanded the issue back to the District Court for further review, and affirmed the award of damages and interest for the pre-August 2007 tools. As a result, the matter is resolved with regard to the alleged infringement of the post-August 2007 tools. With regard to the damages assessment against the pre-August 2007 tools, on March 4, 2014, the Company filed a Petition for a Writ of Certiorari with the U.S. Supreme Court to appeal the basis of the Federal Court of Appeals’ decision affirming the damages award for the pre-August 2007 tools. On June 30, 2014, the Supreme Court denied the Company’s Petition and as a result, on July 22, 2014, the Company paid to ITC $10,613 which represented only the damages and interest portion of the judgment. Since the patent expired in June of 2013 and payment of the judgment has been made, this matter is fully resolved with the sole exception of the issue of the remanded attorney’s fees. On August 8, 2014, the District Court issued an order for setting the attorney’s fees award at $3,252 which the Company appealed to the U.S. Federal Court of Appeals on September 5, 2014. A hearing regarding the Company’s appeal was held on October 6, 2015 and thereafter, the U.S. Federal Court of Appeals issued a ruling that the award was improperly established, vacated the amount of the award and remanded the matter back to the District Court for a determination of a proper fee award. The Company believes that it has meritorious defenses regarding this issue and intend to continue to vigorously prosecute the matter. The $3,252 is held in escrow and is recorded in “Prepaid expenses and other current assets” in the Consolidated Balance Sheet at December 31, 2015. The corresponding liability is recorded under the caption, “Other current liabilities,” in the Consolidated Balance Sheet at December 31, 2015. The Company expects this to be the maximum liability reasonably possible for the attorney’s fees, excluding interest, for this lawsuit with respect to both the pre-August 2007 and post-2007 August tools. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 05-CV-01396 (JRT/FLN) : The Company’s patent infringement suit against Camtek, Ltd., of Migdal Hamek, Israel, concerning its proprietary continuous scan wafer inspection technology, was initially brought in 2005 by August Technology prior to its merger with the Company. On August 22, 2011, the U.S. Federal Court of Appeals issued a decision in which it affirmed multiple rulings from trial at the District Court level including (i) finding the Company’s U.S. Patent No. 6,826,298 valid, (ii) the part of the infringement ruling based on the finding that Camtek’s Falcon product strobes “based on velocity,” and (iii) the dismissal of Camtek’s claim against the Company for inequitable conduct against the U.S. Patent and Trademark Office. The Appellate Court did, however, revise one claim construction ruling made by the District Court in the original case. As a result, the Appellate Court set aside the verdict delivered by the jury for damages and the District Court’s decision to enter an injunction against Camtek’s selling Falcon tools in the U.S. and remanded the case back to the District Court for a limited trial on this single infringement issue. On March 31, 2014, the District Court ruled in the Company’s favor, finding that Camtek’s Falcon tools continue to infringe the Company’s patent even under the revised claim construction of the patent, obviating the need for the limited trial. On February 9, 2015, the District Court issued an Order granting the Company’s Motion for Final Judgment, reinstating the original damages and applying prejudgment interest for a total award of $14,512 . In addition, the District Court issued a permanent injunction against Camtek from “making, using, selling and offering to sell any of its Falcon machines and any machines that are colorable imitations thereof in the United States, intended for sale and use within the United States, until the expiration of the ‘6,298 patent [projected to be in 2020].” While, in March of 2015, Camtek filed an appeal with the U.S. Federal Court of Appeals challenging the District Court’s ruling. The Appeals Court denied Camtek's appeal on February 3, 2016, affirming both the infringement ruling and the damages and interest totaling approximately $14,600 assessed against Camtek by the District Court. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 10-CV-2202 (MJD/FLN) : A lawsuit against Camtek was filed by the Company in 2011 alleging infringement of its U.S. Patent No. 7,729,528 which is also related to the Company’s proprietary continuous scan wafer inspection technology. Camtek filed an inter partes reexamination petition with the U.S. Patent and Trademark Office on January 19, 2012 asserting that certain claims of the patent are unpatentable. The reexamination of the subject patent is ongoing at this time. During the pendency of the reexamination process, the parties have stipulated that the lawsuit be stayed pending resolution of Camtek’s petition. Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT) : On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph ‘6,298 patent by Camtek’s Eagle product with the U.S. District Court in Minnesota. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States which is currently pending. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota District Court and seeking to have the New Jersey District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the U.S. District Court in Minnesota ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the U.S. District Court in New Jersey was subsequently dismissed. This matter is currently ongoing in the U.S. District Court in Minnesota. Lease Agreements The Company rents space for its manufacturing and service operations and sales offices, which expire through 2020. Total rent expense for these facilities amounted to $3,525 , $3,716 and $3,794 for the years ended December 31, 2015 , 2014 and 2013 , respectively. The Company also leases certain equipment pursuant to operating leases, which expire through 2020. Rent expense related to these leases amounted to $105 , $95 and $171 for the years ended December 31, 2015, 2014 and 2013 , respectively. Total future minimum lease payments under noncancelable operating leases as of December 31, 2015 amounted to $3,153 for 2016 , $2,558 for 2017 , $2,327 for 2018 , $1,692 for 2019 , $1,005 for 2020 and $1,310 for all periods thereafter. Royalty Agreements Under various licensing agreements, the Company is obligated to pay royalties based on net sales of products sold. There are no minimum annual royalty payments. Royalty expense amounted to $813 , $819 and $831 for the years ended December 31, 2015 , 2014 and 2013 , respectively. Open and Committed Purchase Orders The Company has open and committed purchase orders of $29,579 as of December 31, 2015 . Debt Obligations The Company’s contractual obligation relating to the principal payment of its convertible senior notes totaling $60,000 is due on July 15, 2016 . Line of Credit During the fourth quarter of 2015, the Company entered into a credit agreement with Credit Suisse providing for a $60,000 committed secured revolving line of credit. The agreement will expire on October 31, 2016. The Company has not utilized the credit agreement to date.

Share-Based Compensation and Em

Share-Based Compensation and Employee Benefit Plans	12 Months Ended
	Dec. 31, 2015
Share-Based Compensation and Employee Benefit Plans [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation and Employee Benefit Plans: Share-Based Compensation Plans The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth of the Company. The Company settles stock option exercises and restricted stock unit awards with newly issued common shares. The Company established the 2009 Stock Plan (the “ 2009 Plan”) effective November 1, 2009. The 2009 Plan provides for the grant of 3,300 stock options and other stock awards to employees, directors and consultants at an exercise price equal to or greater than the fair market value of the common stock on the date of grant. Shares of common stock available for future grants of 2,558 from a previous stock plan were carried forward into the allocated balance of the 2009 Plan. Options granted under the 2009 Plan typically grade vest over a five-year period and expire ten years from the date of grant. Restricted stock units granted under the 2009 Plan typically vest over a five-year period for employees and one year for directors, however, other vesting periods are allowable under the 2009 Plan. Restricted stock units granted to employees have time based or performance based vesting. As of December 31, 2015 and 2014 , there were shares of common stock available for issuance pursuant to future grants under the 2009 Plan totaling 2,626 and 3,552 , respectively. The following table reflects share-based compensation expense by type of award: Year Ended December 31, 2015 2014 2013 Share-based compensation expense: Stock options $ 287 $ 320 $ 570 Restricted stock units 7,316 5,922 3,536 Total share-based compensation 7,603 6,242 4,106 Tax effect on share-based compensation 2,767 2,263 1,500 Net effect on net income $ 4,836 $ 3,979 $ 2,606 Tax effect on: Effect on earnings per share—basic $ (0.15 ) $ (0.12 ) $ (0.08 ) Effect on earnings per share—diluted $ (0.15 ) $ (0.12 ) $ (0.08 ) Stock Option Activity A summary of the Company’s stock option activity with respect to the years ended December 31, 2013 , 2014 and 2015 follows: Shares Weighted Average Exercise Price Per Share Weighted Average Remaining Contractual Term (years) Aggregate Intrinsic Value Outstanding at December 31, 2012 1,487 $ 14.15 Granted — — Exercised (96 ) 8.10 Expired (392 ) 16.60 Forfeited (29 ) 7.88 Outstanding at December 31, 2013 970 13.94 Granted — — Exercised (25 ) 6.86 Expired (320 ) 21.51 Forfeited (10 ) 8.30 Outstanding at December 31, 2014 615 10.39 Granted — — Exercised (25 ) 8.19 Expired (100 ) 15.56 Forfeited — — Outstanding at December 31, 2015 490 $ 9.46 4.4 $ 2,357 Vested or expected to vest at December 31, 2015 485 $ 9.43 Exercisable at December 31, 2015 420 $ 9.00 4.0 $ 2,217 The total intrinsic value of the stock options exercised during 2015 , 2014 and 2013 was $108 , $101 and $312 , respectively. The options outstanding and exercisable at December 31, 2015 were in the following exercise price ranges: Options Outstanding Options Exercisable Range of Exercise Prices Shares Weighted Average Remaining Contractual Life (years) Weighted Shares Weighted $6.80 - $6.80 254 3.6 $ 6.80 254 $ 6.80 $7.86 - $7.86 20 3.0 $ 7.86 20 $ 7.86 $12.22 - $12.22 171 7.0 $ 12.22 101 $ 12.22 $14.46 - $14.81 45 0.1 $ 14.74 45 $ 14.74 $6.80 - $14.81 490 4.4 $ 9.46 420 $ 9.00 As of December 31, 2015 , there was $454 of total unrecognized compensation cost related to stock options granted under the plans. That cost is expected to be recognized over a weighted average remaining period of 2.0 years. Non-Employee Options At December 31, 2015 and 2014, the fair value of options granted to non-employees was $198 and $162 , respectively. Restricted Stock Unit Activity A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2013 , 2014 and 2015 follows: Number of Shares Weighted Average Nonvested at December 31, 2012 1,380 $ 8.37 Granted 333 $ 12.37 Vested (470 ) $ 7.74 Forfeited (127 ) $ 9.29 Nonvested at December 31, 2013 1,116 $ 9.73 Granted 631 $ 10.89 Vested (836 ) $ 9.20 Forfeited (106 ) $ 10.57 Nonvested at December 31, 2014 805 $ 11.07 Granted 967 $ 10.99 Vested (563 ) $ 10.25 Forfeited (40 ) $ 11.05 Nonvested at December 31, 2015 1,169 $ 11.40 As of December 31, 2015 , there was $8,221 of total unrecognized compensation cost related to restricted stock units granted under the plans. That cost is expected to be recognized over a weighted average period of 2.6 years. Non-Employee Restricted Stock Units At December 31, 2015 and 2014, the fair value of options granted to non-employees was $43 , and $0, respectively. Employee Stock Purchase Plan The Company established an Employee Stock Purchase Plan (the “ESPP”) effective November 1, 2009 . Under the terms of the ESPP, eligible employees may have up to 15% of eligible compensation deducted from their pay and applied to the purchase of shares of Company common stock. The price the employee must pay for each share of stock will be 95% of the fair market value of Company common stock at the end of the applicable six-month purchase period. The ESPP is intended to qualify under Section 423 of the Internal Revenue Code and is a non-compensatory plan as defined by FASB Accounting Standards Codification (“ASC”) 718, Stock Compensation. No stock-based compensation expense for the ESPP was recorded for the years ended December 31, 2015 , 2014 and 2013 . As of December 31, 2015 and 2014 , there were 1,677 and 1,394 shares available for issuance under the ESPP, respectively. 401(k) Savings Plan The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to the Plan on a pre-tax or after tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary. Company matching contributions to the plan totaled $963 , $966 and $957 for the years ended December 31, 2015 , 2014 and 2013 , respectively. Profit Sharing Program The Company has a profit sharing program, wherein a percentage of pre-tax profits, at the discretion of the Board of Directors, is provided to all employees who have completed a stipulated employment period. The Company did not make contributions to this program for the years ended December 31, 2015 , 2014 and 2013 .

Other Income (Expense)

Other Income (Expense)	12 Months Ended
	Dec. 31, 2015
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other Expense (Income): Other expense (income) is comprised of the following: Year Ended December 31, 2015 2014 2013 Foreign currency exchange losses (gains), net $ 293 $ 65 $ (8 ) Total other expense (income) $ 293 $ 65 $ (8 )

Income Taxes

Income Taxes	12 Months Ended
	Dec. 31, 2015
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes: The components of income tax expense (benefit) are as follows: Year Ended December 31, 2015 2014 2013 Current: Federal $ 1,012 $ (124 ) $ (1,790 ) State 439 198 (122 ) Foreign 3,425 1,812 1,497 4,876 1,886 (415 ) Deferred: Federal 3,881 (4,285 ) (2,378 ) State 71 54 938 Foreign 28 294 (70 ) 3,980 (3,937 ) (1,510 ) Total income tax expense (benefit) $ 8,856 $ (2,051 ) $ (1,925 ) The income (loss) before tax are comprised of the following: Year Ended December 31, 2015 2014 2013 Domestic operations $ 10,596 $ (11,985 ) $ (4,860 ) Foreign operations $ 16,216 $ 5,294 $ 6,393 The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2015 , 2014 and 2013 to income before provision for income taxes as follows: Year Ended December 31, 2015 2014 2013 Federal income tax provision at statutory rate $ 9,384 $ (2,342 ) $ 537 State taxes, net of federal effect 370 21 828 Foreign taxes net of federal effect 754 561 (1,514 ) Domestic manufacturing benefit (553 ) — — Change in valuation allowance for deferred tax assets (653 ) 535 (153 ) Research tax credit (694 ) (830 ) (1,965 ) Deferred tax true-up (23 ) (36 ) 401 Other 271 40 (59 ) Provision (benefit) for income taxes $ 8,856 $ (2,051 ) $ (1,925 ) Effective tax rate 33 % 31 % (126 )% The income tax expense of $8,856 in 2015 , was impacted by an increase in the Company’s taxes accrued in foreign jurisdictions, partially offset by research and development credits, section 199 domestic manufacturing deduction and decrease in the Company’s valuation allowance. The income tax benefit of $2,051 in 2014 , was impacted by an increase in the Company’s valuation allowance and taxes accrued in foreign jurisdictions, partially offset by research and development tax credit. The income tax benefit of $1,925 in 2013 was impacted by benefits related to the reversal of unrecognized tax benefits, foreign tax credits and research and development credits for both 2012 and 2013 recognized in 2013 , which were not available in 2012 as a result of legislation, and $1,300 of expense related to a correction of the prior year income tax balances recognized in the fourth quarter of 2013 . The Company’s future effective income tax rate depends on various factors, such as tax legislation, the geographic composition of our pre-tax income, the amount of our pre-tax income as business activities fluctuate, non-deductible expenses incurred in connection with acquisitions, research and development credits as a percentage of aggregate pre-tax income and the domestic manufacturing deduction. Deferred tax assets and liabilities are comprised of the following: December 31, 2015 2014 Research and development credit carryforward $ 6,647 $ 7,496 Reserves and accruals not currently deductible 3,357 3,304 Deferred revenue 1,988 2,005 Domestic net operating loss carryforwards 1,302 1,928 Foreign net operating loss and credit carryforwards 4,347 7,533 Intangibles 11,614 12,943 Tax deductible transaction costs 260 296 Share-based compensation 3,396 1,762 Inventory obsolescence reserve 4,026 3,338 Depreciation 484 923 Other 87 776 Gross deferred tax assets 37,508 42,304 Valuation allowance for deferred tax assets (2,205 ) (2,445 ) Deferred tax assets after valuation allowance 35,303 39,859 Gross deferred tax liabilities (330 ) (525 ) Net deferred tax assets $ 34,973 $ 39,334 At December 31, 2015 and 2014 , the Company had valuation allowances of $2,205 and $2,445 , respectively, on certain of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that is more likely than not to be realized. In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment. In making the determination that it is more likely than not that the Company’s deferred tax assets will be realized as of December 31, 2015, the Company relied primarily on projected future taxable income. At December 31, 2015 , the Company had federal, state and foreign net operating loss carryforwards of $903 , $268 and $1,067 , respectively. In addition, as of December 31, 2015 the Company had federal AMT carryforwards of $130 . The federal, state and foreign net operating loss carryforwards expire on various dates through December 31, 2032 , December 31, 2032 and December 31, 2024, respectively. At December 31, 2015 , the Company had federal and state research & development credits and foreign tax credit carryforwards of $7,207 , $1,814 and $3,318 , respectively. The federal research & development credits are set to expire at various dates through December 31, 2035 . The state research & development credits are set to expire at various dates through December 21, 2024 . The foreign tax credit is set to expire at various dates through December 31, 2025 . A provision has not been made at December 31, 2015 for U.S. or additional foreign withholding taxes on approximately $6,764 of undistributed earnings of the Company’s foreign subsidiaries in Europe and Japan because it is the present intention of management to permanently reinvest these undistributed earnings. It is not practical to estimate the amount of tax that might be payable if some or all of such earnings were to be remitted. The total amount of unrecognized tax benefits were as follows: December 31, 2015 2014 2013 Unrecognized tax benefits, opening balance $ 5,292 $ 5,706 $ 9,566 Gross increases—tax positions in prior period 136 150 533 Gross decreases—tax positions in prior period (755 ) (892 ) (4,992 ) Gross increases—current-period tax positions 563 328 599 Lapse of statute of limitations — — — Unrecognized tax benefits, ending balance $ 5,236 $ 5,292 $ 5,706 Included in the balance of unrecognized tax benefits at December 31, 2015 and 2014 are unrecognized tax benefits of $4,613 and $4,499 , respectively, which would be reflected as an adjustment to income tax expense if recognized. The year over year decrease from 2013 to 2015 is primarily due to the reversal of unrecognized tax benefits related to federal tax exposures. It is reasonably possible that certain amounts of unrecognized tax benefits may reverse in the next 12 months; however, the Company does not expect such reversals would have a significant impact on its results of operations or financial position. The Company recognizes accrued interest and penalties related to unrecognized tax benefits in income tax expense. During the years ended December 31, 2015 , 2014 and 2013 , the Company recognized approximately $71 , $60 and $(768) , respectively, in interest and penalties expense associated with uncertain tax positions. As of December 31, 2015 and 2014 , the Company had accrued interest and penalties expense related to unrecognized tax benefits of $900 and $830 , respectively. The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions. The Company files U.S. federal, U.S. state and foreign tax returns. For U.S. federal purposes, the Company is generally no longer subject to tax examinations for years prior to 2012. For U.S. state tax returns, the Company is generally no longer subject to tax examinations for years prior to 2011. For foreign purposes, the Company is generally no longer subject to examination for tax periods 2011 and prior. Certain carryforward tax attributes generated in prior years remain subject to examination and adjustment. The Company believes that adequate amounts have been reserved for any adjustments that may ultimately result from any future examinations of these years. In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may assess additional income or other taxes against it. Although the Company believes its tax estimates are reasonable, the final determination of tax audits and any related litigation could be materially different from the Company’ s historical income tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’ s results of operations or cash flows in the period or periods for which that determination is made.

Restructuring and asset impairm

Restructuring and asset impairment charges (Notes)	12 Months Ended
	Dec. 31, 2015
Restructuring and Related Activities [Abstract]
Restructuring and Related Activities Disclosure [Text Block]	Restructuring and Asset Impairment Charges: The table below provides the activity related to restructuring charges and the remaining liability as of December 31, 2015 : Restructuring obligations at December 31, 2014 $ 764 Restructuring costs incurred — Cash payments (764 ) Restructuring obligations at December 31, 2015 $ — During 2014, the Company implemented restructuring initiatives designed to reduce the Company’s cost structure. In connection with this strategy, the Company reduced its global headcount by approximately 9.0% and closed its facility in Mainz, Germany relocating the operations to its facilities in Snoqualmie, Washington and Bloomington, Minnesota, which was completed as of March 31, 2015.

Accumulated Other Comprehensive

Accumulated Other Comprehensive Loss (Notes)	12 Months Ended
	Dec. 31, 2015
Statement of Comprehensive Income [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss: Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income to our net income. The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss Beginning Balance, December 31, 2013 $ 1,645 $ 150 $ 1,795 Net current period other comprehensive loss 1,040 (183 ) 857 Reclassifications — — — Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (62 ) 33 (29 ) Reclassifications — — — Ending balance, December 31, 2015 $ 2,623 $ — $ 2,623

Segment Reporting and Geographi

Segment Reporting and Geographic Information	12 Months Ended
	Dec. 31, 2015
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information: The Company is engaged in the design, development, manufacture and support of process control defect inspection and metrology, advanced packaging lithography and data analysis systems and software used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of process control defect inspection and metrology, advanced packaging lithography, and data analysis systems and software used by microelectronics device manufacturers, and therefore have one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reportable segment level. The following table lists the different sources of revenue: Year Ended December 31, 2015 2014 2013 Systems and software: Inspection $ 118,925 54 % $ 87,818 49 % $ 89,089 51 % Metrology 25,933 12 % 24,590 14 % 26,500 15 % Data analysis and review 27,291 12 % 24,042 13 % 17,927 10 % Lithography 14,519 6 % 11,163 6 % 8,548 5 % Parts 24,072 11 % 20,334 11 % 21,078 12 % Services 10,950 5 % 13,271 7 % 13,096 7 % Total revenue $ 221,690 100 % $ 181,218 100 % $ 176,238 100 % The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Year Ended December 31, 2015 2014 2013 Revenues from third parties: United States $ 46,778 $ 56,963 $ 40,849 Taiwan 55,548 49,532 54,682 South Korea 14,221 16,690 10,704 Singapore 27,310 14,551 15,804 Austria 3,557 752 898 Japan 13,216 9,449 7,326 Germany 29,378 9,142 5,669 China 17,152 11,521 20,061 Other Europe 11,403 9,362 18,789 Other Asia 3,127 3,256 1,456 Total revenue $ 221,690 $ 181,218 $ 176,238 No individual end user customer accounted for more than 10% of the Company's revenue in 2015 and 2014 . In 2013 , sales to Intel Semiconductor Inc. and STATS ChipPAC Ltd. accounted for 11.4% and 10.3% of the Company’s revenues, respectively. The Company does not have purchase contracts with any of its customers that obligate them to continue to purchase its products. At December 31, 2015 , one customer, Taiwan Semiconductor Manufacturing Co. Ltd., accounted for more than 10% of net accounts receivable. At December 31, 2014 , two customers, Taiwan Semiconductor Manufacturing Co. Ltd. and TriQuint Semiconductor Inc., accounted for more than 10% of net accounts receivable. Substantially all of the Company’s long-lived assets are located within the United States of America.

Earnings (Loss) Per Share

Earnings (Loss) Per Share	12 Months Ended
	Dec. 31, 2015
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings (Loss) Per Share: Basic earnings (loss) per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be antidilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the year ended December 31, 2015 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 15 and 190 , respectively. For the year ended December 31, 2014 , all outstanding restricted stock units of 805 and stock options of 615 were excluded from the computation of diluted loss per shares because the effect in the period would be antidilutive. For the year ended December 31, 2013 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 707 and 3 , respectively. For the year ended December 31, 2015 , diluted earnings per share-weighted average shares outstanding included the effect resulting from assumed conversion of the Notes and warrants. For the years ended December 31, 2014 and 2013 , diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes as their impact would be anti-dilutive. See Note 7 for additional discussion regarding the Notes. The computations of basic and diluted income per share for the years ended December 31, 2015 , 2014 , and 2013 are as follows: December 31, 2015 2014 2013 Numerator: Net income (loss) $ 17,956 $ (4,640 ) $ 3,458 Denominator: Basic earnings per share - weighted average shares outstanding 31,408 33,124 32,783 Effect of potential diluted securities: Employee stock options and restricted stock units - dilutive shares 692 — 605 Convertible senior notes - dilutive shares 66 — — Diluted earnings per share - weighted average shares outstanding 32,166 33,124 33,388 Earnings per share: Basic $ 0.57 $ (0.14 ) $ 0.11 Diluted $ 0.56 $ (0.14 ) $ 0.10

Share Repurchase Program

Share Repurchase Program	12 Months Ended
	Dec. 31, 2015
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Shares Repurchase Authorization: In July 2008, the Company’s Board of Directors authorized the Company to repurchase up to 3,000 shares of its common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. In January 2015, the Company’s Board of Directors increased the Company's authorization to repurchase shares of its common stock by an additional 1,353 shares to replenish the shares purchased through December 31, 2014, bringing the total repurchase authorization back to 3,000 shares as of such date. At December 31, 2015 , there were 1,326 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired. The Company did not repurchase any shares of its common stock during 2013 . The following table summarizes the Company’s stock repurchases for December 31, 2015 and 2014 : Year Ended December 31, 2015 2014 2013 Shares of common stock repurchased 1,674 1,353 — Cost of stock repurchased $20,668 $12,845 $— Average price paid per share $12.35 $9.49 $—

Quarterly Consolidated Financia

Quarterly Consolidated Financial Data (unaudited)	12 Months Ended
	Dec. 31, 2015
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Quarterly Financial Information [Text Block]	Quarterly Consolidated Financial Data (unaudited): The following tables present certain unaudited consolidated quarterly financial information for the years ended December 31, 2015 and December 31, 2014 . In the opinion of the Company’s management, this quarterly information has been prepared on the same basis as the consolidated financial statements and includes all adjustments (consisting only of normal recurring adjustments) necessary to present fairly the information for the periods presented. The results of operations for any quarter are not necessarily indicative of results for the full year or for any future period. Year-over-year quarterly comparisons of the Company’s results of operations may not be meaningful, as the sequential quarterly comparisons set forth below tend to reflect the cyclical activity of the semiconductor industry as a whole. Other quarterly fluctuations in expenses are related directly to sales activity and volume and may also reflect the timing of operating expenses incurred throughout the year and the purchase accounting effects of business combinations. Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 52,570 $ 59,466 $ 58,597 $ 51,057 $ 221,690 Gross profit 28,966 31,884 31,912 26,644 119,406 Income before income taxes 3,097 8,656 10,880 4,179 26,812 Net income 1,848 6,027 7,198 2,883 17,956 Income per share: Basic $ 0.06 $ 0.19 $ 0.23 $ 0.09 $ 0.57 Diluted $ 0.06 $ 0.19 $ 0.22 $ 0.09 $ 0.56 Weighted average number of shares outstanding: Basic 31,928 31,663 31,526 31,016 31,408 Diluted 32,549 32,339 32,204 32,075 32,166 Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 41,649 $ 43,018 $ 46,960 $ 49,591 $ 181,218 Gross profit 21,569 23,304 24,960 25,655 95,488 Income (loss) before income taxes (1,041 ) (10,995 ) 2,835 2,510 (6,691 ) Net income (724 ) (4,412 ) (998 ) 1,494 (4,640 ) Income per share: Basic $ (0.02 ) $ (0.13 ) $ (0.03 ) $ 0.05 $ (0.14 ) Diluted $ (0.02 ) $ (0.13 ) $ (0.03 ) $ 0.04 $ (0.14 ) Weighted average number of shares outstanding: Basic 33,092 33,240 33,237 32,882 33,124 Diluted 33,092 33,240 33,237 33,504 33,124

Summary of Significant Accoun25

Summary of Significant Accounting Policies (Policies)	12 Months Ended
	Dec. 31, 2015
Summary of Significant Accounting Policies [Abstract]
Commitments and Contingencies, Policy [Policy Text Block]	T. Contingencies and Litigation The Company is subject to the possibility of losses from various contingencies, including certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See Note 8, “Commitments and Contingencies” for a detailed description.
Consolidation, Policy [Policy Text Block]	A. Consolidation: The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated.
Revenue Recognition, Policy [Policy Text Block]	B. Revenue Recognition: Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions with arrangements with multiple elements, such as sales of products that include software and services, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies. Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized. Revenue from software license fees is recognized upon shipment or customer acknowledgment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period. Deferred revenue represents undelivered items, prepaid service contract revenue and prepaid license support and maintenance revenue. Deferred revenue is recognized in accordance with the Company’s revenue recognition policies described above.
Use of Estimates, Policy [Policy Text Block]	C. Estimates: The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, fair value of assets acquired and liabilities assumed in a business combination (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates.
Cash and Cash Equivalents, Policy [Policy Text Block]	D. Cash and Cash Equivalents: Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased.
Marketable Securities, Policy [Policy Text Block]	E. Marketable Securities: The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities. For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial Statements.
Trade and Other Accounts Receivable, Policy [Policy Text Block]	F. Allowance for Doubtful Accounts: The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience.
Inventory, Policy [Policy Text Block]	G. Inventories: Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out basis, and include material, labor and manufacturing overhead costs. The Company reviews and sets standard costs as needed, but at a minimum on an annual basis, at current manufacturing costs in order to approximate actual costs. The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been established, it is maintained until the item to which it relates is scrapped or sold.
Property, Plant and Equipment, Policy [Policy Text Block]	H. Property, Plant and Equipment: Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are thirty years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized.
Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]	I. Impairment of Long-Lived Assets: Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows.
Goodwill and Intangible Assets, Policy [Policy Text Block]	J. Goodwill and Intangible Assets: Intangible assets with finite useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. The Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of its reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company also obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2015 . No impairments were noted. For additional information on the Company’s goodwill and purchased intangible assets, see Note 5 of Notes to the Consolidated Financial Statements.
Concentration Risk, Credit Risk, Policy [Policy Text Block]	K. Concentration of Credit Risk: Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer.
Standard Product Warranty, Policy [Policy Text Block]	L. Warranties: The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized.
Income Tax, Policy [Policy Text Block]	M. Income Taxes: The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings. The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current as the Company has early adopted the new ASU No. 2015-17 Balance Sheet Classification of Deferred Taxes to classify all deferred tax assets and liabilities as non-current. For additional information on the Company’s income taxes, see Note 11 of Notes to the Consolidated Financial Statements.
Foreign Currency Transactions and Translations Policy [Policy Text Block]	N. Translation of Foreign Currencies: The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in the United States, Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. These foreign branches and subsidiaries are limited in their operations and level of investment so that the risk of currency fluctuations is not material. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales. Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $2,623 and $2,685 as of December 31, 2015 and 2014 , respectively.
Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]	O. Share-based Compensation: The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method. For additional information on the Company’s share-based compensation plans, see Note 9 of Notes to the Consolidated Financial Statements.
Research, Development, and Computer Software, Policy [Policy Text Block]	P. Research and Development and Software Development Costs: Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2015 and 2014 , the Company did not have any capitalized software development costs. During the years ended December 31, 2015 , 2014 and 2013 , software development cost amortization totaled $0 , $5 and $185 , respectively.
Shipping and Handling Cost, Policy [Policy Text Block]	Q. Shipping and Handling Costs: Shipping and handling cost are included as a component of cost of revenues.
Fair Value of Financial Instruments, Policy [Policy Text Block]	R. Fair Value of Financial Instruments: The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The carrying amount of our convertible senior notes was $58,107 and $54,773 as of December 31, 2015 and 2014 , respectively. The fair value of our convertible senior notes was $60,630 and $59,916 as of December 31, 2015 and 2014 , respectively. The Company’s convertible senior notes are not publicly traded. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. For additional information on the Company’s fair value of financial instruments, see Note 3 of Notes to the Consolidated Financial Statements.
Derivative Instruments and Hedging Activities Disclosure [Text Block]	S. Derivative Instruments and Hedging Activities: The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2015 and 2014 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2015 and 2014 were as follows: December 31, 2015 2014 Notional amount $ 5,423 $ 1,610 Fair value of (liability) asset $ (85 ) $ 222 In 2015 , 2014 and 2013 , the Company recognized gains of $221 , $150 and $374 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $2,484 , $1,456 and $2,922 , for 2015 , 2014 and 2013 , respectively.
Reclassification, Policy [Policy Text Block]	U. Reclassifications: Certain prior year amounts have been reclassified to conform to the 2015 financial statement presentation. These amounts include reclassification of a portion of deferred revenue to other non-current liabilities in the Consolidated Balance Sheets. These reclassifications were not considered material to the prior year financial statements.
New Accounting Pronouncements and Changes in Accounting Principles [Text Block]	V. Recent Accounting Pronouncements: In November 2015, the Financial Account Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2015-17, “Income Taxes (Topic 740), Balance Sheet Classification of Deferred Taxes.” This standard requires that deferred tax liabilities and assets be classified as non-current in a classified statement of financial position. The standard is effective for annual periods beginning after December 15, 2017. Early adoption is permitted and the Company adopted this ASU retrospectively in its year ended December 31, 2015 consolidated statement of financial position resulting in the reclassification of $8,986 from net current deferred income tax assets to net long term deferred income tax assets as of December 31, 2014. In September 2015, the FASB issued ASU No. 2015-16, “Business Combinations (Topic 805), Simplifying the Accounting for Measurement-Period Adjustments.” This standard requires that an acquirer recognize adjustments to provisional amounts that are identified during the measurement period in the reporting period in which the adjustment amounts are determined. The ASU requires an entity to present separately on the face of the income statement or disclose in the notes the portion of the amount recorded in current-period earnings by line item that would have been recorded in previous reporting periods if the adjustment to the provisional amounts had been recognized as of the acquisition date. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of ASU 2015-16 is not expected to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows. In July 2015, the FASB issued ASU No. 2015-11, “Inventory (Topic 330), Simplifying the Measurement of Inventory.” This ASU is intended to simplify subsequent measurement of inventory. An entity should measure inventory within a scope of this ASU at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2016. The adoption of ASU 2015-11 is not expected to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows. In December 2014, the FASB issued ASU No.2014-12, “Compensation - Stock Compensation (Topic 718), Accounting for Share-Based Payments When the Terms of an Award Provide That a Performance Target Could Be Achieved after the Requisite Service Period.” The guidance reflects the EITF consensus that an award with a performance target that affects vesting and that could be achieved after an employee completes the requisite service period (i.e., the employee would be eligible to vest in the award regardless of whether the employee is rendering service on the date the performance target could be achieved) should be treated as a performance condition. That is, the performance target is not reflected in the determination of the grant date fair value of the award. Compensation cost attributable to the period for which requisite service has been rendered would be recognized in the period it becomes probable that the performance condition will be achieved. The total amount of compensation cost recognized during and after the requisite service period would reflect the number of awards that are expected to vest and would be adjusted to reflect those awards that ultimately vest. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2015. The adoption of this new standard will not have a material impact on the Company’s consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers.” ASU 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. In July 2015, the FASB deferred for one year the effective date of the new revenue standard, but early adoption will be permitted. The new standard will be effective for the Company on January 1, 2018. ASU 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Summary of Significant Accoun26

Summary of Significant Accounting Policies (Tables)	12 Months Ended
	Dec. 31, 2015
Accounting Policies [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2015 and 2014 were as follows: December 31, 2015 2014 Notional amount $ 5,423 $ 1,610 Fair value of (liability) asset $ (85 ) $ 222

Fair Value Measurements (Tables

Fair Value Measurements (Tables)	12 Months Ended
	Dec. 31, 2015
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2015 and December 31, 2014 : Fair Value Measurements Using Carrying Value Quoted Prices in Active Markets for Identical Assets (Level 1) Significant Other Observable Inputs (Level 2) Significant Unobservable Inputs (Level 3) December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703 December 31, 2014 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 113,871 $ — $ 113,871 $ — Foreign currency forward contracts 222 — 222 — Total Assets $ 114,093 $ — $ 114,093 $ — Liabilities: Contingent consideration - acquisitions $ 5,064 $ — $ — $ 5,064 Total Liabilities $ 5,064 $ — $ — $ 5,064
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2015 : Fair Value Measurements Using Significant Unobservable Inputs (Level 3) Liabilities: Balance at December 31, 2014 $ 5,064 Additions — Total gain due to remeasurement included in selling, general and administrative expense (630 ) Payments (731 ) Transfer into (out of) Level 3 — Balance at December 31, 2015 $ 3,703
Fair value convertible senior notes [Table Text Block]	The following table reflects information pertaining to the Company’s convertible senior notes: December 31, 2015 2014 Net carrying value of convertible senior notes $ 58,107 $ 54,773 Estimated fair value of convertible senior notes $ 60,630 $ 59,916 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities (Tables)

Marketable Securities (Tables)	12 Months Ended
	Dec. 31, 2015
Marketable Securities [Abstract]
Available-for-sale Securities [Table Text Block]	At December 31, 2015 and 2014 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ (15 ) $ 116,089 Corporate bonds $ 838 $ — $ (3 ) $ 835 Total marketable securities $ 116,924 $ 18 $ (18 ) $ 116,924 December 31, 2014 Municipal notes and bonds $ 113,838 $ 37 $ (4 ) $ 113,871 Total marketable securities $ 113,838 $ 37 $ (4 ) $ 113,871
Investments Classified by Contractual Maturity Date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2015 and 2014 : December 31, 2015 December 31, 2014 Amortized Fair Amortized Fair Due within one year $ 113,542 $ 113,549 $ 107,151 $ 107,177 Due after one through five years 3,382 3,375 6,687 6,694 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 116,924 $ 116,924 $ 113,838 $ 113,871
Schedule of Unrealized Loss on Investments [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2015 and 2014 . In Unrealized Loss Position In Unrealized Loss Position Fair Gross Fair Gross December 31, 2015 Municipal notes and bonds $ 52,638 $ (15 ) $ 305 $ (1 ) Corporate bonds $ 835 $ (3 ) $ — $ — Total marketable securities $ 53,473 $ (18 ) $ 305 $ (1 ) December 31, 2014 Municipal notes and bonds $ 26,698 $ (4 ) $ — $ — Total marketable securities $ 26,698 $ (4 ) $ — $ —

Goodwill and Purchased Intang29

Goodwill and Purchased Intangible Assets (Tables)	12 Months Ended
	Dec. 31, 2015
Intangible Assets [Abstract]
Schedule of Goodwill [Table Text Block]	Goodwill The changes in the carrying amount of goodwill are as follows: Balance at December 31, 2013 $ 22,553 Goodwill acquired during the period (58 ) Balance at December 31, 2014 22,495 Goodwill acquired during the period — Balance at December 31, 2015 $ 22,495
Schedule of Finite-Lived Intangible Assets [Table Text Block]	Purchased intangible assets as of December 31, 2015 and 2014 are as follows: Gross Carrying Amount Accumulated Amortization Net December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593 December 31, 2014 Finite-lived intangibles: Developed technology $ 59,831 $ 53,417 $ 6,414 Customer and distributor relationships 9,560 7,818 1,742 Trade names 4,361 3,475 886 Total identifiable intangible assets $ 73,752 $ 64,710 $ 9,042

Balance Sheet Details (Tables)

Balance Sheet Details (Tables)	12 Months Ended
	Dec. 31, 2015
Balance Sheet Details [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories Inventories are comprised of the following: December 31, 2015 2014 Materials $ 39,022 $ 29,092 Work-in-process 18,918 20,424 Finished goods 13,550 13,828 Total inventories $ 71,490 $ 63,344
Property, Plant and Equipment [Table Text Block]	Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: December 31, 2015 2014 Land and building $ 5,024 $ 5,024 Machinery and equipment 21,683 20,277 Furniture and fixtures 3,414 3,387 Computer equipment 5,304 5,819 Leasehold improvements 7,884 7,774 43,309 42,281 Accumulated depreciation (30,963 ) (29,343 ) Total property, plant and equipment, net $ 12,346 $ 12,938
Other Current liabilities [Table Text Block]	Other current liabilities Other current liabilities is comprised of the following: December 31, 2015 2014 Litigation accrual $ 3,252 $ 3,252 Contingent consideration - acquisitions 1,407 1,267 Other 7,756 5,624 Total other current liabilities $ 12,415 $ 10,143
Other Non-current liabilities [Table Text Block]	Other non-current liabilities Other non-current liabilities is comprised of the following: December 31, 2015 2014 Unrecognized tax benefits (including interest) $ 3,152 $ 3,178 Contingent consideration - acquisitions 2,296 3,797 Deferred revenue 1,206 931 Other 2,900 1,695 Total non-current liabilities $ 9,554 $ 9,601

Debt Obligations (Tables)

Debt Obligations (Tables)	12 Months Ended
	Dec. 31, 2015
Debt Obligations [Abstract]
Schedule of Long-term Debt Instruments [Table Text Block]	The following table reflects the net carrying value of the Notes as of December 31, 2015 and 2014 : December 31, 2015 2014 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 1,893 5,227 Net carrying value of convertible senior notes $ 58,107 $ 54,773
Interest cost recognized on the convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2015 , 2014 and 2013 . December 31, 2015 2014 2013 Contractual interest coupon $ 2,250 $ 2,250 $ 2,250 Amortization of interest discount 3,334 3,022 2,740 Amortization of debt issuance costs 432 363 303 Total interest cost recognized $ 6,016 $ 5,635 $ 5,293

Commitments and Contingencies (

Commitments and Contingencies (Tables)	12 Months Ended
	Dec. 31, 2015
Commitments and Contingencies [Abstract]
Schedule of Product Warranty Liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows: Year Ended December 31, 2015 2014 2013 Balance, beginning of the year $ 1,574 $ 1,551 $ 2,024 Accruals 2,640 2,048 1,956 Usage (2,320 ) (2,025 ) (2,429 ) Balance, end of the year $ 1,894 $ 1,574 $ 1,551

Share-Based Compensation and 33

Share-Based Compensation and Employee Benefit Plans (Tables)	12 Months Ended
	Dec. 31, 2015
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Schedule of Share-based Compensation, Restricted Stock Units Award Activity [Table Text Block]	A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2013 , 2014 and 2015 follows: Number of Shares Weighted Average Nonvested at December 31, 2012 1,380 $ 8.37 Granted 333 $ 12.37 Vested (470 ) $ 7.74 Forfeited (127 ) $ 9.29 Nonvested at December 31, 2013 1,116 $ 9.73 Granted 631 $ 10.89 Vested (836 ) $ 9.20 Forfeited (106 ) $ 10.57 Nonvested at December 31, 2014 805 $ 11.07 Granted 967 $ 10.99 Vested (563 ) $ 10.25 Forfeited (40 ) $ 11.05 Nonvested at December 31, 2015 1,169 $ 11.40
Disclosure of Share-based Compensation Arrangements by Share-based Payment Award [Table Text Block]	The following table reflects share-based compensation expense by type of award: Year Ended December 31, 2015 2014 2013 Share-based compensation expense: Stock options $ 287 $ 320 $ 570 Restricted stock units 7,316 5,922 3,536 Total share-based compensation 7,603 6,242 4,106 Tax effect on share-based compensation 2,767 2,263 1,500 Net effect on net income $ 4,836 $ 3,979 $ 2,606 Tax effect on: Effect on earnings per share—basic $ (0.15 ) $ (0.12 ) $ (0.08 ) Effect on earnings per share—diluted $ (0.15 ) $ (0.12 ) $ (0.08 )
Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]	A summary of the Company’s stock option activity with respect to the years ended December 31, 2013 , 2014 and 2015 follows: Shares Weighted Average Exercise Price Per Share Weighted Average Remaining Contractual Term (years) Aggregate Intrinsic Value Outstanding at December 31, 2012 1,487 $ 14.15 Granted — — Exercised (96 ) 8.10 Expired (392 ) 16.60 Forfeited (29 ) 7.88 Outstanding at December 31, 2013 970 13.94 Granted — — Exercised (25 ) 6.86 Expired (320 ) 21.51 Forfeited (10 ) 8.30 Outstanding at December 31, 2014 615 10.39 Granted — — Exercised (25 ) 8.19 Expired (100 ) 15.56 Forfeited — — Outstanding at December 31, 2015 490 $ 9.46 4.4 $ 2,357 Vested or expected to vest at December 31, 2015 485 $ 9.43 Exercisable at December 31, 2015 420 $ 9.00 4.0 $ 2,217
Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table Text Block]	The options outstanding and exercisable at December 31, 2015 were in the following exercise price ranges: Options Outstanding Options Exercisable Range of Exercise Prices Shares Weighted Average Remaining Contractual Life (years) Weighted Shares Weighted $6.80 - $6.80 254 3.6 $ 6.80 254 $ 6.80 $7.86 - $7.86 20 3.0 $ 7.86 20 $ 7.86 $12.22 - $12.22 171 7.0 $ 12.22 101 $ 12.22 $14.46 - $14.81 45 0.1 $ 14.74 45 $ 14.74 $6.80 - $14.81 490 4.4 $ 9.46 420 $ 9.00

Other Income (Expense) (Tables)

Other Income (Expense) (Tables)	12 Months Ended
	Dec. 31, 2015
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	Other expense (income) is comprised of the following: Year Ended December 31, 2015 2014 2013 Foreign currency exchange losses (gains), net $ 293 $ 65 $ (8 ) Total other expense (income) $ 293 $ 65 $ (8 )

Income Taxes (Tables)

Income Taxes (Tables)	12 Months Ended
	Dec. 31, 2015
Income Taxes [Abstract]
Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]	The components of income tax expense (benefit) are as follows: Year Ended December 31, 2015 2014 2013 Current: Federal $ 1,012 $ (124 ) $ (1,790 ) State 439 198 (122 ) Foreign 3,425 1,812 1,497 4,876 1,886 (415 ) Deferred: Federal 3,881 (4,285 ) (2,378 ) State 71 54 938 Foreign 28 294 (70 ) 3,980 (3,937 ) (1,510 ) Total income tax expense (benefit) $ 8,856 $ (2,051 ) $ (1,925 )
Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]	The income (loss) before tax are comprised of the following: Year Ended December 31, 2015 2014 2013 Domestic operations $ 10,596 $ (11,985 ) $ (4,860 ) Foreign operations $ 16,216 $ 5,294 $ 6,393
Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]	The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2015 , 2014 and 2013 to income before provision for income taxes as follows: Year Ended December 31, 2015 2014 2013 Federal income tax provision at statutory rate $ 9,384 $ (2,342 ) $ 537 State taxes, net of federal effect 370 21 828 Foreign taxes net of federal effect 754 561 (1,514 ) Domestic manufacturing benefit (553 ) — — Change in valuation allowance for deferred tax assets (653 ) 535 (153 ) Research tax credit (694 ) (830 ) (1,965 ) Deferred tax true-up (23 ) (36 ) 401 Other 271 40 (59 ) Provision (benefit) for income taxes $ 8,856 $ (2,051 ) $ (1,925 ) Effective tax rate 33 % 31 % (126 )%
Schedule of Deferred Tax Assets and Liabilities [Table Text Block]	Deferred tax assets and liabilities are comprised of the following: December 31, 2015 2014 Research and development credit carryforward $ 6,647 $ 7,496 Reserves and accruals not currently deductible 3,357 3,304 Deferred revenue 1,988 2,005 Domestic net operating loss carryforwards 1,302 1,928 Foreign net operating loss and credit carryforwards 4,347 7,533 Intangibles 11,614 12,943 Tax deductible transaction costs 260 296 Share-based compensation 3,396 1,762 Inventory obsolescence reserve 4,026 3,338 Depreciation 484 923 Other 87 776 Gross deferred tax assets 37,508 42,304 Valuation allowance for deferred tax assets (2,205 ) (2,445 ) Deferred tax assets after valuation allowance 35,303 39,859 Gross deferred tax liabilities (330 ) (525 ) Net deferred tax assets $ 34,973 $ 39,334
Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]	The total amount of unrecognized tax benefits were as follows: December 31, 2015 2014 2013 Unrecognized tax benefits, opening balance $ 5,292 $ 5,706 $ 9,566 Gross increases—tax positions in prior period 136 150 533 Gross decreases—tax positions in prior period (755 ) (892 ) (4,992 ) Gross increases—current-period tax positions 563 328 599 Lapse of statute of limitations — — — Unrecognized tax benefits, ending balance $ 5,236 $ 5,292 $ 5,706

Restructuring and asset impai36

Restructuring and asset impairment charges (Tables)	12 Months Ended
	Dec. 31, 2015
Restructuring Cost and Reserve [Line Items]
Restructuring and Related Costs [Table Text Block]	The table below provides the activity related to restructuring charges and the remaining liability as of December 31, 2015 : Restructuring obligations at December 31, 2014 $ 764 Restructuring costs incurred — Cash payments (764 ) Restructuring obligations at December 31, 2015 $ —

Accumulated Other Comprehensi37

Accumulated Other Comprehensive Loss (Tables)	12 Months Ended
	Dec. 31, 2015
Statement of Comprehensive Income [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss Beginning Balance, December 31, 2013 $ 1,645 $ 150 $ 1,795 Net current period other comprehensive loss 1,040 (183 ) 857 Reclassifications — — — Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (62 ) 33 (29 ) Reclassifications — — — Ending balance, December 31, 2015 $ 2,623 $ — $ 2,623

Segment Reporting and Geograp38

Segment Reporting and Geographic Information (Tables)	12 Months Ended
	Dec. 31, 2015
Segment Reporting and Geographic Information [Abstract]
Revenue from External Customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue: Year Ended December 31, 2015 2014 2013 Systems and software: Inspection $ 118,925 54 % $ 87,818 49 % $ 89,089 51 % Metrology 25,933 12 % 24,590 14 % 26,500 15 % Data analysis and review 27,291 12 % 24,042 13 % 17,927 10 % Lithography 14,519 6 % 11,163 6 % 8,548 5 % Parts 24,072 11 % 20,334 11 % 21,078 12 % Services 10,950 5 % 13,271 7 % 13,096 7 % Total revenue $ 221,690 100 % $ 181,218 100 % $ 176,238 100 %
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Year Ended December 31, 2015 2014 2013 Revenues from third parties: United States $ 46,778 $ 56,963 $ 40,849 Taiwan 55,548 49,532 54,682 South Korea 14,221 16,690 10,704 Singapore 27,310 14,551 15,804 Austria 3,557 752 898 Japan 13,216 9,449 7,326 Germany 29,378 9,142 5,669 China 17,152 11,521 20,061 Other Europe 11,403 9,362 18,789 Other Asia 3,127 3,256 1,456 Total revenue $ 221,690 $ 181,218 $ 176,238

Earnings (Loss) Per Share (Tabl

Earnings (Loss) Per Share (Tables)	12 Months Ended
	Dec. 31, 2015
Earnings (Loss) Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The computations of basic and diluted income per share for the years ended December 31, 2015 , 2014 , and 2013 are as follows: December 31, 2015 2014 2013 Numerator: Net income (loss) $ 17,956 $ (4,640 ) $ 3,458 Denominator: Basic earnings per share - weighted average shares outstanding 31,408 33,124 32,783 Effect of potential diluted securities: Employee stock options and restricted stock units - dilutive shares 692 — 605 Convertible senior notes - dilutive shares 66 — — Diluted earnings per share - weighted average shares outstanding 32,166 33,124 33,388 Earnings per share: Basic $ 0.57 $ (0.14 ) $ 0.11 Diluted $ 0.56 $ (0.14 ) $ 0.10

Share Repurchase Program Share

Share Repurchase Program Share Repurchase Program (Tables)	12 Months Ended
	Dec. 31, 2015
Schedule of common stock repurchased [Abstract]
Share repurchase authorization [Table Text Block]	he following table summarizes the Company’s stock repurchases for December 31, 2015 and 2014 : Year Ended December 31, 2015 2014 2013 Shares of common stock repurchased 1,674 1,353 — Cost of stock repurchased $20,668 $12,845 $— Average price paid per share $12.35 $9.49 $—

Quarterly Consolidated Financ41

Quarterly Consolidated Financial Data (unaudited) (Tables)	12 Months Ended
	Dec. 31, 2015
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Schedule of Quarterly Financial Information [Table Text Block]	Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 52,570 $ 59,466 $ 58,597 $ 51,057 $ 221,690 Gross profit 28,966 31,884 31,912 26,644 119,406 Income before income taxes 3,097 8,656 10,880 4,179 26,812 Net income 1,848 6,027 7,198 2,883 17,956 Income per share: Basic $ 0.06 $ 0.19 $ 0.23 $ 0.09 $ 0.57 Diluted $ 0.06 $ 0.19 $ 0.22 $ 0.09 $ 0.56 Weighted average number of shares outstanding: Basic 31,928 31,663 31,526 31,016 31,408 Diluted 32,549 32,339 32,204 32,075 32,166 Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 41,649 $ 43,018 $ 46,960 $ 49,591 $ 181,218 Gross profit 21,569 23,304 24,960 25,655 95,488 Income (loss) before income taxes (1,041 ) (10,995 ) 2,835 2,510 (6,691 ) Net income (724 ) (4,412 ) (998 ) 1,494 (4,640 ) Income per share: Basic $ (0.02 ) $ (0.13 ) $ (0.03 ) $ 0.05 $ (0.14 ) Diluted $ (0.02 ) $ (0.13 ) $ (0.03 ) $ 0.04 $ (0.14 ) Weighted average number of shares outstanding: Basic 33,092 33,240 33,237 32,882 33,124 Diluted 33,092 33,240 33,237 33,504 33,124

Summary of Significant Accoun42

Summary of Significant Accounting Policies Translation of Foreign Currency (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Intercompany Foreign Currency Balance [Line Items]
Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax	$ 2,623	$ 2,685

Summary of Significant Accoun43

Summary of Significant Accounting Policies Research and Development and Software Development Costs (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Compensation Related Costs [Abstract]
Software development cost amortization	$ 0	$ 5	$ 185

Summary of Significant Accoun44

Summary of Significant Accounting Policies Fair Value of Financial Instrument (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Convertible Debt, Noncurrent	$ 0	$ 54,773
Convertible Debt, Fair Value Disclosures	$ 60,630	$ 59,916

Summary of Significant Accoun45

Summary of Significant Accounting Policies Derivative Instruments and Hedging Activities (Details) $ in Thousands	12 Months Ended
	Dec. 31, 2015USD ($)	Dec. 31, 2014USD ($)	Dec. 31, 2013USD ($)
Derivative [Line Items]
Derivative, Notional Amount	$ 5,423	$ 1,610
Derivative Asset, Fair Value, Gross Asset	(85)	222
Derivative Instruments, Loss (Gain) Recognized in Income, Net	$ 221	$ 150	$ 374
Number of Foreign Currency Derivatives Held	2,484	1,456	2,922

Summary of Significant Accoun46

Summary of Significant Accounting Policies Recent Accounting pronouncements (Details) $ in Thousands	12 Months Ended
	Dec. 31, 2015USD ($)
Recent Accounting Pronouncements [Abstract]
Recent Accounting Pronouncement Reclass	$ 8,986

Fair Value Measurements (Detail

Fair Value Measurements (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2015
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Convertible Debt, Current	$ 0		$ 58,107
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	113,871		116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value			835
Foreign Currency Contracts, Liability, Fair Value Disclosure	222		85
Assets, Fair Value Disclosure	114,093		116,924
Business Acquisition Contingent Consideration at Fair Value, Liabilities	5,064		3,703
Liabilities, Fair Value Disclosure	$ 5,064		3,788
Fair Value Input Discount Rate 3	18.00%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	$ 3,703	$ 5,064
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Earnings	(630)
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Settlements	(731)
Fair Value, Measurement with Unobservable Inputs Reconciliation, Liability, Transfers out of Level 3	0
Convertible Debt, Noncurrent	54,773		0
Convertible Debt, Fair Value Disclosures	$ 59,916		60,630
Fair Value Inputs Discount Rate 2	5.00%	5.00%
Long-term Debt, Contingent Payment of Principal or Interest	0	0
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value			0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Acquisition Contingent Consideration at Fair Value, Liabilities	0		0
Liabilities, Fair Value Disclosure	0		0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	113,871		116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value			835
Foreign Currency Contracts, Liability, Fair Value Disclosure	222		85
Assets, Fair Value Disclosure	114,093		116,924
Business Acquisition Contingent Consideration at Fair Value, Liabilities	0		0
Liabilities, Fair Value Disclosure	0		85
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value			0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Acquisition Contingent Consideration at Fair Value, Liabilities	5,064		3,703
Liabilities, Fair Value Disclosure	$ 5,064		$ 3,703

Marketable Securities (Details)

Marketable Securities (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		$ 116,924	$ 113,838
Available-for-sale Securities, Fair Value Disclosure		116,924	113,871
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Amortized Cost Basis		113,542	107,151
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Fair Value		113,549	107,177
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis		3,382	6,687
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value		3,375	6,694
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Amortized Cost Basis		0	0
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Fair Value		0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis		0	0
Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value		0	0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		116,086	113,838
Available-for-sale Securities, Accumulated Gross Unrealized Gain, before Tax		18	37
Available-for-sale Securities, Accumulated Gross Unrealized Loss, before Tax		(15)	(4)
Available-for-sale Securities, Fair Value Disclosure		116,089	113,871
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	$ 52,638	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	(15)	(4)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	305	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	(1)	0
Corporate Bond Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	835
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	(3)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		116,924	113,838
Available-for-sale Securities, Accumulated Gross Unrealized Gain, before Tax		18	37
Available-for-sale Securities, Accumulated Gross Unrealized Loss, before Tax		(18)	(4)
Available-for-sale Securities, Fair Value Disclosure		116,924	$ 113,871
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	53,473	26,698
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	(18)	(4)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	305	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	$ (1)	$ 0

Goodwill and Purchased Intang49

Goodwill and Purchased Intangible Assets (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Sep. 25, 2015
Finite-Lived Intangible Assets [Line Items]
Document Period End Date	Dec. 31, 2015
Goodwill	$ 22,495	$ 22,495	$ 22,553
Business Combination, Goodwill Recognized, Description	0	(58)
Finite-Lived Intangible Assets, Gross	$ 79,448	$ 73,752
Finite-Lived Intangible Assets, Accumulated Amortization	66,855	64,710
Intangible Assets, Net (Excluding Goodwill)	12,593	9,042
Amortization of Intangible Assets	2,145	2,422	$ 2,592
Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months	2,321
Finite-Lived Intangible Assets, Amortization Expense, Year Two	1,933
Finite-Lived Intangible Assets, Amortization Expense, Year Three	1,496
Finite-Lived Intangible Assets, Amortization Expense, Year Four	1,496
Finite-Lived Intangible Assets, Amortization Expense, Year Five	1,294
Developed Technology Rights [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	65,527	59,831		$ 5,696
Finite-Lived Intangible Assets, Accumulated Amortization	55,110	53,417
Intangible Assets, Net (Excluding Goodwill)	10,417	6,414
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	9,560	9,560
Finite-Lived Intangible Assets, Accumulated Amortization	8,170	7,818
Intangible Assets, Net (Excluding Goodwill)	1,390	1,742
Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	4,361	4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,575	3,475
Intangible Assets, Net (Excluding Goodwill)	$ 786	$ 886

Balance Sheet Details Inventory

Balance Sheet Details Inventory (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Balance Sheet Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 39,022	$ 29,092
Inventory, Work in Process, Net of Reserves	18,918	20,424
Inventory, Finished Goods, Net of Reserves	13,550	13,828
Inventory, Net	71,490	63,344
Inventory Valuation Reserves	8,896	7,000
Inventory Write-down	3,676	3,910
Inventory Disposal	$ 1,780	$ 3,011

Balance Sheet Details Property

Balance Sheet Details Property Plant & Equipment (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Balance Sheet Details [Abstract]
Buildings and Land Gross	$ 5,024	$ 5,024
Machinery and Equipment, Gross	21,683	20,277
Furniture and Fixtures, Gross	3,414	3,387
Computer Equipments And Software Gross	5,304	5,819
Leasehold Improvements, Gross	7,884	7,774
Property, Plant and Equipment, Gross	43,309	42,281
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	(30,963)	(29,343)
Property, Plant and Equipment, Net	12,346	12,938
Depreciation	3,951	$ 4,686	$ 4,150
Assets Held-for-sale, Long Lived, Fair Value Disclosure	$ 231

Balance Sheet Details Other Cur

Balance Sheet Details Other Current Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Balance Sheet Details [Abstract]
Estimated Litigation Liability, Current	$ 3,252	$ 3,252
Business Combination, Contingent Consideration, Liability, Current	1,407	1,267
Other Current Liabilities Subtotal	7,756	5,624
Other Liabilities, Current	$ 12,415	$ 10,143

Balance Sheet Details Other Non

Balance Sheet Details Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014
Balance Sheet Details [Abstract]
Unrecognized Tax Benefits	$ 3,152	$ 3,178
Business Acquisition Contingent Consideration at Fair Value Long Term	2,296	3,797
Other Liabilities	2,900	1,695
Other Liabilities, Noncurrent	$ 9,554	$ 9,601

Debt Obligations (Details)

Debt Obligations (Details) - USD ($) $ / shares in Units, $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Jul. 25, 2011	Jul. 30, 2008
Debt Instrument [Line Items]
Debt Instrument, Face Amount	$ 60,000	$ 60,000			$ 60,000
Debt Instrument, Interest Rate, Stated Percentage					3.75%
Convertible Preferred Stock, Shares Issued upon Conversion					77.241
Principal Amount of Note					$ 1
Debt Instrument, Convertible, Conversion Price					$ 12.95
Proceeds from Debt, Net of Issuance Costs				$ 50,249
Debt Instrument, Unamortized Discount	1,893	5,227
Convertible Debt, Current	58,107	0
Convertible Debt, Noncurrent	0	54,773
StockPricePercentageOfConversionPrice						130.00%
PrincipalAmountLessThanProductOfLastReportedSalePriceOfCommonStock						98.00%
PercentageOfPrincipalAmountsBeingRepurchased						100.00%
DebtInstrumentConvertibleInitialCarryingAmountOfLiabilityComponent						$ 45,493
Payments for (Proceeds from) Derivative Instrument, Financing Activities				14,507
Issuancecostofdebtinstrument						2,251
Issuance cost allocated to APIC						544
debtissuancecosttobeallocated						$ 1,707
Contractual Interest Coupon	2,250	2,250	$ 2,250
Amortization of Debt Discount (Premium)	3,334	3,022	2,740
Amortization of Financing Costs	432	363	303
Interest Expense, Debt	$ 6,016	$ 5,635	$ 5,293
Warrant Strike Price					$ 17
Class of Warrant or Right, Number of Securities Called by Warrants or Rights						4,634,000
Proceeds from Issuance of Warrants				$ 7,007

Commitments and Contingencies55

Commitments and Contingencies (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Aug. 08, 2014	Dec. 31, 2012	Jul. 25, 2011
Loss Contingencies [Line Items]
Standard Product Warranty Accrual		$ 1,574	$ 1,551		$ 2,024
Product Warranty Accrual, Warranties Issued	$ 2,640	2,048	1,956
Product Warranty Expense	(2,320)	(2,025)	(2,429)
Product Warranty Accrual, Payments	1,894	1,574	1,551
Loss Contingency, Damages Awarded, Value	14,512	15,475
Payments for Legal Settlements	0	10,613	0
Estimated Litigation Liability				$ 3,252
Loss Contingency Damages Awarded Value 2		14,600
Operating Leases, Rent Expense	$ 3,525	3,716	3,794
Document Period End Date	Dec. 31, 2015
Operatingleases,equipment	$ 105	95	171
Operating Leases, Future Minimum Payments Due	3,153
Operating Leases, Future Minimum Payments, Due in Two Years	2,558
Operating Leases, Future Minimum Payments, Due in Three Years	2,327
Operating Leases, Future Minimum Payments, Due in Four Years	1,692
Operating Leases, Future Minimum Payments, Due in Five Years	1,005
Operating Leases, Future Minimum Payments, Due Thereafter	1,310
Royalty Expense	813	819	$ 831
Purchase Commitment, Remaining Minimum Amount Committed	29,579
Debt Instrument, Face Amount	$ 60,000	$ 60,000				$ 60,000

Commitments and Contingencies L

Commitments and Contingencies Line of Credit (Details) $ in Thousands	Oct. 29, 2015USD ($)
Line of Credit [Abstract]
Line of Credit, Current	$ 60,000

Preferred Share Purchase Rights

Preferred Share Purchase Rights (Details) - $ / shares	Dec. 31, 2015	Dec. 31, 2014
Preferred Share Purchase Rights [Abstract]
Preferred Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001

Share-Based Compensation and 58

Share-Based Compensation and Employee Benefit Plans (Details) - USD ($) $ / shares in Units, $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Nov. 01, 2009
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized					3,300,000
Common Stock, Capital Shares Reserved for Future Issuance	2,558,000
Document Period End Date	Dec. 31, 2015
Share based Compensation shares for issuance	2,626,000	3,552,000
Stock Issued During Period, Value, New Issues	$ 7,603	$ 6,242	$ 4,106
Tax effect on share based compensation	2,767	2,263	1,500
Net effect on net income share based compensation	$ 4,836	$ 3,979	$ 2,606
effect on earnings per share basic	$ (0.15)	$ (0.12)	$ (0.08)
effect on earnings per share diluted	$ (0.15)	$ (0.12)	$ (0.08)
Optionsgrantednonemployees	$ 198	$ 162
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	490,000	615,000	970,000	1,487,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 9.46	$ 10.39	$ 13.94	$ 14.15
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures	0	0	0
Share-based Compensation Arrangements by Share-based Payment Award, Options, Grants in Period, Weighted Average Exercise Price	$ 0	$ 0	$ 0
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period	(25,000)	(25,000)	(96,000)
Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price	$ 8.19	$ 6.86	$ 8.10
Share-based Compensation Arrangement by Share-based Payment Award, Options, Expirations in Period	(100,000)	(320,000)	(392,000)
ShareBasedCompensationOptionExpired	$ 15.56	$ 21.51	$ 16.60
Stock Issued During Period, Shares, Share-based Compensation, Forfeited	0	(10,000)	(29,000)
ShareBasedCompensationOptionsForfeited	$ 0	$ 8.30	$ 7.88
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	4 years 5 months 6 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value	$ 2,357
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number	485,000
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Exercise Price	$ 9.43
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Remaining Contractual Term
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	420,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 9
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term	4 years 6 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value	$ 2,217
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Total Intrinsic Value	108	$ 101	$ 312
total unrecognized compensation cost - option	$ 454
Wght average period for compensation cost recognized	1 year 11 months 13 days
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,169,000	805,000	1,116,000	1,380,000
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 11.40	$ 11.07	$ 9.73	$ 8.37
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	967,000	631,000	333,000
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 10.99	$ 10.89	$ 12.37
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	(563,000)	(836,000)	(470,000)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 10.25	$ 9.20	$ 7.74
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	(40,000)	(106,000)	(127,000)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 11.05	$ 10.57	$ 9.29
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$ 8,221
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 7 months 20 days
Employee Stock Purchase Plan available	1,677,000	1,394,000
Contribution plan Employee Percentage	100.00%
Defined Contribution Plan, Maximum Annual Contribution Per Employee, Percent	50.00%
Defined Contribution Plan, Cost Recognized	$ 963	$ 966	$ 957
Stock Options [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Stock Issued During Period, Value, New Issues	287	320	570
Restricted Stock Units (RSUs) [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Stock Issued During Period, Value, New Issues	$ 7,316	$ 5,922	$ 3,536
Range One [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	254,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 6.80
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	3 years 7 months 15 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	254,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 6.80
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	6.80
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 6.80
Range Two [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	20,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 7.86
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	2 years 11 months 24 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	20,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 7.86
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	7.86
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 7.86
Range Three [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	171,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 12.22
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	6 years 11 months 13 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	101,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 12.22
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	12.22
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 12.22
Range Four [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	45,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 14.74
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	22 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	45,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 14.74
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	14.46
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 14.81
Range Five [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	490,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 9.46
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	4 years 5 months 6 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	420,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 9
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	6.80
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 14.81

Other Income (Expense) (Details

Other Income (Expense) (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Other Income (Expense) [Abstract]
Foreign Currency Transaction Loss (Gain), before tax	$ 293	$ 65	$ (8)
Other Nonoperating Expense (Income)	$ 293	$ 65	$ (8)

Income Taxes (Details)

Income Taxes (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Income Tax Examination [Line Items]
Deferred Tax Assets, Tax Credit Carryforwards, Research	$ 6,647	$ 7,496
Document Period End Date	Dec. 31, 2015
Current Federal Tax Expense (Benefit)	$ 1,012	(124)	$ (1,790)
Current State and Local Tax Expense (Benefit)	439	198	(122)
Current Foreign Tax Expense (Benefit)	3,425	1,812	1,497
Current Income Tax Expense (Benefit)	4,876	1,886	(415)
Deferred Federal Income Tax Expense (Benefit)	3,881	(4,285)	(2,378)
Deferred State and Local Income Tax Expense (Benefit)	71	54	938
Deferred Foreign Income Tax Expense (Benefit)	28	294	(70)
Deferred Income Tax Expense (Benefit)	3,980	(3,937)	(1,510)
Income Tax Expense (Benefit)	8,856	(2,051)	(1,925)
Income (Loss) from Continuing Operations before Income Taxes, Domestic	10,596	(11,985)	(4,860)
Income (Loss) from Continuing Operations before Income Taxes, Foreign	16,216	5,294	6,393
Estimated tax reduction for RD			1,300
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	9,384	(2,342)	537
Income Tax Reconciliation, State and Local Income Taxes	370	21	828
Income Tax Reconciliation, Foreign Income Tax Rate Differential	754	561	(1,514)
Income Tax Reconciliation, Deductions, Qualified Production Activities	(553)	0	0
Income Tax Reconciliation, Change in Deferred Tax Assets Valuation Allowance	(653)	535	(153)
Income Tax Reconciliation, Tax Credits, Research	(694)	(830)	(1,965)
Income Tax Reconciliation, Prior Year Income Taxes	(23)	(36)	401
Income Tax Reconciliation, Other Adjustments	$ 271	$ 40	$ (59)
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	33.00%	31.00%	(126.00%)
Deferred Tax Assets, Valuation Allowance	$ (2,205)	$ (2,445)
Operating loss carryforward federal	903
Operating Loss Carryforward State	268
Operating loss carryforward foreign	1,067
Federal AMT Carryforward	130
federal RD credit carryforward	7,207
State RD Credit Carryforward	1,814
foreign RD credit carryforward	3,318
Undistributed Earnings of Foreign Subsidiaries	6,764
Unrecognixed tax benefit balance	5,236	5,292	$ 5,706	$ 9,566
Unrecognized Tax Benefits, Increases Resulting from Prior Period Tax Positions	136	150	533
Unrecognized Tax Benefits, Decreases Resulting from Prior Period Tax Positions	(755)	(892)	(4,992)
Unrecognized Tax Benefits, Increases Resulting from Current Period Tax Positions	563	328	599
Unrecognized Tax Benefits, Reductions Resulting from Lapse of Applicable Statute of Limitations	0	0	0
Unrecognized Tax Benefit adjustment to income tax expense	4,613	4,499
Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense	71	60	$ (768)
Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued	900	830
Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Reserves	3,357	3,304
Deferred Tax Assets, Deferred Income	1,988	2,005
Deferred Tax Assets, Operating Loss Carryforwards, Domestic	1,302	1,928
Deferred Tax Assets, Operating Loss Carryforwards, Foreign	4,347	7,533
Deferred Tax Liabilities, Intangible Assets	11,614	12,943
Deferred Tax Assets transaction costs	260	296
Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost	3,396	1,762
Deferred Tax Assets, Inventory	4,026	3,338
Deferred Tax Asset Depreciation	484	923
Deferred Tax Assets, Other	87	776
Deferred Tax Assets, Gross	37,508	42,304
Deferred Tax Assets, Net of Valuation Allowance	35,303	39,859
Deferred Tax Liabilities, Gross	(330)	(525)
Deferred Tax Assets, Net	$ 34,973	$ 39,334

Restructuring and asset impai61

Restructuring and asset impairment charges (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Restructuring Cost and Reserve [Line Items]
Restructuring Reserve, Current	$ 0	$ 764
Restructuring Costs	0
Payments for Restructuring	$ (764)
Document Period End Date	Dec. 31, 2015

Accumulated Other Comprehensi62

Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Stockholders' Equity Attributable to Parent	$ (270,678)	$ (267,328)	$ (279,003)	$ (270,489)
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	2,623	2,685	1,645
Net current period other comprehensive gain (loss)	(62)	1,040
Reclassification of accumulated other comprehensive income (loss)	0	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	0	(33)	150
Net current period other comprehensive gain (loss)	33	(183)
Reclassification of accumulated other comprehensive income (loss)	0	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	2,623	2,652	$ 1,795	$ 1,085
Net current period other comprehensive gain (loss)	(29)	857
Reclassification of accumulated other comprehensive income (loss)	$ 0	$ 0

Segment Reporting and Geograp63

Segment Reporting and Geographic Information (Details) - USD ($)	3 Months Ended								12 Months Ended
	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Segment Reporting Information [Line Items]
Revenues	$ 51,057,000	$ 58,597,000	$ 59,466,000	$ 52,570,000	$ 49,591,000	$ 46,960,000	$ 43,018,000	$ 41,649,000	$ 221,690,000	$ 181,218,000	$ 176,238,000
UNITED STATES
Segment Reporting Information [Line Items]
Revenues									46,778,000	56,963,000	40,849,000
Taiwan [Member]
Segment Reporting Information [Line Items]
Revenues									55,548,000	49,532,000	54,682,000
South Korea [Member]
Segment Reporting Information [Line Items]
Revenues									14,221,000	16,690,000	10,704,000
Singapore [Member]
Segment Reporting Information [Line Items]
Revenues									27,310,000	14,551,000	15,804,000
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues									3,557,000	752,000	898,000
JAPAN
Segment Reporting Information [Line Items]
Revenues									13,216,000	9,449,000	7,326,000
GERMANY
Segment Reporting Information [Line Items]
Revenues									29,378,000	9,142,000	5,669,000
CHINA
Segment Reporting Information [Line Items]
Revenues									17,152,000	11,521,000	20,061,000
Sales [Member]
Segment Reporting Information [Line Items]
Revenues									221,690,000	181,218,000	176,238,000
Other Europe [Member]
Segment Reporting Information [Line Items]
Revenues									11,403,000	9,362,000	18,789,000
Asia [Member]
Segment Reporting Information [Line Items]
Revenues									3,127,000	3,256,000	1,456,000
Inspection Revenue [Member]
Segment Reporting Information [Line Items]
Revenues									118,925,000	87,818,000	89,089,000
Percentage of Inspection Revenues [Member]
Segment Reporting Information [Line Items]
Revenues									0.54	0.49	0.51
Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Revenues									25,933,000	24,590,000	26,500,000
Percentage of Metrology Revenue [Member]
Segment Reporting Information [Line Items]
Revenues									0.12	0.14	0.15
Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Revenues									27,291,000	24,042,000	17,927,000
Percentage of Data Analysis & Review [Member]
Segment Reporting Information [Line Items]
Revenues									0.12	0.13	0.10
Lithography [Domain]
Segment Reporting Information [Line Items]
Revenues									14,519,000	11,163,000	8,548,000
Percentage of Lithography [Domain]
Segment Reporting Information [Line Items]
Revenues									0.06	0.06	0.05
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues									24,072,000	20,334,000	21,078,000
Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Revenues									0.11	0.11	0.12
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues									10,950,000	13,271,000	13,096,000
Percentage of Service [Member]
Segment Reporting Information [Line Items]
Revenues									0.05	0.07	0.07
Sales [Member]
Segment Reporting Information [Line Items]
Revenues									221,690,000	181,218,000	176,238,000
Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Revenues									$ 1	$ 1	$ 1
Major Customer, One [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage											11.40%
Major Customers Two [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage											10.30%

Earnings (Loss) Per Share (Deta

Earnings (Loss) Per Share (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Earnings (Loss) Per Share [Abstract]
Options Excluded from calculation									15		707
Net Income (Loss) Attributable to Parent	$ 2,883	$ 7,198	$ 6,027	$ 1,848	$ 1,494	$ (998)	$ (4,412)	$ (724)	$ 17,956	$ (4,640)	$ 3,458
Weighted Average Number of Shares Outstanding, Basic	31,016	31,526	31,663	31,928	32,882	33,237	33,240	33,092	31,408	33,124	32,783
Weighted Average Number Diluted Shares Outstanding Adjustment									692	0	605
Weighted Average Number of Shares Outstanding, Diluted	32,075	32,204	32,339	32,549	33,504	33,237	33,240	33,092	32,166	33,124	33,388
Earnings Per Share, Basic	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0.57	$ (0.14)	$ 0.11
Earnings Per Share, Diluted	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0.56	$ (0.14)	$ 0.10
Restricted Stock Units, outstanding					805					805
stock options, outstanding					615					615
Restricted Stock Units Excluded from Calculation									190		3

Share Repurchase Program (Detai

Share Repurchase Program (Details) - USD ($)	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Accelerated Share Repurchases [Line Items]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased		3,000,000
Additional shares available for future repurchase		1,353,000
Stock Repurchased and Retired During Period, Shares	1,674	1,353,000	0
Stock Repurchased and Retired During Period, Value	$ 20,668	$ 12,845,000	$ 0
Stock repurchase and retired average price per share	$ 12.35	$ 9.49	$ 0
Document Period End Date	Dec. 31, 2015
Shares available for future repurchase	1,326,000

Quarterly Consolidated Financ66

Quarterly Consolidated Financial Data (unaudited) (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Revenues	$ 51,057	$ 58,597	$ 59,466	$ 52,570	$ 49,591	$ 46,960	$ 43,018	$ 41,649	$ 221,690	$ 181,218	$ 176,238
Gross Profit	26,644	31,912	31,884	28,966	25,655	24,960	23,304	21,569	119,406	95,488	90,732
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	4,179	10,880	8,656	3,097	2,510	2,835	(10,995)	(1,041)	26,812	(6,691)	1,533
Net Income (Loss) Attributable to Parent	$ 2,883	$ 7,198	$ 6,027	$ 1,848	$ 1,494	$ (998)	$ (4,412)	$ (724)	$ 17,956	$ (4,640)	$ 3,458
Earnings Per Share, Basic	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0.57	$ (0.14)	$ 0.11
Earnings Per Share, Diluted	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0.56	$ (0.14)	$ 0.10
Weighted Average Number of Shares Outstanding, Basic	31,016	31,526	31,663	31,928	32,882	33,237	33,240	33,092	31,408	33,124	32,783
Weighted Average Number of Shares Outstanding, Diluted	32,075	32,204	32,339	32,549	33,504	33,237	33,240	33,092	32,166	33,124	33,388