Exhibit 10.13
Non‑Employee Director Cash Compensation at March 11, 2019
This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non‑employee directors. Axcelis provides both cash retainers to its non‑employee directors, as follows:
|
|
Annual Cash Retainers, paid quarterly in advance
| |
Board Member Retainer | $50,000 |
Independent Chairman Premium | $20,000 |
Committee Chair Retainers |
|
Audit Committee Chairman | $20,000 |
Compensation Committee Chairman | $15,000 |
Nominating and Governance Committee Chairman | $10,000 |
Technology and Product Development Committee Chairman | $10,000 |
Committee Member (not Chairman) Retainers |
|
Audit Committee Member | $10,000 |
Compensation Committee Member | $7,500 |
Nominating and Governance Committee Member | $5,000 |
Technology and Product Development Committee Member | $5,000 |
Non‑employee directors also receive reimbursement of out‑of‑pocket expenses incurred in attending Board and committee meetings. Non‑employee directors do not receive any Company‑paid perquisites.
The Board of Directors may, from time to time, form committees in addition to the Audit, Compensation, Nominating and Governance and Technology and Product Development Committees and set compensation for service on such additional committees.