Rudolph 10-Q 3 May 16 2016 Q1 Quarterly report Financial data

Document and Entity Information

Document and Entity Information Document - shares	3 Months Ended
	Mar. 31, 2016	Apr. 18, 2016
Entity Information [Line Items]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1,094,392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Mar. 31, 2016
Document Fiscal Year Focus	2,016
Document Fiscal Period Focus	Q1
Amendment Flag	false
Entity Common Stock, Shares Outstanding		30,882,205

Statements of Financial Positio

Statements of Financial Position Consolidated Balance Sheet - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Cash and Cash Equivalents, at Carrying Value	$ 38,186	$ 44,554
Marketable Securities, Current	110,055	116,924
Accounts Receivable, Net, Current	64,747	55,492
Inventory, Net	74,143	71,490
Prepaid Expense and Other Assets	21,519	8,137
Assets, Current	308,650	296,597
Property, Plant and Equipment, Net	13,950	12,346
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	11,998	12,593
Other Assets, Noncurrent	35,616	35,532
Assets	392,709	379,563
Liabilities, Current [Abstract]
Accounts Payable and Accrued Liabilities	20,029	21,466
Taxes Payable, Current	5,697	1,163
Deferred Revenue, Current	6,713	6,441
Convertible Debt, Current	58,863	57,846
Other Liabilities, Current	10,627	12,415
Liabilities, Current	101,929	99,331
Convertible senior notes		57,846
Other Liabilities, Noncurrent	10,269	9,554
Liabilities	$ 112,198	$ 108,885
Commitments and Contingencies
Stockholders' Equity Attributable to Parent [Abstract]
Common Stock, Value, Issued	$ 31	$ 31
Additional Paid in Capital, Common Stock	390,190	394,928
Accumulated Other Comprehensive Income (Loss), Net of Tax	(1,991)	(2,623)
Retained Earnings (Accumulated Deficit)	(107,719)	(121,658)
Stockholders' Equity Attributable to Parent	280,511	270,678
Liabilities and Equity	$ 392,709	$ 379,563

Statements of Financial Positi3

Statements of Financial Position B/S Parenthetical - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Allowance for Doubtful Accounts Receivable, Current	$ 703	$ 713

Statements of Income Statement

Statements of Income Statement - USD ($) shares in Thousands, $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Revenues	$ 54,362	$ 52,570
Cost of Revenue	25,317	23,604
Gross Profit	29,045	28,966
Operating Expenses [Abstract]
Research and Development Expense	12,446	10,360
Selling, General and Administrative Expense	9,499	12,974
Gain (Loss) Related to Litigation Settlement	(14,632)	0
Amortization of Intangible Assets	595	515
Operating Expenses	7,908	23,849
Operating Income (Loss)	21,137	5,117
Interest Expense, net	1,469	1,382
Total other expenses (income)	107	638
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	19,561	3,097
Income Tax Expense (Benefit)	5,622	1,249
Net Income (Loss) Attributable to Parent	$ 13,939	$ 1,848
Earnings (Loss) Per Share, Basic	$ 0.45	$ 0.06
Earnings (Loss) Per Share, Diluted	$ 0.44	$ 0.06
Weighted Average Number of Shares Outstanding, Basic	30,957	31,928
Weighted Average Number of Shares Outstanding, Diluted	31,654	32,549

Statements of Comprehensive Inc

Statements of Comprehensive Income (Loss) Statement - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Net Income (Loss) Attributable to Parent	$ 13,939	$ 1,848
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	(6)	(1)
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	638	447
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 14,571	$ 2,294

Statements of Cash Flows Statem

Statements of Cash Flows Statement - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Net Income (Loss) Attributable to Parent	$ 13,939	$ 1,848
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Amortization	595	515
Amortization of Financing Costs and Discounts	1,017	914
Depreciation	944	898
Foreign Currency Transaction Gain (Loss), before Tax	107	638
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	117	(396)
Share-based Compensation	1,161	4,410
Provision for doubtful accounts and inventory valuation	800	923
Gain (Loss) Related to Litigation Settlement	(14,632)	0
Increase (Decrease) in Other Operating Assets and Liabilities, Net	(10,371)	1,281
Net Cash Provided by (Used in) Operating Activities	(6,323)	11,031
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities	(44,311)	(60,458)
Proceeds from Sale and Maturity of Marketable Securities	51,120	51,381
Payments to Acquire Property, Plant, and Equipment	(1,514)	(1,072)
Net Cash Provided by (Used in) Investing Activities	5,295	(10,149)
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for Repurchase of Common Stock	(4,700)	(6,786)
Payments Related to Tax Withholding for Share-based Compensation	(1,509)	(1,868)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	6	61
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	304	93
Net Cash Provided by (Used in) Financing Activities	(5,899)	(8,500)
Effect of Exchange Rate on Cash and Cash Equivalents	559	(131)
Cash and Cash Equivalents, Period Increase (Decrease)	(6,368)	(7,749)
Cash and Cash Equivalents, at Carrying Value	38,186	35,365
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid	1,068	356
Interest Paid	$ 1,125	$ 1,125

Basis of Presentation (Notes)

Basis of Presentation (Notes)	3 Months Ended
	Mar. 31, 2016
Organization and Nature of Operations: [Abstract]
Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]	Basis of Presentation The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”). Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes. Actual amounts could differ materially from reported amounts. The interim results for the three month period ended March 31, 2016 are not necessarily indicative of results to be expected for the entire year or any future periods. This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2015 (“2015 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2015 has been derived from the audited consolidated financial statements included in the 2015 10-K. Reclassifications Certain immaterial prior period amounts have been reclassified to conform to the current financial statement presentation. Debt Issuance Costs: In the first quarter of 2016, the Company adopted Accounting Standards Update (ASU) No. 2015-03, Interest - Imputation of Interest (Subtopic 835-30), Simplifying the Presentation of Debt Issuance Costs,” which requires entities to present debt issuance costs related to a debt liability as a direct deduction from the carrying amount of that debt liability on the balance sheet as opposed to being presented as a deferred charge. For all periods presented in this Form 10-Q for the quarter ended March 31, 2016 , unamortized debt issuance costs related to the Company’s convertible senior notes are reported on the Consolidated Balance Sheets as a reduction of the carrying value of the related debt. Prior to adoption, the Company reported the unamortized debt issuance costs in “Other Assets” on the Consolidated Balance Sheets. As of December 31, 2015 , the change in presentation resulted in a reduction of “Other Assets” of $261 and a corresponding decrease in “Convertible Senior Notes” with no impact on the Company’s Consolidated Statements of Operations. Recent Accounting Pronouncements In March 2016, the Financial Accounting Standards Board (FASB) issued ASU No. 2016-09, Compensation - Stock Compensation (Topic 718), Improvements to Employee Share-Based Payment Accounting”. The standard was issued as part of the Simplification Initiative which involves several aspects of the accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, and classification on the statement of cash flows. The standard is effective for annual periods beginning after December 15, 2017, and interim periods within annual periods beginning after December 15, 2018. The Company is in the process of determining the adoption methods as well as the effects the adoption of ASU No. 2016-09 will have on its consolidated financial position, results of operations, and cash flows. In March 2016, the FASB issued ASU No. 2016-07, Investments-Equity Method and Joint Ventures (Topic 323). The standard was issued as part of the Simplification Initiative which eliminates the requirement that when an investment qualifies for use of the equity method as of a result of an increase in the level of ownership interest or degree of influence, an investor must adjust the investment, results of operations, and retained earnings retroactively on a step-by-step basis as if the equity method has been in effect during all previous periods that the investment had been held. The standard is effective for fiscal years, and interim periods within those fiscal years, beginning after December 15, 2016. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-07 will have on its consolidated financial position, results of operations, and cash flows. In February 2016, the FASB issued ASU No. 2016-02, Leases (Topic 842). The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard will take effect for fiscal years and interim periods within those fiscal years beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows. In January 2016, the FASB issued ASU 2016-01, “Financial Instruments – Overall: Recognition and Measurement of Financial Assets and Financial Liabilities.” The pronouncement requires equity investments (except those accounted for under the equity method of accounting, or those that result in consolidation of the investee) to be measured at fair value with changes in fair value recognized in net income, requires public business entities to use the exit price notion when measuring the fair value of financial instruments for disclosure purposes, requires separate presentation of financial assets and financial liabilities by measurement category and form of financial asset, and eliminates the requirement for public business entities to disclose the method(s) and significant assumptions used to estimate the fair value that is required to be disclosed for financial instruments measured at amortized cost. These changes become effective for the Company’s fiscal year beginning January 1, 2018. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-01 will have on its consolidated financial position, results of operations, and cash flows. In July 2015, the FASB issued ASU No. 2015-11, “Inventory (Topic 330), Simplifying the Measurement of Inventory.” This ASU is intended to simplify subsequent measurement of inventory. An entity should measure inventory within the scope of this ASU at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The standard is effective for annual periods and interim periods within those annual periods beginning after December 15, 2016. The adoption of ASU 2015-11 is not expected to have a material effect on the Company’s consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09 outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance. In July 2015, the FASB deferred for one year the effective date of the new revenue standard, but early adoption will be permitted. The new standard will be effective for the Company on January 1, 2018. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Fair Value Measurements

Fair Value Measurements	3 Months Ended
	Mar. 31, 2016
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement. The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at March 31, 2016 and December 31, 2015 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant March 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 109,217 $ — $ 109,217 $ — Corporate bonds 838 — 838 — Total Assets $ 110,055 $ — $ 110,055 $ — Liabilities: Foreign currency forward contracts 289 $ — $ 289 $ — Contingent consideration - acquisitions 3,820 — — 3,820 Total Liabilities $ 4,109 $ — $ 289 $ 3,820 December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703 The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Available-for-sale debt securities prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class. Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these liabilities. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, estimates of discount rates of 9.1% and timing of cash flows. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration. This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the three months ended March 31, 2016 : Fair Value Measurements Using Balance at December 31, 2015 $ 3,703 Additions — Total loss included in selling, general and administrative expense 117 Payments — Transfers into (out of) Level 3 — Balance at March 31, 2016 $ 3,820 See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities. Fair Value of Other Financial Instruments The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. The Company’s convertible senior notes are not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model, included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes is valued quarterly using the present value under an expected cash flow model incorporating the probabilities of the contingent events occurring. The following table reflects information pertaining to the Company’s convertible senior notes: March 31, 2016 December 31, 2015 Net carrying value of convertible senior notes $ 58,863 $ 57,846 Estimated fair value of convertible senior notes $ 60,240 $ 60,630 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities

Marketable Securities	3 Months Ended
	Mar. 31, 2016
Marketable Securities [Abstract]
Marketable Securities [Text Block]	Marketable Securities The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other expense” in the Condensed Consolidated Statements of Operations. The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost of securities sold is based on the specific identification method. The Company has determined that the gross unrealized losses on its marketable securities at March 31, 2016 and December 31, 2015 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. At March 31, 2016 and December 31, 2015 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value March 31, 2016 Municipal notes and bonds $ 109,223 $ 14 $ 20 $ 109,217 Corporate bonds $ 838 $ — $ — $ 838 Total marketable securities $ 110,061 $ 14 $ 20 $ 110,055 December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ 15 $ 116,089 Corporate bonds $ 838 $ — $ 3 $ 835 Total marketable securities $ 116,924 $ 18 $ 18 $ 116,924 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at March 31, 2016 and December 31, 2015 : March 31, 2016 December 31, 2015 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 99,920 $ 99,914 $ 113,542 $ 113,549 Due after one through five years 10,141 10,141 3,382 3,375 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 110,061 $ 110,055 $ 116,924 $ 116,924 The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at March 31, 2016 and December 31, 2015 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses March 31, 2016 Municipal notes and bonds $ 57,835 $ 20 $ — $ — Total $ 57,835 $ 20 $ — $ — December 31, 2015 Municipal notes and bonds $ 52,638 $ 15 $ 305 $ 1 Corporate bonds 835 3 — — Total $ 53,473 $ 18 $ 305 $ 1 See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

Derivative Instruments and Hedg

Derivative Instruments and Hedging Activities	3 Months Ended
	Mar. 31, 2016
Derivative Instruments and Hedging Activities [Abstract]
Derivative Instruments and Hedging Activities Disclosure [Text Block]	Derivative Instruments and Hedging Activities The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At March 31, 2016 and December 31, 2015 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either prepaid expenses and other current assets or other current liabilities in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $204 and $78 for the three month periods ended March 31, 2016 and 2015, respectively, are recorded within the caption “Other expense” in the Condensed Consolidated Statements of Operations. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of March 31, 2016 and December 31, 2015 were as follows: March 31, 2016 December 31, 2015 Notional amount $ 4,525 $ 5,423 Fair value of liability $ 289 $ 85

Identifiable Intangible Assets

Identifiable Intangible Assets	3 Months Ended
	Mar. 31, 2016
Finite-Lived Intangible Assets [Line Items]
Intangible Assets Disclosure [Text Block]	Purchased Intangible Assets Purchased intangible assets as of March 31, 2016 and December 31, 2015 are as follows: Gross Carrying Amount Accumulated Amortization Net March 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 55,592 $ 9,935 Customer and distributor relationships 9,560 8,258 1,302 Trade names 4,361 3,600 761 Total identifiable intangible assets $ 79,448 $ 67,450 $ 11,998 December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593 Intangible asset amortization expense for the three months ended March 31, 2016 and 2015 was $595 and $515 , respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2016 will be $1,726 , and for each of the next five years estimated amortization expense amounts to $1,933 for 2017 , $1,496 for 2018 , $1,496 for 2019 , $1,294 for 2020 , and $546 for 2021 .

Balance Sheet Details

Balance Sheet Details	3 Months Ended
	Mar. 31, 2016
Balance Sheet Detail [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details Inventories Inventories are comprised of the following: March 31, 2016 December 31, 2015 Materials $ 39,345 $ 39,022 Work-in-process 23,161 18,918 Finished goods 11,637 13,550 Total inventories $ 74,143 $ 71,490 The Company has established reserves of $9,515 and $8,896 as of March 31, 2016 and December 31, 2015 , respectively, for slow moving and obsolete inventory, which are included in the amounts above. Prepaid expenses and other current assets Prepaid expenses and other current assets are comprised of the following: March 31, 2016 December 31, 2015 Patent litigation judgment $ 14,632 $ — Other 6,887 8,137 Total prepaid expenses and other current assets $ 21,519 $ 8,137 Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: March 31, 2016 December 31, 2015 Land and building $ 2,584 $ 5,024 Machinery and equipment 23,952 21,683 Furniture and fixtures 2,671 3,414 Computer equipment 5,595 5,304 Leasehold improvements 8,089 7,884 42,891 43,309 Less: Accumulated depreciation 28,941 30,963 Total property, plant and equipment, net $ 13,950 $ 12,346 In February 2016, the Company consolidated its New Jersey locations into its Budd Lake, NJ facility and vacated its corporate offices in Flanders, NJ. The Flanders, NJ corporate office location is classified as an asset held for sale. The Company believes the facility will be sold within the next 12 months and has classified the facility as current assets held for sale in “Prepaid and other assets”. Assets held for sale as of March 31, 2016 consist of land with a cost of $168 and buildings with a cost and net book value of $939 and $51 , respectively. Other assets Other assets is comprised of the following: March 31, 2016 December 31, 2015 Deferred income taxes $ 35,047 $ 34,973 Other 569 559 Total other assets $ 35,616 $ 35,532 Other current liabilities Other current liabilities is comprised of the following: March 31, 2016 December 31, 2015 Litigation accrual $ 3,252 $ 3,252 Contingent consideration - acquisitions 717 1,407 Other 6,658 7,756 Total other current liabilities $ 10,627 $ 12,415 Other non-current liabilities Other non-current liabilities is comprised of the following: March 31, 2016 December 31, 2015 Unrecognized tax benefits (including interest) $ 2,963 $ 3,152 Contingent consideration - acquisitions 3,103 2,296 Deferred revenue 1,128 1,206 Other 3,075 2,900 Total other non-current liabilities $ 10,269 $ 9,554

Debt Obligations

Debt Obligations	3 Months Ended
	Mar. 31, 2016
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations On July 25, 2011 , the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 , between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provide for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012 , at an annual rate of 3.75% and will mature on July 15, 2016 , unless earlier converted or repurchased. The Notes may be converted, under certain circumstances, based on an initial conversion rate of 77.241 shares of Company common stock per $1 principal amount of Notes, which represents an initial conversion price of approximately $12.95 per share. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. The convertible note hedge is intended to reduce the potential future dilution to the Company’s common stock associated with the conversion of the Notes. However, the warrant transaction will have a dilutive effect on the Company’s earnings per share to the extent that the price of the Company’s common stock exceeds the strike price of the warrant. The strike price of the warrant is $17.00 per share subject to adjustment in accordance with the terms of the agreement. The net proceeds to the Company from the sale of the Notes, including the convertible note hedge and warrant, were $50,249 . The following table reflects the net carrying value of the Notes: March 31, 2016 December 31, 2015 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 999 1,893 Less: Unamortized debt issuance costs 138 261 Net carrying value of convertible senior notes $ 58,863 $ 57,846 The following table presents the amount of interest cost recognized relating to the Notes during the three months ended March 31, 2016 and March 31, 2015 : Three Months Ended March 31, 2016 2015 Contractual interest coupon $ 562 $ 562 Amortization of interest discount 894 811 Amortization of debt issuance costs 123 103 Total interest cost recognized $ 1,579 $ 1,476 The remaining bond discount of $999 and debt issuance costs of $138 relating to the Notes, as of March 31, 2016 , will be amortized over the remaining life of the Notes.

Commitments and Contingencies

Commitments and Contingencies	3 Months Ended
	Mar. 31, 2016
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies Warranty Reserves The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the year. Changes in the Company’s warranty reserves are as follows: Three Months Ended March 31, 2016 2015 Balance, beginning of the period $ 1,894 $ 1,574 Accruals 544 822 Less: Usage 665 696 Balance, end of the period $ 1,773 $ 1,700 Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.” Legal Matters From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The Company’s 2015 10-K reflects the status of the Company’s litigation with Integrated Technology Corporation (“ITC”) and Camtek, Ltd. (“Camtek”). The following reflects the material developments during the three months ended March 31, 2016 with regard to these matters. Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182 (PHX-ROS) : This matter is fully resolved with the sole exception of the issue of remanded attorney’s fees which were set by the U.S. District Court for the District of Arizona (the “AZ District Court”) at $3,252 . A hearing regarding the Company’s appeal of this order was held on October 6, 2015 and the U.S. Federal Court of Appeals (the “Court of Appeals”). The Court of Appeals issued a ruling that the award was improperly established, vacated the amount of the award and remanded the matter back to the AZ District Court for a determination of a proper fee award. The Company believes that it has meritorious defenses regarding this issue and intends to continue to vigorously prosecute the matter. The $3,252 is held in escrow and is recorded in “Prepaid expenses and other current assets” in the Consolidated Balance Sheet at March 31, 2016 . The corresponding liability is recorded under the caption “Other current liabilities” in the Condensed Consolidated Balance Sheet at March 31, 2016 . The Company expects this to be the maximum liability reasonably possible for the attorney’s fees, excluding interest, for this lawsuit with respect to both the pre-August 2007 and the post-August 2007 tools which were the subject of this action. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 05-CV-01396 (JRT/FLN) : Subsequent to the ruling by the U.S. District Court for the District of Minnesota (the “MN District Court”) in the Company’s favor that Camtek’s Falcon tools continue to infringe the Company’s patent under the revised claim construction of the patent determined by the Court of Appeals, the MN District Court, on February 9, 2015, issued an Order granting the Company’s Motion for Final Judgment, reinstating the original damages and applying prejudgment interest for a total award of $14,512 . In addition, the MN District Court issued a permanent injunction against Camtek from “making, using, selling and offering to sell any of its Falcon machines and any machines that are colorable imitations thereof in the United States, intended for sale and use within the United States, until the expiration of the ‘6,298 patent,” which is projected to be in 2020. While, in March of 2015, Camtek filed an appeal with the Court of Appeals challenging the MN District Court’s ruling, the Court of Appeals denied Camtek’s appeal on February 3, 2016, affirming both the infringement ruling and the damages and interest totaling approximately $14,632 million assessed against Camtek by the MN District Court, the payment of which is guaranteed by a supersedeas bond. All of Camtek’s rights to appeal the final judgment have now expired. On March 14, 2016 the Company filed its request to the MN District Court to release payment under the bond and is currently awaiting a response from the Court. The Company recorded the judgment in “Prepaid expenses and other current assets” in the Consolidate Balance Sheets as of March 31, 2016 as the gain contingency was realized upon completion of the appeal process. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 10-CV-2202 (MJD/FLN) : With regard to the Company’s subsequently filed lawsuit against Camtek in the MN District Court alleging infringement of its U.S. Patent No. 7,729,528, this lawsuit continues to be stayed pending resolution of a re-examination petition filed by Camtek with the U.S. Patent and Trademark Office. Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT) : On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph ‘6,298 patent by Camtek’s Eagle product with the MN District Court. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States which is currently pending. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court for the District of New Jersey (the “NJ District Court”) seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota court and seeking to have the NJ District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the MN District Court ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the NJ District Court was subsequently dismissed. This matter is currently in discovery phase of the litigation. Line of Credit The Company has a credit agreement with Credit Suisse providing for a $60,000 committed secured revolving line of credit, which will expire on October 31, 2016. The Company has not utilized the credit agreement to date.

Share-Based Compensation

Share-Based Compensation	3 Months Ended
	Mar. 31, 2016
Share-based Compensation [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation Restricted Stock Unit Activity A summary of the Company’s nonvested restricted stock unit activity with respect to the three months ended March 31, 2016 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2015 1,169 $ 11.40 Granted 162 $ 12.31 Less: Vested 268 $ 10.51 Less: Forfeited 7 $ 11.16 Nonvested at March 31, 2016 1,056 $ 11.76 As of March 31, 2016 and December 31, 2015 , there was $8,930 and $8,221 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively. That cost is expected to be recognized over a weighted average period of 3.0 years and 2.6 years for the respective periods.

Other Expense (Income)

Other Expense (Income)	3 Months Ended
	Mar. 31, 2016
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other Expense Three Months Ended March 31, 2016 2015 Foreign currency exchange losses, net $ 107 $ 638 Total other expense $ 107 $ 638

Income Taxes

Income Taxes	3 Months Ended
	Mar. 31, 2016
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes The following table provides details of income taxes: Three Months Ended March 31, 2016 2015 Income before income taxes $ 19,561 $ 3,097 Provision for income taxes $ 5,622 $ 1,249 Effective tax rate 28.7 % 40.3 % The income tax provision for the three months ended March 31, 2016 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the three months ended March 31, 2016 compared to the same period for the prior year are primarily due to the mix of forecasted earnings by jurisdictions, additional foreign tax credits generated and the availability of the research and development credit in 2016. The Company currently has a partial valuation allowance recorded against certain foreign and state net operating loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including forecasted earnings in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a recorded valuation allowance against certain of its deferred tax assets of $2,205 as of March 31, 2016 and December 31, 2015.

Earnings Per Share

Earnings Per Share	3 Months Ended
	Mar. 31, 2016
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings Per Share Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be anti-dilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the three months ended March 31, 2016 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 151 and 0 , respectively. For the three months ended March 31, 2015 , all outstanding stock options and restricted stock units totaling 299 and 0 , respectively, were excluded from the computation of diluted loss per share because the effect in the periods would be anti-dilutive. Diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes and warrants as their impact would be anti-dilutive. The Company’s basic and diluted earnings per share amounts are as follows: Three Months Ended March 31, 2016 2015 Numerator: Net income $ 13,939 $ 1,848 Denominator: Basic earnings per share - weighted average shares outstanding 30,957 31,928 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 697 621 Diluted earnings per share - weighted average shares outstanding 31,654 32,549 Earnings per share: Basic $ 0.45 $ 0.06 Diluted $ 0.44 $ 0.06

Accumulated Other Comprehensive

Accumulated Other Comprehensive Loss (Notes)	3 Months Ended
	Mar. 31, 2016
Accumulated Other Comprehensive Loss [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income on the Company’s net income. The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2015 $ 2,623 $ — $ 2,623 Net current period other comprehensive loss (income) (638 ) 6 (632 ) Reclassifications — — — Ending balance, March 31, 2016 $ 1,985 $ 6 $ 1,991

Segment Reporting and Geographi

Segment Reporting and Geographic Information	3 Months Ended
	Mar. 31, 2016
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection, metrology, advanced packaging lithography, and process control software systems used by microelectronics device manufacturers, and therefore the Company has one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level. The following table lists the different sources of revenue: Three Months Ended March 31, 2016 2015 Systems and Software: Process Control $ 36,459 67 % $ 36,061 69 % Lithography 170 — % 21 — % Software 7,422 14 % 7,794 15 % Parts 7,160 13 % 5,655 10 % Services 3,151 6 % 3,039 6 % Total revenue $ 54,362 100 % $ 52,570 100 % For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended March 31, 2016 2015 United States $ 7,388 $ 17,648 Taiwan 22,035 13,329 Japan 2,937 1,314 China 8,825 6,088 South Korea 1,623 3,531 Singapore 7,047 1,738 Other Asia 871 39 Germany 697 7,055 Other Europe 2,939 1,828 Total revenue $ 54,362 $ 52,570 The following customers each accounted for more than 10% of total revenues for the indicated periods. Three Months Ended March 31, 2016 2015 Customer A 26.9 % 11.1 % Customer B 4.3 % 10.2 %

Share Repurchase Program

Share Repurchase Program	3 Months Ended
	Mar. 31, 2016
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Share Repurchase Authorization In January 2015, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the three months ended March 31, 2016, the Company repurchased 370 shares of common stock. At March 31, 2016 , there were 956 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired. The following table summarizes the Company’s stock repurchases for the three month period ended March 31, 2016 and 2015, respectively: Three Months Ended March 31, 2016 2015 Shares of common stock repurchased 370 570 Cost of stock repurchased $4,700 $6,786 Average price paid per share $12.70 $11.91

Fair Value Measurements - (Tabl

Fair Value Measurements - (Tables)	3 Months Ended
	Mar. 31, 2016
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Table Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at March 31, 2016 and December 31, 2015 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant March 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 109,217 $ — $ 109,217 $ — Corporate bonds 838 — 838 — Total Assets $ 110,055 $ — $ 110,055 $ — Liabilities: Foreign currency forward contracts 289 $ — $ 289 $ — Contingent consideration - acquisitions 3,820 — — 3,820 Total Liabilities $ 4,109 $ — $ 289 $ 3,820 December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the three months ended March 31, 2016 : Fair Value Measurements Using Balance at December 31, 2015 $ 3,703 Additions — Total loss included in selling, general and administrative expense 117 Payments — Transfers into (out of) Level 3 — Balance at March 31, 2016 $ 3,820
Fair value convertible senior notes [Table Text Block]	The following table reflects information pertaining to the Company’s convertible senior notes: March 31, 2016 December 31, 2015 Net carrying value of convertible senior notes $ 58,863 $ 57,846 Estimated fair value of convertible senior notes $ 60,240 $ 60,630 Estimated interest rate used in discounted cash flow model 5.0 % 5.0 % Fair value of contingent interest $ — $ —

Marketable Securities - (Tables

Marketable Securities - (Tables)	3 Months Ended
	Mar. 31, 2016
Schedule of Available-for-sale Securities [Line Items]
Schedule of marketable securities by category [Table Text Block]	At March 31, 2016 and December 31, 2015 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value March 31, 2016 Municipal notes and bonds $ 109,223 $ 14 $ 20 $ 109,217 Corporate bonds $ 838 $ — $ — $ 838 Total marketable securities $ 110,061 $ 14 $ 20 $ 110,055 December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ 15 $ 116,089 Corporate bonds $ 838 $ — $ 3 $ 835 Total marketable securities $ 116,924 $ 18 $ 18 $ 116,924
Schedule of marketable securities classified by contractual maturity date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at March 31, 2016 and December 31, 2015 : March 31, 2016 December 31, 2015 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 99,920 $ 99,914 $ 113,542 $ 113,549 Due after one through five years 10,141 10,141 3,382 3,375 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 110,061 $ 110,055 $ 116,924 $ 116,924
Schedule of marketable securities in unrealized loss positions [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at March 31, 2016 and December 31, 2015 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses March 31, 2016 Municipal notes and bonds $ 57,835 $ 20 $ — $ — Total $ 57,835 $ 20 $ — $ — December 31, 2015 Municipal notes and bonds $ 52,638 $ 15 $ 305 $ 1 Corporate bonds 835 3 — — Total $ 53,473 $ 18 $ 305 $ 1

Derivative Instruments and He24

Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)	3 Months Ended
	Mar. 31, 2016
Derivative Instruments and Hedging Activities [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of March 31, 2016 and December 31, 2015 were as follows: March 31, 2016 December 31, 2015 Notional amount $ 4,525 $ 5,423 Fair value of liability $ 289 $ 85

Identifiable Intangible Assets

Identifiable Intangible Assets - (Tables)	3 Months Ended
	Mar. 31, 2016
Identifiable Intangible Assets [Abstract]
Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]	Purchased intangible assets as of March 31, 2016 and December 31, 2015 are as follows: Gross Carrying Amount Accumulated Amortization Net March 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 55,592 $ 9,935 Customer and distributor relationships 9,560 8,258 1,302 Trade names 4,361 3,600 761 Total identifiable intangible assets $ 79,448 $ 67,450 $ 11,998 December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593

Balance Sheet Details - (Tables

Balance Sheet Details - (Tables)	3 Months Ended
	Mar. 31, 2016
Balance Sheet Detail [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories are comprised of the following: March 31, 2016 December 31, 2015 Materials $ 39,345 $ 39,022 Work-in-process 23,161 18,918 Finished goods 11,637 13,550 Total inventories $ 74,143 $ 71,490
Deferred Costs, Capitalized, Prepaid, and Other Assets Disclosure [Table Text Block]	Prepaid expenses and other current assets Prepaid expenses and other current assets are comprised of the following: March 31, 2016 December 31, 2015 Patent litigation judgment $ 14,632 $ — Other 6,887 8,137 Total prepaid expenses and other current assets $ 21,519 $ 8,137
Property, Plant and Equipment [Table Text Block]	Property, plant and equipment, net is comprised of the following: March 31, 2016 December 31, 2015 Land and building $ 2,584 $ 5,024 Machinery and equipment 23,952 21,683 Furniture and fixtures 2,671 3,414 Computer equipment 5,595 5,304 Leasehold improvements 8,089 7,884 42,891 43,309 Less: Accumulated depreciation 28,941 30,963 Total property, plant and equipment, net $ 13,950 $ 12,346
Schedule of Other Assets [Table Text Block]	Other assets is comprised of the following: March 31, 2016 December 31, 2015 Deferred income taxes $ 35,047 $ 34,973 Other 569 559 Total other assets $ 35,616 $ 35,532
Other Current liabilities [Table Text Block]	Other current liabilities is comprised of the following: March 31, 2016 December 31, 2015 Litigation accrual $ 3,252 $ 3,252 Contingent consideration - acquisitions 717 1,407 Other 6,658 7,756 Total other current liabilities $ 10,627 $ 12,415
Other Non-current liabilities [Table Text Block]	Other non-current liabilities is comprised of the following: March 31, 2016 December 31, 2015 Unrecognized tax benefits (including interest) $ 2,963 $ 3,152 Contingent consideration - acquisitions 3,103 2,296 Deferred revenue 1,128 1,206 Other 3,075 2,900 Total other non-current liabilities $ 10,269 $ 9,554

Debt Obligations - (Tables)

Debt Obligations - (Tables)	3 Months Ended
	Mar. 31, 2016
Debt Obligations [Abstract]
Schedule of carrying value of convertible senior notes [Table Text Block]	The following table reflects the net carrying value of the Notes: March 31, 2016 December 31, 2015 Convertible senior notes $ 60,000 $ 60,000 Less: Unamortized interest discount 999 1,893 Less: Unamortized debt issuance costs 138 261 Net carrying value of convertible senior notes $ 58,863 $ 57,846
Schedule of interest cost recognized on convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the three months ended March 31, 2016 and March 31, 2015 : Three Months Ended March 31, 2016 2015 Contractual interest coupon $ 562 $ 562 Amortization of interest discount 894 811 Amortization of debt issuance costs 123 103 Total interest cost recognized $ 1,579 $ 1,476

Commitments and Contingencies -

Commitments and Contingencies - (Tables)	3 Months Ended
	Mar. 31, 2016
Commitments and Contingencies [Abstract]
Schedule of changes product warranty liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows: Three Months Ended March 31, 2016 2015 Balance, beginning of the period $ 1,894 $ 1,574 Accruals 544 822 Less: Usage 665 696 Balance, end of the period $ 1,773 $ 1,700

Share-Based Compensation - (Tab

Share-Based Compensation - (Tables)	3 Months Ended
	Mar. 31, 2016
Share-based Compensation [Abstract]
Summary of restricted stock unit activity [Table Text Block]	A summary of the Company’s nonvested restricted stock unit activity with respect to the three months ended March 31, 2016 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2015 1,169 $ 11.40 Granted 162 $ 12.31 Less: Vested 268 $ 10.51 Less: Forfeited 7 $ 11.16 Nonvested at March 31, 2016 1,056 $ 11.76

Other Income - (Tables)

Other Income - (Tables)	3 Months Ended
	Mar. 31, 2016
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	Three Months Ended March 31, 2016 2015 Foreign currency exchange losses, net $ 107 $ 638 Total other expense $ 107 $ 638

Income Taxes - (Tables)

Income Taxes - (Tables)	3 Months Ended
	Mar. 31, 2016
Income Taxes [Abstract]
Schedule of effective tax rate [Table Text Block]	The following table provides details of income taxes: Three Months Ended March 31, 2016 2015 Income before income taxes $ 19,561 $ 3,097 Provision for income taxes $ 5,622 $ 1,249 Effective tax rate 28.7 % 40.3 %

Earnings Per Share - (Tables)

Earnings Per Share - (Tables)	3 Months Ended
	Mar. 31, 2016
Earnings Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The Company’s basic and diluted earnings per share amounts are as follows: Three Months Ended March 31, 2016 2015 Numerator: Net income $ 13,939 $ 1,848 Denominator: Basic earnings per share - weighted average shares outstanding 30,957 31,928 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 697 621 Diluted earnings per share - weighted average shares outstanding 31,654 32,549 Earnings per share: Basic $ 0.45 $ 0.06 Diluted $ 0.44 $ 0.06

Accumulated Other Comprehensi33

Accumulated Other Comprehensive Loss (Tables)	3 Months Ended
	Mar. 31, 2016
Accumulated Other Comprehensive Loss [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2015 $ 2,623 $ — $ 2,623 Net current period other comprehensive loss (income) (638 ) 6 (632 ) Reclassifications — — — Ending balance, March 31, 2016 $ 1,985 $ 6 $ 1,991

Segment Reporting and Geograp34

Segment Reporting and Geographic Information - (Tables)	3 Months Ended
	Mar. 31, 2016
Segment Reporting and Geographic Information [Abstract]
Schedule of revenue from external customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue: Three Months Ended March 31, 2016 2015 Systems and Software: Process Control $ 36,459 67 % $ 36,061 69 % Lithography 170 — % 21 — % Software 7,422 14 % 7,794 15 % Parts 7,160 13 % 5,655 10 % Services 3,151 6 % 3,039 6 % Total revenue $ 54,362 100 % $ 52,570 100 %
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended March 31, 2016 2015 United States $ 7,388 $ 17,648 Taiwan 22,035 13,329 Japan 2,937 1,314 China 8,825 6,088 South Korea 1,623 3,531 Singapore 7,047 1,738 Other Asia 871 39 Germany 697 7,055 Other Europe 2,939 1,828 Total revenue $ 54,362 $ 52,570
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	The following customers each accounted for more than 10% of total revenues for the indicated periods. Three Months Ended March 31, 2016 2015 Customer A 26.9 % 11.1 % Customer B 4.3 % 10.2 %

Share Repurchase Program - (Tab

Share Repurchase Program - (Tables)	3 Months Ended
	Mar. 31, 2016
Schedule of common stock repurchased [Abstract]
share repurchase program [Table Text Block]	The following table summarizes the Company’s stock repurchases for the three month period ended March 31, 2016 and 2015, respectively: Three Months Ended March 31, 2016 2015 Shares of common stock repurchased 370 570 Cost of stock repurchased $4,700 $6,786 Average price paid per share $12.70 $11.91

Basis of Presentation (Details)

Basis of Presentation (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Debt Issuance Costs [Abstract]
Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net	$ 138	$ 261

Fair Value Measurements - (Deta

Fair Value Measurements - (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Dec. 31, 2015
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 109,217	$ 116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value	838	835
Foreign Currency Contract, Asset, Fair Value Disclosure		85
Assets, Fair Value Disclosure	110,055	116,924
Foreign Currency Contracts, Liability, Fair Value Disclosure	289
Business Combination, Contingent Consideration, Liability	3,820	3,703
Liabilities, Fair Value Disclosure	$ 4,109	3,788
Fair Value Inputs Discount Rate 3	9.10%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	$ 3,820	3,703
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	117
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	$ 0
Fair Value, Level 3 Transfers out, Description	0
Convertible Debt	$ 58,863	57,846
Long-term Debt, Fair Value	$ 60,240	$ 60,630
Fair Value Inputs Discount Rate 2	5.00%	5.00%
Long-term Debt, Contingent Payment of Principal or Interest	0	0
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 0	$ 0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0	0
Foreign Currency Contract, Asset, Fair Value Disclosure		0
Assets, Fair Value Disclosure	0	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	109,217	116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value	838	835
Foreign Currency Contract, Asset, Fair Value Disclosure		85
Assets, Fair Value Disclosure	110,055	116,924
Foreign Currency Contracts, Liability, Fair Value Disclosure	289
Business Combination, Contingent Consideration, Liability	0	0
Liabilities, Fair Value Disclosure	289	85
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0	0
Foreign Currency Contract, Asset, Fair Value Disclosure		0
Assets, Fair Value Disclosure	0	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0
Business Combination, Contingent Consideration, Liability	3,820	3,703
Liabilities, Fair Value Disclosure	$ 3,820	$ 3,703

Marketable Securities - (Detail

Marketable Securities - (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Dec. 31, 2015
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	$ 110,061	$ 116,924
Available-for-sale Securities, Fair Value Disclosure	110,055	116,924
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	99,920	113,542
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	99,914	113,549
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	10,141	3,382
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	10,141	3,375
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Fair Value	0	0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	109,223	116,086
Available-for-sale Securities, Gross Unrealized Gains	14	18
Available-for-sale Securities, Gross Unrealized Losses	20	15
Available-for-sale Securities, Fair Value Disclosure	109,217	116,089
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	57,835	52,638
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	20	15
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	305
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	1
Corporate Bond Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	838	838
Available-for-sale Securities, Gross Unrealized Gains	0	0
Available-for-sale Securities, Gross Unrealized Losses	0	3
Available-for-sale Securities, Fair Value Disclosure	838	835
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value		835
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses		3
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value		0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses		0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	110,061	116,924
Available-for-sale Securities, Gross Unrealized Gains	14	18
Available-for-sale Securities, Gross Unrealized Losses	20	18
Available-for-sale Securities, Fair Value Disclosure	110,055	116,924
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	57,835	53,473
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	20	18
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	305
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$ 0	$ 1

Derivative Instruments and He39

Derivative Instruments and Hedging Activities - (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015	Dec. 31, 2015
Derivative [Line Items]
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	$ 204	$ 78
Derivative, Notional Amount	4,525		$ 5,423
Derivative Asset, Fair Value, Gross Liability	$ 289
Derivative Asset, Fair Value, Gross Asset			$ 85

Identifiable Intangible Asset40

Identifiable Intangible Assets - (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015	Dec. 31, 2015
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	$ 79,448		$ 79,448
Finite-Lived Intangible Assets, Accumulated Amortization	67,450		66,855
Intangible Assets, Net (Excluding Goodwill)	11,998		12,593
Amortization of Intangible Assets	595	$ 515
Future Amortization Expense, Remainder of Fiscal Year	1,726
Future Amortization Expense, Year One	1,933
Future Amortization Expense, Year Two	1,496
Future Amortization Expense, Year Three	1,496
Future Amortization Expense, Year Four	1,294
Future Amortization Expense, Year Five	546
Developed Technology Rights [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	65,527		65,527
Finite-Lived Intangible Assets, Accumulated Amortization	55,592		55,110
Intangible Assets, Net (Excluding Goodwill)	9,935		10,417
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	9,560		9,560
Finite-Lived Intangible Assets, Accumulated Amortization	8,258		8,170
Intangible Assets, Net (Excluding Goodwill)	1,302		1,390
Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	4,361		4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,600		3,575
Intangible Assets, Net (Excluding Goodwill)	$ 761		$ 786

Balance Sheet Details - Invento

Balance Sheet Details - Inventory (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Inventory Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 39,345	$ 39,022
Inventory, Work in Process, Net of Reserves	23,161	18,918
Inventory, Finished Goods, Net of Reserves	11,637	13,550
Inventory, Net	74,143	71,490
Inventory Valuation Reserves	$ 9,515	$ 8,896

Balance Sheet Details - Propert

Balance Sheet Details - Property Plant & Equipment (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Property, Plant and Equipment [Line Items]
Buildings and Land Gross	$ 2,584	$ 5,024
Machinery and Equipment, Gross	23,952	21,683
Furniture and Fixtures, Gross	2,671	3,414
Computer Equipments And Software Gross	5,595	5,304
Leasehold Improvements, Gross	8,089	7,884
Property, Plant and Equipment, Gross	42,891	43,309
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	28,941	30,963
Property, Plant and Equipment, Net	13,950	$ 12,346
Land [Member]
Property, Plant and Equipment [Line Items]
Asset held-for-sale, Not Part of Disposal Group, Current, Other - Cost	168
Building [Member]
Property, Plant and Equipment [Line Items]
Asset held-for-sale, Not Part of Disposal Group, Current, Other - Cost	939
Asset Held for sale current, other NBV	$ 51

Balance Sheet Details - Other A

Balance Sheet Details - Other Assets (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Other Assets [Abstract]
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$ 35,047	$ 34,973
Other	569	559
Total Other Assets	$ 35,616	$ 35,532

Balance Sheet Details - Other C

Balance Sheet Details - Other Current Liabilities (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Other Current Liabilities [Abstract]
Estimated Litigation Liability, Current	$ 3,252	$ 3,252
Contingent Consideration Current Liability	717	1,407
Other Current Liabilities Subtotal	6,658	7,756
Other Liabilities, Current	$ 10,627	$ 12,415

Balance Sheet Details - Other N

Balance Sheet Details - Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$ 2,963	$ 3,152
Contingent consideration - Acquisition non-current liability	3,103	2,296
Deferred Revenue, Noncurrent	1,128	1,206
Other Liabilities	3,075	2,900
Other Liabilities, Noncurrent	$ 10,269	$ 9,554

Balance Sheet Details Balance S

Balance Sheet Details Balance Sheet Detail - Prepaid expenses and other current assets (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Dec. 31, 2015
Debt Issuance Costs [Abstract]
Loss Contingency, damages Awarded, Value 2	$ 14,632	$ 0
Other Assets, Current	6,887	8,137
Prepaid Expense and Other Assets	$ 21,519	$ 8,137

Debt Obligations - (Details)

Debt Obligations - (Details) - USD ($) $ / shares in Units, $ in Thousands	1 Months Ended	3 Months Ended
	Jul. 31, 2011	Mar. 31, 2016	Mar. 31, 2015	Dec. 31, 2015	Jul. 25, 2011
Debt Obligations [Abstract]
Convertible Debt		$ 60,000		$ 60,000	$ 60,000
Debt Instrument, Interest Rate, Stated Percentage					3.75%
Convertible Preferred Stock, Shares Issued upon Conversion					77.241
Note increment for which conversion amount of Common Stock based					$ 1
Debt Instrument, Convertible, Conversion Price					$ 12.95
Class of Warrant or Right, Exercise Price of Warrants or Rights					$ 17
Proceeds from Convertible Debt	$ 50,249
Debt Instrument, Unamortized Discount		999		1,893
Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net		138		261
Convertible Debt, Current		58,863		57,846
Convertible senior notes				$ 57,846
Contractual Interest Coupon		562	$ 562
Amortization of Debt Discount (Premium)		894	811
Amortization of Financing Costs		123	103
Interest Expense, Debt		$ 1,579	$ 1,476

Commitments and Contingencies48

Commitments and Contingencies - (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015	Dec. 31, 2015	Dec. 31, 2014
Commitments and Contingencies [Abstract]
Line of Credit, Current	$ 60,000
Standard Product Warranty Accrual	1,773	$ 1,700	$ 1,894	$ 1,574
Product Warranty Accrual, Warranties Issued	544	822
Product Warranty Accrual, Payments	$ 665	$ 696

Legal Matters (Details)

Legal Matters (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Aug. 08, 2014
Commitments and Contingencies [Abstract]
Estimated Litigation Liability		$ 3,252
Subsequent Event [Line Items]
Loss Contingency, Damages Awarded, Value	$ 14,512

Commitments and Contingencies L

Commitments and Contingencies Legal Matters - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Dec. 31, 2015
Commitments and Contingencies Disclosure [Abstract]
Loss Contingency, Damages Awarded, Value	$ 14,512
Loss Contingency, damages Awarded, Value 2	$ 14,632	$ 0

Share-Based Compensation Restri

Share-Based Compensation Restricted Stock Units (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Dec. 31, 2015
Restricted Stock Units Activity [Abstract]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,056	1,169
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 11.76	$ 11.40
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	162
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 12.31
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	268
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 10.51
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	7
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 11.16
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$ 8,930	$ 8,221
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 11 months 25 days	2 years 7 months 20 days

Other Income - (Details)

Other Income - (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Other Income (Expense) [Abstract]
Foreign currency exchange losses (gains), net	$ 107	$ 638
Total other expenses (income)	$ 107	$ 638

Income Taxes - (Details)

Income Taxes - (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015	Dec. 31, 2015
Income Taxes [Abstract]
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	$ 19,561	$ 3,097
Income Tax Expense (Benefit)	$ 5,622	$ 1,249
Effective Income Tax Rate	28.70%	40.30%
Valuation Allowance, Amount	$ 2,205		$ 2,205

Earnings Per Share - (Details)

Earnings Per Share - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Earnings Per Share [Abstract]
Stock Options Antidilutive securities excluded from computation	151
Restricted Stock Unit Antidilutive excluded from computation	0
Stock Options Excluded from Computation of diluted loss per share		299
Restricted stock units excluded from Computation of diluted loss per share		0
Net Income (Loss) Attributable to Parent	$ 13,939	$ 1,848
Weighted Average Number of Shares Outstanding, Basic	30,957	31,928
Weighted Average Number Diluted Shares Outstanding Adjustment	697	621
Weighted Average Number of Shares Outstanding, Diluted	31,654	32,549
Earnings (Loss) Per Share, Basic	$ 0.45	$ 0.06
Earnings (Loss) Per Share, Diluted	$ 0.44	$ 0.06

Accumulated Other Comprehensi55

Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Dec. 31, 2015
Stockholders' Equity Attributable to Parent	$ 280,511	$ 270,678
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	1,985	2,623
Net current period other comprehensive gain (loss)	(638)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	6	0
Net current period other comprehensive gain (loss)	6
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	1,991	$ 2,623
Net current period other comprehensive gain (loss)	(632)
Reclassification of accumulated other comprehensive income (loss)	$ 0

Segment Reporting (Details)

Segment Reporting (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Segment Reporting Information [Line Items]
Revenues	$ 54,362	$ 52,570
Concentration Risk, Percentage	26.90%	11.10%
Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	$ 36,459	$ 36,061
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues	170	21
Software [Domain]
Segment Reporting Information [Line Items]
Revenues	7,422	7,794
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues	7,160	5,655
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues	3,151	3,039
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues	$ 54,362	$ 52,570
Sales [Member] | Percentage of Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	67.00%	69.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	0.00%	0.00%
Sales [Member] | Percentage of Software Revenue [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	14.00%	15.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	13.00%	10.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	6.00%	6.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	100.00%	100.00%
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 7,388	$ 17,648
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	22,035	13,329
JAPAN
Segment Reporting Information [Line Items]
Revenues	2,937	1,314
CHINA
Segment Reporting Information [Line Items]
Revenues	8,825	6,088
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	1,623	3,531
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	7,047	1,738
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	871	39
GERMANY
Segment Reporting Information [Line Items]
Revenues	697	7,055
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	2,939	1,828
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 54,362	$ 52,570

Segment Reporting and Geograp57

Segment Reporting and Geographic Information Geographic Information (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Segment Reporting Information [Line Items]
Revenues	$ 54,362	$ 52,570
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	7,388	17,648
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	22,035	13,329
JAPAN
Segment Reporting Information [Line Items]
Revenues	2,937	1,314
CHINA
Segment Reporting Information [Line Items]
Revenues	8,825	6,088
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	1,623	3,531
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	871	39
GERMANY
Segment Reporting Information [Line Items]
Revenues	697	7,055
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	2,939	1,828
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 54,362	$ 52,570

Segment Reporting and Geograp58

Segment Reporting and Geographic Information Customer Reporting (Details)	3 Months Ended
	Mar. 31, 2016Rate	Mar. 31, 2015Rate
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	26.90%	11.10%
Major Customer Two [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	4.30%	10.20%

Share Repurchase Program - (Det

Share Repurchase Program - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Share Repurchase Program [Abstract]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000
Stock Repurchased and Retired During Period, Shares	370	570
Shares available for future repurchase	956
Stock Repurchased During Period, Value	$ 4,700	$ 6,786
StockRepurchasedAndRetired-AveragePricePerShare	$ 12.70	$ 11.91