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Exhibit 21.1
Axcelis Technologies, Inc.
Exhibit 21.1 to Form 10-K for the year ended December 31, 2022
Subsidiaries
The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:
Domestic Subsidiaries
1. | Axcelis Technologies (Israel) Inc., a Delaware corporation |
European Subsidiaries
2. | Axcelis Technologies GmbH (Germany) |
3. | Axcelis Technologies, Srl (Italy) |
4. | Axcelis Technologies, Sarl (France) |
Asian Subsidiaries
5. | Axcelis Technologies, KK (Japan) |
6. | Axcelis Technologies Limited (Korea) |
7. | Axcelis Technologies, Ltd. (Taiwan) |
8. | Axcelis Technologies Pte. Ltd. (Singapore) |
9. | Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China) |
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