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Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name | Jurisdiction in which incorporated | |
Tempress Systems, Inc. | State of Texas | |
Tempress Group Holding B. V. | The Netherlands | |
Tempress Holdings B.V. | The Netherlands | |
Tempress Systems B.V. | The Netherlands | |
Tempress Manufacturing B.V. | The Netherlands | |
Tempress Engineering B.V. | The Netherlands | |
Tempress Onroerend Goed B.V | The Netherlands | |
Tempress IP B.V. | The Netherlands | |
Tempress Asia Holding BV | The Netherlands | |
Tempress Hong Kong Limited | Hong Kong | |
P.R. Hoffman Machine Products, Inc | State of Arizona | |
Bruce Technologies, Inc | State of Massachusetts | |
Bruce Technologies Europe GmbH | Federal Republic of Germany | |
R2D Automation SAS | France | |
Shanghai Kingstone Semiconductor Ltd. | China | |
Kingstone Technology Hong Kong Ltd. | Hong Kong | |
KingCore Technology | China | |
Amtech Tempress New Energy Technologies Limited | China |