Rudolph 10-Q 3 Aug 17 2017 Q2 Quarterly report Financial data

Document and Entity Information

Document and Entity Information Document - shares	6 Months Ended
	Jun. 30, 2017	Jul. 18, 2017
Entity Information [Line Items]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	1,094,392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Jun. 30, 2017
Document Fiscal Year Focus	2,017
Document Fiscal Period Focus	Q2
Amendment Flag	false
Entity Common Stock, Shares Outstanding		31,540,042

Statements of Financial Positio

Statements of Financial Position Consolidated Balance Sheet - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Cash and Cash Equivalents, at Carrying Value	$ 57,705	$ 37,859
Available-for-sale Securities, Debt Securities, Current	91,244	87,872
Accounts Receivable, Net, Current	70,564	64,912
Inventory, Net	66,835	65,485
Income Taxes Receivable	0	2,389
Prepaid Expense and Other Assets, Current	4,634	4,113
Assets, Current	290,982	262,630
Property, Plant and Equipment, Net	15,091	11,858
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	9,263	10,273
Other Assets, Noncurrent	32,755	31,443
Assets	370,586	338,699
Liabilities, Current [Abstract]
Accounts Payable and Accrued Liabilities, Current	25,928	21,494
Accrued Income Taxes, Current	1,168	0
Deferred Revenue, Current	11,230	7,329
Other Liabilities, Current	7,722	7,139
Liabilities, Current	46,048	35,962
Other Liabilities, Noncurrent	11,247	9,002
Liabilities	57,295	44,964
Commitments and Contingencies
Stockholders' Equity Attributable to Parent [Abstract]
Common Stock, Value, Issued	32	31
Additional Paid in Capital, Common Stock	383,174	381,189
Accumulated Other Comprehensive Income (Loss), Net of Tax	(1,481)	(2,779)
Retained Earnings (Accumulated Deficit)	(68,434)	(84,706)
Stockholders' Equity Attributable to Parent	313,291	293,735
Liabilities and Equity	$ 370,586	$ 338,699

Statements of Financial Positi3

Statements of Financial Position B/S Parenthetical - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Allowance for Doubtful Accounts Receivable, Current	$ 495	$ 680

Statements of Income Statement

Statements of Income Statement - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Cost of Revenue	31,962	28,508	60,773	53,825
Gross Profit	35,456	34,193	67,324	63,238
Operating Expenses [Abstract]
Research and Development Expense	12,146	11,879	24,156	24,325
Selling, General and Administrative Expense	10,110	9,488	19,778	18,987
Amortization of Intangible Assets	505	595	1,010	1,190
Gain (Loss) Related to Litigation Settlement	0	0	0	(14,632)
Operating Expenses	22,761	21,962	44,944	29,870
Operating Income (Loss)	12,695	12,231	22,380	33,368
Interest Income (Expense), Nonoperating, Net	223	(1,446)	414	(2,915)
Total other expenses (income)	166	192	435	299
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	12,752	10,593	22,359	30,154
Income Tax Expense (Benefit)	3,559	2,992	6,015	8,614
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Earnings (Loss) Per Share, Basic	$ 0.29	$ 0.25	$ 0.52	$ 0.70
Earnings (Loss) Per Share, Diluted	$ 0.29	$ 0.24	$ 0.51	$ 0.68
Weighted Average Number of Shares Outstanding, Basic	31,501	30,779	31,397	30,869
Weighted Average Number of Shares Outstanding, Diluted	32,146	31,754	32,104	31,705

Statements of Comprehensive Inc

Statements of Comprehensive Income (Loss) Statement - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	1	29	45	23
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	133	596	1,253	1,234
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 9,327	$ 8,226	$ 17,642	$ 22,797

Statements of Cash Flows Statem

Statements of Cash Flows Statement - USD ($) $ in Thousands	3 Months Ended		6 Months Ended		12 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Dec. 31, 2015
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Amortization of Financing Costs and Discounts			0	2,039
Amortization of Intangible Assets	505	595	1,010	1,190
Depreciation			1,880	1,868
Foreign Currency Transaction Gain (Loss), before Tax	166	192	435	299
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset			132	117
Share-based Compensation			2,948	2,387
Provision for doubtful accounts and inventory valuation			2,026	2,278
Gain (Loss) Related to Litigation Settlement	0	0	0	(14,632)
Increase (Decrease) in Other Operating Assets and Liabilities, Net			5,198	(4,852)
Net Cash Provided by (Used in) Operating Activities			29,973	12,234
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities			(62,527)	(70,412)
Proceeds from Sale and Maturity of Marketable Securities			59,491	90,599
Payments to Acquire Property, Plant, and Equipment			(5,301)	(2,173)
Net Cash Provided by (Used in) Investing Activities			(8,337)	18,014
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for Repurchase of Warrants			(1,025)	0	$ (9,500)
Payments for Repurchase of Common Stock			0	(8,044)
Payments Related to Tax Withholding for Share-based Compensation			(1,323)	(1,565)
Proceeds from (Payments for) Other Financing Activities			(358)	(94)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options			289	275
Net Cash Provided by (Used in) Financing Activities			(2,417)	(9,428)
Effect of Exchange Rate on Cash and Cash Equivalents			627	1,065
Cash and Cash Equivalents, Period Increase (Decrease)			19,846	21,885
Cash and Cash Equivalents, at Carrying Value	$ 57,705	$ 66,439	57,705	66,439	$ 37,859	$ 44,554
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid			2,246	2,541
Interest Paid			$ 0	$ 1,125

Basis of Presentation (Notes)

Basis of Presentation (Notes)	6 Months Ended
	Jun. 30, 2017
Organization and Nature of Operations: [Abstract]
Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]	Basis of Presentation The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”). Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes. Actual amounts could differ materially from reported amounts. The interim results for the three and six month periods ended June 30, 2017 are not necessarily indicative of results to be expected for the entire year or any future periods. This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2016 (“2016 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2016 has been derived from the audited consolidated financial statements included in the 2016 10-K. Reclassifications Certain immaterial prior period amounts have been reclassified to conform to the current financial statement presentation. Recent Accounting Pronouncements Recently Adopted Effective January 1, 2017, the Company adopted the Financial Accounting Standards Board (FASB) Accounting Standard Update (ASU) No. 2016-09, “Improvements to Employee Share-Based Payment Accounting.” The standard update simplifies several aspects of the accounting for employee share-based payment transactions, including accounting for income taxes, forfeitures, and statutory withholding requirements, as well as classification in the Condensed Consolidated Statement of Cash Flows. As a result of the adoption, on a prospective basis, the Company recognized $623 and $1,295 of excess tax benefits from stock-based compensation as a benefit in our income tax provision for the three and six months ended June 30, 2017, respectively. Historically, these amounts were recorded as additional paid-in capital. Upon adoption, the Company elected to present excess tax benefits to operating cash flows retrospectively to its Condensed Consolidated Statement of Cash Flows for the six months ended June 30, 2016, which resulted in a reclassification of excess tax benefits from stock-based compensation of $252 from cash flows from financing activities to cash flows from operating activities. The Company elected to change its policy on accounting for forfeitures and account for forfeitures as they occur. As a result of the forfeiture rate policy change, the Company recorded a reduction to retained earnings of $72 under the modified retrospective approach. Additional amendments to the accounting for income taxes and minimum statutory withholding requirements had no impact on its results of operations. Effective January 1, 2017, the Company adopted ASU No. 2015-11, “Inventory (Topic 330): Simplifying the Measurement of Inventory.” This simplifies subsequent measurement of inventory by having an entity measure inventory at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The adoption of ASU 2015-11 did not have any impact on the Company's consolidated financial position, results of operations, and cash flows. Recently Issued In May 2017, the FASB issued ASU No. 2017-09, “Compensation - Stock Compensation (Topic718): Scope of Modification Accounting.” This ASU amends the scope of modification accounting for share-based payment arrangements and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which an entity would be required to apply modification accounting under ASC 718. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-09 will have on its consolidated financial position, results of operations, and cash flows. In January 2017, the FASB issued ASU No. 2017-04, “Intangibles - Goodwill and Other (Topic 350): Simplifying the Test for Goodwill Impairment.” This ASU eliminates Step 2 from the goodwill impairment test. Accordingly, if the carrying amount of a reporting unit exceeds its fair value, an impairment loss will be recognized in an amount equal to the excess, limited to the total amount of goodwill allocated to the reporting unit. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-04 will have on its consolidated financial position, results of operations, and cash flows. In October 2016, the FASB issued ASU No. 2016-16, “Income Tax (Topic 740): Intra-Entity Transfers of Assets Other Than Inventory.” This ASU, which is part of the Board’s simplification initiative, is intended to reduce the complexity of U.S. GAAP and diversity in practice related to the tax consequences of certain types of intra-entity asset transfers, particularly those involving intellectual property. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-16 will have on its consolidated financial position, results of operations, and cash flows. In August 2016, the FASB issued ASU No. 2016-15, “Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments.” This ASU provides guidance on statement of cash flows presentation for eight specific cash flow issues where diversity in practice exists. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-15 will have on its consolidated financial position, results of operations, and cash flows. In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326),” which introduces new guidance for the accounting for credit losses on instruments within its scope. Given the breadth of that scope, the new ASU will impact both financial services and non-financial services entities. The standard is effective for fiscal years beginning after December 15, 2020. The Company is currently evaluating the effect the adoption of ASU No. 2016-13 will have on its consolidated financial position, results of operations, and cash flows. In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows. In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09, as amended, outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance as amended. In July 2015, the FASB deferred for one year the effective date of the new revenue standard. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2017 with earlier adoption permitted. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows as well as the impact on our internal controls over financial reporting.

Fair Value Measurements

Fair Value Measurements	6 Months Ended
	Jun. 30, 2017
Fair Value Measurements [Abstract]
Fair Value Disclosures [Text Block]	Fair Value Measurements The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels. Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement. The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2017 and December 31, 2016 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant June 30, 2017 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 90,403 $ — $ 90,403 $ — Corporate bonds 841 — 841 — Foreign currency forward contracts 94 — 94 — Total Assets $ 91,338 $ — $ 91,338 $ — Liabilities: Contingent consideration - acquisitions 3,025 — — 3,025 Total Liabilities $ 3,025 $ — $ — $ 3,025 December 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 87,029 $ — $ 87,029 $ — Corporate bonds 843 — 843 — Foreign currency forward contracts 312 — 312 — Total Assets $ 88,184 $ — $ 88,184 $ — Liabilities: Contingent consideration - acquisitions 3,251 — — 3,251 Total Liabilities $ 3,251 $ — $ — $ 3,251 The Company’s investments classified as Level 1 are based on quoted market prices that are available in active markets. The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class. Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these liabilities. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, timing of cash flows and estimates of discount rates of 8.6% and 9.1% for the six months ended June 30, 2017 and 2016 , respectively. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration. This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2017 : Fair Value Measurements Using Balance at December 31, 2016 $ 3,251 Additions — Total loss included in selling, general and administrative expense 132 Payments (358 ) Transfers into (out of) Level 3 — Balance at June 30, 2017 $ 3,025 See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities. Fair Value of Other Financial Instruments The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.

Marketable Securities

Marketable Securities	6 Months Ended
	Jun. 30, 2017
Marketable Securities [Abstract]
Marketable Securities [Text Block]	Marketable Securities The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale. Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ equity under the caption “Accumulated other comprehensive loss.” Realized gains and losses on available-for-sale securities are included in “Other expense” in the Condensed Consolidated Statements of Operations. The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities. The cost of securities sold is based on the specific identification method. The Company has determined that the gross unrealized losses on its marketable securities at June 30, 2017 and December 31, 2016 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value. At June 30, 2017 and December 31, 2016 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value June 30, 2017 Municipal notes and bonds $ 90,389 $ 21 $ (7 ) $ 90,403 Corporate bonds 841 — — 841 Total marketable securities $ 91,230 $ 21 $ (7 ) $ 91,244 December 31, 2016 Municipal notes and bonds $ 87,088 $ 6 $ (65 ) $ 87,029 Corporate bonds 842 1 — 843 Total marketable securities $ 87,930 $ 7 $ (65 ) $ 87,872 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2017 and December 31, 2016 : June 30, 2017 December 31, 2016 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 77,592 $ 77,601 $ 82,498 $ 82,445 Due after one through five years 13,638 13,643 5,432 5,427 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 91,230 $ 91,244 $ 87,930 $ 87,872 The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2017 and December 31, 2016 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses June 30, 2017 Municipal notes and bonds $ 26,062 $ (7 ) $ — $ — Corporate bonds — — — — Total $ 26,062 $ (7 ) $ — $ — December 31, 2016 Municipal notes and bonds $ 64,918 $ (65 ) $ — $ — Corporate bonds — — — — Total $ 64,918 $ (65 ) $ — $ — See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

Derivative Instruments and Hedg

Derivative Instruments and Hedging Activities	6 Months Ended
	Jun. 30, 2017
Derivative Instruments and Hedging Activities [Abstract]
Derivative Instruments and Hedging Activities Disclosure [Text Block]	Derivative Instruments and Hedging Activities The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At June 30, 2017 and December 31, 2016 , these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either “Prepaid expenses and other current assets” or “Other current liabilities” in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $218 and $300 for the six month periods ended June 30, 2017 and 2016, respectively, are recorded within the caption “Other expense” in the Condensed Consolidated Statements of Operations. The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2017 and December 31, 2016 were as follows: June 30, 2017 December 31, 2016 Notional amount $ 3,148 $ 3,827 Fair value of asset $ 94 $ 312

Identifiable Intangible Assets

Identifiable Intangible Assets	6 Months Ended
	Jun. 30, 2017
Finite-Lived Intangible Assets [Line Items]
Intangible Assets Disclosure [Text Block]	Purchased Intangible Assets Purchased intangible assets as of June 30, 2017 and December 31, 2016 are as follows: Gross Carrying Amount Accumulated Amortization Net June 30, 2017 Finite-lived intangibles: Developed technology $ 65,527 $ 57,790 $ 7,737 Customer and distributor relationships 9,560 8,670 890 Trade names 4,361 3,725 636 Total identifiable intangible assets $ 79,448 $ 70,185 $ 9,263 December 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 56,986 $ 8,541 Customer and distributor relationships 9,560 8,514 1,046 Trade names 4,361 3,675 686 Total identifiable intangible assets $ 79,448 $ 69,175 $ 10,273 Intangible asset amortization expense for the three and six month periods ended June 30, 2017 was $505 and $1,010 , respectively. For the three and six month periods ended June 30, 2016 , intangible assets amortization expenses was $595 and $1,190 , respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2017 will be $923 , and for each of the next five years estimated amortization expense amounts to $1,496 for 2018 , $1,496 for 2019 , $1,294 for 2020 , $546 for 2021 , and $480 for 2022 .

Balance Sheet Details

Balance Sheet Details	6 Months Ended
	Jun. 30, 2017
Balance Sheet Detail [Abstract]
Balance Sheet Details [Text Block]	Balance Sheet Details Inventories Inventories are comprised of the following: June 30, 2017 December 31, 2016 Materials $ 34,739 $ 32,993 Work-in-process 19,862 18,764 Finished goods 12,234 13,728 Total inventories $ 66,835 $ 65,485 The Company has established reserves of $11,842 and $10,545 as of June 30, 2017 and December 31, 2016 , respectively, for slow moving and obsolete inventory, which are included in the amounts above. Property, Plant and Equipment Property, plant and equipment, net is comprised of the following: June 30, 2017 December 31, 2016 Land and building $ 2,584 $ 2,584 Machinery and equipment 26,803 23,493 Furniture and fixtures 3,036 2,699 Computer equipment and software 5,682 5,204 Leasehold improvements 8,952 8,116 47,057 42,096 Accumulated depreciation (31,966 ) (30,238 ) Total property, plant and equipment, net $ 15,091 $ 11,858 Other assets Other assets is comprised of the following: June 30, 2017 December 31, 2016 Deferred income taxes $ 32,165 $ 30,850 Other 590 593 Total other assets $ 32,755 $ 31,443 Other current liabilities Other current liabilities is comprised of the following: June 30, 2017 December 31, 2016 Intangible asset acquisition - Stella Alliance $ 1,000 $ 1,000 Contingent consideration - acquisitions 634 855 Warrant settlement payable — 1,025 Customer deposits 983 996 Other 5,105 3,263 Total other current liabilities $ 7,722 $ 7,139 Other non-current liabilities Other non-current liabilities is comprised of the following: June 30, 2017 December 31, 2016 Unrecognized tax benefits (including interest) $ 4,866 $ 3,386 Contingent consideration - acquisitions 2,391 2,396 Deferred revenue 1,299 1,132 Other 2,691 2,088 Total other non-current liabilities $ 11,247 $ 9,002

Debt Obligations

Debt Obligations	6 Months Ended
	Jun. 30, 2017
Debt Obligations [Abstract]
Debt Disclosure [Text Block]	Debt Obligations On July 25, 2011 , the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011 , between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provided for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012 , at an annual rate of 3.75% . Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes. On July 15, 2016, the Company redeemed all of its outstanding 3.75% Convertible Senior Notes with an aggregate principle amount of $60,000 . Under the terms of the indenture, holders of the Notes were paid cash up to the aggregate principal amount of the Notes and were issued shares of common stock for the remainder of the conversion, with any fractional shares paid in cash. The conversion resulted in the issuance of 540 shares of common stock of the Company to the bondholders, but resulted in no dilution to Rudolph shareholders as these shares were covered by the convertible note hedge that was entered into by the Company in 2011 at the time of issuance of the Notes. The sale of the warrant gave the holder the right to purchase 4,634 shares of Company common stock at a strike price of $17.00 per share. The warrant had a series of daily expiration dates beginning in October 2016 and ending in January 2017. In 2016, the holder exercised 4,248 warrants, which settled for 80 shares of Company common stock and $10,525 payable in cash, of which $9,500 was paid as of December 31, 2016 and $1,025 was paid in January 2017, at a weighted average stock price of $19.82 per share. The remaining 386 warrants were exercised in January 2017 by the holder for 102 shares of Company common stock at a weighted average stock price of $23.13 per share. The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2017 and June 30, 2016 : Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Contractual interest coupon $ — $ 563 $ — $ 1,125 Amortization of interest discount — 899 — 1,793 Amortization of debt issuance costs — 123 — 246 Total interest cost recognized $ — $ 1,585 $ — $ 3,164

Commitments and Contingencies

Commitments and Contingencies	6 Months Ended
	Jun. 30, 2017
Commitments and Contingencies [Abstract]
Commitments and Contingencies Disclosure [Text Block]	Commitments and Contingencies Intellectual Property Indemnification Obligations The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees. Warranty Reserves The Company generally provides a warranty on its products for a period of 12 to 15 months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the same year. Changes in the Company’s warranty reserves are as follows: Six Months Ended June 30, 2017 2016 Balance, beginning of the period $ 1,788 $ 1,894 Accruals 1,659 1,261 Usage (1,311 ) (1,319 ) Balance, end of the period $ 2,136 $ 1,836 Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.” Legal Matters From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The following reflects an overview of the material activities with regard to these matters through June 30, 2017. August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 11-CV-03707 (MJD/TNL) : A lawsuit against Camtek, Ltd. (“Camtek”), of Migdal Hamek, Israel, was filed by the Company on June 1, 2011 alleging infringement of its U.S. Patent No. 7,729,528 related to its proprietary continuous scan wafer inspection technology. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. Camtek filed an inter partes reexamination petition with the U.S. Patent and Trademark Office (the “PTO”) on January 19, 2012 asserting that certain claims of the patent are unpatentable. In the course of this proceeding the PTO issued a final determination that 35 claims of the patent were valid and 18 claims were rejected. The Company appealed the PTO’s rejection of the 18 claims to the US Court of Appeals for the Federal Circuit. On December 22, 2016, the U.S. Court of Appeals for the Federal Circuit reversed the PTO’s rejection of three of the 18 patent claims, affirmed the PTO’s rejection of nine of the 18 patent claims, and dismissed the remaining six patent claims for procedural reasons. Thus, 38 claims are available to be asserted under the ‘528 patent in this lawsuit. During the pendency of the reexamination process, the parties had stipulated that the lawsuit be stayed. With resolution of Camtek’s petition, the stay in the lawsuit has been lifted and the parties are proceeding with litigation. Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT) : On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph’s U.S. Patent No. 6,826,298 by Camtek’s Eagle product with the U.S. District Court in Minnesota. The ‘6,298 patent is also related to our proprietary continuous scan wafer inspection technology and was the subject of Rudolph’s prior litigation against the Camtek Falcon system (the “Falcon Litigation”) in which Rudolph prevailed with a final judgment of infringement and damages of $14.6 million assessed against Camtek. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota District Court and seeking to have the New Jersey District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the U.S. District Court in Minnesota ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the U.S. District Court in New Jersey was subsequently dismissed. On August 8, 2016 the Minnesota District Court issued an order regarding motions for partial summary judgment which we had filed in March 2016 granting (i) that the ‘6,298 patent is valid and Camtek is precluded from contesting its validity at trial, and (ii) that the claim constructions adopted in the Falcon Litigation for four terms are entitled to a preclusive effect and will apply in the course of the present litigation. The Minnesota District Court also ruled that three phrases not subject to claim construction in the Falcon Litigation may be defined in the present case. This matter is currently ongoing in the U.S. District Court in Minnesota with no trial date set. Camtek, Ltd. v. Rudolph Technologies, Inc., No.: 1:17-CV-11127-PBS : On June 19, 2017, Camtek filed with the U.S. District Court in Massachusetts and served on Rudolph a complaint alleging infringement by Rudolph’s NSX product of Camtek’s U.S. Patent No. 6,192,289 related to kerf inspection. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. This newly served matter is currently ongoing in the U.S. District Court in Massachusetts with no trial date set. Subsequent to the close of the 2017 second quarter, on July 28, 2017, Rudolph and Camtek entered into a Settlement Agreement (the “Agreement”) resolving each of the three litigations referenced above (the “Litigations”). Pursuant to the Agreement, in exchange for a $13.0 million cash payment from Camtek to be paid to Rudolph, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations. The parties also mutually agreed not to pursue further legal actions on any of the claims reflected in the patents which were the subject of the Litigations. Further, subject to limited exceptions, Rudolph and Camtek have agreed not to bring suit against each other for a three year period from the date of the Agreement. E ach party expressly denies any liability to the other party with respect to any of the Litigations. Line of Credit The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable securities the Company has with the bank. The Company is permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit is accessed. The available line of credit as of June 30, 2017 was approximately $86 million with an available interest rate of 2.8% . The credit agreement is available to the Company until such time that either party terminates the arrangement at their discretion. The Company has not utilized the line of credit to date.

Share-Based Compensation

Share-Based Compensation	6 Months Ended
	Jun. 30, 2017
Share-based Compensation [Abstract]
Disclosure of Compensation Related Costs, Share-based Payments [Text Block]	Share-Based Compensation Restricted Stock Unit Activity A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2017 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2016 1,136 $ 12.30 Granted 273 $ 22.62 Vested (277 ) $ 11.35 Forfeited (30 ) $ 12.30 Nonvested at June 30, 2017 1,102 $ 15.10 Included in the number of shares granted in the table directly above are 38 market performance-based restricted stock units (MPRSUs) granted to executives. Vesting of these MPRSUs is contingent upon the Company meeting certain total shareholder return (TSR) levels as compared to a select peer group over the next three years. The MPRSUs cliff vest at the end of the three-year period and have a maximum potential to vest at 200% ( 76 shares) based on TSR performance. The related share-based compensation expense is determined based on the estimated fair value of the underlying shares on the date of grant and is recognized straight-line over the vesting term. The estimated fair value per share of the MPRSUs was $25.30 and was calculated using a Monte Carlo simulation model. As of June 30, 2017 and December 31, 2016 , there was $12,601 and $8,697 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively. That cost is expected to be recognized over a weighted average period of 2.6 years and 2.7 years for the respective periods.

Other Expense (Income)

Other Expense (Income)	6 Months Ended
	Jun. 30, 2017
Other Income (Expense) [Abstract]
Other Income and Other Expense Disclosure [Text Block]	Other Expense Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Foreign currency exchange losses, net $ 166 $ 192 $ 435 $ 299 Total other expense $ 166 $ 192 $ 435 $ 299

Income Taxes

Income Taxes	6 Months Ended
	Jun. 30, 2017
Income Taxes [Abstract]
Income Tax Disclosure [Text Block]	Income Taxes The following table provides details of income taxes: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Income before income taxes $ 12,752 $ 10,593 $ 22,359 $ 30,154 Provision for income taxes $ 3,559 $ 2,992 $ 6,015 $ 8,614 Effective tax rate 27.9 % 28.2 % 26.9 % 28.6 % The income tax provision for the three and six months ended June 30, 2017 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the three and six months ended June 30, 2017 compared to the same period for the prior year are primarily due to changes in the mix of forecasted earnings by jurisdictions and the recording of excess tax benefits for stock compensation related to the adoption of FASB ASU No. 2016-09. The Company currently has a partial valuation allowance recorded against certain foreign and state net operating loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including forecasted earnings in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a recorded valuation allowance against certain of its deferred tax assets of $1,924 as of June 30, 2017 and December 31, 2016.

Earnings Per Share

Earnings Per Share	6 Months Ended
	Jun. 30, 2017
Earnings (Loss) Per Share [Abstract]
Earnings Per Share [Text Block]	Earnings Per Share Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during the period. Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period. Potential common shares that would have the effect of increasing diluted earnings per share are considered to be anti-dilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share. The following table sets forth the weighted average number of stock options and restricted stock units that have been excluded from the calculation of diluted earnings per share as their effect would have been antidilutive: Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Stock options — 4 — 78 Restricted stock units 1 — 13 — Total 1 4 13 78 The Company’s basic and diluted earnings per share amounts are as follows: Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Numerator: Net income $ 9,193 $ 7,601 $ 16,344 $ 21,540 Denominator: Basic earnings per share - weighted average shares outstanding 31,501 30,779 31,397 30,869 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 645 563 704 630 Convertible senior notes - dilutive shares — 412 — 206 Warrant - dilutive shares — — 3 — Diluted earnings per share - weighted average shares outstanding 32,146 31,754 32,104 31,705 Earnings per share: Basic $ 0.29 $ 0.25 $ 0.52 $ 0.70 Diluted $ 0.29 $ 0.24 $ 0.51 $ 0.68

Accumulated Other Comprehensive

Accumulated Other Comprehensive Loss (Notes)	6 Months Ended
	Jun. 30, 2017
Accumulated Other Comprehensive Loss [Abstract]
Comprehensive Income (Loss) Note [Text Block]	Accumulated Other Comprehensive Loss Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Condensed Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income on the Company’s net income. The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized (gains) losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2016 $ 2,742 $ 37 $ 2,779 Net current period other comprehensive income (1,253 ) (45 ) (1,298 ) Reclassifications — — — Ending balance, June 30, 2017 $ 1,489 $ (8 ) $ 1,481

Segment Reporting and Geographi

Segment Reporting and Geographic Information	6 Months Ended
	Jun. 30, 2017
Segment Reporting and Geographic Information [Abstract]
Segment Reporting Disclosure [Text Block]	Segment Reporting and Geographic Information The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection and metrology, advanced packaging lithography, and process control software systems used by microelectronics device manufacturers, and therefore the Company has one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level. The following table lists the different sources of revenue: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Systems and software: Process Control $ 47,711 71 % $ 34,464 55 % $ 91,586 72 % $ 70,922 61 % Lithography 3,533 5 % 11,480 18 % 3,550 2 % 11,650 10 % Software 6,895 10 % 7,780 12 % 14,394 11 % 15,202 13 % Parts 7,348 11 % 5,993 10 % 13,678 11 % 13,153 11 % Services 1,931 3 % 2,984 5 % 4,889 4 % 6,136 5 % Total revenue $ 67,418 100 % $ 62,701 100 % $ 128,097 100 % $ 117,063 100 % For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 United States $ 9,182 $ 5,646 $ 18,190 $ 13,034 Taiwan 20,323 14,535 34,156 36,570 Japan 3,468 3,164 6,677 6,101 China 5,904 10,824 20,005 19,649 South Korea 14,221 2,226 23,751 3,849 Singapore 1,945 14,879 5,211 21,926 Other Asia 1,444 1,674 1,559 2,545 Germany 4,789 4,235 7,869 4,932 Other Europe 6,142 5,518 10,679 8,457 Total revenue $ 67,418 $ 62,701 $ 128,097 $ 117,063 The following customers each accounted for more than 10% of total revenues for the indicated periods. Six Months Ended June 30, 2017 2016 Customer A 11.2 % 1.6 % Customer B 6.0 % 13.4 % Customer C 0.9 % 10.2 %

Share Repurchase Program

Share Repurchase Program	6 Months Ended
	Jun. 30, 2017
Share Repurchase Program [Abstract]
Share Repurchase [Text Block]	Share Repurchase Authorization In January 2015, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the three and six month periods ended June 30, 2017 , the Company did not repurchase any shares of common stock pursuant to the share repurchase authorization. At June 30, 2017 , there were 711 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired. The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2017 and 2016, respectively: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Shares of common stock repurchased — 245 — 615 Cost of stock repurchased $— $3,344 $— $8,045 Average price paid per share $— $13.63 $— $13.07

Subsequent Event (Notes)

Subsequent Event (Notes)	6 Months Ended
	Jun. 30, 2017
Subsequent Events [Abstract]
Subsequent Events [Text Block]	Subsequent Event Subsequent to June 30, 2017 and through the Company’s financial statement issuance date of August 3, 2017, the Company entered into an agreement with Camtek on July 28, 2017 resolving each of the three Litigations discussed further in Note 8, “Commitments and Contingencies”, of these Notes to Condensed Consolidated Financial Statements. Pursuant to the Agreement, in exchange for a $13,000 cash payment from Camtek to be paid to the Company, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations.

Fair Value Measurements - (Tabl

Fair Value Measurements - (Tables)	6 Months Ended
	Jun. 30, 2017
Fair Value Measurements [Abstract]
Fair Value, Measurement Inputs, Disclosure [Table Text Block]	The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2017 and December 31, 2016 : Fair Value Measurements Using Carrying Quoted Prices in Significant Other Significant June 30, 2017 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 90,403 $ — $ 90,403 $ — Corporate bonds 841 — 841 — Foreign currency forward contracts 94 — 94 — Total Assets $ 91,338 $ — $ 91,338 $ — Liabilities: Contingent consideration - acquisitions 3,025 — — 3,025 Total Liabilities $ 3,025 $ — $ — $ 3,025 December 31, 2016 Assets: Available-for-sale debt securities: Municipal notes and bonds $ 87,029 $ — $ 87,029 $ — Corporate bonds 843 — 843 — Foreign currency forward contracts 312 — 312 — Total Assets $ 88,184 $ — $ 88,184 $ — Liabilities: Contingent consideration - acquisitions 3,251 — — 3,251 Total Liabilities $ 3,251 $ — $ — $ 3,251
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]	This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2017 : Fair Value Measurements Using Balance at December 31, 2016 $ 3,251 Additions — Total loss included in selling, general and administrative expense 132 Payments (358 ) Transfers into (out of) Level 3 — Balance at June 30, 2017 $ 3,025

Marketable Securities - (Tables

Marketable Securities - (Tables)	6 Months Ended
	Jun. 30, 2017
Schedule of Available-for-sale Securities [Line Items]
Schedule of marketable securities by category [Table Text Block]	At June 30, 2017 and December 31, 2016 , marketable securities are categorized as follows: Amortized Cost Gross Unrealized Holding Gains Gross Unrealized Holding Losses Fair Value June 30, 2017 Municipal notes and bonds $ 90,389 $ 21 $ (7 ) $ 90,403 Corporate bonds 841 — — 841 Total marketable securities $ 91,230 $ 21 $ (7 ) $ 91,244 December 31, 2016 Municipal notes and bonds $ 87,088 $ 6 $ (65 ) $ 87,029 Corporate bonds 842 1 — 843 Total marketable securities $ 87,930 $ 7 $ (65 ) $ 87,872
Schedule of marketable securities classified by contractual maturity date [Table Text Block]	The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2017 and December 31, 2016 : June 30, 2017 December 31, 2016 Amortized Cost Fair Value Amortized Cost Fair Value Due within one year $ 77,592 $ 77,601 $ 82,498 $ 82,445 Due after one through five years 13,638 13,643 5,432 5,427 Due after five through ten years — — — — Due after ten years — — — — Total marketable securities $ 91,230 $ 91,244 $ 87,930 $ 87,872
Schedule of marketable securities in unrealized loss positions [Table Text Block]	The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2017 and December 31, 2016 : Unrealized Loss Position For Less Than 12 Months Unrealized Loss Position For Greater Than 12 Months Fair Value Gross Unrealized Losses Fair Value Gross Unrealized Losses June 30, 2017 Municipal notes and bonds $ 26,062 $ (7 ) $ — $ — Corporate bonds — — — — Total $ 26,062 $ (7 ) $ — $ — December 31, 2016 Municipal notes and bonds $ 64,918 $ (65 ) $ — $ — Corporate bonds — — — — Total $ 64,918 $ (65 ) $ — $ —

Derivative Instruments and He25

Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)	6 Months Ended
	Jun. 30, 2017
Derivative Instruments and Hedging Activities [Abstract]
Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]	The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2017 and December 31, 2016 were as follows: June 30, 2017 December 31, 2016 Notional amount $ 3,148 $ 3,827 Fair value of asset $ 94 $ 312

Identifiable Intangible Assets

Identifiable Intangible Assets - (Tables)	6 Months Ended
	Jun. 30, 2017
Identifiable Intangible Assets [Abstract]
Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]	Purchased intangible assets as of June 30, 2017 and December 31, 2016 are as follows: Gross Carrying Amount Accumulated Amortization Net June 30, 2017 Finite-lived intangibles: Developed technology $ 65,527 $ 57,790 $ 7,737 Customer and distributor relationships 9,560 8,670 890 Trade names 4,361 3,725 636 Total identifiable intangible assets $ 79,448 $ 70,185 $ 9,263 December 31, 2016 Finite-lived intangibles: Developed technology $ 65,527 $ 56,986 $ 8,541 Customer and distributor relationships 9,560 8,514 1,046 Trade names 4,361 3,675 686 Total identifiable intangible assets $ 79,448 $ 69,175 $ 10,273

Balance Sheet Details - (Tables

Balance Sheet Details - (Tables)	6 Months Ended
	Jun. 30, 2017
Balance Sheet Detail [Abstract]
Schedule of Inventory, Current [Table Text Block]	Inventories are comprised of the following: June 30, 2017 December 31, 2016 Materials $ 34,739 $ 32,993 Work-in-process 19,862 18,764 Finished goods 12,234 13,728 Total inventories $ 66,835 $ 65,485
Property, Plant and Equipment [Table Text Block]	Property, plant and equipment, net is comprised of the following: June 30, 2017 December 31, 2016 Land and building $ 2,584 $ 2,584 Machinery and equipment 26,803 23,493 Furniture and fixtures 3,036 2,699 Computer equipment and software 5,682 5,204 Leasehold improvements 8,952 8,116 47,057 42,096 Accumulated depreciation (31,966 ) (30,238 ) Total property, plant and equipment, net $ 15,091 $ 11,858
Schedule of Other Assets [Table Text Block]	Other assets is comprised of the following: June 30, 2017 December 31, 2016 Deferred income taxes $ 32,165 $ 30,850 Other 590 593 Total other assets $ 32,755 $ 31,443
Other Current liabilities [Table Text Block]	Other current liabilities is comprised of the following: June 30, 2017 December 31, 2016 Intangible asset acquisition - Stella Alliance $ 1,000 $ 1,000 Contingent consideration - acquisitions 634 855 Warrant settlement payable — 1,025 Customer deposits 983 996 Other 5,105 3,263 Total other current liabilities $ 7,722 $ 7,139
Other Non-current liabilities [Table Text Block]	Other non-current liabilities is comprised of the following: June 30, 2017 December 31, 2016 Unrecognized tax benefits (including interest) $ 4,866 $ 3,386 Contingent consideration - acquisitions 2,391 2,396 Deferred revenue 1,299 1,132 Other 2,691 2,088 Total other non-current liabilities $ 11,247 $ 9,002

Debt Obligations - (Tables)

Debt Obligations - (Tables)	6 Months Ended
	Jun. 30, 2017
Debt Obligations [Abstract]
Schedule of interest cost recognized on convertible senior notes [Table Text Block]	The following table presents the amount of interest cost recognized relating to the Notes during the three and six months ended June 30, 2017 and June 30, 2016 : Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Contractual interest coupon $ — $ 563 $ — $ 1,125 Amortization of interest discount — 899 — 1,793 Amortization of debt issuance costs — 123 — 246 Total interest cost recognized $ — $ 1,585 $ — $ 3,164

Commitments and Contingencies -

Commitments and Contingencies - (Tables)	6 Months Ended
	Jun. 30, 2017
Commitments and Contingencies [Abstract]
Schedule of changes product warranty liability [Table Text Block]	Changes in the Company’s warranty reserves are as follows: Six Months Ended June 30, 2017 2016 Balance, beginning of the period $ 1,788 $ 1,894 Accruals 1,659 1,261 Usage (1,311 ) (1,319 ) Balance, end of the period $ 2,136 $ 1,836

Share-Based Compensation - (Tab

Share-Based Compensation - (Tables)	6 Months Ended
	Jun. 30, 2017
Share-based Compensation [Abstract]
Summary of restricted stock unit activity [Table Text Block]	A summary of the Company’s nonvested restricted stock unit activity with respect to the six months ended June 30, 2017 is as follows: Number of Shares Weighted Average Grant Date Fair Value Nonvested at December 31, 2016 1,136 $ 12.30 Granted 273 $ 22.62 Vested (277 ) $ 11.35 Forfeited (30 ) $ 12.30 Nonvested at June 30, 2017 1,102 $ 15.10

Other Income - (Tables)

Other Income - (Tables)	6 Months Ended
	Jun. 30, 2017
Other Income (Expense) [Abstract]
Schedule of Other Nonoperating Income (Expense) [Table Text Block]	Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Foreign currency exchange losses, net $ 166 $ 192 $ 435 $ 299 Total other expense $ 166 $ 192 $ 435 $ 299

Income Taxes - (Tables)

Income Taxes - (Tables)	6 Months Ended
	Jun. 30, 2017
Income Taxes [Abstract]
Schedule of effective tax rate [Table Text Block]	The following table provides details of income taxes: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Income before income taxes $ 12,752 $ 10,593 $ 22,359 $ 30,154 Provision for income taxes $ 3,559 $ 2,992 $ 6,015 $ 8,614 Effective tax rate 27.9 % 28.2 % 26.9 % 28.6 %

Earnings Per Share - (Tables)

Earnings Per Share - (Tables)	6 Months Ended
	Jun. 30, 2017
Earnings Per Share [Abstract]
Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table Text Block]	The following table sets forth the weighted average number of stock options and restricted stock units that have been excluded from the calculation of diluted earnings per share as their effect would have been antidilutive: Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Stock options — 4 — 78 Restricted stock units 1 — 13 — Total 1 4 13 78
Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]	The Company’s basic and diluted earnings per share amounts are as follows: Three Months Ended June 30, Six Months Ended June 30, 2017 2016 2017 2016 Numerator: Net income $ 9,193 $ 7,601 $ 16,344 $ 21,540 Denominator: Basic earnings per share - weighted average shares outstanding 31,501 30,779 31,397 30,869 Effect of potential dilutive securities: Employee stock options and restricted stock units - dilutive shares 645 563 704 630 Convertible senior notes - dilutive shares — 412 — 206 Warrant - dilutive shares — — 3 — Diluted earnings per share - weighted average shares outstanding 32,146 31,754 32,104 31,705 Earnings per share: Basic $ 0.29 $ 0.25 $ 0.52 $ 0.70 Diluted $ 0.29 $ 0.24 $ 0.51 $ 0.68

Accumulated Other Comprehensi34

Accumulated Other Comprehensive Loss (Tables)	6 Months Ended
	Jun. 30, 2017
Accumulated Other Comprehensive Loss [Abstract]
Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]	The components of accumulated other comprehensive loss, net of tax, are as follows: Foreign currency translation adjustments Net unrealized (gains) losses on available-for-sale investments Accumulated other comprehensive loss (income) Beginning Balance, December 31, 2016 $ 2,742 $ 37 $ 2,779 Net current period other comprehensive income (1,253 ) (45 ) (1,298 ) Reclassifications — — — Ending balance, June 30, 2017 $ 1,489 $ (8 ) $ 1,481

Segment Reporting and Geograp35

Segment Reporting and Geographic Information - (Tables)	6 Months Ended
	Jun. 30, 2017
Segment Reporting and Geographic Information [Abstract]
Schedule of revenue from external customers by Products and Services [Table Text Block]	The following table lists the different sources of revenue: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Systems and software: Process Control $ 47,711 71 % $ 34,464 55 % $ 91,586 72 % $ 70,922 61 % Lithography 3,533 5 % 11,480 18 % 3,550 2 % 11,650 10 % Software 6,895 10 % 7,780 12 % 14,394 11 % 15,202 13 % Parts 7,348 11 % 5,993 10 % 13,678 11 % 13,153 11 % Services 1,931 3 % 2,984 5 % 4,889 4 % 6,136 5 % Total revenue $ 67,418 100 % $ 62,701 100 % $ 128,097 100 % $ 117,063 100 %
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]	For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 United States $ 9,182 $ 5,646 $ 18,190 $ 13,034 Taiwan 20,323 14,535 34,156 36,570 Japan 3,468 3,164 6,677 6,101 China 5,904 10,824 20,005 19,649 South Korea 14,221 2,226 23,751 3,849 Singapore 1,945 14,879 5,211 21,926 Other Asia 1,444 1,674 1,559 2,545 Germany 4,789 4,235 7,869 4,932 Other Europe 6,142 5,518 10,679 8,457 Total revenue $ 67,418 $ 62,701 $ 128,097 $ 117,063
Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]	The following customers each accounted for more than 10% of total revenues for the indicated periods. Six Months Ended June 30, 2017 2016 Customer A 11.2 % 1.6 % Customer B 6.0 % 13.4 % Customer C 0.9 % 10.2 %

Share Repurchase Program Stock

Share Repurchase Program Stock Repurchase Program (Tables)	6 Months Ended
	Jun. 30, 2017
Statement of Stockholders' Equity [Abstract]
share repurchase program [Table Text Block]	The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2017 and 2016, respectively: Three Months Ended Six Months Ended June 30, June 30, 2017 2016 2017 2016 Shares of common stock repurchased — 245 — 615 Cost of stock repurchased $— $3,344 $— $8,045 Average price paid per share $— $13.63 $— $13.07

Basis of Presentation Pronounce

Basis of Presentation Pronouncement reclass (Details) - Type of Adoption [Domain] - USD ($) $ in Thousands	3 Months Ended	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2017	Dec. 31, 2016
New Accounting Pronouncements or Change in Accounting Principle [Line Items]
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	$ 623	$ 1,295
Proceeds and Excess Tax Benefit from Share-based Compensation		$ 252
Retained Earnings Reclassification			$ 72

Fair Value Measurements - (Deta

Fair Value Measurements - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Jul. 15, 2016	Jul. 25, 2011
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 90,403		$ 87,029
Financial Instruments, Owned, Corporate Equities, at Fair Value	841		843
Foreign Currency Contract, Asset, Fair Value Disclosure	94		312
Assets, Fair Value Disclosure	91,338		88,184
Business Combination, Contingent Consideration, Liability	3,025		3,251
Liabilities, Fair Value Disclosure	$ 3,025		3,251
Fair Value Inputs Discount Rate 3	8.60%	9.10%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	$ 3,025		3,251
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	132
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	$ (358)
Fair Value, Level 3 Transfers out, Description	0
Convertible Debt				$ 60,000	$ 60,000
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0		0
Foreign Currency Contract, Asset, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Combination, Contingent Consideration, Liability	0		0
Liabilities, Fair Value Disclosure	0		0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	90,403		87,029
Financial Instruments, Owned, Corporate Equities, at Fair Value	841		843
Foreign Currency Contract, Asset, Fair Value Disclosure	94		312
Assets, Fair Value Disclosure	91,338		88,184
Business Combination, Contingent Consideration, Liability	0		0
Liabilities, Fair Value Disclosure	0		0
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0		0
Foreign Currency Contract, Asset, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Combination, Contingent Consideration, Liability	3,025		3,251
Liabilities, Fair Value Disclosure	$ 3,025		$ 3,251

Marketable Securities - (Detail

Marketable Securities - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	$ 91,230		$ 87,930
Available-for-sale Securities, Fair Value Disclosure	91,244		87,872
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	77,592		82,498
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	77,601		82,445
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	13,638		5,432
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	13,643		5,427
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0		0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0		0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	0		0
Available-for-sale Securities, Debt Maturities, after Ten Years, Fair Value	0		0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	90,389		87,088
Available-for-sale Securities, Gross Unrealized Gains	21	$ 6
Available-for-sale Securities, Gross Unrealized Losses	(7)	(65)
Available-for-sale Securities, Fair Value Disclosure	90,403		87,029
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	26,062		64,918
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	(7)	(65)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Corporate Bond Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	841		842
Available-for-sale Securities, Gross Unrealized Gains	0	1
Available-for-sale Securities, Gross Unrealized Losses	0	0
Available-for-sale Securities, Fair Value Disclosure	841		843
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	91,230		87,930
Available-for-sale Securities, Gross Unrealized Gains	21	7
Available-for-sale Securities, Gross Unrealized Losses	(7)	(65)
Available-for-sale Securities, Fair Value Disclosure	91,244		87,872
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	26,062		64,918
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	(7)	(65)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		$ 0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$ 0	$ 0

Derivative Instruments and He40

Derivative Instruments and Hedging Activities - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Derivative [Line Items]
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	$ 218	$ 300
Derivative, Notional Amount	3,148		$ 3,827
Derivative Asset, Fair Value, Gross Liability	$ 94
Derivative Asset, Fair Value, Gross Asset			$ 312

Identifiable Intangible Asset41

Identifiable Intangible Assets - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	$ 79,448		$ 79,448		$ 79,448
Finite-Lived Intangible Assets, Accumulated Amortization	70,185		70,185		69,175
Intangible Assets, Net (Excluding Goodwill)	9,263		9,263		10,273
Amortization of Intangible Assets	505	$ 595	1,010	$ 1,190
Future Amortization Expense, Remainder of Fiscal Year	923		923
Future Amortization Expense, Year One	1,496		1,496
Future Amortization Expense, Year Two	1,496		1,496
Future Amortization Expense, Year Three	1,294		1,294
Future Amortization Expense, Year Four	546		546
Future Amortization Expense, Year Five	480		480
Developed Technology Rights [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	65,527		65,527		65,527
Finite-Lived Intangible Assets, Accumulated Amortization	57,790		57,790		56,986
Intangible Assets, Net (Excluding Goodwill)	7,737		7,737		8,541
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	9,560		9,560		9,560
Finite-Lived Intangible Assets, Accumulated Amortization	8,670		8,670		8,514
Intangible Assets, Net (Excluding Goodwill)	890		890		1,046
Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	4,361		4,361		4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,725		3,725		3,675
Intangible Assets, Net (Excluding Goodwill)	$ 636		$ 636		$ 686

Balance Sheet Details - Invento

Balance Sheet Details - Inventory (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Inventory Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 34,739	$ 32,993
Inventory, Work in Process, Net of Reserves	19,862	18,764
Inventory, Finished Goods, Net of Reserves	12,234	13,728
Inventory, Net	66,835	65,485
Inventory Valuation Reserves	$ 11,842	$ 10,545

Balance Sheet Details - Propert

Balance Sheet Details - Property Plant & Equipment (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Property, Plant and Equipment [Line Items]
Buildings and Land Gross	$ 2,584	$ 2,584
Machinery and Equipment, Gross	26,803	23,493
Furniture and Fixtures, Gross	3,036	2,699
Computer Equipments And Software Gross	5,682	5,204
Leasehold Improvements, Gross	8,952	8,116
Property, Plant and Equipment, Gross	47,057	42,096
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	(31,966)	(30,238)
Property, Plant and Equipment, Net	$ 15,091	$ 11,858

Balance Sheet Details - Other A

Balance Sheet Details - Other Assets (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Assets [Abstract]
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$ 32,165	$ 30,850
Other	590	593
Total Other Assets	$ 32,755	$ 31,443

Balance Sheet Details - Other C

Balance Sheet Details - Other Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Current Liabilities [Abstract]
Intangible assets current liabilities	$ 1,000	$ 1,000
Contingent Consideration Current Liability	634	855
Payable for repurchase of warrant	0	1,025
Customer Deposits, Current	983	996
Other Current Liabilities Subtotal	5,105	3,263
Other Liabilities, Current	$ 7,722	$ 7,139

Balance Sheet Details - Other N

Balance Sheet Details - Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$ 4,866	$ 3,386
Contingent consideration - Acquisition non-current liability	2,391	2,396
Deferred Revenue, Noncurrent	1,299	1,132
Other Liabilities	2,691	2,088
Other Liabilities, Noncurrent	$ 11,247	$ 9,002

Debt Obligations - (Details)

Debt Obligations - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended		12 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Jul. 15, 2016	Jul. 25, 2011
Convertible Debt						$ 60,000	$ 60,000
Conversion of Stock, Shares Issued					540
Debt Instrument, Interest Rate, Stated Percentage							3.75%
Class of Warrant or Right, Exercise Price of Warrants or Rights	$ 17		$ 17
Contractual Interest Coupon	$ 0	$ 563	$ 0	$ 1,125
Amortization of Debt Discount (Premium)	0	899	0	1,793
Amortization of Financing Costs	0	123	0	246
Interest Expense, Debt	$ 0	$ 1,585	$ 0	3,164
Class of Warrant or Right, Number of Securities Called by Warrants or Rights	386		386				4,634
Redemption of stock warrants			102		4,248
Stock Issued During Period, Value, Conversion of Convertible Securities					$ 10,525
Payments for Repurchase of Warrants			$ 1,025	$ 0	$ 9,500
Investment Warrants, Exercise Price			$ 23.13		$ 19.82
Common Stock [Member]
Redemption of stock warrants					80

Commitments and Contingencies48

Commitments and Contingencies - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Dec. 31, 2015
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$ 2,136	$ 1,836	$ 1,788	$ 1,894
Product Warranty Accrual, Warranties Issued	1,659	1,261
Product Warranty Accrual, Payments	(1,311)	$ (1,319)
Loss Contingency, damages Awarded, Value 2	14,600
Proceeds from Legal Settlements	13,000
Line of Credit Facility, Remaining Borrowing Capacity	$ 86,000
Line of Credit Facility, Interest Rate at Period End	2.80%

Share-Based Compensation Restri

Share-Based Compensation Restricted Stock Units (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	6 Months Ended
	Jun. 30, 2017	Dec. 31, 2016
Restricted Stock Units Activity [Abstract]
Market performance-based restricted stock units granted	38
Maximum potential market performance-based restricted stock units to vest	76
Estimated fair value per share of the market performance-based restricted stock units	$ 25.30
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,102	1,136
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 15.10	$ 12.30
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	273
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 22.62
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	(277)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 11.35
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	(30)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 12.30
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$ 12,601	$ 8,697
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 7 months

Other Income - (Details)

Other Income - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Other Income (Expense) [Abstract]
Foreign currency exchange losses (gains), net	$ 166	$ 192	$ 435	$ 299
Total other expenses (income)	$ 166	$ 192	$ 435	$ 299

Income Taxes - (Details)

Income Taxes - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Income Taxes [Abstract]
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	$ 12,752	$ 10,593	$ 22,359	$ 30,154
Income Tax Expense (Benefit)	$ 3,559	$ 2,992	$ 6,015	$ 8,614
Effective Income Tax Rate	27.90%	28.20%	26.90%	28.60%
Valuation Allowance, Amount	$ 1,924		$ 1,924		$ 1,924

Earnings Per Share - (Details)

Earnings Per Share - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount	1	4	13	78
Stock Options Antidilutive securities excluded from computation	0	4	0	78
Restricted Stock Unit Antidilutive excluded from computation	1	0	13	0
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Weighted Average Number of Shares Outstanding, Basic	31,501	30,779	31,397	30,869
Weighted Average Number Diluted Shares Outstanding Adjustment	645	563	704	630
Dilutive Securities, Effect on Basic Earnings Per Share	$ 0	$ 412	$ 0	$ 206
Warrant Dilutive Shares	$ 0	$ 0	$ 3	$ 0
Weighted Average Number of Shares Outstanding, Diluted	32,146	31,754	32,104	31,705
Earnings (Loss) Per Share, Basic	$ 0.29	$ 0.25	$ 0.52	$ 0.70
Earnings (Loss) Per Share, Diluted	$ 0.29	$ 0.24	$ 0.51	$ 0.68

Accumulated Other Comprehensi53

Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Stockholders' Equity Attributable to Parent	$ 313,291	$ 293,735
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	1,489	2,742
Net current period other comprehensive gain (loss)	(1,253)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	(8)	37
Net current period other comprehensive gain (loss)	(45)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	1,481	$ 2,779
Net current period other comprehensive gain (loss)	(1,298)
Reclassification of accumulated other comprehensive income (loss)	$ 0

Segment Reporting (Details)

Segment Reporting (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Concentration Risk, Percentage			11.20%	1.60%
Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	47,711	34,464	$ 91,586	$ 70,922
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues	3,533	11,480	3,550	11,650
Software [Domain]
Segment Reporting Information [Line Items]
Revenues	6,895	7,780	14,394	15,202
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues	7,348	5,993	13,678	13,153
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues	1,931	2,984	4,889	6,136
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Sales [Member] | Percentage of Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	71.00%	55.00%	72.00%	61.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	5.00%	18.00%	2.00%	10.00%
Sales [Member] | Percentage of Software Revenue [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	10.00%	12.00%	11.00%	13.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	11.00%	10.00%	11.00%	11.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	3.00%	5.00%	4.00%	5.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	100.00%	100.00%	100.00%	100.00%
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 9,182	$ 5,646	$ 18,190	$ 13,034
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	20,323	14,535	34,156	36,570
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,468	3,164	6,677	6,101
CHINA
Segment Reporting Information [Line Items]
Revenues	5,904	10,824	20,005	19,649
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	1,945	14,879	5,211	21,926
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	1,444	1,674	1,559	2,545
GERMANY
Segment Reporting Information [Line Items]
Revenues	4,789	4,235	7,869	4,932
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063

Segment Reporting and Geograp55

Segment Reporting and Geographic Information Geographic Information (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	9,182	5,646	18,190	13,034
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	20,323	14,535	34,156	36,570
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,468	3,164	6,677	6,101
CHINA
Segment Reporting Information [Line Items]
Revenues	5,904	10,824	20,005	19,649
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	14,221	2,226	23,751	3,849
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	1,945	14,879	5,211	21,926
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	1,444	1,674	1,559	2,545
GERMANY
Segment Reporting Information [Line Items]
Revenues	4,789	4,235	7,869	4,932
Country Other Europe [Member]
Segment Reporting Information [Line Items]
Revenues	6,142	5,518	10,679	8,457
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063

Segment Reporting and Geograp56

Segment Reporting and Geographic Information Customer Reporting (Details)	6 Months Ended
	Jun. 30, 2017Rate	Jun. 30, 2016Rate
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	11.20%	1.60%
Major Customer Two [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	6.00%	13.40%
Major Customer Three [Member]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	0.90%	10.20%

Share Repurchase Program - (Det

Share Repurchase Program - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Share Repurchase Program [Abstract]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000		3,000
Stock Repurchased and Retired During Period, Shares	0	245	0	615
Shares available for future repurchase	711		711
Stock Repurchased During Period, Value	$ 0	$ 3,344	$ 0	$ 8,045
StockRepurchasedAndRetired-AveragePricePerShare	$ 0	$ 13.63	$ 0	$ 13.07

Subsequent Event (Details)

Subsequent Event (Details) $ in Millions	6 Months Ended
	Jun. 30, 2017USD ($)
Subsequent Events [Abstract]
Proceeds from Legal Settlements	$ 13