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- 10-K Annual report
- 10.1 2009 Rsu Unit Award Agreement
- 10.2 2009 Stock Option Award Agreement
- 10.3 First Amendment to 401(K) Savings and Profit Sharing Plan
- 10.4 Second Amendment to 401(K) Savings and Profit Sharing Plan
- 10.5 Third Amendment to 401(K) Savings and Profit Sharing Plan
- 10.6 Fourth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.7 Fifth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.8 Sixth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.9 Seventh Amendment to 401(K) Savings and Profit Sharing Plan
- 10.10 Eighth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.11 Ninth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.12 Tenth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.13 Eleventh Amendment to 401(K) Savings and Profit Sharing Plan
- 10.14 Twelfth Amendment to 401(K) Savings and Profit Sharing Plan
- 10.15 Amendment to Amended and Restated Serp
- 10.16 2010 Stock Plan
- 10.17 Third Amended and Restated Membrane Manufacture and Supply Agreement
- 21 Subsidiaries of Entegris, Inc.
- 23 Consent of Independent Registered Public Accounting Firm
- 24 Power of Attorney by the Directors of Entegris, Inc.
- 31.1 Certification Pursuant Section 302
- 31.2 Certification Pursuant Section 302
- 32.1 Certification Pursuant Section 906
- 32.2 Certification Pursuant Section 906
Exhibit 23
Consent of Independent Registered Public Accounting Firm
The Board of Directors and Shareholders
Entegris, Inc.:
We consent to the incorporation by reference in the registration statements (Nos. 333-160212 and 333-105962) on Form S-3 and (Nos. 333-127599 and 333-53382) on Form S-8 of Entegris, Inc. of our report dated February 25, 2010, with respect to the consolidated balance sheets of Entegris, Inc. as of December 31, 2009 and 2008, and the related consolidated statements of operations, equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended December 31, 2009 and the effectiveness of internal control over financial reporting as of December 31, 2009, which report appears in the December 31, 2009 annual report on Form 10-K of Entegris, Inc.
/s/ KPMG LLP
Minneapolis, Minnesota
February 25, 2010