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EXHIBIT 23
Consent of Independent Registered Public Accounting Firm
We consent to the incorporation by reference in the registration statements (Nos. 333-167178, 333-203789, 333-203790, 333-211444, 333-237905, 333-53382, and 333-266040 on Form S-8, No. 333-262172 on Form S-4, and No. 333-266041 on Form S-3ASR) of our reports dated February 21, 2023, with respect to the consolidated financial statements of Entegris, Inc. and subsidiaries and the effectiveness of internal control over financial reporting.
/s/ KPMG LLP
Minneapolis, Minnesota
February 22, 2023