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- 10-K Annual report
- 10.1 Thirteenth Amendment to Entegris, Inc. 401(K) Savings and Profit Sharing Plan
- 21 Subsidiaries of Entegris, Inc.
- 23 Consent of Independent Registered Public Accounting Firm
- 24 Power of Attorney by the Directors of Entegris, Inc.
- 31.1 Certification Required by Rule 13A-14(A) In Accordance with Section 302
- 31.2 Certification Required by Rule 13A-14(A) In Accordance with Section 302
- 32.1 Certification Required by Rule 13A-14(B) and 18 U.s.c. Section 1350
- 32.2 Certification Required by Rule 13A-14(B) and 18 U.s.c. Section 1350
Exhibit 23
Consent of Independent Registered Public Accounting Firm
The Board of Directors and Shareholders
Entegris, Inc.:
We consent to the incorporation by reference in the registration statements (Nos. 333-160212 and 333-105962) on Form S-3 and (Nos. 333-167178, 333-127599 and 333-53382) on Form S-8 of Entegris, Inc. of our report dated February 24, 2011, with respect to the consolidated balance sheets of Entegris, Inc. as of December 31, 2010 and 2009, and the related consolidated statements of operations, equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended December 31, 2010 and the effectiveness of internal control over financial reporting as of December 31, 2010, which report appears in the December 31, 2010 annual report on Form 10-K of Entegris, Inc.
/s/ KPMG LLP
Minneapolis, Minnesota
February 24, 2011