Exhibit 107
Calculation of Filing Fee Tables
Form S-3
(Form Type)
Axcelis Technologies, Inc.
(Exact Name of Registrant as Specified in its Charter)
Table 1: Newly Registered and Carry-Forward Securities
| Security Type | Security Class Title | Fee Calculation or Carry Forward Rule | Amount Registered | Proposed Maximum Offering Price Per Unit | Maximum Aggregate Offering Price | Fee Rate | Amount of Registration Fee | Carry Forward Form Type | Carry Forward File Number | Carry Forward Initial Effective Date | Filing Fee Previously Paid In Connection with Unsold Securities to be Carried Forward | |
| Newly Registered Securities | ||||||||||||
| Fees to Be Paid | Debt | Debt Securities | Rule 456(b) and Rule 457(r) (1) | (2) | (2) | (2) | (1) | (1) | ||||
| Equity | Common Stock, par value $0.001 per share | Rule 456(b) and Rule 457(r) (1) | (2) | (2) | (2) | (1) | (1) | |||||
| Equity | Preferred Stock, par value $0.001 per share | Rule 456(b) and Rule 457(r) (1) | (2) | (2) | (2) | (1) | (1) | |||||
| Other | Warrants | Rule 456(b) and Rule 457(r) (1) | (2) | (2) | (2) | (1) | (1) | |||||
| Other | Units | Rule 456(b) and Rule 457(r) (1) | (2) | (2) | (2) | (1) | (1) | |||||
| Fees Previously Paid | N/A | N/A | N/A | N/A | N/A | N/A | N/A | |||||
| Carry Forward Securities | ||||||||||||
| Carry Forward Securities | N/A | N/A | N/A | N/A | N/A | N/A | N/A | N/A | N/A | |||
| Total Offering Amount | N/A | (1) | ||||||||||
| Total Fees Previously Paid | N/A | |||||||||||
| Total Fee Offsets | N/A | |||||||||||
| Net Fee Due | (1) | |||||||||||
(1) In accordance with Rules 456(b) and 457(r) under the Securities Act of 1933, as amended, Axcelis Technologies, Inc. (the “Registrant”) is deferring payment of all of the registration fee. Registration fees will be paid subsequently on a “pay as you go” basis. The Registrant will calculate the registration fee applicable to an offer of securities pursuant to this Registration Statement based on the fee payment rate in effect on the date of such fee payment.
(2) An indeterminate aggregate initial offering price, principal amount or number of the securities of each identified class is being registered as may from time to time be issued at indeterminate prices or upon conversion, exchange or exercise of securities registered hereunder to the extent any such securities are, by their terms, convertible into, or exchangeable or exercisable for, such securities. Securities registered hereunder may be sold either separately or as units comprised of more than one type of security registered hereunder. Separate consideration may or may not be received for securities that are issuable on exercise, conversion or exchange of other securities or that are issued in units.
