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Filing tables
Filing exhibits
- 10-K Annual report
- 3.1 Amended and Restated Certificate of Incorporation
- 10.1 Fourteenth Amendment to Entegris 401K Savings and Profit Sharing Plan
- 21 Subsidiaires of Entegris
- 23 Consent of Independent Registered Public Accounting Firm
- 24 Power of Attorney by the Directors of Entegris, Inc.
- 31.1 Certification Required by Rule 13A-14(A)
- 31.2 Certification Required by Rule 13A-14(A)
- 32.1 Certification Required by Rule 13A-14(B)
- 32.2 Certification Required by Rule 13A-14(B)
- CORRESP Corresp
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