Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
The Board of Directors
Rudolph Technologies, Inc.:
We consent to the incorporation by reference in the registration statements (Nos. 333-132283 and 333-129773) on Form S-8 and registration statement (No. 333-54860) on Form S-3 of Rudolph Technologies, Inc. of our reports dated February 21, 2007, with respect to the consolidated balance sheets of Rudolph Technologies, Inc. and subsidiaries as of December 31, 2006 and 2005 and the related consolidated statements of operations, stockholders’ equity and comprehensive income, and cash flows for each of the years in the three-year period ended December 31, 2006, and the related consolidated financial statement schedule, and management’s assessment of the effectiveness of internal control over financial reporting as of December 31, 2006 and the effectiveness of internal control over financial reporting as of December 31, 2006, which reports appear in this December 31, 2006 annual report on Form 10-K of Rudolph Technologies, Inc.
Our report with respect to the consolidated balance sheets of Rudolph Technologies, Inc. and subsidiaries as of December 31, 2006 and 2005 and the related consolidated statements of operations, stockholders’ equity and comprehensive income, and cash flows for each of the years in the three-year period ended December 31, 2006, and the related consolidated financial statement schedule dated February 21, 2007 refers to Rudolph Technologies, Inc.’s adoption of Statement of Financial Accounting Standards No. 123(R), “Share-Based Payment”, effective January 1, 2006.
/s/ KPMG LLP
Short Hills, New Jersey
February 21, 2007