Exhibit 21
Subsidiaries of Entegris, Inc.
| Name of Subsidiary | Jurisdiction | |
| ATMI Clean Technologies (Shanghai) Company Limited | China | |
| ATMI International Trading Co. Ltd. | China | |
| ATMI Semiconductor New Materials Xi'an Co., Ltd. | China | |
| Entegris Asia LLC | Delaware | |
| Entegris Asia Pte. Ltd. | Singapore | |
| Entegris Ecosys LLC | Delaware | |
| Entegris GmbH | Germany | |
| Entegris International Holdings B.V. | The Netherlands | |
| Entegris International Holdings II B.V. | The Netherlands | |
| Entegris International Holdings III B.V. | The Netherlands | |
| Entegris International Holdings IV LLC | Delaware | |
| Entegris International Holdings V LLC | Delaware | |
| Entegris International Holdings VI LLC | Delaware | |
| Entegris International Holdings VII LLC | The Netherlands | |
| Entegris International Holdings, Inc. | Delaware | |
| Entegris Ireland Unlimited Company | Ireland | |
| Entegris Israel Ltd. | Israel | |
| Entegris Japan Co. Ltd. | Japan | |
| Entegris Korea II Ltd. | South Korea | |
| Entegris Korea Ltd. | South Korea | |
| Entegris Malaysia Sdn. Bhd. | Malaysia | |
| Entegris (Shanghai) Microelectronics Trading Company Ltd. | China | |
| Entegris Pacific Ltd. | Delaware | |
| Entegris Professional Solutions, Inc. | Delaware | |
| Entegris Sarl | Luxembourg | |
| Entegris SAS | France | |
| Entegris Singapore Pte. Ltd. | Singapore | |
| Entegris Specialty Materials, LLC | Delaware | |
| Entegris Taiwan Enterprises Partnership | Taiwan | |
| Entegris Taiwan Holdings, Inc. | Delaware | |
| Entegris Taiwan Technologies Co. Ltd. | Taiwan | |
| Nihon Entegris G.K. | Japan | |
| Poco Graphite, Inc. | Delaware | |
| Pure Gas Colorado, Inc. | Colorado | |
| Pureline Co., Ltd. | South Korea | |
| SAES Pure Gas, Inc. | California | |