Rudolph 10-K 16 Feb 17 2016 FY Annual report Financial data

Document and Entity Information

Document and Entity Information Document - USD ($)	12 Months Ended
	Dec. 31, 2016	Jan. 25, 2017	Jun. 30, 2016
Document Information [Abstract]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1,094,392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-K
Document Period End Date	Dec. 31, 2016
Document Fiscal Year Focus	2,016
Document Fiscal Period Focus	FY
Amendment Flag	false
Entity Common Stock, Shares Outstanding		31,238,967
Entity Well-known Seasoned Issuer	No
Entity Voluntary Filers	No
Entity Current Reporting Status	Yes
Entity Public Float			$ 468,614,163

Statement of Financial Position

Statement of Financial Position - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015
Assets, Current [Abstract]
Cash and Cash Equivalents, at Carrying Value	$ 37,859	$ 44,554
Marketable Securities, Current	87,872	116,924
Accounts Receivable, Net, Current	64,912	55,492
Inventory, Net	65,485	71,490
Income Taxes Receivable	2,389	0
Prepaid Expense and Other Assets	4,113	8,137
Assets, Current	262,630	296,597
Property, Plant and Equipment, Net	11,858	12,346
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	10,273	12,593
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	30,850	34,973
Other Assets, Noncurrent	593	559
Assets	338,699	379,563
Liabilities, Current [Abstract]
Accounts Payable, Current	10,245	9,094
Accrued Liabilities, Current [Abstract]
Employee-related Liabilities, Current	8,968	10,142
Accrued Royalties	493	336
Product Warranty Accrual, Current	1,788	1,894
Convertible Debt, Current	0	57,846
Taxes Payable, Current	0	1,163
Deferred Revenue	7,329	6,441
Other Liabilities, Current	7,139	12,415
Liabilities, Current	35,962	99,331
Convertible Debt, Noncurrent		57,846
Other Liabilities, Noncurrent	9,002	9,554
Liabilities	44,964	108,885
Stockholders' Equity Attributable to Parent [Abstract]
Preferred stock issued and outstanding	0	0
Common Stock, Value, Issued	31	31
Additional Paid in Capital, Common Stock	381,189	394,928
Accumulated Other Comprehensive Income (Loss), Net of Tax	(2,779)	(2,623)
Retained Earnings (Accumulated Deficit)	(84,706)	(121,658)
Stockholders' Equity Attributable to Parent	293,735	270,678
Liabilities and Equity	$ 338,699	$ 379,563

Statement of Financial Positio3

Statement of Financial Position B/S Parathetical - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015
Allowance for Doubtful Accounts Receivable, Current	$ 680	$ 713
Preferred Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001
Preferred Stock, Shares Authorized	5,000,000	5,000,000
Preferred Stock, Shares Issued	0	0
Preferred Stock, Shares Outstanding	0	0
Common Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001
Common Stock, Shares Authorized	100,000,000	100,000,000
Common Stock, Shares, Issued	31,127,000	30,949,000
Common Stock, Shares, Outstanding	31,127,000	30,949,000

Statement of Income

Statement of Income - USD ($) shares in Thousands, $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Revenues	$ 232,780	$ 221,690	$ 181,218
Cost of Revenue	109,229	102,284	85,730
Gross Profit	123,551	119,406	95,488
Operating Expenses [Abstract]
Research and Development Expense	44,964	41,233	40,576
Selling, General and Administrative Expense	38,562	43,235	53,799
Amortization of Intangible Assets	2,320	2,145	2,422
Gain (Loss) Related to Litigation Settlement	(14,643)	0	0
Operating Expenses	71,203	86,613	96,797
Operating Income (Loss)	52,348	32,793	(1,309)
Interest Income (Expense), Net	2,834	5,688	5,317
Other Nonoperating Expense (Income)	(354)	293	65
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	49,868	26,812	(6,691)
Income Tax Expense (Benefit)	12,916	8,856	(2,051)
Net Income (Loss) Attributable to Parent	$ 36,952	$ 17,956	$ (4,640)
Earnings Per Share, Basic	$ 1.19	$ 0.57	$ (0.14)
Earnings Per Share, Diluted	$ 1.16	$ 0.56	$ (0.14)
Weighted Average Number of Shares Outstanding, Basic	31,128	31,408	33,124
Weighted Average Number of Shares Outstanding, Diluted	31,790	32,166	33,124

Statement of Comprehensive Inco

Statement of Comprehensive Income - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Net Income (Loss) Attributable to Parent	$ 36,952	$ 17,956	$ (4,640)
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Other Comprehensive Income (Loss), Unrealized Holding Gain (Loss) on Securities Arising During Period, Net of Tax	(37)	(33)	183
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	(119)	62	(1,040)
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 36,796	$ 17,985	$ (5,497)

Statement of Shareholders' Equi

Statement of Shareholders' Equity - USD ($) shares in Thousands, $ in Thousands	Total	Common Stock [Member]	Additional Paid-in Capital [Member]	Accumulated Other Comprehensive Income (Loss) [Member]	Retained Earnings [Member]
Shares, Issued		32,953
Stockholders' Equity Attributable to Parent	$ 279,003	$ 33	$ 415,739	$ (1,795)	$ (134,974)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		493
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	362	$ 0	362	0	0
Stock Repurchased During Period, Shares		(1,353)
Stock Repurchased During Period, Value		$ (1)	(12,844)
Payments for Repurchase of Common Stock	(12,845)
Net Income (Loss) Attributable to Parent	(4,640)				(4,640)
Stock Issued During Period, Value, New Issues	6,242		6,242
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	63		63
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	(1,040)			(1,040)
Unrealized Gain (Loss) on Investments	183			183
Shares, Issued		32,093
Stockholders' Equity Attributable to Parent	267,328	$ 32	409,562	(2,652)	(139,614)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		530
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	330	$ 0	330	0	0
Stock Repurchased During Period, Shares		(1,674)
Stock Repurchased During Period, Value		$ (1)	(20,667)
Payments for Repurchase of Common Stock	(20,668)
Net Income (Loss) Attributable to Parent	17,956				17,956
Stock Issued During Period, Value, New Issues	7,603		7,603
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	16		16
Shares withheld for taxes for share based compensation	(1,916)
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	62			62
Unrealized Gain (Loss) on Investments	(33)			(33)
Shares, Issued		30,949
Stockholders' Equity Attributable to Parent	270,678	$ 31	394,928	(2,623)	(121,658)
Stock Issued During Period, Shares, Share-based Compensation, Net of Forfeitures		713
Stock Issued During Period, Value, Share-based Compensation, Net of Forfeitures	850	$ 0	850	0	0
Stock Repurchased During Period, Shares		(615)
Stock Repurchased During Period, Value		$ 0	(8,044)
Payments for Repurchase of Common Stock	(8,044)
Net Income (Loss) Attributable to Parent	36,952				36,952
Stock Issued During Period, Value, New Issues	4,775		4,775
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	792		792
Shares withheld for taxes for share based compensation	$ (1,587)
Redemption of stock warrants	4,248	80
Stock Issued During Period, Value, Conversion of Convertible Securities	$ (10,525)
Stock and Warrants Issued During Period, Value, Preferred Stock and Warrants	(10,525)
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent	(119)			(119)
Unrealized Gain (Loss) on Investments	(37)			(37)
Shares, Issued		31,127
Stockholders' Equity Attributable to Parent	$ 293,735	$ 31	$ 381,189	$ (2,779)	$ (84,706)

Statement of Cash Flows

Statement of Cash Flows $ in Thousands	12 Months Ended
	Dec. 31, 2016USD ($)	Dec. 31, 2015USD ($)	Dec. 31, 2014USD ($)
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Net Income (Loss) Attributable to Parent	$ 36,952	$ 17,956	$ (4,640)
Depreciation	3,677	3,951	4,686
Amortization of Financing Costs and Discounts	2,154	3,766	3,385
Amortization	2,320	2,145	2,427
Foreign Currency Transaction Loss (Gain), before tax	592	293	65
Gain (Loss) on Disposition of Property Plant Equipment	(946)	0	0
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	170	(630)	120
Share-based Compensation	4,775	7,603	6,242
Provision for doubtful accounts and inventory valuation	2,971	3,826	4,064
Increase (Decrease) in Deferred Income Taxes	5,011	3,980	(3,937)
Increase (Decrease) in Accounts Receivable	(9,279)	(4,336)	1,147
Increase (Decrease) in Income Taxes Receivable	(3,813)	2,610	1,196
Increase (Decrease) in Inventories	4,003	(12,529)	(9,393)
Increase (Decrease) in Prepaid Expense and Other Assets	2,038	953	(4,690)
Increase (Decrease) in Accounts Payable	1,169	2,254	3,758
Increase (Decrease) in Deferred Revenue	896	(1,535)	363
Increase (Decrease) in Other Operating Liabilities	(6,057)	3,486	(503)
Net Cash Provided by (Used in) Operating Activities	46,633	33,793	4,290
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities	(146,865)	(237,127)	(243,656)
Proceeds from Sale and Maturity of Marketable Securities	175,460	234,105	217,212
Payments to Acquire Property, Plant, and Equipment	(3,291)	(3,359)	(2,084)
Payments to Acquire Intangible Assets	(2,000)	(2,696)	0
Payments to Acquire Businesses, Net of Cash Acquired	1,165	0	0
Net Cash Provided by (Used in) Investing Activities	24,469	(9,077)	(28,528)
Debt Instrument, Redemption	(60,000)	0	0
Payments for Repurchase of Warrants	9,500
Proceeds from Warrant Exercises		0	0
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for (Proceeds from) Derivative Instrument, Financing Activities	(8,044)	(20,668)	(12,845)
Payments Related to Tax Withholding for Share-based Compensation	(1,587)	(1,916)	0
Proceeds from (Payments for) Other Financing Activities	(622)	(731)	(264)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	850	330	362
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	792	16	63
Net Cash Provided by (Used in) Financing Activities	(78,111)	(22,969)	(12,684)
Effect of Exchange Rate on Cash and Cash Equivalents	314	(307)	(754)
Cash and Cash Equivalents, Period Increase (Decrease)	(6,695)	1,440	(37,676)
Cash and Cash Equivalents, at Carrying Value	37,859	44,554	43,114
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid	10,980	2,013	1,067
Interest Paid	2,250	2,250	2,250
Litigation settlement received	(14,643)
Payments for Legal Settlements		0	10,613
Noncash or Part Noncash Acquisition, Intangible Assets Acquired	$ 0	$ 3,000	$ 0

Organization and Nature of Oper

Organization and Nature of Operations	12 Months Ended
	Dec. 31, 2016
Organization and Nature of Operations: [Abstract]
Nature of Operations [Text Block]	Organization and Nature of Operations: Rudolph Technologies, Inc. (the “Company”) designs, develops, manufactures and supports high-performance process control defect inspection, advanced packaging lithography, metrology and process control software systems used in semiconductor device manufacturing. The Company has branch sales and service offices in South Korea, Taiwan and Singapore and wholly-owned sales and service subsidiaries in the United States, Europe, Japan and China. The Company operates in a single segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities.

Summary of Significant Accounti

Summary of Significant Accounting Policies	12 Months Ended
	Dec. 31, 2016
Summary of Significant Accounting Policies [Abstract]
Significant Accounting Policies [Text Block]	Summary of Significant Accounting Policies: A. Consolidation: The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated. B. Revenue Recognition: Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions with arrangements with multiple elements, such as sales of products that include software and services, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies. Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized. Revenue from software license fees is recognized upon shipment or customer acknowledgment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period. Deferred revenue represents undelivered items, prepaid service contract revenue and prepaid license support and maintenance revenue. Deferred revenue is recognized in accordance with the Company’s revenue recognition policies described above. C. Estimates: The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, fair value of assets acquired and liabilities assumed in a business combination (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates. D. Cash and Cash Equivalents: Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased. E. Marketable Securities: The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities. For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial Statements. F. Allowance for Doubtful Accounts: The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience. G. Inventories: Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out basis, and include material, labor and manufacturing overhead costs. The Company reviews and sets standard costs as needed, but at a minimum on an annual basis, at current manufacturing costs in order to approximate actual costs. The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been established, it is maintained until the item to which it relates is scrapped or sold. H. Property, Plant and Equipment: Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are fifteen years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized. I. Impairment of Long-Lived Assets: Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows. J. Goodwill and Intangible Assets: Intangible assets with finite useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. The Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of its reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company also obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2016 . No impairments were noted. For additional information on the Company’s goodwill and purchased intangible assets, see Note 5 of Notes to the Consolidated Financial Statements. K. Concentration of Credit Risk: Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer. L. Warranties: The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized. M. Income Taxes: The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings. The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current as the Company has early adopted the new ASU No. 2015-17 Balance Sheet Classification of Deferred Taxes to classify all deferred tax assets and liabilities as non-current. For additional information on the Company’s income taxes, see Note 11 of Notes to the Consolidated Financial Statements. N. Translation of Foreign Currencies: The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in the United States, Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales. Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $2,742 and $2,623 as of December 31, 2016 and 2015 , respectively. O. Share-based Compensation: The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method. For additional information on the Company’s share-based compensation plans, see Note 9 of Notes to the Consolidated Financial Statements. P. Research and Development and Software Development Costs: Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2016 and 2015 , the Company did not have any capitalized software development costs. Q. Shipping and Handling Costs: Shipping and handling cost are included as a component of cost of revenues. R. Fair Value of Financial Instruments: The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. For additional information on the Company’s fair value of financial instruments, see Note 3 of Notes to the Consolidated Financial Statements. S. Derivative Instruments and Hedging Activities: The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2016 and 2015 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2016 and 2015 were as follows: December 31, 2016 2015 Notional amount $ 3,827 $ 5,423 Fair value of (liability) asset $ 312 $ (85 ) In 2016 , 2015 and 2014 , the Company recognized gains of $417 , $221 and $150 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $6,641 , $2,484 and $1,456 , for 2016 , 2015 and 2014 , respectively. T. Contingencies and Litigation The Company is subject to the possibility of losses from various contingencies, including certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See Note 8, “Commitments and Contingencies” for a detailed description. U. Reclassifications: Certain prior year amounts have been reclassified to conform to the 2016 financial statement presentation. These amounts include reclassification of a portion of deferred revenue to other non-current liabilities in the Consolidated Balance Sheets. In the first quarter of 2016, the Company adopted Accounting Standards Update (ASU) No. 2015-03, “Interest - Imputation of Interest (Subtopic 835-30), Simplifying the Presentation of Debt Issuance Costs,” which requires entities to present debt issuance costs related to a debt liability as a direct deduction from the carrying amount of that debt liability on the balance sheet as opposed to being presented as a deferred charge. Prior to adoption, the Company reported the unamortized debt issuance costs in “Other Assets” on the Consolidated Balance Sheets. As of December 31, 2015 , the change in presentation resulted in a reduction of “Other Assets” of $261 and a corresponding decrease in “Convertible Senior Notes” with no impact on the Company’s Consolidated Statements of Operations. These reclassifications were not considered material to the prior year financial statements. V. Recent Accounting Pronouncements: In January 2017, the Financial Accounting Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2017-04, “Intangibles - Goodwill and Other (Topic 350), ‘Simplifying the Test for Goodwill Impairment.” This ASU would eliminate Step 2 from the goodwill impairment test. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-04 will have on its consolidated financial position, results of operations, and cash flows. In October 2016, the FASB issued ASU No. 2016-16, “Income Tax (Topic 740): Intra-Entity Transfers of Assets Other Than Inventory.” This ASU which is part of the Board’s simplification initiative, is intended to reduce the complexity of U.S. GAAP and diversity in practice related to the tax consequences of certain types of intra-entity asset transfers, particularly those involving intellectual property. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-16 will have on its consolidated financial position, results of operations, and cash flows. In August 2016, the FASB issued ASU No. 2016-15, “Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments.” This ASU provides guidance on statement of cash flows presentation for eight specific cash flow issues where diversity in practice exists. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-15 will have on its consolidated financial position, results of operations, and cash flows. In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326),” which introduces new guidance for the accounting for credit losses on instruments within its scope. Given the breadth of that scope, the new ASU will impact both financial services and non-financial services entities. The standard is effective for fiscal years beginning after December 15, 2020. The Company is currently evaluating the effect the adoption of ASU No. 2016-13 will have on its consolidated financial position, results of operations, and cash flows. In March 2016, the FASB issued ASU No. 2016-09, “Compensation - Stock Compensation (Topic 718), Improvements to Employee Share-Based Payment Accounting.” The standard was issued as part of the Simplification Initiative which involves several aspects of the accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, and classification on the statement of cash flows. The standard is effective for annual periods beginning after December 15, 2017, and interim periods within annual periods beginning after December 15, 2016. The Company is currently evaluating the effect the adoption of ASU No. 2016-09 will have on its consolidated financial position, results of operations, and cash flows. In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows. In July 2015, the FASB issued ASU No. 2015-11, “Inventory (Topic 330), Simplifying the Measurement of Inventory.” This ASU is intended to simplify subsequent measurement of inventory. An entity should measure inventory within the scope of this ASU at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The standard is effective for annual periods and interim periods within those annual periods, beginning after December 15, 2016. The adoption of ASU 2015-11 is not expected to have a material effect on the Company's consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09, as amended, outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance as amended. In July 2015, the FASB deferred for one year the effective date of the new revenue standard. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2017 with earlier adoption permitted. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Fair Value Measurements

Fair Value Measurements	12 Months Ended
	Dec. 31, 2016
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements: The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement. The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2016 and December 31, 2015 : Fair Value Measurements Using Carrying Value Quoted Prices in Active Markets for Identical Assets (Level 1) Significant Other Observable Inputs (Level 2) Significant Unobservable Inputs (Level 3) December 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 87,029 $ — $ 87,029 $ — Corporate bonds 843 — 843 — Foreign currency forward contracts 312 — 312 — Total Assets $ 88,184 $ — $ 88,184 $ — Liabilities: Contingent consideration - acquisitions 3,251 — — 3,251 Total Liabilities $ 3,251 $ — $ — $ 3,251 December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703 The Company’s investments classified as Level 1 are based on quoted market prices that are available in active markets. The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class. Level 3 investments consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these investments. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, timing of cash flows and estimates of discount rates of 9.1% for the year ended December 31, 2016 . A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration. This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2016 : Fair Value Measurements Using Significant Unobservable Inputs (Level 3) Liabilities: Balance at December 31, 2015 $ 3,703 Additions — Total loss due to remeasurement included in selling, general and administrative expense 170 Payments (622 ) Transfer into (out of) Level 3 — Balance at December 31, 2016 $ 3,251 See Note 4 for additional discussion regarding the fair value of the Company’s marketable securities. Fair Value of Other Financial Instruments The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. The Company’s convertible senior notes matured on July 15, 2016 and the principal payment amount of $60,000 was paid. As of December 31, 2016, there were no convertible senior notes outstanding. The Company’s convertible senior notes were not publicly traded. The estimated fair value of the Company’s convertible senior notes was valued using a discounted cash flow model. The Level 3 assumptions, based on data available at the valuation date used in preparing the discounted cash flow model, included estimates of interest rates, timing and amount of cash flows and expected holding periods of the convertible senior notes. The fair value of the contingent interest associated with the convertible senior notes was valued quarterly using the present value under an expected cash flow model incorporating the probabilities of the contingent events occurring. The following table reflects information pertaining to the Company’s convertible senior notes: December 31, 2015 Net carrying value of convertible senior notes $ 57,846 Estimated fair value of convertible senior notes $ 60,630 Estimated interest rate used in discounted cash flow model 5.0 % Fair value of contingent interest $ —

Marketable Securities

Marketable Securities	12 Months Ended
	Dec. 31, 2016
Marketable Securities [Abstract]
Investments in Debt and Marketable Equity Securities (and Certain Trading Assets) Disclosure [Text Block]	Marketable Securities: The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ Equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other expense (income).” The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost of securities sold is based on the specific identification method. The Company has determined that the gross unrealized losses on its marketable securities at December 31, 2016 and 2015 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. At December 31, 2016 and 2015 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value December 31, 2016 Municipal notes and bonds $ 87,088 $ 6 $ (65 ) $ 87,029 Corporate bonds 842 1 — 843 Total marketable securities $ 87,930 $ 7 $ (65 ) $ 87,872 December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ (15 ) $ 116,089 Corporate bonds 838 — (3 ) 835 Total marketable securities $ 116,924 $ 18 $ (18 ) $ 116,924 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2016 and 2015 : December 31, 2016 December 31, 2015 Amortized Fair Amortized Fair Due within one year $ 82,498 $ 82,445 $ 113,542 $ 113,549 Due after one through five years 5,431 5,427 3,382 3,375 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 87,929 $ 87,872 $ 116,924 $ 116,924 The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2016 and 2015 . In Unrealized Loss Position In Unrealized Loss Position Fair Gross Fair Gross December 31, 2016 Municipal notes and bonds $ 64,918 $ (65 ) $ — $ — Corporate bonds — — — — Total marketable securities $ 64,918 $ (65 ) $ — $ — December 31, 2015 Municipal notes and bonds $ 52,638 $ (15 ) $ 305 $ (1 ) Corporate bonds 835 (3 ) — — Total marketable securities $ 53,473 $ (18 ) $ 305 $ (1 ) See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

Goodwill and Purchased Intangib

Goodwill and Purchased Intangible Assets	12 Months Ended
	Dec. 31, 2016
Identifiable Intangible Assets [Abstract]
Goodwill and Intangible Assets Disclosure [Text Block]	Goodwill and Purchased Intangible Assets: Goodwill There were no changes in the carrying amount of goodwill for the years ended December 31, 2016 and 2015 . Purchased Intangible Assets Purchased intangible assets as of December 31, 2016 and 2015 are as follows: Gross Carrying Amount Accumulated Amortization Net December 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 56,986 $ 8,541 Customer and distributor relationships 9,560 8,514 1,046 Trade names 4,361 3,675 686 Total identifiable intangible assets $ 79,448 $ 69,175 $ 10,273 December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593 Intangible asset amortization expense amounted to $2,320 , $2,145 and $2,422 for the years ended December 31, 2016 , 2015 and 2014 , respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense will be $1,933 for 2017 , $1,496 for 2018 , $1,496 for 2019 , $1,294 for 2020 , and $546 for 2021 . In September 2015, the Company announced that it purchased Stella Alliance, LLC, a Massachusetts-based semiconductor inspection technology intellectual property portfolio company. The acquired intellectual property was integrated into the Company’s process control group. The Company accounted for the transaction as an asset acquisition and assigned a fair value to the intellectual property of $5,696 , which is included in the asset class of developed technology. The intellectual property is being amortized on a straight line basis over its estimated useful life of fifteen years.

Balance Sheet Details

Balance Sheet Details	12 Months Ended
	Dec. 31, 2016
Balance Sheet Details [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details: Inventories Inventories are comprised of the following: December 31, 2016 2015 Materials $ 32,993 $ 39,022 Work-in-process 18,764 18,918 Finished goods 13,728 13,550 Total inventories $ 65,485 $ 71,490 The Company has established reserves of $10,545 and $8,896 at December 31, 2016 and 2015 , respectively, for slow moving and obsolete inventory. During 2016 , the Company recorded a net charge in cost of revenues of $2,953 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2016 , the Company disposed of $1,304 of inventory. During 2015 , the Company recorded a net charge in cost of revenues of $3,676 for the write-down of inventory for excess parts, for older product lines and for parts that were rendered obsolete by design and engineering advancements. In 2015 , the Company disposed of $1,780 of inventory. Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: December 31, 2016 2015 Land and building $ 2,584 $ 5,024 Machinery and equipment 23,493 21,683 Furniture and fixtures 2,699 3,414 Computer equipment and software 5,204 5,304 Leasehold improvements 8,116 7,884 42,096 43,309 Accumulated depreciation (30,238 ) (30,963 ) Total property, plant and equipment, net $ 11,858 $ 12,346 Depreciation expense amounted to $3,677 , $3,951 and $4,686 for the years ended December 31, 2016 , 2015 and 2014 , respectively. Other current liabilities Other current liabilities is comprised of the following: December 31, 2016 2015 Intangible asset acquisition - Stella Alliance $ 1,000 $ 2,000 Litigation accrual — 3,252 Contingent consideration - acquisitions 855 1,407 Warrant settlement payable 1,025 — Customer deposits 996 505 Other 3,263 5,251 Total other current liabilities $ 7,139 $ 12,415 Other non-current liabilities Other non-current liabilities is comprised of the following: December 31, 2016 2015 Unrecognized tax benefits (including interest) $ 3,386 $ 3,152 Contingent consideration - acquisitions 2,396 2,296 Deferred revenue 1,132 1,206 Other 2,088 2,900 Total non-current liabilities $ 9,002 $ 9,554

Debt Obligations

Debt Obligations	12 Months Ended
	Dec. 31, 2016
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations: On July 25, 2011 , the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 , between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provided for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012 , at an annual rate of 3.75% . Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. On July 15, 2016, the Company redeemed all of its outstanding 3.75% Convertible Senior Notes with an aggregate principle amount of $60,000 . Under the terms of the indenture, holders of the Notes were paid cash up to the aggregate principal amount of the notes and were issued shares of common stock for the remainder of the conversion, with any fractional shares paid in cash. The conversion resulted in the issuance of 540 shares of common stock of the Company to the bondholders, but resulted in no dilution to Rudolph shareholders as these shares were covered by the convertible note hedge that was entered into by the Company in 2011 at the time of issuance of the notes. The sale of the warrant gave the holder the right to purchase 4,634 shares of the Company’s common stock at a strike price of $17.00 per share. The warrant has a series of daily expiration dates beginning in October 2016 and ending in January 2017. From October 13, 2016 to December 31, 2016, the holder exercised 4,248 warrants, which settled for 80 shares of the Company’s common stock and $10,525 payable in cash, of which $9,500 was paid as of December 31, 2016, at a weighted average stock price of $19.82 per share. The remaining 386 warrants were exercised in January 2017 by the holder for 102 shares of the Company’s common stock at a weighted average stock price of $23.13 per share. The following table reflects the net carrying value of the Notes as of December 31, 2016 and 2015 : December 31, 2016 2015 Convertible senior notes $ — $ 60,000 Less: Unamortized interest discount — 1,893 Less: Unamortized debt issuance costs — 261 Net carrying value of convertible senior notes $ — $ 57,846 The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2016 , 2015 and 2014 . December 31, 2016 2015 2014 Contractual interest coupon $ 1,186 $ 2,250 $ 2,250 Amortization of interest discount 1,893 3,334 3,022 Amortization of debt issuance costs 261 432 363 Total interest cost recognized $ 3,340 $ 6,016 $ 5,635

Commitments and Contingencies

Commitments and Contingencies	12 Months Ended
	Dec. 31, 2016
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies: Intellectual Property Indemnification Obligations The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees. Warranty Reserves The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the year-end and warranty accruals are related to sales during the year. Changes in the Company’s warranty reserves are as follows: Year Ended December 31, 2016 2015 2014 Balance, beginning of the year $ 1,894 $ 1,574 $ 1,551 Accruals 2,405 2,640 2,048 Usage (2,511 ) (2,320 ) (2,025 ) Balance, end of the year $ 1,788 $ 1,894 $ 1,574 Legal Matters From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The following reflects an overview of the material activities with regard to these matters through December 31, 2016. Integrated Technology Corporation v. Rudolph Technologies, Inc., No. CV-06-2182 (PHX-ROS) : The sole remaining issue in this case was the determination and payment of remanded attorney’s fees which were initially set by the U.S. District Court for the District of Arizona (the “AZ District Court”) at $3,252 . Subsequent to the Company’s successful appeal before the U.S. Federal Court of Appeals, the matter was remanded back to the AZ District Court for a determination of a proper fee award. On October 5, 2016, the AZ District Court issued an order determining that the Company is to pay $1,289 to ITC for its attorney’s fees. The payment was made in November of 2016 and this matter is now closed. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 05-CV-01396 (JRT/FLN) : Subsequent to the ruling by the U.S. District Court for the District of Minnesota (the “MN District Court”) in the Company’s favor that Camtek’s Falcon tools continue to infringe the Company’s patent under the revised claim construction of the patent determined by the Court of Appeals, the MN District Court, on February 9, 2015, issued an Order granting the Company’s Motion for Final Judgment, reinstating the original damages and applying prejudgment interest for a total award of $14,512 . In addition, the MN District Court issued a permanent injunction against Camtek from “making, using, selling and offering to sell any of its Falcon machines and any machines that are colorable imitations thereof in the United States, intended for sale and use within the United States, until the expiration of the ‘6,298 patent,” which is projected to be in 2020. While, in March of 2015, Camtek filed an appeal with the Court of Appeals challenging the MN District Court’s ruling, the Court of Appeals denied Camtek’s appeal on February 3, 2016, affirming both the infringement ruling and the damages and interest totaling approximately $14,632 assessed against Camtek by the MN District Court, the payment of which is guaranteed by a supersedeas bond. All of Camtek’s rights to appeal the final judgment have expired. On July 22, 2016, the MN District Court ordered that the full amount of the judgment be paid to the Company. With the payment of the final judgment amount on August 11, 2016, this matter has been closed. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 11-CV-03707 (MJD/TNL) : A lawsuit against Camtek, Ltd., of Migdal Hamek, Israel, was filed by the Company in 2011 alleging infringement of its U.S. Patent No. 7,729,528 related to its proprietary continuous scan wafer inspection technology. Camtek filed an inter partes reexamination petition with the U.S. Patent and Trademark Office (the “PTO”) on January 19, 2012 asserting that certain claims of the patent are unpatentable. In the course of this proceeding the PTO issued a final determination that 35 claims of the patent were valid and 18 claims were rejected. The Company appealed the PTO’s rejection of the 18 claims to the US. Court of Appeals. On December 22, 2016, the U.S. Court of Appeals for the Federal Circuit reversed the PTO’s rejection of three of the 18 patent claims and affirmed the PTO’s rejection of nine of the 18 patent claims. The appeal of the remaining six patent claims was dismissed for procedural reasons. Thus, 38 claims are available to be asserted under the ‘528 patent in this lawsuit. During the pendency of the reexamination process, the parties have stipulated that the lawsuit be stayed. With resolution of Camtek’s petition, it is intended to lift the stay in the lawsuit in Q1 2017. Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT) : On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph’s U.S. Patent No. 6,826,298 by Camtek’s Eagle product with the U.S. District Court in Minnesota. The ‘6,298 patent is also related to our proprietary continuous scan wafer inspection technology and was the subject of Rudolph’s prior litigation against the Camtek Falcon system (the “Falcon Litigation”) in which Rudolph prevailed with a final judgment of infringement and damages of $14,600 assessed against Camtek. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota District Court and seeking to have the New Jersey District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the U.S. District Court in Minnesota ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the U.S. District Court in New Jersey was subsequently dismissed. On August 8, 2016 the Minnesota District Court issued an order regarding motions for partial summary judgment which we had filed in March of 2016 granting (i) that the ‘6,298 patent is valid and Camtek is precluded from contesting its validity at trial, and (ii) that the claim constructions adopted in the Falcon Litigation for four terms are entitled to a preclusive effect and will apply in the course of the present litigation. The Minnesota District Court also ruled that three phrases not subject to claim construction in the Falcon Litigation may be defined in the present case. This matter is currently ongoing in the U.S. District Court in Minnesota with no trial date set. Lease Agreements The Company rents space for its manufacturing and service operations and sales offices, which expire through 2020. Total rent expense for these facilities amounted to $3,296 , $3,525 and $3,716 for the years ended December 31, 2016 , 2015 and 2014 , respectively. The Company also leases certain equipment pursuant to operating leases, which expire through 2020. Rent expense related to these leases amounted to $99 , $105 and $95 for the years ended December 31, 2016 , 2015 and 2014 , respectively. Total future minimum lease payments under noncancelable operating leases as of December 31, 2016 amounted to $2,922 for 2017 , $2,621 for 2018 , $1,780 for 2019 , $1,010 for 2020 , $541 for 2021 and $772 for all periods thereafter. Royalty Agreements Under various licensing agreements, the Company is obligated to pay royalties based on net sales of products sold. There are no minimum annual royalty payments. Royalty expense amounted to $586 , $813 and $819 for the years ended December 31, 2016 , 2015 and 2014 , respectively. Open and Committed Purchase Orders The Company has open and committed purchase orders of $19,296 as of December 31, 2016 . Line of Credit The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable securities the Company has with the bank. The Company is permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit is accessed. The available line of credit as of December 31, 2016 was approximately $68,327 . The Company entered into our current credit agrement and concurrently terminated a prior credit agreement in June 2016. The credit agreement is available to the Company until such time that either party terminates the arrangement at their discretion. The Company has not utilized the line of credit to date.

Share-Based Compensation and Em

Share-Based Compensation and Employee Benefit Plans	12 Months Ended
	Dec. 31, 2016
Share-Based Compensation and Employee Benefit Plans [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation and Employee Benefit Plans: Share-Based Compensation Plans The Company’s share-based compensation plans are intended to attract and retain employees and to provide an incentive for them to assist the Company to achieve long-range performance goals and to enable them to participate in long-term growth of the Company. The Company settles stock option exercises and restricted stock unit awards with newly issued common shares. The Company established the 2009 Stock Plan (the “ 2009 Plan”) effective November 1, 2009. The 2009 Plan provides for the grant of 3,300 stock options and other stock awards to employees, directors and consultants at an exercise price equal to or greater than the fair market value of the common stock on the date of grant. Shares of common stock available for future grants of 2,558 from a previous stock plan were carried forward into the allocated balance of the 2009 Plan. Options granted under the 2009 Plan typically grade vest over a five-year period and expire ten years from the date of grant. Restricted stock units granted under the 2009 Plan typically vest over a five-year period for employees and one year for directors, however, other vesting periods are allowable under the 2009 Plan. Restricted stock units granted to employees have time based or performance based vesting. As of December 31, 2016 and 2015 , there were shares of common stock available for issuance pursuant to future grants under the 2009 Plan totaling 2,247 and 2,626 , respectively. The following table reflects share-based compensation expense by type of award: Year Ended December 31, 2016 2015 2014 Share-based compensation expense: Stock options $ 318 $ 287 $ 320 Restricted stock units 4,457 7,316 5,922 Total share-based compensation 4,775 7,603 6,242 Tax effect on share-based compensation 1,743 2,767 2,263 Net effect on net income $ 3,032 $ 4,836 $ 3,979 Effect on earnings per share: Basic $ (0.10 ) $ (0.15 ) $ (0.12 ) Diluted $ (0.10 ) $ (0.15 ) $ (0.12 ) Stock Option Activity A summary of the Company’s stock option activity with respect to the years ended December 31, 2014 , 2015 and 2016 follows: Shares Weighted Average Exercise Price Per Share Weighted Average Remaining Contractual Term (years) Aggregate Intrinsic Value Outstanding at December 31, 2013 970 $ 13.94 Granted — — Exercised (25 ) 6.86 Expired (320 ) 21.51 Forfeited (10 ) 8.30 Outstanding at December 31, 2014 615 10.39 Granted — — Exercised (25 ) 8.19 Expired (100 ) 15.56 Forfeited — — Outstanding at December 31, 2015 490 9.46 Granted — — Exercised (231 ) 7.76 Expired (44 ) 14.74 Forfeited — — Outstanding at December 31, 2016 215 $ 10.19 4.6 $ 2,823 Vested or expected to vest at December 31, 2016 213 $ 10.17 4.6 $ 2,805 Exercisable at December 31, 2016 180 $ 9.79 4.4 $ 2,434 The total intrinsic value of the stock options exercised during 2016 , 2015 and 2014 was $1,312 , $108 and $101 , respectively. The options outstanding and exercisable at December 31, 2016 were in the following exercise price ranges: Options Outstanding Options Exercisable Range of Exercise Prices Shares Weighted Average Remaining Contractual Life (years) Weighted Shares Weighted 6.80 - 6.80 74 2.6 $ 6.80 74 $ 6.80 7.86 - 7.86 8 1.4 $ 7.86 8 $ 7.86 12.22 - 12.22 133 5.9 $ 12.22 98 $ 12.22 6.80 - 12.22 215 4.6 $ 10.19 180 $ 9.79 As of December 31, 2016 , there was $229 of total unrecognized compensation cost related to stock options granted under the plans. That cost is expected to be recognized over a weighted average remaining period of 1.0 years. Non-Employee Options At December 31, 2016 and 2015 , the fair value of options granted to non-employees was $270 and $198 , respectively. Restricted Stock Unit Activity A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2014 , 2015 and 2016 follows: Number of Shares Weighted Average Nonvested at December 31, 2013 1,116 $ 9.73 Granted 631 $ 10.89 Vested (836 ) $ 9.20 Forfeited (106 ) $ 10.57 Nonvested at December 31, 2014 805 $ 11.07 Granted 967 $ 10.99 Vested (563 ) $ 10.25 Forfeited (40 ) $ 11.05 Nonvested at December 31, 2015 1,169 $ 11.40 Granted 429 $ 13.20 Vested (413 ) $ 10.80 Forfeited (49 ) $ 11.14 Nonvested at December 31, 2016 1,136 $ 12.30 As of December 31, 2016 , there was $8,697 of total unrecognized compensation cost related to restricted stock units granted under the plans. That cost is expected to be recognized over a weighted average period of 2.7 years. Non-Employee Restricted Stock Units At December 31, 2016 and 2015 , the fair value of options granted to non-employees was $0 and $43 , respectively. Employee Stock Purchase Plan The Company established an Employee Stock Purchase Plan (the “ESPP”) effective November 1, 2009 . Under the terms of the ESPP, eligible employees may have up to 15% of eligible compensation deducted from their pay and applied to the purchase of shares of Company common stock. The price the employee must pay for each share of stock will be 95% of the fair market value of Company common stock at the end of the applicable six-month purchase period. The ESPP is intended to qualify under Section 423 of the Internal Revenue Code and is a non-compensatory plan as defined by FASB Accounting Standards Codification (“ASC”) 718, Stock Compensation. No stock-based compensation expense for the ESPP was recorded for the years ended December 31, 2016 , 2015 and 2014 . Employees purchased 15 , 16 and 22 shares during the twelve months ended December 31, 2016, 2015 and 2014, respectively, under the ESPP. As of December 31, 2016 and 2015 , there were 1,962 and 1,677 shares available for issuance under the ESPP, respectively. 401(k) Savings Plan The Company has a 401(k) savings plan that allows employees to contribute up to 100% of their annual compensation to the Plan on a pre-tax or after tax basis, limited to a maximum annual amount as set periodically by the Internal Revenue Service. The plan provides a 50% match of all employee contributions up to 6 percent of the employee’s salary. Company matching contributions to the plan totaled $1,017 , $963 and $966 for the years ended December 31, 2016 , 2015 and 2014 , respectively. Profit Sharing Program The Company has a profit sharing program, wherein a percentage of pre-tax profits, at the discretion of the Board of Directors, is provided to all employees who have completed a stipulated employment period. The Company did not make contributions to this program for the years ended December 31, 2016 , 2015 and 2014 .

Other Income (Expense)

Other Income (Expense)	12 Months Ended
	Dec. 31, 2016
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other (Income) Expense: Other expense (income) is comprised of the following: Year Ended December 31, 2016 2015 2014 Foreign currency exchange losses (gains), net $ 592 $ 293 $ 65 Gain on sale of property, plant and equipment (946 ) — — Total other (income) expense $ (354 ) $ 293 $ 65

Income Taxes

Income Taxes	12 Months Ended
	Dec. 31, 2016
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes: The components of income tax expense (benefit) are as follows: Year Ended December 31, 2016 2015 2014 Current: Federal $ 6,084 $ 1,012 $ (124 ) State 983 439 198 Foreign 838 3,425 1,812 7,905 4,876 1,886 Deferred: Federal 4,765 3,881 (4,285 ) State 184 71 54 Foreign 62 28 294 5,011 3,980 (3,937 ) Total income tax expense (benefit) $ 12,916 $ 8,856 $ (2,051 ) The income (loss) before tax are comprised of the following: Year Ended December 31, 2016 2015 2014 Domestic operations $ 47,599 $ 10,596 $ (11,985 ) Foreign operations $ 2,269 $ 16,216 $ 5,294 The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2016 , 2015 and 2014 to income before provision for income taxes as follows: Year Ended December 31, 2016 2015 2014 Federal income tax provision at statutory rate $ 17,454 $ 9,384 $ (2,342 ) State taxes, net of federal effect 822 370 21 Foreign taxes net of federal effect (1,613 ) 754 561 Domestic manufacturing benefit (1,244 ) (553 ) — Change in valuation allowance for deferred tax assets — (653 ) 535 Research tax credit (692 ) (694 ) (830 ) Deferred tax true-up (1,644 ) (23 ) (36 ) Other (167 ) 271 40 Provision (benefit) for income taxes $ 12,916 $ 8,856 $ (2,051 ) Effective tax rate 26 % 33 % 31 % The income tax expense of $12,916 in 2016 , was impacted by research and development credits, section 199 domestic manufacturing deduction, the foreign tax credit and deferred tax true-ups. The deferred tax true-up of $1,705 is related to a non-cash out of period tax benefit recorded by the Company as of December 31, 2016 related to deferred tax assets misstated from prior years. The recording of the tax benefit due to the out of period adjustment in 2016 was not considered material to the prior year or current year financial statements. The income tax expense of $8,856 in 2015 , was impacted by an increase in the Company’s taxes accrued in foreign jurisdictions, partially offset by research and development credits, section 199 domestic manufacturing deduction and decrease in the Company’s valuation allowance. The income tax benefit of $2,051 in 2014 , was impacted by an increase in the Company’s valuation allowance and taxes accrued in foreign jurisdictions, partially offset by research and development tax credit. The Company’s future effective income tax rate depends on various factors, such as tax legislation, the geographic composition of our pre-tax income, the amount of our pre-tax income as business activities fluctuate, non-deductible expenses incurred in connection with acquisitions, research and development credits as a percentage of aggregate pre-tax income and the domestic manufacturing deduction. Deferred tax assets and liabilities are comprised of the following: December 31, 2016 2015 Research and development credit carryforward $ 3,784 $ 6,647 Reserves and accruals not currently deductible 2,932 3,357 Deferred revenue 2,286 1,988 Domestic net operating loss carryforwards 1,049 1,302 Foreign net operating loss and credit carryforwards 4,362 4,347 Intangibles 11,002 11,614 Tax deductible transaction costs 199 260 Share-based compensation 2,249 3,396 Inventory obsolescence reserve 4,454 4,026 Depreciation 206 484 Other 633 87 Gross deferred tax assets 33,156 37,508 Valuation allowance for deferred tax assets (1,924 ) (2,205 ) Deferred tax assets after valuation allowance 31,232 35,303 Gross deferred tax liabilities (382 ) (330 ) Net deferred tax assets $ 30,850 $ 34,973 At December 31, 2016 and 2015 , the Company had valuation allowances of $1,924 and $2,205 , respectively, on certain of the Company’s deferred tax assets to reflect the deferred tax assets at the net amount that is more likely than not to be realized. In assessing the realizability of deferred tax assets, the Company uses a more likely than not standard. If it is determined that it is more-likely-than-not that deferred tax assets will not be realized, a valuation allowance must be established against the deferred tax assets. The ultimate realization of the assets is dependent on the generation of future taxable income during the periods in which the associated temporary differences become deductible. Management considers the scheduled reversal of deferred income tax liabilities, projected future taxable income and tax planning strategies when making this assessment. In making the determination that it is more likely than not that the Company’s deferred tax assets will be realized as of December 31, 2016 , the Company relied primarily on projected future taxable income. At December 31, 2016 , the Company had federal, state and foreign net operating loss carryforwards of $747 , $172 and $1,001 , respectively. In addition, as of December 31, 2016 the Company had federal AMT carryforwards of $130 . The federal, state and foreign net operating loss carryforwards expire on various dates through December 31, 2032 , December 31, 2032 and December 31, 2025 , respectively. At December 31, 2016 , the Company had federal and state research & development credits and foreign tax credit carryforwards of $3,767 , $1,459 and $3,330 , respectively. The federal research & development credits are set to expire at various dates through December 31, 2036 . The state research & development credits are set to expire at various dates through December 21, 2024 . The foreign tax credit is set to expire at various dates through December 31, 2026 . A provision has not been made at December 31, 2016 for U.S. or additional foreign withholding taxes on approximately $6,958 of undistributed earnings of the Company’s foreign subsidiaries in Europe and Japan because it is the present intention of management to permanently reinvest these undistributed earnings. It is not practical to estimate the amount of tax that might be payable if some or all of such earnings were to be remitted. The total amount of unrecognized tax benefits were as follows: December 31, 2016 2015 2014 Unrecognized tax benefits, opening balance $ 5,236 $ 5,292 $ 5,706 Gross increases—tax positions in prior period 118 136 150 Gross decreases—tax positions in prior period (735 ) (755 ) (892 ) Gross increases—current-period tax positions 208 563 328 Lapse of statute of limitations — — — Unrecognized tax benefits, ending balance $ 4,827 $ 5,236 $ 5,292 Included in the ending balance at December 31, 2016 and 2015 are unrecognized tax benefits of $4,275 and $4,613 , respectively, which would be reflected as an adjustment to income tax expense if recognized. The year over year decrease from 2014 to 2016 is primarily due to the reversal of unrecognized tax benefits related to federal tax exposures. It is reasonably possible that certain amounts of unrecognized tax benefits may reverse in the next 12 months; however, the Company does not expect such reversals would have a significant impact on its results of operations or financial position. The Company recognizes accrued interest and penalties related to unrecognized tax benefits in income tax expense. During the years ended December 31, 2016 , 2015 and 2014 , the Company recognized approximately $76 , $71 and $60 , respectively, in interest and penalties expense associated with uncertain tax positions. As of December 31, 2016 and 2015 , the Company had accrued interest and penalties expense related to unrecognized tax benefits of $1,019 and $900 , respectively. The Company is subject to U.S. federal income tax as well as income tax in multiple state and foreign jurisdictions. The Company files U.S. federal, U.S. state and foreign tax returns. For U.S. federal purposes, the Company is generally no longer subject to tax examinations for years prior to 2012. For U.S. state tax returns, the Company is generally no longer subject to tax examinations for years prior to 2011. For foreign purposes, the Company is generally no longer subject to examination for tax periods 2011 and prior. Certain carryforward tax attributes generated in prior years remain subject to examination and adjustment. The Company believes that adequate amounts have been reserved for any adjustments that may ultimately result from any future examinations of these years. In the normal course of business, the Company is subject to tax audits in various jurisdictions, and such jurisdictions may assess additional income or other taxes against it. Although the Company believes its tax estimates are reasonable, the final determination of tax audits and any related litigation could be materially different from the Company’ s historical income tax provisions and accruals. The results of an audit or litigation could have a material adverse effect on the Company’ s results of operations or cash flows in the period or periods for which that determination is made.

Accumulated Other Comprehensive

Accumulated Other Comprehensive Loss (Notes)	12 Months Ended
	Dec. 31, 2016
Statement of Comprehensive Income [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss: Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income to our net income. The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (62 ) 33 (29 ) Reclassifications — — — Beginning Balance, December 31, 2015 $ 2,623 $ — $ 2,623 Net current period other comprehensive loss 119 37 156 Reclassifications — — — Ending balance, December 31, 2016 $ 2,742 $ 37 $ 2,779

Segment Reporting and Geographi

Segment Reporting and Geographic Information	12 Months Ended
	Dec. 31, 2016
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information: The Company is engaged in the design, development, manufacture and support of process control defect inspection and metrology, advanced packaging lithography and data analysis systems and software used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of process control defect inspection and metrology, advanced packaging lithography, and data analysis systems and software used by microelectronics device manufacturers, and therefore have one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reportable segment level. The following table lists the different sources of revenue: Year Ended December 31, 2016 2015 2014 Systems and software: Process Control $ 146,652 63 % $ 144,858 66 % $ 112,408 63 % Lithography 18,949 8 % 14,519 6 % 11,163 6 % Software 29,795 13 % 27,291 12 % 24,042 13 % Parts 25,343 11 % 24,072 11 % 20,334 11 % Services 12,041 5 % 10,950 5 % 13,271 7 % Total revenue $ 232,780 100 % $ 221,690 100 % $ 181,218 100 % The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Year Ended December 31, 2016 2015 2014 Revenues from third parties: United States $ 30,876 $ 46,778 $ 56,963 Taiwan 68,211 55,548 49,532 South Korea 15,556 14,221 16,690 Singapore 35,517 27,310 14,551 Austria 2,049 3,557 752 Japan 11,875 13,216 9,449 Germany 9,759 29,378 9,142 China 33,720 17,152 11,521 Other Europe 18,720 11,403 9,362 Other Asia 6,497 3,127 3,256 Total revenue $ 232,780 $ 221,690 $ 181,218 No individual end user customer accounted for more than 10% of the Company’s revenue in 2016 , 2015 and 2014 . The Company does not have purchase contracts with any of its customers that obligate them to continue to purchase its products. At December 31, 2016 and December 31, 2015 , one customer, Taiwan Semiconductor Manufacturing Co. Ltd., accounted for more than 10% of net accounts receivable. Substantially all of the Company’s long-lived assets are located within the United States of America.

Earnings (Loss) Per Share

Earnings (Loss) Per Share	12 Months Ended
	Dec. 31, 2016
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings (Loss) Per Share: Basic earnings (loss) per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be antidilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. For the year ended December 31, 2016 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 39 and 0 , respectively. For the year ended December 31, 2015 , the weighted average number of stock options and restricted stock units excluded from the computation of diluted earnings per share were 15 and 190 , respectively. For the year ended December 31, 2014 , all outstanding restricted stock units of 805 and stock options of 615 were excluded from the computation of diluted loss per shares because the effect in the period would be antidilutive. For the years ended December 31, 2016 and 2015 , diluted earnings per share-weighted average shares outstanding included the effect resulting from assumed conversion of the Notes and warrants. For the year ended December 31, 2014 , diluted earnings per share-weighted average shares outstanding do not include any effect resulting from assumed conversion of the Notes as their impact would be anti-dilutive. See Note 7 for additional discussion regarding the Notes. The computations of basic and diluted income per share for the years ended December 31, 2016 , 2015 , and 2014 are as follows: December 31, 2016 2015 2014 Numerator: Net income (loss) $ 36,952 $ 17,956 $ (4,640 ) Denominator: Basic earnings per share - weighted average shares outstanding 31,128 31,408 33,124 Effect of potential diluted securities: Employee stock options and restricted stock units - dilutive shares 467 692 — Convertible senior notes - dilutive shares 103 66 — Warrants - dilutive shares 92 — — Diluted earnings per share - weighted average shares outstanding 31,790 32,166 33,124 Earnings per share: Basic $ 1.19 $ 0.57 $ (0.14 ) Diluted $ 1.16 $ 0.56 $ (0.14 )

Share Repurchase Program

Share Repurchase Program	12 Months Ended
	Dec. 31, 2016
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Shares Repurchase Authorization: In January 2015, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the twelve months ended December 31, 2016 , we repurchased 615 shares of common stock. At December 31, 2016 , there were 711 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired. The following table summarizes the Company’s stock repurchases for December 31, 2016 , 2015 and 2014 : Year Ended December 31, 2016 2015 2014 Shares of common stock repurchased 615 1,674 1,353 Cost of stock repurchased $8,044 $20,668 $12,845 Average price paid per share $13.07 $12.35 $9.49

Quarterly Consolidated Financia

Quarterly Consolidated Financial Data (unaudited)	12 Months Ended
	Dec. 31, 2016
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Quarterly Financial Information [Text Block]	Quarterly Consolidated Financial Data (unaudited): The following tables present certain unaudited consolidated quarterly financial information for the years ended December 31, 2016 and December 31, 2015 . In the opinion of the Company’s management, this quarterly information has been prepared on the same basis as the consolidated financial statements and includes all adjustments (consisting only of normal recurring adjustments) necessary to present fairly the information for the periods presented. The results of operations for any quarter are not necessarily indicative of results for the full year or for any future period. Year-over-year quarterly comparisons of the Company’s results of operations may not be meaningful, as the sequential quarterly comparisons set forth below tend to reflect the cyclical activity of the semiconductor industry as a whole. Other quarterly fluctuations in expenses are related directly to sales activity and volume and may also reflect the timing of operating expenses incurred throughout the year and the purchase accounting effects of business combinations. Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 54,362 $ 62,701 $ 61,641 $ 54,076 $ 232,780 Gross profit 29,045 34,193 32,449 27,864 123,551 Income before income taxes 19,561 10,593 12,970 6,744 49,868 Net income 13,939 7,601 9,286 6,126 36,952 Income per share: Basic $ 0.45 $ 0.25 $ 0.30 $ 0.20 $ 1.19 Diluted $ 0.44 $ 0.24 $ 0.30 $ 0.19 $ 1.16 Weighted average number of shares outstanding: Basic 30,957 30,779 30,988 31,085 31,128 Diluted 31,654 31,754 31,459 32,018 31,790 Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 52,570 $ 59,466 $ 58,597 $ 51,057 $ 221,690 Gross profit 28,966 31,884 31,912 26,644 119,406 Income (loss) before income taxes 3,097 8,656 10,880 4,179 26,812 Net income 1,848 6,027 7,198 2,883 17,956 Income per share: Basic $ 0.06 $ 0.19 $ 0.23 $ 0.09 $ 0.57 Diluted $ 0.06 $ 0.19 $ 0.22 $ 0.09 $ 0.56 Weighted average number of shares outstanding: Basic 31,928 31,663 31,526 31,016 31,408 Diluted 32,549 32,339 32,204 32,075 32,166

Summary of Significant Accoun24

Summary of Significant Accounting Policies (Policies)	12 Months Ended
	Dec. 31, 2016
Summary of Significant Accounting Policies [Abstract]
Commitments and Contingencies, Policy [Policy Text Block]	T. Contingencies and Litigation The Company is subject to the possibility of losses from various contingencies, including certain legal proceedings, lawsuits and other claims. The Company accrues for a loss contingency when it concludes that the likelihood of a loss is probable and the amount of the loss can be reasonably estimated. If the Company concludes that loss contingencies that could be material to any one of its financial statements are not probable, but are reasonably possible, or are probable, but cannot be estimated, then the Company discloses the nature of the loss contingencies, together with an estimate of the range of possible loss or a statement that such loss is not reasonably estimable. The Company expenses as incurred the costs of defending legal claims against the Company. The Company does not recognize gain contingencies until realized. See Note 8, “Commitments and Contingencies” for a detailed description.
Consolidation, Policy [Policy Text Block]	A. Consolidation: The consolidated financial statements reflect the accounts of the Company and its wholly-owned subsidiaries. All intercompany accounts and transactions have been eliminated.
Revenue Recognition, Policy [Policy Text Block]	B. Revenue Recognition: Revenue is recognized provided that there is persuasive evidence of an arrangement, delivery has occurred or services have been rendered, the sales price is fixed or determinable, and collection of the related receivable is reasonably assured. Revenue recognition generally results at the following points: (1) for all transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for all products that have been demonstrated to meet product specifications prior to shipment; the portion of revenue associated with certain installation-related tasks is deferred, and that revenue is recognized upon completion of the installation-related tasks; (2) for products that have not been demonstrated to meet product specifications prior to shipment, revenue is recognized at customer technical acceptance; (3) for transactions with arrangements with multiple elements, such as sales of products that include software and services, the revenue relating to the undelivered elements is deferred using the relative selling price method utilizing vendor-specific objective evidence (“VSOE”) or estimated sales prices (“ESP”) until delivery of the deferred elements. Third-party evidence is not typically used to determine selling prices as to limited availability of reliable competitor products’ selling prices. The ESP is established considering multiple factors including, but not limited to, gross margin objectives, internal costs and competitor pricing strategies. Revenues from parts sales are recognized at the time of shipment. Revenue from training and service contracts is recognized ratably over the training period and contract period. A provision for the estimated cost of fulfilling warranty obligations is recorded at the time the related revenue is recognized. Revenue from software license fees is recognized upon shipment or customer acknowledgment if collection of the resulting receivable is probable, the fee is fixed or determinable, and VSOE exists to allocate a portion of the total fee to any undelivered elements of the arrangement. License support and maintenance revenue is recognized ratably over the contract period. Deferred revenue represents undelivered items, prepaid service contract revenue and prepaid license support and maintenance revenue. Deferred revenue is recognized in accordance with the Company’s revenue recognition policies described above.
Use of Estimates, Policy [Policy Text Block]	C. Estimates: The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reporting period. Significant estimates made by management include allowance for doubtful accounts, inventory obsolescence, fair value of assets acquired and liabilities assumed in a business combination (including contingent consideration), recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments, including forfeitures and liabilities for tax uncertainties. Actual results could differ from those estimates.
Cash and Cash Equivalents, Policy [Policy Text Block]	D. Cash and Cash Equivalents: Cash and cash equivalents include cash and highly liquid debt instruments with original maturities of three months or less when purchased.
Marketable Securities, Policy [Policy Text Block]	E. Marketable Securities: The Company determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses, interest and dividends on available-for-sale securities are included in interest income and other, net. Available-for-sale securities are classified as current assets regardless of their maturity date if they are available for use in current operations. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. When a decline in fair value is determined to be other-than-temporary, unrealized losses on available-for-sale securities are charged against earnings. The specific identification method is used to determine the gains and losses on marketable securities. For additional information on the Company’s marketable securities, see Note 4 of Notes to the Consolidated Financial Statements.
Trade and Other Accounts Receivable, Policy [Policy Text Block]	F. Allowance for Doubtful Accounts: The Company evaluates the collectability of accounts receivable based on a combination of factors. In the cases where the Company is aware of circumstances that may impair a specific customer’s ability to meet its financial obligation, the Company records a specific allowance against amounts due, and thereby reduces the net recognized receivable to the amount management reasonably believes will be collected. For all other customers, the Company recognizes allowances for doubtful accounts based on the length of time the receivables are outstanding, industry and geographic concentrations, the current business environment and historical experience.
Inventory, Policy [Policy Text Block]	G. Inventories: Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out basis, and include material, labor and manufacturing overhead costs. The Company reviews and sets standard costs as needed, but at a minimum on an annual basis, at current manufacturing costs in order to approximate actual costs. The Company evaluates inventories for excess quantities and obsolescence. The Company establishes inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about historical and future demand for the Company’s products and market conditions. In addition, inventories are evaluated for potential obsolescence due to the effect of known and anticipated engineering design changes. Once a reserve has been established, it is maintained until the item to which it relates is scrapped or sold.
Property, Plant and Equipment, Policy [Policy Text Block]	H. Property, Plant and Equipment: Property, plant and equipment are stated at cost. Depreciation of property, plant and equipment is computed using the straight-line method over the estimated useful lives of the assets which are fifteen years for buildings, four to seven years for machinery and equipment, seven years for furniture and fixtures, and three years for computer equipment. Leasehold improvements are amortized using the straight-line method over the lesser of the lease term or the estimated useful life of the related asset. Repairs and maintenance costs are expensed as incurred and major renewals and betterments are capitalized.
Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]	I. Impairment of Long-Lived Assets: Long-lived assets, such as property, plant, and equipment, and identifiable acquired intangible assets with definite useful lives, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. Recoverability of assets to be held and used is measured by a comparison of the carrying amount of an asset to estimated undiscounted future cash flows expected to be generated by the asset. If the carrying amount of an asset exceeds its estimated future cash flows, an impairment charge is recognized by the amount by which the carrying amount of the asset exceeds the fair value of the asset, which is generally based on discounted cash flows.
Goodwill and Intangible Assets, Policy [Policy Text Block]	J. Goodwill and Intangible Assets: Intangible assets with finite useful lives are amortized using the straight-line method over their estimated useful lives. Goodwill and intangible assets with indefinite useful lives are not amortized but are tested for impairment at least annually and when there are indications of impairment. Goodwill impairment is deemed to exist if the net book value of a reporting unit exceeds its estimated fair value. The Company has the option to first assess qualitative factors to determine whether the existence of events or circumstances leads to a determination that it is more likely than not that the fair value of a reporting unit is less than its carrying amount. If, the Company elects this option and after assessing the totality of events or circumstances, the Company determines that it is not likely that the fair value of its reporting unit is less than its carrying amount, then performing the two-step impairment test is unnecessary. The Company has not elected this option to date. The Company estimates the fair value of its reporting unit using the market value of its common stock at October 31 multiplied by the number of outstanding common shares (market capitalization) and an implied control premium as it were to be acquired by a single stockholder. The Company also obtains information on completed sales of similar companies in the related industry to estimate the implied control premium for the Company. If the results of the initial market capitalization test produce results which are below the reporting unit carrying value, the Company may also perform a discounted cash flow test. The Company tested for goodwill impairment on October 31, 2016 . No impairments were noted. For additional information on the Company’s goodwill and purchased intangible assets, see Note 5 of Notes to the Consolidated Financial Statements.
Concentration Risk, Credit Risk, Policy [Policy Text Block]	K. Concentration of Credit Risk: Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. The Company performs ongoing credit evaluations of its customers and generally does not require collateral for sales on credit. The Company maintains allowances for potential credit losses. The Company maintains cash and cash equivalents and marketable securities with higher credit quality issuers and monitors the amount of credit exposure to any one issuer.
Standard Product Warranty, Policy [Policy Text Block]	L. Warranties: The Company generally provides a warranty on its products for a period of twelve to fifteen months against defects in material and workmanship. The Company provides for the estimated cost of product warranties at the time revenue is recognized.
Income Tax, Policy [Policy Text Block]	M. Income Taxes: The Company accounts for income taxes using the asset and liability approach for deferred taxes which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been recognized in the Company’s consolidated financial statements or tax returns. A valuation allowance is recorded to reduce a deferred tax asset to that portion which more likely than not will be realized. The Company does not provide for federal income taxes on the undistributed earnings of its foreign operations as it is the Company’s intention to permanently re-invest undistributed earnings. The impact of an uncertain income tax position is recognized as the largest amount that is more-likely-than-not to be sustained upon audit by the relevant taxing authority and includes consideration of interest and penalties. An uncertain income tax position will not be recognized if it has less than a 50% likelihood of being sustained. The liability for unrecognized tax benefits is classified as non-current as the Company has early adopted the new ASU No. 2015-17 Balance Sheet Classification of Deferred Taxes to classify all deferred tax assets and liabilities as non-current. For additional information on the Company’s income taxes, see Note 11 of Notes to the Consolidated Financial Statements.
Foreign Currency Transactions and Translations Policy [Policy Text Block]	N. Translation of Foreign Currencies: The Company has branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in the United States, Europe, Japan and China. Its international subsidiaries and branches operate primarily using local functional currencies. A substantial portion of the Company’s international systems sales are denominated in U.S. dollars with the exception of Japan and, as a result, it has relatively little exposure to foreign currency exchange risk with respect to these sales. Assets and liabilities are translated at exchange rates in effect at the balance sheet date, and income and expense accounts and cash flow items are translated at average monthly exchange rates during the period. Net exchange gains or losses resulting from the translation of foreign financial statements and the effect of exchange rates on intercompany transactions of a long-term investment nature are recorded directly as a separate component of stockholders’ equity under the caption, “Accumulated other comprehensive loss.” Any foreign currency gains or losses related to transactions are included in operating results. The Company had accumulated exchange losses resulting from the translation of foreign operation financial statements of $2,742 and $2,623 as of December 31, 2016 and 2015 , respectively.
Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]	O. Share-based Compensation: The estimation of stock awards that will ultimately vest requires significant judgment. The Company considers many factors when estimating expected forfeitures, including types of awards, employee class, and historical experience. Actual results, and future changes in estimates, may differ substantially from the Company’s current estimates. Compensation expense for all share-based payments includes an estimate for forfeitures and is recognized over the expected term of the share-based awards using the straight-line method. For additional information on the Company’s share-based compensation plans, see Note 9 of Notes to the Consolidated Financial Statements.
Research, Development, and Computer Software, Policy [Policy Text Block]	P. Research and Development and Software Development Costs: Expenditures for research and development are expensed as incurred. Certain software product development costs incurred after technological feasibility has been established are capitalized and amortized, commencing upon the general release of the software product to the Company’s customers, over the economic life of the software product. Annual amortization of capitalized costs is computed using the greater of: (i) the ratio of current gross revenues for the software product over the total of current and anticipated future gross revenues for the software product or (ii) the straight-line basis, typically over seven years. Software product development costs incurred prior to the product reaching technological feasibility are expensed as incurred and included in research and development costs. At December 31, 2016 and 2015 , the Company did not have any capitalized software development costs.
Shipping and Handling Cost, Policy [Policy Text Block]	Q. Shipping and Handling Costs: Shipping and handling cost are included as a component of cost of revenues.
Fair Value of Financial Instruments, Policy [Policy Text Block]	R. Fair Value of Financial Instruments: The carrying amounts of the Company’s financial instruments, including cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities, approximate fair value due to their short maturities. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods. For additional information on the Company’s fair value of financial instruments, see Note 3 of Notes to the Consolidated Financial Statements.
Derivative Instruments and Hedging Activities Disclosure [Text Block]	S. Derivative Instruments and Hedging Activities: The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At December 31, 2016 and 2015 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and therefore, the change in fair value is recorded in selling, general and administrative expenses in the Consolidated Statements of Operations. The Company records its forward contracts at fair value in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2016 and 2015 were as follows: December 31, 2016 2015 Notional amount $ 3,827 $ 5,423 Fair value of (liability) asset $ 312 $ (85 ) In 2016 , 2015 and 2014 , the Company recognized gains of $417 , $221 and $150 with respect to forward contracts that matured, respectively. The aggregate notional amount of matured contracts was $6,641 , $2,484 and $1,456 , for 2016 , 2015 and 2014 , respectively.
Reclassification, Policy [Policy Text Block]	U. Reclassifications: Certain prior year amounts have been reclassified to conform to the 2016 financial statement presentation. These amounts include reclassification of a portion of deferred revenue to other non-current liabilities in the Consolidated Balance Sheets. In the first quarter of 2016, the Company adopted Accounting Standards Update (ASU) No. 2015-03, “Interest - Imputation of Interest (Subtopic 835-30), Simplifying the Presentation of Debt Issuance Costs,” which requires entities to present debt issuance costs related to a debt liability as a direct deduction from the carrying amount of that debt liability on the balance sheet as opposed to being presented as a deferred charge. Prior to adoption, the Company reported the unamortized debt issuance costs in “Other Assets” on the Consolidated Balance Sheets. As of December 31, 2015 , the change in presentation resulted in a reduction of “Other Assets” of $261 and a corresponding decrease in “Convertible Senior Notes” with no impact on the Company’s Consolidated Statements of Operations. These reclassifications were not considered material to the prior year financial statements.
New Accounting Pronouncements and Changes in Accounting Principles [Text Block]	V. Recent Accounting Pronouncements: In January 2017, the Financial Accounting Standards Board (FASB) issued Accounting Standards Update (ASU) No. 2017-04, “Intangibles - Goodwill and Other (Topic 350), ‘Simplifying the Test for Goodwill Impairment.” This ASU would eliminate Step 2 from the goodwill impairment test. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-04 will have on its consolidated financial position, results of operations, and cash flows. In October 2016, the FASB issued ASU No. 2016-16, “Income Tax (Topic 740): Intra-Entity Transfers of Assets Other Than Inventory.” This ASU which is part of the Board’s simplification initiative, is intended to reduce the complexity of U.S. GAAP and diversity in practice related to the tax consequences of certain types of intra-entity asset transfers, particularly those involving intellectual property. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-16 will have on its consolidated financial position, results of operations, and cash flows. In August 2016, the FASB issued ASU No. 2016-15, “Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments.” This ASU provides guidance on statement of cash flows presentation for eight specific cash flow issues where diversity in practice exists. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-15 will have on its consolidated financial position, results of operations, and cash flows. In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326),” which introduces new guidance for the accounting for credit losses on instruments within its scope. Given the breadth of that scope, the new ASU will impact both financial services and non-financial services entities. The standard is effective for fiscal years beginning after December 15, 2020. The Company is currently evaluating the effect the adoption of ASU No. 2016-13 will have on its consolidated financial position, results of operations, and cash flows. In March 2016, the FASB issued ASU No. 2016-09, “Compensation - Stock Compensation (Topic 718), Improvements to Employee Share-Based Payment Accounting.” The standard was issued as part of the Simplification Initiative which involves several aspects of the accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, and classification on the statement of cash flows. The standard is effective for annual periods beginning after December 15, 2017, and interim periods within annual periods beginning after December 15, 2016. The Company is currently evaluating the effect the adoption of ASU No. 2016-09 will have on its consolidated financial position, results of operations, and cash flows. In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows. In July 2015, the FASB issued ASU No. 2015-11, “Inventory (Topic 330), Simplifying the Measurement of Inventory.” This ASU is intended to simplify subsequent measurement of inventory. An entity should measure inventory within the scope of this ASU at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The standard is effective for annual periods and interim periods within those annual periods, beginning after December 15, 2016. The adoption of ASU 2015-11 is not expected to have a material effect on the Company's consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09, as amended, outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance as amended. In July 2015, the FASB deferred for one year the effective date of the new revenue standard. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2017 with earlier adoption permitted. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows.

Summary of Significant Accoun25

Summary of Significant Accounting Policies (Tables)	12 Months Ended
	Dec. 31, 2016
Accounting Policies [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of December 31, 2016 and 2015 were as follows: December 31, 2016 2015 Notional amount $ 3,827 $ 5,423 Fair value of (liability) asset $ 312 $ (85 )

Fair Value Measurements (Tables

Fair Value Measurements (Tables)	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at December 31, 2016 and December 31, 2015 : Fair Value Measurements Using Carrying Value Quoted Prices in Active Markets for Identical Assets (Level 1) Significant Other Observable Inputs (Level 2) Significant Unobservable Inputs (Level 3) December 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 87,029 $ — $ 87,029 $ — Corporate bonds 843 — 843 — Foreign currency forward contracts 312 — 312 — Total Assets $ 88,184 $ — $ 88,184 $ — Liabilities: Contingent consideration - acquisitions 3,251 — — 3,251 Total Liabilities $ 3,251 $ — $ — $ 3,251 December 31, 2015 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 116,089 $ — $ 116,089 $ — Corporate bonds 835 — 835 — Total Assets $ 116,924 $ — $ 116,924 $ — Liabilities: Foreign currency forward contracts $ 85 $ — $ 85 $ — Contingent consideration - acquisitions 3,703 — — 3,703 Total Liabilities $ 3,788 $ — $ 85 $ 3,703
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the year ended December 31, 2016 : Fair Value Measurements Using Significant Unobservable Inputs (Level 3) Liabilities: Balance at December 31, 2015 $ 3,703 Additions — Total loss due to remeasurement included in selling, general and administrative expense 170 Payments (622 ) Transfer into (out of) Level 3 — Balance at December 31, 2016 $ 3,251
Fair value convertible senior notes [Table Text Block]		The following table reflects information pertaining to the Company’s convertible senior notes: December 31, 2015 Net carrying value of convertible senior notes $ 57,846 Estimated fair value of convertible senior notes $ 60,630 Estimated interest rate used in discounted cash flow model 5.0 % Fair value of contingent interest $ —

Marketable Securities (Tables)

Marketable Securities (Tables)	12 Months Ended
	Dec. 31, 2016
Marketable Securities [Abstract]
Available-for-sale Securities [Table Text Block]	At December 31, 2016 and 2015 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value December 31, 2016 Municipal notes and bonds $ 87,088 $ 6 $ (65 ) $ 87,029 Corporate bonds 842 1 — 843 Total marketable securities $ 87,930 $ 7 $ (65 ) $ 87,872 December 31, 2015 Municipal notes and bonds $ 116,086 $ 18 $ (15 ) $ 116,089 Corporate bonds 838 — (3 ) 835 Total marketable securities $ 116,924 $ 18 $ (18 ) $ 116,924
Investments Classified by Contractual Maturity Date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Consolidated Balance Sheet classification, is as follows at December 31, 2016 and 2015 : December 31, 2016 December 31, 2015 Amortized Fair Amortized Fair Due within one year $ 82,498 $ 82,445 $ 113,542 $ 113,549 Due after one through five years 5,431 5,427 3,382 3,375 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 87,929 $ 87,872 $ 116,924 $ 116,924
Schedule of Unrealized Loss on Investments [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at December 31, 2016 and 2015 . In Unrealized Loss Position In Unrealized Loss Position Fair Gross Fair Gross December 31, 2016 Municipal notes and bonds $ 64,918 $ (65 ) $ — $ — Corporate bonds — — — — Total marketable securities $ 64,918 $ (65 ) $ — $ — December 31, 2015 Municipal notes and bonds $ 52,638 $ (15 ) $ 305 $ (1 ) Corporate bonds 835 (3 ) — — Total marketable securities $ 53,473 $ (18 ) $ 305 $ (1 )

Goodwill and Purchased Intang28

Goodwill and Purchased Intangible Assets (Tables)	12 Months Ended
	Dec. 31, 2016
Intangible Assets [Abstract]
Schedule of Finite-Lived Intangible Assets [Table Text Block]	Purchased intangible assets as of December 31, 2016 and 2015 are as follows: Gross Carrying Amount Accumulated Amortization Net December 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 56,986 $ 8,541 Customer and distributor relationships 9,560 8,514 1,046 Trade names 4,361 3,675 686 Total identifiable intangible assets $ 79,448 $ 69,175 $ 10,273 December 31, 2015 Finite-lived intangibles: Developed technology $ 65,527 $ 55,110 $ 10,417 Customer and distributor relationships 9,560 8,170 1,390 Trade names 4,361 3,575 786 Total identifiable intangible assets $ 79,448 $ 66,855 $ 12,593

Balance Sheet Details (Tables)

Balance Sheet Details (Tables)	12 Months Ended
	Dec. 31, 2016
Balance Sheet Details [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories Inventories are comprised of the following: December 31, 2016 2015 Materials $ 32,993 $ 39,022 Work-in-process 18,764 18,918 Finished goods 13,728 13,550 Total inventories $ 65,485 $ 71,490
Property, Plant and Equipment [Table Text Block]	Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: December 31, 2016 2015 Land and building $ 2,584 $ 5,024 Machinery and equipment 23,493 21,683 Furniture and fixtures 2,699 3,414 Computer equipment and software 5,204 5,304 Leasehold improvements 8,116 7,884 42,096 43,309 Accumulated depreciation (30,238 ) (30,963 ) Total property, plant and equipment, net $ 11,858 $ 12,346
Other Current liabilities [Table Text Block]	Other current liabilities Other current liabilities is comprised of the following: December 31, 2016 2015 Intangible asset acquisition - Stella Alliance $ 1,000 $ 2,000 Litigation accrual — 3,252 Contingent consideration - acquisitions 855 1,407 Warrant settlement payable 1,025 — Customer deposits 996 505 Other 3,263 5,251 Total other current liabilities $ 7,139 $ 12,415
Other Non-current liabilities [Table Text Block]	Other non-current liabilities Other non-current liabilities is comprised of the following: December 31, 2016 2015 Unrecognized tax benefits (including interest) $ 3,386 $ 3,152 Contingent consideration - acquisitions 2,396 2,296 Deferred revenue 1,132 1,206 Other 2,088 2,900 Total non-current liabilities $ 9,002 $ 9,554

Debt Obligations (Tables)

Debt Obligations (Tables)	12 Months Ended
	Dec. 31, 2016
Debt Obligations [Abstract]
Schedule of Long-term Debt Instruments [Table Text Block]	The following table reflects the net carrying value of the Notes as of December 31, 2016 and 2015 : December 31, 2016 2015 Convertible senior notes $ — $ 60,000 Less: Unamortized interest discount — 1,893 Less: Unamortized debt issuance costs — 261 Net carrying value of convertible senior notes $ — $ 57,846
Interest cost recognized on the convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the years ended December 31, 2016 , 2015 and 2014 . December 31, 2016 2015 2014 Contractual interest coupon $ 1,186 $ 2,250 $ 2,250 Amortization of interest discount 1,893 3,334 3,022 Amortization of debt issuance costs 261 432 363 Total interest cost recognized $ 3,340 $ 6,016 $ 5,635

Commitments and Contingencies (

Commitments and Contingencies (Tables)	12 Months Ended
	Dec. 31, 2016
Commitments and Contingencies [Abstract]
Schedule of Product Warranty Liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows: Year Ended December 31, 2016 2015 2014 Balance, beginning of the year $ 1,894 $ 1,574 $ 1,551 Accruals 2,405 2,640 2,048 Usage (2,511 ) (2,320 ) (2,025 ) Balance, end of the year $ 1,788 $ 1,894 $ 1,574

Share-Based Compensation and 32

Share-Based Compensation and Employee Benefit Plans (Tables)	12 Months Ended
	Dec. 31, 2016
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Schedule of Share-based Compensation, Restricted Stock Units Award Activity [Table Text Block]	A summary of the Company’s restricted stock unit activity with respect to the years ended December 31, 2014 , 2015 and 2016 follows: Number of Shares Weighted Average Nonvested at December 31, 2013 1,116 $ 9.73 Granted 631 $ 10.89 Vested (836 ) $ 9.20 Forfeited (106 ) $ 10.57 Nonvested at December 31, 2014 805 $ 11.07 Granted 967 $ 10.99 Vested (563 ) $ 10.25 Forfeited (40 ) $ 11.05 Nonvested at December 31, 2015 1,169 $ 11.40 Granted 429 $ 13.20 Vested (413 ) $ 10.80 Forfeited (49 ) $ 11.14 Nonvested at December 31, 2016 1,136 $ 12.30
Disclosure of Share-based Compensation Arrangements by Share-based Payment Award [Table Text Block]	The following table reflects share-based compensation expense by type of award: Year Ended December 31, 2016 2015 2014 Share-based compensation expense: Stock options $ 318 $ 287 $ 320 Restricted stock units 4,457 7,316 5,922 Total share-based compensation 4,775 7,603 6,242 Tax effect on share-based compensation 1,743 2,767 2,263 Net effect on net income $ 3,032 $ 4,836 $ 3,979 Effect on earnings per share: Basic $ (0.10 ) $ (0.15 ) $ (0.12 ) Diluted $ (0.10 ) $ (0.15 ) $ (0.12 )
Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]	A summary of the Company’s stock option activity with respect to the years ended December 31, 2014 , 2015 and 2016 follows: Shares Weighted Average Exercise Price Per Share Weighted Average Remaining Contractual Term (years) Aggregate Intrinsic Value Outstanding at December 31, 2013 970 $ 13.94 Granted — — Exercised (25 ) 6.86 Expired (320 ) 21.51 Forfeited (10 ) 8.30 Outstanding at December 31, 2014 615 10.39 Granted — — Exercised (25 ) 8.19 Expired (100 ) 15.56 Forfeited — — Outstanding at December 31, 2015 490 9.46 Granted — — Exercised (231 ) 7.76 Expired (44 ) 14.74 Forfeited — — Outstanding at December 31, 2016 215 $ 10.19 4.6 $ 2,823 Vested or expected to vest at December 31, 2016 213 $ 10.17 4.6 $ 2,805 Exercisable at December 31, 2016 180 $ 9.79 4.4 $ 2,434
Schedule of Share-based Compensation, Shares Authorized under Stock Option Plans, by Exercise Price Range [Table Text Block]	The options outstanding and exercisable at December 31, 2016 were in the following exercise price ranges: Options Outstanding Options Exercisable Range of Exercise Prices Shares Weighted Average Remaining Contractual Life (years) Weighted Shares Weighted 6.80 - 6.80 74 2.6 $ 6.80 74 $ 6.80 7.86 - 7.86 8 1.4 $ 7.86 8 $ 7.86 12.22 - 12.22 133 5.9 $ 12.22 98 $ 12.22 6.80 - 12.22 215 4.6 $ 10.19 180 $ 9.79

Other Income (Expense) (Tables)

Other Income (Expense) (Tables)	12 Months Ended
	Dec. 31, 2016
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	Other expense (income) is comprised of the following: Year Ended December 31, 2016 2015 2014 Foreign currency exchange losses (gains), net $ 592 $ 293 $ 65 Gain on sale of property, plant and equipment (946 ) — — Total other (income) expense $ (354 ) $ 293 $ 65

Income Taxes (Tables)

Income Taxes (Tables)	12 Months Ended
	Dec. 31, 2016
Income Taxes [Abstract]
Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]	The components of income tax expense (benefit) are as follows: Year Ended December 31, 2016 2015 2014 Current: Federal $ 6,084 $ 1,012 $ (124 ) State 983 439 198 Foreign 838 3,425 1,812 7,905 4,876 1,886 Deferred: Federal 4,765 3,881 (4,285 ) State 184 71 54 Foreign 62 28 294 5,011 3,980 (3,937 ) Total income tax expense (benefit) $ 12,916 $ 8,856 $ (2,051 )
Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]	The income (loss) before tax are comprised of the following: Year Ended December 31, 2016 2015 2014 Domestic operations $ 47,599 $ 10,596 $ (11,985 ) Foreign operations $ 2,269 $ 16,216 $ 5,294
Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]	The provision for income taxes differs from the amount of income tax determined by applying the applicable U.S. federal income tax rate of 35% for the years ended December 31, 2016 , 2015 and 2014 to income before provision for income taxes as follows: Year Ended December 31, 2016 2015 2014 Federal income tax provision at statutory rate $ 17,454 $ 9,384 $ (2,342 ) State taxes, net of federal effect 822 370 21 Foreign taxes net of federal effect (1,613 ) 754 561 Domestic manufacturing benefit (1,244 ) (553 ) — Change in valuation allowance for deferred tax assets — (653 ) 535 Research tax credit (692 ) (694 ) (830 ) Deferred tax true-up (1,644 ) (23 ) (36 ) Other (167 ) 271 40 Provision (benefit) for income taxes $ 12,916 $ 8,856 $ (2,051 ) Effective tax rate 26 % 33 % 31 %
Schedule of Deferred Tax Assets and Liabilities [Table Text Block]	Deferred tax assets and liabilities are comprised of the following: December 31, 2016 2015 Research and development credit carryforward $ 3,784 $ 6,647 Reserves and accruals not currently deductible 2,932 3,357 Deferred revenue 2,286 1,988 Domestic net operating loss carryforwards 1,049 1,302 Foreign net operating loss and credit carryforwards 4,362 4,347 Intangibles 11,002 11,614 Tax deductible transaction costs 199 260 Share-based compensation 2,249 3,396 Inventory obsolescence reserve 4,454 4,026 Depreciation 206 484 Other 633 87 Gross deferred tax assets 33,156 37,508 Valuation allowance for deferred tax assets (1,924 ) (2,205 ) Deferred tax assets after valuation allowance 31,232 35,303 Gross deferred tax liabilities (382 ) (330 ) Net deferred tax assets $ 30,850 $ 34,973
Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]	The total amount of unrecognized tax benefits were as follows: December 31, 2016 2015 2014 Unrecognized tax benefits, opening balance $ 5,236 $ 5,292 $ 5,706 Gross increases—tax positions in prior period 118 136 150 Gross decreases—tax positions in prior period (735 ) (755 ) (892 ) Gross increases—current-period tax positions 208 563 328 Lapse of statute of limitations — — — Unrecognized tax benefits, ending balance $ 4,827 $ 5,236 $ 5,292

Accumulated Other Comprehensi35

Accumulated Other Comprehensive Loss (Tables)	12 Months Ended
	Dec. 31, 2016
Statement of Comprehensive Income [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized losses on available-for-sale investments Accumulated other comprehensive loss Beginning Balance, December 31, 2014 $ 2,685 $ (33 ) $ 2,652 Net current period other comprehensive loss (62 ) 33 (29 ) Reclassifications — — — Beginning Balance, December 31, 2015 $ 2,623 $ — $ 2,623 Net current period other comprehensive loss 119 37 156 Reclassifications — — — Ending balance, December 31, 2016 $ 2,742 $ 37 $ 2,779

Segment Reporting and Geograp36

Segment Reporting and Geographic Information (Tables)	12 Months Ended
	Dec. 31, 2016
Segment Reporting and Geographic Information [Abstract]
Revenue from External Customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue: Year Ended December 31, 2016 2015 2014 Systems and software: Process Control $ 146,652 63 % $ 144,858 66 % $ 112,408 63 % Lithography 18,949 8 % 14,519 6 % 11,163 6 % Software 29,795 13 % 27,291 12 % 24,042 13 % Parts 25,343 11 % 24,072 11 % 20,334 11 % Services 12,041 5 % 10,950 5 % 13,271 7 % Total revenue $ 232,780 100 % $ 221,690 100 % $ 181,218 100 %
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Year Ended December 31, 2016 2015 2014 Revenues from third parties: United States $ 30,876 $ 46,778 $ 56,963 Taiwan 68,211 55,548 49,532 South Korea 15,556 14,221 16,690 Singapore 35,517 27,310 14,551 Austria 2,049 3,557 752 Japan 11,875 13,216 9,449 Germany 9,759 29,378 9,142 China 33,720 17,152 11,521 Other Europe 18,720 11,403 9,362 Other Asia 6,497 3,127 3,256 Total revenue $ 232,780 $ 221,690 $ 181,218

Earnings (Loss) Per Share (Tabl

Earnings (Loss) Per Share (Tables)	12 Months Ended
	Dec. 31, 2016
Earnings (Loss) Per Share [Abstract]
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The computations of basic and diluted income per share for the years ended December 31, 2016 , 2015 , and 2014 are as follows: December 31, 2016 2015 2014 Numerator: Net income (loss) $ 36,952 $ 17,956 $ (4,640 ) Denominator: Basic earnings per share - weighted average shares outstanding 31,128 31,408 33,124 Effect of potential diluted securities: Employee stock options and restricted stock units - dilutive shares 467 692 — Convertible senior notes - dilutive shares 103 66 — Warrants - dilutive shares 92 — — Diluted earnings per share - weighted average shares outstanding 31,790 32,166 33,124 Earnings per share: Basic $ 1.19 $ 0.57 $ (0.14 ) Diluted $ 1.16 $ 0.56 $ (0.14 )

Share Repurchase Program Share

Share Repurchase Program Share Repurchase Program (Tables)	12 Months Ended
	Dec. 31, 2016
Schedule of common stock repurchased [Abstract]
Share repurchase authorization [Table Text Block]	The following table summarizes the Company’s stock repurchases for December 31, 2016 , 2015 and 2014 : Year Ended December 31, 2016 2015 2014 Shares of common stock repurchased 615 1,674 1,353 Cost of stock repurchased $8,044 $20,668 $12,845 Average price paid per share $13.07 $12.35 $9.49

Quarterly Consolidated Financ39

Quarterly Consolidated Financial Data (unaudited) (Tables)	12 Months Ended
	Dec. 31, 2016
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Schedule of Quarterly Financial Information [Table Text Block]	Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 54,362 $ 62,701 $ 61,641 $ 54,076 $ 232,780 Gross profit 29,045 34,193 32,449 27,864 123,551 Income before income taxes 19,561 10,593 12,970 6,744 49,868 Net income 13,939 7,601 9,286 6,126 36,952 Income per share: Basic $ 0.45 $ 0.25 $ 0.30 $ 0.20 $ 1.19 Diluted $ 0.44 $ 0.24 $ 0.30 $ 0.19 $ 1.16 Weighted average number of shares outstanding: Basic 30,957 30,779 30,988 31,085 31,128 Diluted 31,654 31,754 31,459 32,018 31,790 Quarters Ended March 31, June 30, September 30, December 31, Total Revenues $ 52,570 $ 59,466 $ 58,597 $ 51,057 $ 221,690 Gross profit 28,966 31,884 31,912 26,644 119,406 Income (loss) before income taxes 3,097 8,656 10,880 4,179 26,812 Net income 1,848 6,027 7,198 2,883 17,956 Income per share: Basic $ 0.06 $ 0.19 $ 0.23 $ 0.09 $ 0.57 Diluted $ 0.06 $ 0.19 $ 0.22 $ 0.09 $ 0.56 Weighted average number of shares outstanding: Basic 31,928 31,663 31,526 31,016 31,408 Diluted 32,549 32,339 32,204 32,075 32,166

Summary of Significant Accoun40

Summary of Significant Accounting Policies Translation of Foreign Currency (Details) - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015
Intercompany Foreign Currency Balance [Line Items]
Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax	$ 2,742	$ 2,623

Summary of Significant Accoun41

Summary of Significant Accounting Policies Fair Value of Financial Instrument (Details) $ in Thousands	Dec. 31, 2015USD ($)
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Convertible Debt, Noncurrent	$ 57,846
Convertible Debt, Fair Value Disclosures	$ 60,630

Summary of Significant Accoun42

Summary of Significant Accounting Policies Derivative Instruments and Hedging Activities (Details) $ in Thousands	12 Months Ended
	Dec. 31, 2016USD ($)	Dec. 31, 2015USD ($)	Dec. 31, 2014USD ($)
Derivative [Line Items]
Derivative, Notional Amount	$ 3,827	$ 5,423
Derivative Asset, Fair Value, Gross Asset	312
Derivative Instruments, Loss (Gain) Recognized in Income, Net	$ (417)	221	$ 150
Derivative Liability, Fair Value, Gross Asset		$ (85)
Number of Foreign Currency Derivatives Held	6,641	2,484	1,456

Fair Value Measurements (Detail

Fair Value Measurements (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Jul. 15, 2016	Dec. 31, 2014	Jul. 25, 2011
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Document Period End Date	Dec. 31, 2016
Debt Instrument, Face Amount	$ 0	$ 60,000	$ 60,000		$ 60,000
Convertible Debt, Current	0	57,846
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	87,029	116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value	843
Foreign Currency Contracts, Liability, Fair Value Disclosure	312	835
Assets, Fair Value Disclosure	88,184	116,924
Business Acquisition Contingent Consideration at Fair Value, Liabilities	3,251	3,703
Liabilities, Fair Value Disclosure	3,251	$ 3,788
Fair Value Input Discount Rate 3		9.10%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value		$ 3,251		$ 3,703
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases		0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Gain (Loss) Included in Earnings		170
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Asset, Settlements		(622)
Fair Value, Measurement with Unobservable Inputs Reconciliation, Liability, Transfers out of Level 3		0
Convertible Debt, Noncurrent		57,846
Convertible Debt, Fair Value Disclosures		$ 60,630
Fair Value Inputs Discount Rate 2		5.00%
Long-term Debt, Contingent Payment of Principal or Interest		0
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	$ 0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Acquisition Contingent Consideration at Fair Value, Liabilities	0	0
Liabilities, Fair Value Disclosure	0	0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	87,029	116,089
Financial Instruments, Owned, Corporate Equities, at Fair Value	843
Foreign Currency Contracts, Liability, Fair Value Disclosure	312	835
Assets, Fair Value Disclosure	88,184	116,924
Business Acquisition Contingent Consideration at Fair Value, Liabilities	0	0
Liabilities, Fair Value Disclosure	0	85
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0	0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0
Foreign Currency Contracts, Liability, Fair Value Disclosure	0	0
Assets, Fair Value Disclosure	0	0
Business Acquisition Contingent Consideration at Fair Value, Liabilities	3,251	3,703
Liabilities, Fair Value Disclosure	$ 3,251	$ 3,703

Marketable Securities (Details)

Marketable Securities (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		$ 87,929	$ 116,924
Available-for-sale Securities, Fair Value Disclosure		87,872	116,924
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Amortized Cost Basis		82,498	113,542
Available-for-sale Securities, Debt Maturities, Next Twelve Months, Fair Value		82,445	113,549
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis		5,431	3,382
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value		5,427	3,375
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Amortized Cost Basis		0	0
Available-for-sale Securities, Debt Maturities, Year Six Through Ten, Fair Value		0	0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis		0	0
Held-to-maturity Securities, Debt Maturities, after Ten Years, Fair Value		0	0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		87,088	116,086
Available-for-sale Securities, Accumulated Gross Unrealized Gain, before Tax		6	18
Available-for-sale Securities, Accumulated Gross Unrealized Loss, before Tax		(65)	(15)
Available-for-sale Securities, Fair Value Disclosure		87,029	116,089
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	$ 64,918	52,638
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	(65)	(15)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	305
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	0	(1)
Corporate Bond Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	842	838
Available-for-sale Securities, Gross Unrealized Gain	1	0
Available-for-sale Securities, Gross Unrealized Loss	0	(3)
Available-for-sale Securities, Fair Value Disclosure	843	835
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis		87,930	116,924
Available-for-sale Securities, Accumulated Gross Unrealized Gain, before Tax		7	18
Available-for-sale Securities, Accumulated Gross Unrealized Loss, before Tax		(65)	(18)
Available-for-sale Securities, Fair Value Disclosure		87,872	$ 116,924
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	64,918	53,473
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Accumulated Loss	(65)	(18)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0	305
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Accumulated Loss	$ 0	$ (1)

Goodwill and Purchased Intang45

Goodwill and Purchased Intangible Assets (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Sep. 25, 2015
Finite-Lived Intangible Assets [Line Items]
Document Period End Date	Dec. 31, 2016
Goodwill	$ 22,495	$ 22,495
Finite-Lived Intangible Assets, Gross	79,448	79,448
Finite-Lived Intangible Assets, Accumulated Amortization	69,175	66,855
Intangible Assets, Net (Excluding Goodwill)	10,273	12,593
Amortization of Intangible Assets	2,320	2,145	$ 2,422
Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months	1,933
Finite-Lived Intangible Assets, Amortization Expense, Year Two	1,496
Finite-Lived Intangible Assets, Amortization Expense, Year Three	1,496
Finite-Lived Intangible Assets, Amortization Expense, Year Four	1,294
Finite-Lived Intangible Assets, Amortization Expense, Year Five	546
Developed Technology Rights [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	65,527	65,527		$ 5,696
Finite-Lived Intangible Assets, Accumulated Amortization	56,986	55,110
Intangible Assets, Net (Excluding Goodwill)	8,541	10,417
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	9,560	9,560
Finite-Lived Intangible Assets, Accumulated Amortization	8,514	8,170
Intangible Assets, Net (Excluding Goodwill)	1,046	1,390
Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	4,361	4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,675	3,575
Intangible Assets, Net (Excluding Goodwill)	$ 686	$ 786

Balance Sheet Details Inventory

Balance Sheet Details Inventory (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015
Balance Sheet Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 32,993	$ 39,022
Inventory, Work in Process, Net of Reserves	18,764	18,918
Inventory, Finished Goods, Net of Reserves	13,728	13,550
Inventory, Net	65,485	71,490
Inventory Valuation Reserves	10,545	8,896
Inventory Write-down	2,953	3,676
Inventory Disposal	$ 1,304	$ 1,780

Balance Sheet Details Property

Balance Sheet Details Property Plant & Equipment (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Balance Sheet Details [Abstract]
Buildings and Land Gross	$ 2,584	$ 5,024
Machinery and Equipment, Gross	23,493	21,683
Furniture and Fixtures, Gross	2,699	3,414
Computer Equipments And Software Gross	5,204	5,304
Leasehold Improvements, Gross	8,116	7,884
Property, Plant and Equipment, Gross	42,096	43,309
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	(30,238)	(30,963)
Property, Plant and Equipment, Net	11,858	12,346
Depreciation	$ 3,677	$ 3,951	$ 4,686

Balance Sheet Details Other Cur

Balance Sheet Details Other Current Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2016	Oct. 05, 2016	Dec. 31, 2015
Balance Sheet Details [Abstract]
Intangible assets current liabilities	$ 1,000		$ 2,000
Estimated Litigation Liability, Current	0	$ 1,289	3,252
Business Combination, Contingent Consideration, Liability, Current	855		1,407
Payable for repurchase of warrant	1,025		0
Customer Deposits, Current	996		505
Other Current Liabilities Subtotal	3,263		5,251
Other Liabilities, Current	$ 7,139		$ 12,415

Balance Sheet Details Other Non

Balance Sheet Details Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015
Balance Sheet Details [Abstract]
Unrecognized Tax Benefits	$ 3,386	$ 3,152
Business Acquisition Contingent Consideration at Fair Value Long Term	2,396	2,296
Deferred Revenue, Noncurrent	1,132	1,206
Other Liabilities	2,088	2,900
Other Liabilities, Noncurrent	$ 9,002	$ 9,554

Debt Obligations (Details)

Debt Obligations (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	1 Months Ended	12 Months Ended
	Jan. 31, 2017	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Jul. 15, 2016	Jul. 25, 2011	Jul. 30, 2008
Debt Instrument [Line Items]
Investment Warrants, Exercise Price	$ 23,130	$ 19,820
Document Period End Date		Dec. 31, 2016
Debt Instrument, Face Amount		$ 0	$ 60,000		$ 60,000	$ 60,000
Class of Warrant or Right, Number of Securities Called by Warrants or Rights		386					4,634
Debt Instrument, Interest Rate, Stated Percentage						3.75%
Debt Instrument, Unamortized Discount		$ 0	1,893
Debt Instrument, Unamortized Discount (Premium) and Debt Issuance Costs, Net		0	261
Convertible Debt, Current		0	57,846
Convertible Debt, Noncurrent			57,846
Contractual Interest Coupon		1,186	2,250	$ 2,250
Amortization of Debt Discount (Premium)		1,893	3,334	3,022
Amortization of Financing Costs		261	432	363
Interest Expense, Debt		$ 3,340	$ 6,016	$ 5,635
Warrant Strike Price		$ 17
Redemption of stock warrants	102	4,248
Stock Issued During Period, Value, Conversion of Convertible Securities		$ 10,525
Payments for Repurchase of Warrants		$ 9,500
Common Stock [Member]
Debt Instrument [Line Items]
Redemption of stock warrants		80

Commitments and Contingencies51

Commitments and Contingencies (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Oct. 05, 2016	Jul. 15, 2016	Dec. 31, 2013	Jul. 25, 2011
Loss Contingencies [Line Items]
Standard Product Warranty Accrual			$ 1,894	$ 1,574			$ 1,551
Product Warranty Accrual, Warranties Issued		$ 2,405	2,640	2,048
Product Warranty Expense		(2,511)	(2,320)	(2,025)
Product Warranty Accrual, Payments		1,788	1,894	1,574
Loss Contingency, Damages Awarded, Value	$ 14,600	14,512
Payments for Legal Settlements			0	10,613
Estimated Litigation Liability	3,252	3,252
Estimated Litigation Liability, Current	0	0	3,252		$ 1,289
Loss Contingency Damages Awarded Value 2		14,632
Operating Leases, Rent Expense		$ 3,296	3,525	3,716
Document Period End Date		Dec. 31, 2016
Operatingleases,equipment		$ 99	105	95
Operating Leases, Future Minimum Payments Due	2,922	2,922
Operating Leases, Future Minimum Payments, Due in Two Years	2,621	2,621
Operating Leases, Future Minimum Payments, Due in Three Years	1,780	1,780
Operating Leases, Future Minimum Payments, Due in Four Years	1,010	1,010
Operating Leases, Future Minimum Payments, Due in Five Years	541	541
Operating Leases, Future Minimum Payments, Due Thereafter	772	772
Royalty Expense		586	813	$ 819
Purchase Commitment, Remaining Minimum Amount Committed	19,296	19,296
Debt Instrument, Face Amount	$ 0	$ 0	$ 60,000			$ 60,000		$ 60,000

Commitments and Contingencies L

Commitments and Contingencies Line of Credit (Details) $ in Thousands	Oct. 29, 2015USD ($)
Line of Credit [Abstract]
Line of Credit, Current	$ 68,327

Preferred Share Purchase Rights

Preferred Share Purchase Rights (Details) - $ / shares	Dec. 31, 2016	Dec. 31, 2015
Preferred Share Purchase Rights [Abstract]
Preferred Stock, Par or Stated Value Per Share	$ 0.001	$ 0.001

Share-Based Compensation and 54

Share-Based Compensation and Employee Benefit Plans (Details) - USD ($) $ / shares in Units, $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013	Nov. 01, 2009
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized	$ 8,697
Employee Stock Purchase Plan available	1,962,000	1,677,000
Shares purchased under ESPP	15,000	16,000	22,000
Non-employee restricted stock units	$ 0	$ 43
Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition	2 years 8 months 20 days
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,136,000	1,169,000	805,000	1,116,000
Optionsgrantednonemployees	$ 270	$ 198
total unrecognized compensation cost - option	229
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value	$ 1,312	$ 108	$ 101
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	215,000	490,000	615,000	970,000
Share based Compensation shares for issuance	2,247,000	2,626,000
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized					3,300,000
Stock Issued During Period, Value, New Issues	$ 4,775	$ 7,603	$ 6,242
Tax effect on share based compensation	1,743	2,767	2,263
Net effect on net income share based compensation	$ 3,032	$ 4,836	$ 3,979
effect on earnings per share basic	$ (0.10)	$ (0.15)	$ (0.12)
effect on earnings per share diluted	$ (0.10)	(0.15)	(0.12)
Common Stock, Capital Shares Reserved for Future Issuance	2,558,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 10.19	$ 9.46	$ 10.39	$ 13.94
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Net of Forfeitures	0	0	0
Share-based Compensation Arrangements by Share-based Payment Award, Options, Grants in Period, Weighted Average Exercise Price	$ 0	$ 0	$ 0
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period	231,000	25,000	25,000
Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price	$ 7.76	$ 8.19	$ 6.86
Share-based Compensation Arrangement by Share-based Payment Award, Options, Expirations in Period	44,000	100,000	320,000
ShareBasedCompensationOptionExpired	$ 14.74	$ 15.56	$ 21.51
Stock Issued During Period, Shares, Share-based Compensation, Forfeited	0	0	10,000
ShareBasedCompensationOptionsForfeited	$ 0	$ 0	$ 8.30
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	4 years 7 months 20 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value	$ 2,823
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number	213,000
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Outstanding Options, Weighted Average Exercise Price	$ 10.17
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Remaining Contractual Term	4 years 7 months 15 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value	$ 2,805
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	180,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 9.79
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term	4 years 4 months 18 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value	$ 2,434
Wght average period for compensation cost recognized	11 months 13 days
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 12.30	$ 11.40	$ 11.07	$ 9.73
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	429,000	967,000	631,000
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 13.20	$ 10.99	$ 10.89
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	413,000	563,000	836,000
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 10.80	$ 10.25	$ 9.20
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	49,000	40,000	106,000
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 11.14	$ 11.05	$ 10.57
Contribution plan Employee Percentage	100.00%
Defined Contribution Plan, Maximum Annual Contributions Per Employee, Percent	50.00%
Defined Contribution Plan, Cost Recognized	$ 1,017	$ 963	$ 966
Employee Stock Option [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Stock Issued During Period, Value, New Issues	318	287	320
Restricted Stock Units (RSUs) [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Stock Issued During Period, Value, New Issues	$ 4,457	$ 7,316	$ 5,922
Range Five [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	$ 6.80
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 12.22
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	215,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 10.19
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	4 years 7 months 20 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	180,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 9.79
Range Three [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	12.22
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 12.22
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	133,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 12.22
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	5 years 11 months 12 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	98,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 12.22
Range Two [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	7.86
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 7.86
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	8,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 7.86
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	1 year 4 months 18 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	8,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 7.86
Range One [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Lower Range Limit	6.80
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Upper Range Limit	$ 6.80
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number	74,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price	$ 6.80
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	2 years 7 months 20 days
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range, Number of Exercisable Options	74,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price	$ 6.80

Other Income (Expense) (Details

Other Income (Expense) (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Other Income (Expense) [Abstract]
Foreign Currency Transaction Loss (Gain), before tax	$ 592	$ 293	$ 65
Gain (Loss) on Disposition of Property Plant Equipment, Excluding Oil and Gas Property and Timber Property	(946)	0	0
Other Nonoperating Expense (Income)	$ (354)	$ 293	$ 65

Income Taxes (Details)

Income Taxes (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Income Tax Examination [Line Items]
Deferred Tax Assets, Tax Credit Carryforwards, Research	$ 3,784	$ 6,647
Document Period End Date	Dec. 31, 2016
Current Federal Tax Expense (Benefit)	$ 6,084	1,012	$ (124)
Current State and Local Tax Expense (Benefit)	983	439	198
Current Foreign Tax Expense (Benefit)	838	3,425	1,812
Current Income Tax Expense (Benefit)	7,905	4,876	1,886
Deferred Federal Income Tax Expense (Benefit)	4,765	3,881	(4,285)
Deferred State and Local Income Tax Expense (Benefit)	184	71	54
Deferred Foreign Income Tax Expense (Benefit)	62	28	294
Deferred Income Tax Expense (Benefit)	5,011	3,980	(3,937)
Income Tax Expense (Benefit)	12,916	8,856	(2,051)
Deferred Tax True up	1,705
Income (Loss) from Continuing Operations before Income Taxes, Domestic	47,599	10,596	(11,985)
Income (Loss) from Continuing Operations before Income Taxes, Foreign	2,269	16,216	5,294
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	17,454	9,384	(2,342)
Income Tax Reconciliation, State and Local Income Taxes	822	370	21
Income Tax Reconciliation, Foreign Income Tax Rate Differential	(1,613)	754	561
Income Tax Reconciliation, Deductions, Qualified Production Activities	(1,244)	(553)	0
Income Tax Reconciliation, Change in Deferred Tax Assets Valuation Allowance	0	(653)	535
Income Tax Reconciliation, Tax Credits, Research	(692)	(694)	(830)
Income Tax Reconciliation, Prior Year Income Taxes	(1,644)	(23)	(36)
Income Tax Reconciliation, Other Adjustments	$ (167)	$ 271	$ 40
Income Tax Reconciliation, Income Tax Expense (Benefit), at Federal Statutory Income Tax Rate	26.00%	33.00%	31.00%
Deferred Tax Assets, Valuation Allowance	$ (1,924)	$ (2,205)
Operating loss carryforward federal	747
Operating Loss Carryforward State	172
Operating loss carryforward foreign	1,001
Federal AMT Carryforward	130
federal RD credit carryforward	3,767
State RD Credit Carryforward	1,459
foreign RD credit carryforward	3,330
Undistributed Earnings of Foreign Subsidiaries	6,958
Unrecognixed tax benefit balance	4,827	5,236	$ 5,292	$ 5,706
Unrecognized Tax Benefits, Increases Resulting from Prior Period Tax Positions	118	136	150
Unrecognized Tax Benefits, Decreases Resulting from Prior Period Tax Positions	(735)	(755)	(892)
Unrecognized Tax Benefits, Increases Resulting from Current Period Tax Positions	208	563	328
Unrecognized Tax Benefits, Reductions Resulting from Lapse of Applicable Statute of Limitations	0	0	0
Unrecognized Tax Benefit adjustment to income tax expense	4,275	4,613
Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense	76	71	$ 60
Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued	1,019	900
Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Reserves	2,932	3,357
Deferred Tax Assets, Deferred Income	2,286	1,988
Deferred Tax Assets, Operating Loss Carryforwards, Domestic	1,049	1,302
Deferred Tax Assets, Operating Loss Carryforwards, Foreign	4,362	4,347
Deferred Tax Liabilities, Intangible Assets	11,002	11,614
Deferred Tax Assets transaction costs	199	260
Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost	2,249	3,396
Deferred Tax Assets, Inventory	4,454	4,026
Deferred Tax Asset Depreciation	206	484
Deferred Tax Assets, Other	633	87
Deferred Tax Assets, Gross	33,156	37,508
Deferred Tax Assets, Net of Valuation Allowance	31,232	35,303
Deferred Tax Liabilities, Gross	(382)	(330)
Deferred Tax Assets, Net	$ 30,850	$ 34,973

Restructuring and asset impairm

Restructuring and asset impairment charges (Details)	12 Months Ended
	Dec. 31, 2016
Restructuring Cost and Reserve [Line Items]
Document Period End Date	Dec. 31, 2016

Accumulated Other Comprehensi58

Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Stockholders' Equity Attributable to Parent	$ (293,735)	$ (270,678)	$ (267,328)	$ (279,003)
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	2,742	2,623	2,685
Net current period other comprehensive gain (loss)	119	(62)
Reclassification of accumulated other comprehensive income (loss)	0	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	37	0	(33)
Net current period other comprehensive gain (loss)	37	33
Reclassification of accumulated other comprehensive income (loss)	0	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	2,779	2,623	$ 2,652	$ 1,795
Net current period other comprehensive gain (loss)	156	(29)
Reclassification of accumulated other comprehensive income (loss)	$ 0	$ 0

Segment Reporting and Geograp59

Segment Reporting and Geographic Information Geographic Region (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 30,876	$ 46,778	$ 56,963
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	68,211	55,548	49,532
Korea (South), Won
Segment Reporting Information [Line Items]
Revenues	15,556	14,221	16,690
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	35,517	27,310	14,551
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	2,049	3,557	752
JAPAN
Segment Reporting Information [Line Items]
Revenues	11,875	13,216	9,449
GERMANY
Segment Reporting Information [Line Items]
Revenues	9,759	29,378	9,142
CHINA
Segment Reporting Information [Line Items]
Revenues	33,720	17,152	11,521
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	18,720	11,403	9,362
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	6,497	3,127	3,256
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 232,780	$ 221,690	$ 181,218

Segment Reporting and Geograp60

Segment Reporting and Geographic Information Segment Reporting (Details) - USD ($) $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2016	Sep. 30, 2016	Jun. 30, 2016	Mar. 31, 2016	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Segment Reporting Information [Line Items]
Revenues	$ 54,076	$ 61,641	$ 62,701	$ 54,362	$ 51,057	$ 58,597	$ 59,466	$ 52,570	$ 232,780	$ 221,690	$ 181,218
Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Revenues									146,652	144,858	112,408
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues									18,949	14,519	11,163
Software [Domain]
Segment Reporting Information [Line Items]
Revenues									29,795	27,291	24,042
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues									25,343	24,072	20,334
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues									12,041	10,950	13,271
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues									$ 232,780	$ 221,690	$ 181,218
Sales [Member] | Percentage of Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									63.00%	66.00%	63.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									8.00%	6.00%	6.00%
Sales [Member] | Percentage of Software Revenue [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									13.00%	12.00%	13.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									11.00%	11.00%	11.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									5.00%	5.00%	7.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage									100.00%	100.00%	100.00%

Earnings (Loss) Per Share (Deta

Earnings (Loss) Per Share (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2016	Sep. 30, 2016	Jun. 30, 2016	Mar. 31, 2016	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Earnings (Loss) Per Share [Abstract]
Options Excluded from calculation									39		15
Net Income (Loss) Attributable to Parent	$ 6,126	$ 9,286	$ 7,601	$ 13,939	$ 2,883	$ 7,198	$ 6,027	$ 1,848	$ 36,952	$ 17,956	$ (4,640)
Weighted Average Number of Shares Outstanding, Basic	31,085	30,988	30,779	30,957	31,016	31,526	31,663	31,928	31,128	31,408	33,124
Weighted Average Number Diluted Shares Outstanding Adjustment									467	692	0
Dilutive Securities, Effect on Basic Earnings Per Share, Dilutive Convertible Securities									$ 103	$ 66	$ 0
Warrant Dilutive Shares									$ 92	$ 0	$ 0
Weighted Average Number of Shares Outstanding, Diluted	32,018	31,459	31,754	31,654	32,075	32,204	32,339	32,549	31,790	32,166	33,124
Earnings Per Share, Basic	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 1.19	$ 0.57	$ (0.14)
Earnings Per Share, Diluted	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 1.16	$ 0.56	$ (0.14)
Restricted Stock Units, outstanding					805					805
stock options, outstanding					615					615
Restricted Stock Units Excluded from Calculation									0		190

Share Repurchase Program (Detai

Share Repurchase Program (Details) - USD ($) $ / shares in Units, shares in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Accelerated Share Repurchases [Line Items]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased		3,000
Stock Repurchased and Retired During Period, Shares	615	1,674	1,353
Stock Repurchased and Retired During Period, Value	$ 8,044	$ 20,668	$ 12,845,000
Stock repurchase and retired average price per share	$ 13.07	$ 12.35	$ 9.49
Document Period End Date	Dec. 31, 2016
Shares available for future repurchase	711

Quarterly Consolidated Financ63

Quarterly Consolidated Financial Data (unaudited) (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2016	Sep. 30, 2016	Jun. 30, 2016	Mar. 31, 2016	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Quarterly Consolidated Financial Data (unaudited) [Abstract]
Revenues	$ 54,076	$ 61,641	$ 62,701	$ 54,362	$ 51,057	$ 58,597	$ 59,466	$ 52,570	$ 232,780	$ 221,690	$ 181,218
Gross Profit	27,864	32,449	34,193	29,045	26,644	31,912	31,884	28,966	123,551	119,406	95,488
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Noncontrolling Interest	6,744	12,970	10,593	19,561	4,179	10,880	8,656	3,097	49,868	26,812	(6,691)
Net Income (Loss) Attributable to Parent	$ 6,126	$ 9,286	$ 7,601	$ 13,939	$ 2,883	$ 7,198	$ 6,027	$ 1,848	$ 36,952	$ 17,956	$ (4,640)
Earnings Per Share, Basic	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 1.19	$ 0.57	$ (0.14)
Earnings Per Share, Diluted	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 0	$ 1.16	$ 0.56	$ (0.14)
Weighted Average Number of Shares Outstanding, Basic	31,085	30,988	30,779	30,957	31,016	31,526	31,663	31,928	31,128	31,408	33,124
Weighted Average Number of Shares Outstanding, Diluted	32,018	31,459	31,754	31,654	32,075	32,204	32,339	32,549	31,790	32,166	33,124