Exhibit 21
Subsidiaries of Entegris, Inc.
Name of Subsidiary | Jurisdiction |
Entegris-Jetalon Solutions, Inc. | Delaware |
Entegris Singapore Pte. Ltd. | Singapore |
Entegris Pte. Ltd. | Singapore |
Entegris Korea Ltd. | South Korea |
Pureline Co. Ltd. (1) | South Korea |
Entegris Pacific Ltd. | Delaware |
Entegris (Shanghai) Microelectronics Trading Company Ltd. | Peoples Republic of China |
Entegris International Holdings B.V. | The Netherlands |
Entegris Asia Pte. Ltd. | Singapore |
Entegris GmbH (2) | Germany |
Entegris (UK) Ltd. | United Kingdom |
Entegris Ireland Ltd. | Ireland |
Entegris SAS | France |
Entegris Israel Ltd. | Israel |
Entegris Cleaning Process (ECP) SAS | France |
Nihon Entegris K.K. | Japan |
Entegris Japan Co. Ltd. | Japan |
Entegris Taiwan Enterprise Partnership (3) | Taiwan |
Entegris Asia LLC | Delaware |
Entegris Taiwan Technologies Co. Ltd. | Taiwan |
Entegris Malaysia Sdn. Bhd. | Malaysia |
Entegris Precision Technology Corp.(4) | Taiwan |
Entegris Specialty Materials, LLC | Delaware |
Poco Graphite, Inc. | Delaware |
Poco Graphite International, Inc. | Delaware |
Poco Graphite SARL (5) | France |
(1) | Owned 37.5% by Entegris Korea Ltd. and 62.5% by registrant |
(2) | Owned 90% by Entegris International Holdings B.V. and 10% by registrant |
(3) | Owned 99% by Entegris International Holdings B.V. and 1% by registrant |
(4) | Owned 50% by Entegris International Holdings B.V. and 50% by registrant |
(5) | Owned 90% by Poco Graphite, Inc. and 10% by Poco Graphite International, Inc. |