| Pay vs Performance Disclosure | 12 Months Ended |
| Sep. 30, 2023 USD ($) | Oct. 01, 2022 USD ($) | Oct. 02, 2021 USD ($) |
| Pay vs Performance Disclosure | | | |
| Pay vs Performance Disclosure, Table | Fiscal Year Summary Compensation Table Total for PEO Compensation Actually Paid to PEO Average Summary Compensation Table Total for non-PEO NEOs Average Compensation Actually Paid to non-PEO NEOs Total Shareholder Return Peer Group Total Shareholder Return Net Income Relative TSR Percentile (a) (b) 1 (c) 2 (d) 3 (e) 2 (f) 4 (g) 4 (h) 5 (i) 6 2023 $6,877,217 $10,185,047 $1,317,779 $1,778,426 $231.47 $240.05 $57.00 65th Percentile 2022 $6,221,903 $(5,007,404) $1,451,465 $168,428 $180.65 $145.24 $433.55 47th Percentile 2021 $6,351,696 $35,208,977 $1,447,828 $4,703,718 $271.25 $182.64 $367.16 95th Percentile | | |
| Company Selected Measure Name | Relative Total Shareholder Return | | |
| Named Executive Officers, Footnote | The dollar amounts reported in column (d) represent the average of the amounts reported for the Company’s named executive officers (NEOs) as a group in the “Total” column of the Summary Compensation Table in each applicable year. The names of each of the NEOs included for purposes of calculating the average amounts in each applicable year are as follows: 2023 Lester Alfred Wong, Chan Pin Chong, Nelson Wong, and Robert Chylak 2022 Lester Alfred Wong, Chan Pin Chong, Nelson Wong, and Robert Chylak 2021 Lester Alfred Wong, Chan Pin Chong, Nelson Wong, and Stephen Ray Drake | | |
| Peer Group Issuers, Footnote | TSR determined in Column (f) is based on the value of an initial fixed investment of $100 in our Company's stock (NASDAQ: KLIC) as of October 2, 2020. TSR determined in Column (g) is based on the value of an initial fixed investment of $100 in the S&P 600 Semiconductor Materials & Equipment Index as of October 2, 2020. | | |
| PEO Total Compensation Amount | $ 6,877,217 | $ 6,221,903 | $ 6,351,696 |
| PEO Actually Paid Compensation Amount | $ 10,185,047 | (5,007,404) | 35,208,977 |
| Adjustment To PEO Compensation, Footnote | The dollar amounts reported in column (c) and (e) represent the amount of “compensation actually paid” (otherwise known as CAP), as computed in accordance with the applicable SEC rules. “Compensation actually paid” does not necessarily represent cash and/or equity value transferred to the applicable NEO without restriction, but rather is a value calculated under applicable SEC rules. We do not have a defined benefit plan so no adjustment for pension benefits is included in the table below. Similarly, no adjustment is made for dividends as dividends are factored into the fair value of the award. The following table details these adjustments: Fiscal SCT Grant Date Year End Change in Change in Prior Year End Total Fair Value CAP (a) (b) (i) (ii) (iii) (iv) (c) (d) 2023 PEO $6,877,217 $5,576,880 $6,180,977 $2,045,776 $657,957 $0 $8,884,710 $10,185,047 NEOs $1,317,779 $760,537 $868,236 $271,086 $81,863 $0 $1,221,184 $1,778,426 2022 PEO $6,221,903 $4,131,665 $3,801,363 $(8,943,599) $(1,955,407) $0 $(7,097,642) $(5,007,404) NEOs $1,451,465 $670,322 $594,563 $(1,090,746) $(116,532) $0 $(612,715) $168,428 2021 PEO $6,351,696 $3,837,192 $13,161,605 $18,908,278 $624,591 $0 $32,694,473 $35,208,977 NEOs $1,447,828 $555,521 $1,791,823 $1,897,768 $121,819 $0 $3,811,410 $4,703,718 (a) The dollar amounts reported in the Summary Compensation Table for the applicable year. (i-iv) The recalculated value of equity awards for each applicable year includes the addition of the following: (i) Fair Value at Fiscal Year-End of Outstanding and Unvested Option Awards and Stock Awards Granted in Fiscal Year; (ii) Change in Fair Value of Outstanding and Unvested Option Awards and Stock Awards Granted in Prior Fiscal Years from the end of the prior Fiscal Year to the end of the current Fiscal Year; (iii) Change in Fair Value as of Vesting Date (compared to prior Fiscal Year End) of Option Awards and Stock Awards Granted in the Current Year and Prior Fiscal Years For Which Applicable Vesting Conditions Were Satisfied During Fiscal Year; (iv) Fair Value as of Prior Fiscal Year-End of Option Awards and Stock Awards Granted in Prior Fiscal Years That Failed to Meet Applicable Vesting Conditions During Fiscal Year. (c) “Total Fair Value Adjustments” is equal to the sum of items (i-iv) and represents the cumulative change in Fair Value across all outstanding, vested, and cancelled awards during the fiscal year. (d) “Compensation Actually Paid” does not necessarily represent cash and/or equity value transferred to the applicable NEO without restriction, but rather is a value calculated under applicable SEC rules and is equal to (a) – (b) + (c) | | |
| Non-PEO NEO Average Total Compensation Amount | $ 1,317,779 | 1,451,465 | 1,447,828 |
| Non-PEO NEO Average Compensation Actually Paid Amount | $ 1,778,426 | 168,428 | 4,703,718 |
| Adjustment to Non-PEO NEO Compensation Footnote | The dollar amounts reported in column (c) and (e) represent the amount of “compensation actually paid” (otherwise known as CAP), as computed in accordance with the applicable SEC rules. “Compensation actually paid” does not necessarily represent cash and/or equity value transferred to the applicable NEO without restriction, but rather is a value calculated under applicable SEC rules. We do not have a defined benefit plan so no adjustment for pension benefits is included in the table below. Similarly, no adjustment is made for dividends as dividends are factored into the fair value of the award. The following table details these adjustments: Fiscal SCT Grant Date Year End Change in Change in Prior Year End Total Fair Value CAP (a) (b) (i) (ii) (iii) (iv) (c) (d) 2023 PEO $6,877,217 $5,576,880 $6,180,977 $2,045,776 $657,957 $0 $8,884,710 $10,185,047 NEOs $1,317,779 $760,537 $868,236 $271,086 $81,863 $0 $1,221,184 $1,778,426 2022 PEO $6,221,903 $4,131,665 $3,801,363 $(8,943,599) $(1,955,407) $0 $(7,097,642) $(5,007,404) NEOs $1,451,465 $670,322 $594,563 $(1,090,746) $(116,532) $0 $(612,715) $168,428 2021 PEO $6,351,696 $3,837,192 $13,161,605 $18,908,278 $624,591 $0 $32,694,473 $35,208,977 NEOs $1,447,828 $555,521 $1,791,823 $1,897,768 $121,819 $0 $3,811,410 $4,703,718 (a) The dollar amounts reported in the Summary Compensation Table for the applicable year. (b) The grant date fair value of equity awards represents the total of the amounts reported in the “Stock Awards” column in the Summary Compensation Table for the applicable year. (i-iv) The recalculated value of equity awards for each applicable year includes the addition of the following: (i) Fair Value at Fiscal Year-End of Outstanding and Unvested Option Awards and Stock Awards Granted in Fiscal Year; (ii) Change in Fair Value of Outstanding and Unvested Option Awards and Stock Awards Granted in Prior Fiscal Years from the end of the prior Fiscal Year to the end of the current Fiscal Year; (iii) Change in Fair Value as of Vesting Date (compared to prior Fiscal Year End) of Option Awards and Stock Awards Granted in the Current Year and Prior Fiscal Years For Which Applicable Vesting Conditions Were Satisfied During Fiscal Year; (iv) Fair Value as of Prior Fiscal Year-End of Option Awards and Stock Awards Granted in Prior Fiscal Years That Failed to Meet Applicable Vesting Conditions During Fiscal Year. (c) “Total Fair Value Adjustments” is equal to the sum of items (i-iv) and represents the cumulative change in Fair Value across all outstanding, vested, and cancelled awards during the fiscal year. (d) “Compensation Actually Paid” does not necessarily represent cash and/or equity value transferred to the applicable NEO without restriction, but rather is a value calculated under applicable SEC rules and is equal to (a) – (b) + (c) | | |
| Compensation Actually Paid vs. Total Shareholder Return | TSR amounts reported in the graph assume an initial fixed investment of $100, and that all dividends, if any, were reinvested. The following chart illustrates a comparison of our Company's cumulative TSR, the peer group TSR and CAP. CAP values are aligned with the stock price performance of our Company and reflect the Company's use of equity incentives that are directly related to stock price performance. | | |
| Compensation Actually Paid vs. Net Income | The following chart illustrates a comparison of our Company's Net Income and CAP: | | |
| Compensation Actually Paid vs. Company Selected Measure | The following chart illustrates a comparison of our Company's relative TSR Percentile across each fiscal year relative to CAP: | | |
| Total Shareholder Return Vs Peer Group | TSR amounts reported in the graph assume an initial fixed investment of $100, and that all dividends, if any, were reinvested. The following chart illustrates a comparison of our Company's cumulative TSR, the peer group TSR and CAP. CAP values are aligned with the stock price performance of our Company and reflect the Company's use of equity incentives that are directly related to stock price performance. | | |
| Tabular List, Table | Financial Performance Measure Relative Total Shareholder Return Operating Margin Organic Revenue Growth | | |
| Total Shareholder Return Amount | $ 231.47 | 180.65 | 271.25 |
| Peer Group Total Shareholder Return Amount | 240.05 | 145.24 | 182.64 |
| Net Income (Loss) | $ 57,000,000 | $ 433,550,000 | $ 367,160,000 |
| Company Selected Measure Amount | 0.65 | 0.47 | 0.95 |
| PEO Name | Fusen Chen | | |
| Additional 402(v) Disclosure | The dollar amounts reported in column (b) are the amounts of total compensation reported for PEO (Dr. Chen) for each corresponding year in the “Total” column of the Summary Compensation Table. | | |
| Measure:: 1 | | | |
| Pay vs Performance Disclosure | | | |
| Name | Relative Total Shareholder Return | | |
| Non-GAAP Measure Description | We have selected Relative Total Shareholder Return (rTSR) as our Company Selected Measure, which is the most important financial measure that links company performance with Compensation Actually Paid. The calculations within this column represent the 1-year Relative TSR percentile of our Company as compared against the same peer group as defined in the most recent fiscal year relative TSR PSU agreement. | | |
| Measure:: 2 | | | |
| Pay vs Performance Disclosure | | | |
| Name | Operating Margin | | |
| Measure:: 3 | | | |
| Pay vs Performance Disclosure | | | |
| Name | Organic Revenue Growth | | |
| PEO | Equity Awards Reported Value [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation, Amount | $ 5,576,880 | $ 4,131,665 | $ 3,837,192 |
| PEO | Equity Awards Granted During the Year, Unvested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 6,180,977 | 3,801,363 | 13,161,605 |
| PEO | Equity Awards Granted in Prior Years, Unvested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 2,045,776 | (8,943,599) | 18,908,278 |
| PEO | Equity Awards, Vested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 657,957 | (1,955,407) | 624,591 |
| PEO | Equity Awards that Failed to Meet Vesting Conditions [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 0 | 0 | 0 |
| PEO | Equity Award Adjustments [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation, Amount | 8,884,710 | (7,097,642) | 32,694,473 |
| Non-PEO NEO | Equity Awards Reported Value [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation, Amount | 760,537 | 670,322 | 555,521 |
| Non-PEO NEO | Equity Awards Granted During the Year, Unvested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 868,236 | 594,563 | 1,791,823 |
| Non-PEO NEO | Equity Awards Granted in Prior Years, Unvested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 271,086 | (1,090,746) | 1,897,768 |
| Non-PEO NEO | Equity Awards, Vested [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 81,863 | (116,532) | 121,819 |
| Non-PEO NEO | Equity Awards that Failed to Meet Vesting Conditions [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation Amount, Equity Awards | 0 | 0 | 0 |
| Non-PEO NEO | Equity Award Adjustments [Member] | | | |
| Pay vs Performance Disclosure | | | |
| Adjustment to Compensation, Amount | $ 1,221,184 | $ (612,715) | $ 3,811,410 |
