| Document and Entity Information | 12 Months Ended |
| Dec. 31, 2022 | |
| Document Information [Line Items] | |
| Document Type | DEF 14A |
| Amendment Flag | false |
| Entity Information [Line Items] | |
| Entity Registrant Name | Onto Innovation Inc. |
| Entity Central Index Key | 0000704532 |
| Pay vs Performance Disclosure | 12 Months Ended | ||
| Dec. 31, 2022 USD ($) shares | Dec. 31, 2021 USD ($) shares | Dec. 31, 2020 USD ($) shares | |
| Pay vs Performance Disclosure [Table] | |||
| Pay vs Performance [Table Text Block] | We are required by SEC rules to disclose the following information regarding compensation paid to our NEOs. The amounts set forth below under the headings “Compensation Actually Paid to CEO” and “Average Compensation Actually Paid for NEOs” have been calculated in a manner consistent with Item 402(v) of Regulation S-K. Footnotes (4), (5) and (6) below set forth the adjustments from the Total Compensation for each NEO reported in the Summary Compensation Table above. The following table sets forth additional compensation information of our Chief Executive Officer (CEO) and our non-CEO NEOs along with total shareholder return, net income and total revenue performance results for fiscal years 2020, 2021 and 2022. Average Summary Average Value of Initial Fixed $100 Investment Based on: Year (1) Summary Compensation Table for CEO Compensation Actually Paid to CEO (2)(3) Compensation Table Total for NEOs Compensation Actually Paid to NEOs (2)(3) Total Shareholder Return (7) Peer Group Total Shareholder Return (7) Net Income Total Revenue 2022 $ 5,313,301 $ 2,086,925 $ 1,129,974 $ 711,974 $ 86.27 $ 42.98 $ 223,334 $ 1,005,183 2021 $ 5,134,310 $ 13,985,674 $ 1,069,940 $ 2,149,621 $ 176.97 $ 125.09 $ 142,349 $ 788,899 2020 $ 3,763,688 $ 4,453,187 $ 934,489 $ 1,463,581 $ 30.11 $ 56.09 $ 31,025 $ 556,496 | ||
| Named Executive Officers, Footnote [Text Block] | (1) The CEO and NEOs included in the above compensation columns reflect the following: Year CEO NEOs 2022 Michael P. Plisinski Mark R. Slicer, James (Cody) Harlow, Robert Fiordalice, Yoon Ah E. Oh, Steven R. Roth 2021 Michael P. Plisinski Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch, Yoon Ah E. Oh 2020 Michael P. Plisinski Steven R. Roth, Rollin Kocher, Kevin Heidrich, Robert A. Koch | ||
| Peer Group Issuers, Footnote [Text Block] | (7) Company and Peer Group TSR reflects the Company’s peer group (PHLX Semiconductor Index) as reflected in our Annual Report on the Form 10-K pursuant to Item 201(e) of Regulation S-K for the fiscal year ended December 31, 2022. Each year reflects what the cumulative value of $100 would be, including the reinvestment of dividends, if such amount were invested on December 31, 2019. | ||
| PEO Total Compensation Amount | $ 5,313,301 | $ 5,134,310 | $ 3,763,688 |
| PEO Actually Paid Compensation Amount | $ 2,086,925 | $ 13,985,674 | $ 4,453,187 |
| Adjustment To PEO Compensation, Footnote [Text Block] | (4) 2022 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2022 Summary Compensation Table (SCT) $ 5,313,301 $ 1,129,974 Less, Value of Stock & Option Awards Reported in SCT ($3,977,905) ($577,372) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 2,764,863 $ 436,885 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested ($2,584,704) ($143,057) Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 571,370 ($134,457) Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments ($3,226,376) ($418,000) “Compensation Actually Paid” for Fiscal Year 2022 $ 2,086,925 $ 711,974 | (5) 2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2021 Summary Compensation Table (SCT) $ 5,134,310 $ 1,069,940 Less, Value of Stock & Option Awards Reported in SCT ($3,487,747) ($533,902) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 6,761,134 $ 879,706 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested $ 5,241,435 $ 665,069 Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 336,542 $ 68,807 Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments $ 8,851,364 $ 1,079,680 “Compensation Actually Paid” for Fiscal Year 2021 $ 13,985,674 $ 2,149,621 | (6) 2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2020 Summary Compensation Table (SCT) $ 3,763,688 $ 934,489 Less, Value of Stock & Option Awards Reported in SCT ($2,672,777) ($435,715) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 2,941,125 $ 479,458 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested $ 318,972 $ 487,384 Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 102,179 ($2,036) Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments $ 689,499 $ 529,092 “Compensation Actually Paid” for Fiscal Year 2020 $ 4,453,187 $ 1,463,581 |
| Non-PEO NEO Average Total Compensation Amount | $ 1,129,974 | $ 1,069,940 | $ 934,489 |
| Non-PEO NEO Average Compensation Actually Paid Amount | $ 711,974 | $ 2,149,621 | $ 1,463,581 |
| Adjustment to Non-PEO NEO Compensation Footnote [Text Block] | 2022 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2022 Summary Compensation Table (SCT) $ 5,313,301 $ 1,129,974 Less, Value of Stock & Option Awards Reported in SCT ($3,977,905) ($577,372) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 2,764,863 $ 436,885 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested ($2,584,704) ($143,057) Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 571,370 ($134,457) Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments ($3,226,376) ($418,000) “Compensation Actually Paid” for Fiscal Year 2022 $ 2,086,925 $ 711,974 | (5) 2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2021 Summary Compensation Table (SCT) $ 5,134,310 $ 1,069,940 Less, Value of Stock & Option Awards Reported in SCT ($3,487,747) ($533,902) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 6,761,134 $ 879,706 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested $ 5,241,435 $ 665,069 Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 336,542 $ 68,807 Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments $ 8,851,364 $ 1,079,680 “Compensation Actually Paid” for Fiscal Year 2021 $ 13,985,674 $ 2,149,621 | (6) 2021 “Compensation Actually Paid” to the CEO and the average “Compensation Actually Paid” to the NEOs reflect the following adjustments from Total Compensation reported in the Summary Compensation Table: CEO Average of NEOs Total Reported in 2020 Summary Compensation Table (SCT) $ 3,763,688 $ 934,489 Less, Value of Stock & Option Awards Reported in SCT ($2,672,777) ($435,715) Less, Change in Pension Value and Non-Qualified Deferred Compensation Earnings in SCT — — Plus, Pension Service Cost and impact of Pension Plan Amendments — — Plus, Year-End value of Awards Granted in Fiscal Year that are Unvested and Outstanding $ 2,941,125 $ 479,458 Plus, Change in Fair Value of Prior Year awards that are Outstanding and Unvested $ 318,972 $ 487,384 Plus, FMV of Awards Granted this Year and that Vested this Year — — Plus, Change in Fair Value (from Prior Year-End) of Prior Year awards that Vested this year $ 102,179 ($2,036) Less, Prior Year Fair Value of Prior Year awards that failed to vest this year — — Total Adjustments $ 689,499 $ 529,092 “Compensation Actually Paid” for Fiscal Year 2020 $ 4,453,187 $ 1,463,581 |
| Equity Valuation Assumption Difference, Footnote [Text Block] | (2) Fair value or change in fair value, as applicable, of equity awards in the “Compensation Actually Paid” columns was determined by reference to (1) for RSU awards, closing price on applicable year-end dates or, in the case of vesting dates, the actual vesting price, (2) for TSR-based PSU awards, the fair value calculated by a Monte Carlo simulation model as of the applicable year-end date(s) or, in the case of vesting date, the actual vesting price and probability of achievement. | ||
| Tabular List [Table Text Block] | Pay versus Performance Tabular List The table below lists our most important performance measures used to link “Compensation Actually Paid” for our TotalRevenueNEOs to company performance, over the fiscal year ending December 31, 2022. Both Total Revenue and Operating Income factor into the annual cash incentive compensation paid to NEOs and Company TSR over two- and three-year measurement periods determine the ultimate value of PSUs awarded to NEOs. For a further discussion of how each of these financial measures relates to NEO compensation, see our “Compensation Discussion and Analysis” beginning on page 26 of this Proxy Statement. The performance measures included in this table are not ranked by relative importance. Most Important Financial Measures Total Revenue Operating Income TSR | ||
| Total Shareholder Return Amount | $ 86.27 | $ 176.97 | $ 30.11 |
| Peer Group Total Shareholder Return Amount | 42.98 | 125.09 | 56.09 |
| Net Income (Loss) | $ 223,334 | 142,349 | 31,025 |
| Additional 402(v) Disclosure [Text Block] | We chose Total Revenue as our Company Selected Measure for evaluating Pay versus Performance because it is a key metric, along with operating income, in determining the annual cash incentive compensation paid to the CEO and other NEOs. It also highlights the rapid growth of the Company over the last three years. Our TSR lagged the TSR for our peer group in 2020 but increased significantly in 2021 both in terms of real dollars and in relation to our peer group TSR, which our TSR exceeded by approximately 40%. In 2022, the dollar value of our TSR dropped but was nonetheless over 100% greater than our peer group TSR. There is a positive relationship between TSR and “Compensation Actually Paid” to our CEO and the other NEOs between 2020 and 2021, when both metrics increased, and between 2021 and 2022, when both metrics dropped, despite our TSR equaling approximately twice our peer group TSR. There is a positive relationship between Net Income and “Compensation Actually Paid” to our CEO and the other NEOs between 2020 and 2021, when both metrics increased. There is an inverse relationship between Net Income and “Compensation Actually Paid” to our CEO and the other NEOs between 2021 and 2020 when Net Income increased, but “Compensation Actually Paid” decreased. Similarly, from 2020 to 2021 there is a positive relationship between Total Revenue and “Compensation Actually Paid”, when both metrics increased, and an inverse relationship between 2021 and 2020 when Total Revenue increased, but “Compensation Actually Paid” to our CEO and the other NEOs decreased. | ||
| Total Revenue | $ 1,005,183 | $ 788,899 | $ 556,496 |
| Year End Stock Price | shares | 68.09 | 101.23 | 48.02 |
| Stock Price Performance | 0.327 | 1.108 | 0.010 |
| Measure [Axis]: 1 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Total Revenue | ||
| Measure [Axis]: 2 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | Operating Income | ||
| Measure [Axis]: 3 | |||
| Pay vs Performance Disclosure [Table] | |||
| Measure Name | TSR | ||
| PEO [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | $ (3,226,376) | $ 8,851,364 | $ 689,499 |
| PEO [Member] | Value Of Stock And Option Awards In Summary Compensation Table Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (3,977,905) | (3,487,747) | (2,672,777) |
| PEO [Member] | Change In Pension Value And Non Qualified Deferred Compensation Earnings Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| PEO [Member] | Pension Service Cost And Impact Of Pension Plan Adjustments Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| PEO [Member] | Year End Value Of Awards Granted In Fiscal Year That Are Unvested And Outstanding Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 2,764,863 | 6,761,134 | 2,941,125 |
| PEO [Member] | Change In Fair Value Of Prior Year Awards That Are Outstanding And Unvested Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (2,584,704) | 5,241,435 | 318,972 |
| PEO [Member] | F M V Of Awards Granted This Year And That Vested This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| PEO [Member] | Change In Fair Value From Prior Year End Of Prior Year Awards That Vested This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 571,370 | 336,542 | 102,179 |
| PEO [Member] | Prior Year Fair Value Of Prior Year Awards That Failed To Vest This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| Non-PEO NEO [Member] | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (418,000) | 1,079,680 | 529,092 |
| Non-PEO NEO [Member] | Value Of Stock And Option Awards In Summary Compensation Table Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (577,372) | (533,902) | (435,715) |
| Non-PEO NEO [Member] | Change In Pension Value And Non Qualified Deferred Compensation Earnings Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| Non-PEO NEO [Member] | Pension Service Cost And Impact Of Pension Plan Adjustments Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| Non-PEO NEO [Member] | Year End Value Of Awards Granted In Fiscal Year That Are Unvested And Outstanding Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | 436,885 | 879,706 | 479,458 |
| Non-PEO NEO [Member] | Change In Fair Value Of Prior Year Awards That Are Outstanding And Unvested Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (143,057) | 665,069 | 487,384 |
| Non-PEO NEO [Member] | F M V Of Awards Granted This Year And That Vested This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
| Non-PEO NEO [Member] | Change In Fair Value From Prior Year End Of Prior Year Awards That Vested This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | (134,457) | 68,807 | (2,036) |
| Non-PEO NEO [Member] | Prior Year Fair Value Of Prior Year Awards That Failed To Vest This Year Member | |||
| Pay vs Performance Disclosure [Table] | |||
| Adjustment to Compensation Amount | |||
