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Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 14, 2011
This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:
Annual Retainers (paid quarterly in advance)
Board Member Position | Amount | |||
|---|---|---|---|---|
Lead Director | $ | 50,000 | ||
Non-Employee Board Member (not Lead Director) | $ | 30,000 | ||
Audit Committee Chair* | $ | 15,000 | ||
Compensation Committee Chair* | $ | 10,000 | ||
Nominating Committee Chair* | $ | 7,500 | ||
- *
- Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.
Meeting Fees (payable quarterly in arrears)
Meeting Type | Amount Per Meeting | |||
|---|---|---|---|---|
In Person Board Meetings | $ | 2,000 | ||
Telephone Board Meetings | $ | 1,000 | ||
In Person or Telephone Committee Meetings** | $ | 1,000 | ||
- **
- Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.
Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.