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- 10-K Annual report
- 10.5 Registrant's 2000 Director Stock Option Plan
- 10.8 Registrant's 2005 Equity Incentive Plan
- 10.14 Employment Agreement Between Gary C. Schaefer and the Registrant
- 21 Subsidiaries of the Registrant
- 23.1 Consent of Bdo Seidman, LLP
- 31.1 Certification of Timothy J. Stultz, Peo of the Registrant
- 31.2 Certification of Gary C. Schaefer, Pfo of the Registrant
- 32.1 Certification of Peo & Pfo of the Registrant Pursuant to Section 906
Exhibit 23.1
Consent of Independent Registered Public Accounting Firm
Nanometrics Incorporated
Milpitas, California
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557 and 333-149339) of Nanometrics Incorporated of our reports dated March 13, 2008, relating to the consolidated financial statements, financial statement schedule, and the effectiveness of Nanometrics Incorporated’s internal control over financial reporting, which appear in this Form 10-K. Our report on the effectiveness of the Company’s internal control over financial reporting expresses an adverse opinion on the effectiveness of the Company’s internal control over financial reporting as of December 29, 2007.
/s/ BDO Seidman, LLP
San Francisco, California
March 13, 2008