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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in Registration Statements No. 333-167530, 333-165782, 333-158108, 333-151335, 333-141989, 333-135147, 333-123820 and 333-114051 on Form S-8 and Registration Statement No. 333-172262 on Form S-3 of our report dated March 13, 2013, relating to the consolidated financial statements of Ultra Clean Holdings, Inc. and subsidiaries (the “Company”), and the effectiveness of the Company’s internal control over financial reporting appearing in the Annual Report on Form 10-K of the Company for the year ended December 28, 2012.
/s/ Deloitte & Touche LLP
San Jose, California
March 13, 2013