Amtech Systems (ASYS) 10-K 11 Dec 13 2013 FY Annual report Financial data

Document_and_Entity_Informatio

Document and Entity Information (USD $)	12 Months Ended
In Thousands, except Share data, unless otherwise specified	Sep. 30, 2013	Dec. 02, 2013	Mar. 31, 2013
Document and Entity Information [Abstract]	'	'	'
Entity Registrant Name	'AMTECH SYSTEMS INC	'	'
Entity Central Index Key	'0000720500	'	'
Current Fiscal Year End Date	'--09-30	'	'
Entity Filer Category	'Non-accelerated Filer	'	'
Document Type	'10-K	'	'
Document Period End Date	30-Sep-13	'	'
Document Fiscal Year Focus	'2013	'	'
Document Fiscal Period Focus	'FY	'	'
Amendment Flag	'false	'	'
Entity Common Stock, Shares Outstanding	'	9,565,500	'
Entity Well-known Seasoned Issuer	'No	'	'
Entity Voluntary Filers	'No	'	'
Entity Current Reporting Status	'Yes	'	'
Entity Public Float	'	'	$34,129

Consolidated_Balance_Sheets

Consolidated Balance Sheets (USD $)	Sep. 30, 2013	Sep. 30, 2012
In Thousands, unless otherwise specified
Current Assets	'	'
Cash and cash equivalents	$37,197	$46,726
Restricted cash	5,134	4,644
Accounts receivable	'	'
Trade (less allowance for doubtful accounts of $638 and $517 at September 30, 2013 and September 30, 2012, respectively)	4,829	7,486
Unbilled and other	3,194	10,807
Inventories	22,001	25,670
Deferred income taxes	1,330	3,460
Refundable income taxes	7,580	0
Other	2,930	2,650
Total current assets	84,195	101,443
Property, Plant and Equipment - Net	11,066	12,387
Deferred income taxes - Long Term	1,260	470
Other Assets - Long Term	2,443	2,271
Intangible Assets - Net	3,502	4,096
Goodwill	8,481	8,355
Total Assets	110,947	129,022
Current Liabilities	'	'
Accounts payable	5,472	5,780
Accrued compensation and related taxes	3,778	5,311
Accrued warranty expense	1,454	2,687
Deferred profit	3,067	10,236
Customer deposits	11,253	3,958
Other accrued liabilities	10,140	7,499
Income taxes payable	6,170	7,140
Total current liabilities	41,334	42,611
Income Taxes Payable Long-term	2,810	2,360
Total Liabilities	44,144	44,971
Commitments and Contingencies	'	'
Stockholders' Equity	'	'
Preferred stock; 100,000,000 shares authorized; none issued	0	0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 9,550,809 and 9,483,588 at September 30, 2013 and September 30, 2012, respectively	96	95
Additional paid-in capital	79,610	77,377
Accumulated other comprehensive loss	-4,556	-6,817
Retained earnings (deficit)	-8,004	12,065
Total Stockholders' Equity	67,146	82,720
Noncontrolling interest	-343	1,331
Total Equity	66,803	84,051
Total Liabilities and Stockholders' Equity	$110,947	$129,022

Consolidated_Balance_Sheets_Pa

Consolidated Balance Sheets (Parenthetical) (USD $)	Sep. 30, 2013	Sep. 30, 2012
In Thousands, except Share data, unless otherwise specified
Current Assets	'	'
Allowance for doubtful accounts	$638	$517
Stockholders' Equity	'	'
Common stock, par value (in usd per share)	$0.01	$0.01
Common stock, shares authorized	100,000,000	100,000,000
Common stock, shares issued	9,550,809	9,483,588
Common stock, shares outstanding	9,550,809	9,483,588
Preferred stock, shares authorized	100,000,000	100,000,000
Preferred stock, shares issued	0	0

Consolidated_Statements_of_Ope

Consolidated Statements of Operations (USD $)	12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Income Statement [Abstract]	'	'	'
Revenue, net of returns and allowances	$34,798	$81,539	$246,705
Cost of sales	26,833	59,511	154,881
Write-down of inventory	3,652	10,380	1,167
Losses on inventory purchase commitments	0	2,455	0
Gross profit	4,313	9,193	90,657
Selling, general and administrative	16,830	23,055	43,739
Research and development	6,594	13,694	5,784
Impairment and restructuring charges	883	5,428	0
Expense related to reacquired shares	0	0	2,855
Operating income (loss)	-19,994	-32,984	38,279
Interest and other income, net	147	66	30
Income (loss) before income taxes	-19,847	-32,918	38,309
Income tax provision (benefit)	1,860	-5,320	16,190
Net income (loss)	-21,707	-27,598	22,119
Add: net loss attributable to noncontrolling interest	1,638	4,567	763
Net income (loss) attributable to Amtech Systems, Inc.	($20,069)	($23,031)	$22,882
Income (Loss) Per Share:	'	'	'
Basic income (loss) per share attributable to Amtech shareholders (dollars per share)	($2.11)	($2.43)	$2.41
Weighted average shares outstanding (in shares)	9,529	9,471	9,480
Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)	($2.11)	($2.43)	$2.34
Weighted average shares outstanding (in shares)	9,529	9,471	9,764

Consolidated_Statements_of_Com

Consolidated Statements of Comprehensive Income Statement (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Statement of Other Comprehensive Income [Abstract]	'	'	'
Net income (loss)	($21,707)	($27,598)	$22,119
Foreign currency translation adjustment	2,225	-4,853	-1,136
Comprehensive income (loss)	-19,482	-32,451	20,983
Comprehensive loss attributable to noncontrolling interest	1,674	4,681	803
Comprehensive income (loss) attributable to Amtech Systems, Inc.	($17,808)	($27,770)	$21,786

Consolidated_Statments_of_Stoc

Consolidated Statments of Stockholders' Equity (USD $)	Total	Common Stock	Additional Paid-in Capital	Accumulated Other Comprehensive Income (Loss)	Retained Earnings	Total Stockholders' Equity	Non-controlling Interest
In Thousands, except Share data, unless otherwise specified
Beginning balance at Sep. 30, 2010	$84,243	$92	$72,919	($982)	$12,214	$84,243	$0
Beginning balance, shares at Sep. 30, 2010	'	9,210,000	'	'	'	'	'
Increase (Decrease) in Stockholders' Equity [Roll Forward]	'	'	'	'	'	'	'
Net income (loss)	22,119	'	'	'	22,882	22,882	-763
Translation adjustment	-1,136	'	'	-1,096	'	-1,096	-40
Deferred tax asset recorded due to legal reorganization	4,025	'	4,025	'	'	4,025	'
Acquired interest in Kingstone, shares	'	153,000	'	'	'	'	'
Acquired interest in Kingstone	10,650	2	3,833	'	'	3,835	6,815
Share repurchase, shares	'	-153,000	'	'	'	'	'
Share repurchase	-1,225	-2	-1,223	'	'	-1,225	'
Tax benefit (deficiency) of stock compensation	855	'	855	'	'	855	'
Stock compensation expense	1,470	'	1,470	'	'	1,470	'
Restricted shares released, shares	'	43,000	'	'	'	'	'
Stock options exercised, shares	'	178,000	'	'	'	'	'
Stock options exercised	1,330	2	1,328	'	'	1,330	'
Ending balance at Sep. 30, 2011	122,331	94	83,207	-2,078	35,096	116,319	6,012
Ending balance, shares at Sep. 30, 2011	'	9,431,000	'	'	'	'	'
Increase (Decrease) in Stockholders' Equity [Roll Forward]	'	'	'	'	'	'	'
Net income (loss)	-27,598	'	'	'	-23,031	-23,031	-4,567
Translation adjustment	-4,853	'	'	-4,739	'	-4,739	-114
Deferred tax asset recorded due to legal reorganization	-7,595	'	-7,595	'	'	-7,595	'
Stock compensation expense	1,763	'	1,763	'	'	1,763	'
Restricted shares released, shares	'	52,000	'	'	'	'	'
Restricted shares released	'	1	-1	'	'	'	'
Stock options exercised, shares	'	1,000	'	'	'	'	'
Stock options exercised	3	0	3	'	'	3	'
Ending balance at Sep. 30, 2012	84,051	95	77,377	-6,817	12,065	82,720	1,331
Ending balance, shares at Sep. 30, 2012	9,483,588	9,484,000	'	'	'	'	'
Increase (Decrease) in Stockholders' Equity [Roll Forward]	'	'	'	'	'	'	'
Net income (loss)	-21,707	'	'	'	-20,069	-20,069	-1,638
Translation adjustment	2,225	'	'	2,261	'	2,261	-36
Tax benefit (deficiency) of stock compensation	-264	'	-264	'	'	-264	'
Stock compensation expense	2,472	'	2,472	'	'	2,472	'
Restricted shares released, shares	'	59,000	'	'	'	'	'
Restricted shares released	2	1	1	'	'	2	'
Stock options exercised, shares	'	8,000	'	'	'	'	'
Stock options exercised	24	0	24	'	'	24	'
Ending balance at Sep. 30, 2013	$66,803	$96	$79,610	($4,556)	($8,004)	$67,146	($343)
Ending balance, shares at Sep. 30, 2013	9,550,809	9,551,000	'	'	'	'	'

Consolidated_Statements_Of_Cas

Consolidated Statements Of Cash Flows (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Operating Activities	'	'	'
Net income (loss)	($21,707)	($27,598)	$22,119
Adjustments to reconcile net income (loss) to net cash provided by (used in) operating activities:	'	'	'
Depreciation and amortization	2,667	2,858	2,814
Write-down of inventory	3,652	10,380	1,167
Losses on inventory purchase commitments	0	2,455	0
Provision for allowance for doubtful accounts	169	300	139
Deferred income taxes	1,368	3,781	-635
Impairment of long-lived assets	0	5,428	0
Non-cash share based compensation expense	2,472	1,763	1,470
Changes in operating assets and liabilities:	'	'	'
Change in restricted cash	-326	1,781	-274
Accounts receivable	10,629	23,700	-21,399
Inventories	-221	-2,130	-14,194
Accrued income taxes	-7,818	-15,543	7,834
Prepaid expenses and other assets	-360	4,677	-1,740
Accounts payable	-495	-2,807	-3,644
Accrued liabilities and customer deposits	7,489	-5,387	5,137
Deferred profit	-7,472	-16,096	16,632
Net cash provided by (used in) operating activities	-9,953	-12,438	15,426
Investing Activities	'	'	'
Purchases of property, plant and equipment	-178	-1,306	-5,183
Investment in acquisitions, net of cash	0	0	-1,055
Other	0	-236	0
Net cash used in investing activities	-178	-1,542	-6,238
Financing Activities	'	'	'
Proceeds from issuance of common stock, net	26	3	1,330
Repurchase of common stock	0	-4,080	0
Payments on long-term obligations	0	-31	-127
Excess tax benefit (deficiency) of stock compensation	-264	0	855
Net cash provided by (used in) financing activities	-238	-4,108	2,058
Effect of Exchange Rate Changes on Cash	840	-2,568	-628
Net Increase (Decrease) in Cash and Cash Equivalents	-9,529	-20,656	10,618
Cash and Cash Equivalents, Beginning of Year	46,726	67,382	56,764
Cash and Cash Equivalents, End of Year	37,197	46,726	67,382
Supplemental Cash Flow Information:	'	'	'
Income tax refunds	18	1,115	282
Income tax payments	8,678	5,030	8,451
Supplemental Non-cash Financing Activities:	'	'	'
Transfer inventory to capital equipment	0	1,586	0
Issuance of common stock for acquisition of interest in Kingstone	0	0	3,835
Repurchase of common stock financed with current liabilities	$0	$0	$1,225

Summary_of_Significant_Account

Summary of Significant Accounting Policies	12 Months Ended
	Sep. 30, 2013
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'
Summary of Significant Accounting Policies	'
	Summary of Significant Accounting Policies
	Nature of Operations and Basis of Presentation – Amtech Systems, Inc. (the “Company”) designs, assembles, sells and installs capital equipment and related consumables used in the manufacture of wafers, primarily for the solar and semiconductor industries. The Company is developing an ion implanter to provide its customers with a more complete solution for their next-generation high-efficiency solar cell production. The Company sells these products to manufacturers of solar cells, silicon wafers, and semiconductors worldwide, particularly in Asia, United States and Europe.
	The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company’s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.
	Principles of Consolidation – The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company’s equity. All material intercompany accounts and transactions have been eliminated in consolidation.
	Use of Estimates - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.
	Change in Accounting Estimate - The Company regularly reviews inventory quantities and inventory purchase commitments and writes down excess and obsolete inventory to its net realizable value, and records a loss for expected purchase order cancellation charges and for excess inventory purchase commitments that cannot be cancelled. The write-down is primarily based on historical inventory usage adjusted for expected changes in product demand and production requirements. Due to a downturn in the solar industry, product demand and production requirements have declined significantly. As the Company began its annual budget review in the fourth quarter of fiscal 2012, it determined that the downturn was expected to continue at least in 2013. As a result, the Company recorded a write-down of inventory of $10.4 million for the fiscal year ended September 30, 2012. The Company also recorded a loss of $2.5 million for the fiscal year ended September 30, 2012 on inventory purchase commitments. In fiscal 2012, the inventory write-down and loss on inventory purchase commitments reduced operating income by $12.8 million, reduced net income attributable to Amtech shareholders by $9.7 million and increased basic and diluted loss per share by $1.01 cents per share. In fiscal 2013, the Company determined that the downturn was expected to continue into 2014. As a result, the Company recorded a write-down of inventory of $3.7 million for fiscal year 2013. The write-down of inventory reduced net income attributable to Amtech shareholders by $3.7 million and increased basic and diluted loss per share by $0.39 cents per share.
	Revenue Recognition – We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present in the arrangements. Where separate units of accounting exist, revenue is allocated to delivered items equal to the total sales price less the greater of (1) the relative fair value of the undelivered items, and (2) all contingent portions of the sales arrangement.
	We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; the seller’s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:
	-1	For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer’s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. However, a portion of the revenue associated with certain installation-related tasks, equal to the greater of the relative fair value of those tasks or the portion of the contract price contingent upon their completion, generally 10%-20% of the system’s selling price (the “holdback”), and directly related costs, if any, are deferred and recognized into income when the tasks are completed. Since we defer only those costs directly related to installation or other unit of accounting not yet delivered and the portion of the contract price is often considerably greater than the fair market value of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.
	-2	For products where the customer’s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.
	-3	Sales of polishing supplies generally do not include process guarantees, acceptance criteria or holdbacks; therefore, the related revenue is generally recorded upon transfer of title which is generally at the time of shipment.
	-4	Sales of spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.
	-5	Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.
	Deferred Profit – Revenue deferred pursuant to our revenue policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:
		September 30,
		2013				2012				2011
		(dollars in thousands)
	Deferred revenue	$	3,371			$	11,200			$	29,666
	Deferred costs	304				964				2,058
	Deferred profit	$	3,067			$	10,236			$	27,608
	Cash Equivalents – Cash equivalents in the United States consist of money market mutual funds invested in securities issued by the U.S. Government and its agencies and time deposits. In Europe, cash equivalents consist of money market mutual funds and time deposits. The fair value of the cash equivalents is based on Level One inputs in the fair value hierarchy as defined by ASC No. 820, Fair Value Measurements and Disclosures.
	Restricted Cash – Restricted cash of $5.1 million and $4.6 million as of September 30, 2013 and 2012, respectively, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.
	Accounts Receivable and Allowance for Doubtful Accounts – Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.
	The following is a summary of the activity in the Company’s allowance for doubtful accounts:
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands)
	Balance at beginning of year	$	517			$	246			$	181
	Provision	199				271				115
	Write offs	(78		)		—				(50		)
	Balance at end of year	$	638			$	517			$	246
	Accounts Receivable - Unbilled and Other – Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance.
	Concentrations of Credit Risk – Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company’s customers consist of manufacturers of solar cells, semiconductors, semiconductor wafers, LEDs and MEMS located throughout the world. Credit risk is managed by performing ongoing credit evaluations of the customers’ financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.
	The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately 60% of total cash balances) are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company’s cash is maintained in banks in The Netherlands, France and China that are uninsured.
	As of September 30, 2013, two customers individually represented 18% and 13% of accounts receivable. As of September 30, 2012, two customers individually represented 14% and 12% of accounts receivable. Accounts receivable from Yingli Green Energy (Yingli) was 18% and 14% as of September 30, 2013 and 2012, respectively.
	Refer to Note 9, Geographic Regions, for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.
	Inventories – We value our inventory at the lower of cost or net realizable value. Costs for approximately 80% of inventory are determined on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis. The components of inventories are as follows:
		30-Sep-13				30-Sep-12
		(dollars in thousands)
	Purchased parts and raw materials	$	11,757			$	19,644
	Work-in-process	7,104				2,328
	Finished goods	3,140				3,698
		$	22,001			$	25,670
	Property, Plant and Equipment - Property plant, and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation and amortization are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Depreciation expense was $2.0 million, $2.2 million and $2.1 million in fiscal 2013, 2012 and 2011, respectively. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings twenty years.
	The following is a summary of property, plant and equipment:
		30-Sep-13				30-Sep-12
		(dollars in thousands)
	Land, building and leasehold improvements	$	10,960			$	10,476
	Equipment and machinery	7,630				7,272
	Furniture and fixtures	5,685				5,458
		24,275				23,206
	Accumulated depreciation and amortization	(13,209		)		(10,819		)
		$	11,066			$	12,387
	Goodwill - Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate. In fiscal 2012, the Company recorded a charge for impairment of goodwill in two of its reporting units. See Note 11, "Impairment Charge" for a description of the facts and circumstances leading to the goodwill impairment charge.
	The changes in the carrying amount of goodwill for the year ended September 30, 2013 are as follows.
		Solar and Semiconductor				Polishing Supplies and Equipment				Total
		(dollars in thousands)
	Balance at the beginning of year
	Goodwill	$	12,362			$	728			$	13,090
	Accumulated impairment losses	(4,735		)		—				(4,735		)
		7,627				728				8,355
	Net exchange differences	126				—				126
	Balance at the end of the year
Goodwill	12,563				728				13,291
Accumulated impairment losses	(4,810		)		—				(4,810		)
	$	7,753			$	728			$	8,481
Intangibles - Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded. Amortization expense related to intangible assets was $0.6 million, $0.7 million and $0.8 million in fiscal 2013, 2012 and 2011, respectively. The aggregate amortization expense for the intangible assets for each of the four succeeding fiscal years is estimated to be $0.7 million, $0.6 million, $0.4 million, $0.3 million in 2014, 2015, 2016, and 2017. Amortization expense for the four succeeding years does not include $1.6 million for in-process research and development. The in-process research and development will be amortized over its useful life when it has reached technological feasibility.
Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. See Note 11, “Impairment Charge” for a description of the facts and circumstances surrounding the impairment charges for the fiscal year ending September 30, 2012.
The following is a summary of intangibles:
	Useful Life		Gross Carrying Amount			Accumulated Amortization			Net Carrying Amount			Gross Carrying Amount		Accumulated Amortization			Net Carrying Amount
			Years Ended September 30,
			2013									2012
			(dollars in thousands)
Non-compete agreements	4-8 years		$	1,065		$	(717	)	$	348		$	1,057	$	(468	)	$	589
Customer lists	10 years		871			(532		)	339			828		(432		)	396
Technology	5-10 years		2,426			(1,422		)	1,004			2,341		(1,085		)	1,256
In-process research and development	-1		1,600			—			1,600			1,600		—			1,600
Other	2-10 years		341			(130		)	211			325		(70		)	255
			$	6,303		$	(2,801	)	$	3,502		$	6,151	$	(2,055	)	$	4,096
(1) The in-process research and development will be amortized over its useful life when it has reached technological feasibility.
Warranty – A limited warranty is provided free of charge, generally for periods of 12 to 24 months to all purchasers of the Company’s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. The following is a summary of activity in accrued warranty expense:
	Years Ended September 30,
	2013				2012				2011
	(dollars in thousands)
Beginning balance	$	2,687			$	2,265			$	1,843
Warranty expenditures	(1,360		)		(1,831		)		(1,199		)
Reserve provision	127				2,253				1,621
Ending balance	$	1,454			$	2,687			$	2,265
Research and Development Expenses - Research and development expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes as well as materials, supplies and facilities used in producing prototypes. Payments received for research and development grants prior to the meeting of milestones are recorded as unearned research and development grant liabilities and included in other accrued liabilities on the balance sheet. When certain contract requirements are met, governmental research and development grants are netted against research and development expenses.
	Years Ended September 30,
	2013				2012				2011
	(dollars in thousands)
Research and development	$	8,459			$	14,723			$	7,362
Grants earned	(1,865		)		(1,029		)		(1,578		)
Net research and development	$	6,594			$	13,694			$	5,784
Shipping Expense – Shipping expenses of $0.8 million, $1.7 million and $5.9 million for fiscal 2013, 2012 and 2011 are included in selling, general and administrative expenses.
Foreign Currency Transactions and Translation – The functional currency of the Company’s European operations is the Euro. Net income includes pretax net losses from foreign currency transactions of less than $0.1 million, less than $0.1 million and $0.2 million in fiscal 2013, 2012 and 2011, respectively. The gains or losses resulting from the translation of foreign financial statements have been included in other comprehensive income (loss).
Income Taxes - The Company files consolidated federal income tax returns in the United States for all subsidiaries except those in the Netherlands, France, Hong Kong and China, where separate returns are filed. The Netherlands operations file separate returns in that country and, prior to fiscal 2012, were included in the United States consolidated return. The Company computes deferred income tax assets and liabilities based upon cumulative temporary differences between financial reporting and taxable income, carryforwards available and enacted tax laws. The Company also accrues a liability for uncertain tax positions when it is more likely than not that such tax will be incurred.
Deferred tax assets reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. Deferred tax assets are reduced by a valuation allowance when, in the opinion of management and based on the weight of available evidence, it is more likely than not that a portion or all of the deferred tax asset will not be realized. Each quarter the valuation allowance is re-evaluated.
Stock-Based Compensation - The Company measures compensation costs relating to share-based payment transactions based upon the grant-date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are reported as cash flow from financing activities rather than as cash flow from operating activities.
In the third quarter of fiscal 2013, the Company's Board of Directors approved the acceleration of the vesting of one half of the unvested stock options with an exercise price of $2.95 and all of the remaining unvested stock options with exercise prices of $6.15 and $7.98 per share for approximately 110 employees holding options to purchase approximately 0.4 million shares of common stock. The Company concluded that the modification to the stated vesting provisions was substantive after the Company considered the volatility of its share price and the exercise price of the amended options in relation to recent share values. Because the modification was considered substantive, the remaining unearned compensation expense of $0.9 million was recorded as an expense in the third quarter of fiscal 2013. The weighted-average exercise price of the options that were accelerated was $5.77.
Effective June 30, 2013, current and former executive officers of the Company voluntarily cancelled approximately 0.1 million stock options, vested and unvested, that were issued with exercise prices of $14.79 and $17.12 per share. At the time of the cancellation, all of the options with an exercise price of $14.79 were fully vested. The Company recognized the remaining unearned compensation expense of $0.3 million for the unvested portion of the stock options with an exercise price of $17.12 per share in the third quarter of fiscal 2013.
Stock-based compensation expense for the fiscal years ended September 30, 2013, 2012 and 2011 reduced the Company’s results of operations as follows:
	Years Ended September 30,
	2013				2012				2011
	(dollars in thousands, except per share amounts)
Effect on income before income taxes (1)	$	(2,472	)		$	(1,763	)		$	(1,470	)
Effect on income taxes	$	512			$	255			$	495
Effect on net income	$	(1,960	)		$	(1,508	)		$	(975	)
(1) Stock-based compensation expense is included in selling, general and administrative expense
The Company awards restricted shares under the existing share-based compensation plans. Our restricted share-awards vest in equal annual installments over a two or four-year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The “service period” is the time during which the employees receiving grants must remain employed for the shares granted to fully vest.
Qualified stock options issued under the terms of the plans have, or will have, an exercise price equal to, or greater than, the fair market value of the common stock at the date of the option grant, and expire no later than ten years from the date of grant, with the most recent grant expiring in 2022. Options vest over 1 to 4 years. The Company estimates the fair value of stock option awards on the date of grant using the Black-Scholes option pricing model using the following assumptions:
	Years Ended September 30,
	2013		2012		2011
Risk free interest rate	1%		1%		2%
Expected life	6 years		6 years		6 years
Dividend rate	0%		0%		0%
Volatility	70%		70%		70%
To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.
Fair Value of Financial Instruments – Cash, Cash Equivalents and Restricted Cash - The carrying amount of these assets on the Company’s Consolidated Balance Sheets approximates their fair value because of the short maturities of these instruments.
Receivables and Payables—The recorded amounts of financial instruments, including Accounts Receivable and Accounts Payable, approximate their fair value because of the short maturities of these instruments.
Pensions—The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company’s operations in the Netherlands and France and the plan for hourly union employees in Pennsylvania and the Company's defined contribution plan that covers substantially all of the employees in the United States. The multiemployer plans in the United States and France are insignificant.
The Company’s employees in The Netherlands, approximately 110, participate in a multi-employer union plan Pensioenfonds Metaal en Techniek (PMT), determined in accordance with the collective bargaining agreements effective for the industry in the Netherlands. This collective bargaining agreement has no expiration date. This multiemployer union plan covers approximately 34,000 companies and 1.2 million participants. Amtech's contribution to the multiemployer union plan is less than 5.0% of the total contributions to the plan. The plan monitors its risks on a global basis, not by company or employee, and is subject to regulation by Dutch governmental authorities. By law (the Dutch Pension Act), a multiemployer union plan must be monitored against specific criteria, including the coverage ratio of the plan assets to its obligations. This coverage ratio must exceed 104.3% for the total plan. Every company participating in a Dutch multiemployer union plan contributes a premium calculated as a percentage of its total pensionable salaries, with each company subject to the same percentage contribution rate. The premium can fluctuate yearly based on the coverage ratio of the multiemployer union plan. The pension rights of each employee are based upon the employee’s average salary during employment, the years of service, and the participant's age at the time of retirement.
The Company's net periodic pension cost for this multiemployer union plan for any period is the amount of the required contribution for that period. A contingent liability may arise from, for example, possible actuarial losses relating to other participating entities because each entity that participates in a multiemployer union plan shares in the actuarial risks of every other participating entity or any responsibility under the terms of a plan to finance any shortfall in the plan if other entities cease to participate
The coverage ratio of the Dutch multiemployer union plan is 101.5% as of September 30, 2013. Because of the low coverage ratio PMT prepared and executed a “Recovery Plan” which was approved by De Nederlandsche Bank, the Dutch central bank, which is the supervisor of all pension companies in the Netherlands. As a result of the Recovery Plan, the pension rights decreased 6.3% in April 2013 and the employer's premium percentage increased to 16.6% of pensionable wages. The coverage ratio is calculated by dividing the plan assets by the total sum of pension liabilities and is based on actual market interest. If the coverage ratio does not increase to 104.3% by December 31, 2013, pension rights may decrease again. As of September 30, 2013 PMT's total plan assets were $63.7 billion and the actuarial present value of accumulated plan benefits was $63.1 billion.
Below is a table of contributions made by the Company to multiemployer pension plans.
	Contributions
	Years Ended September 30,
	2013				2012				2011
	(dollars in thousands)
Pensioenfonds Metaal en Techniek (PMT)	$	879			$	1,021			$	913
Other plans	163				181				192
Total	$	1,042			$	1,202			$	1,105
The Company matches employee funds to the Company's defined contribution plans on a discretionary basis. The match was insignificant in fiscal years 2013, 2012 and 2011.
Reclassifications –  Certain reclassifications have been made to prior year financial statements to conform to the current year presentation. Specifically, prepaid income taxes of $1.4 million and $4.3 million as of September 30, 2012 and 2011, respectively, were previously stated as a separate line item in current assets, prepaid income taxes, and are now included in the line item, other assets - long term, in the Company's consolidated balance sheets.
Impact of Recently Issued Accounting Pronouncements
In July 2013, the FASB issued ASU No. 2013-11 "Income Taxes (Topic 740)." An unrecognized tax benefit, or a portion of an unrecognized tax benefit, should be presented in the financial statements as a reduction to a deferred tax asset for a net operating loss carryforward, a similar tax loss, or a tax credit carryforward, except as follows. To the extent a net operating loss carryforward, a similar tax loss, or a tax credit carryforward is not available at the reporting date under the tax law of the applicable jurisdiction to settle any additional income taxes that would result from the disallowance of a tax position or the tax law of the applicable jurisdiction does not require the entity to use, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit should be presented in the financial statements as a liability and should not be combined with deferred tax assets. The assessment of whether a deferred tax asset is available is based on the unrecognized tax benefit and deferred tax asset that exist at the reporting date and should be made presuming disallowance of the tax position at the reporting date. The amendments in this Update are effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. We expect to adopt the amendment effective October 1, 2014. We do not expect that that the adoption will have a material impact on the Company's consolidated financial statements.
In March 2013, the FASB issued ASU No. 2013-05 "Foreign Currency Matters (Topic 830)." The objective of the amendments in this Update is to resolve the diversity in practice about which codification subtopic applies to the release of the cumulative translation adjustment into net income when a parent either sells a part or all of its investment in a foreign entity or no longer holds a controlling financial interest in a subsidiary or group of assets that is a business within a foreign entity.
The amendments in this Update are effective prospectively for fiscal years (and interim reporting periods within those years) beginning after December 15, 2013. The Company will evaluate the impact of the Update as future transactions occur.
In February 2013, The FASB issued ASU No. 2013-04 "Liabilities (Topic 405)," The guidance in this Update requires an entity to measure obligations resulting from joint and several liability arrangements for which the total amount of the obligation within the scope of this guidance is fixed at the reporting date, as the sum of the following:
a. The amount the reporting entity agreed to pay on the basis of its arrangement among its co-obligors.
b. Any additional amount the reporting entity expects to pay on behalf of its co-obligors.
The guidance in this Update also requires an entity to disclose the nature and amount of the obligation as well as other information about those obligations. The amendments in this Update are effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. The Company does not expect this Update to have a material impact on the Company's consolidated financial statements.

StockBased_Compensation

Stock-Based Compensation	12 Months Ended
	Sep. 30, 2013
Disclosure of Compensation Related Costs, Share-based Payments [Abstract]	'
Stock-Based Compensation	'
	Stock-Based Compensation
	Stock-Based Plans –The 2007 Employee Stock Incentive Plan (the “2007 Plan), under which 500,000 shares could be granted, was adopted by the Board of Directors in April 2007, and approved by the shareholders in May 2007. The 1998 Employee Stock Option Plan (the “1998 Plan”), under which 50,000 shares could be granted, was adopted by the Board of Directors in January 1998, and approved by shareholders in March 1998. The number of shares available for options under the 1998 Plan has since been increased to 500,000 shares through authorization by the Board of Directors and approval of shareholders. The 1998 Plan expired in January 2008. The Non-Employee Directors Stock Option Plan was approved by the shareholders in 1996 for issuance of up to 100,000 shares of Common Stock to directors. In July 2005, the Board of Directors authorized, and shareholders approved, an increase in the number of shares available for options under the Non-Employee Directors Stock Option Plan to 200,000 shares. In the second quarter of fiscal 2009, the Company’s shareholders approved an amendment to our 2007 Employee Stock Incentive Plan and our Non-Employee Directors Stock Option Plan to authorize an additional 900,000 and 150,000 shares, respectively.
	Stock options issued under the terms of the plans have, or will have, an exercise price equal to or greater than the fair market value of the Common Stock at the date of the option grant and expire no later than 10 years from the date of grant, with the most recent grant expiring in 2022. Options issued by the Company vest over 1 to 4 years. The Company may also grant restricted stock awards under the 2007 Plan.
	As of September 30, 2013 and 2012, the unamortized expense related to restricted shares was $0.4 million and $0.8 million, respectively, and it is expected to be recognized over two years.
	Restricted stock transactions and outstanding are summarized as follows:
		Years Ended September 30,
		2013							2012							2011
		Awards			Weighted Average Grant Date Fair Value				Awards			Weighted Average Grant Date Fair Value				Awards			Weighted Average Grant Date Fair Value
	Beginning Outstanding	127,975			$	9.06			120,970			$	9.42			128,751			$	6.34
	Awarded	—			—				60,600			7.98				35,517			17.28
	Released	(58,771	)		7.81				(51,595	)		8.72				(43,298	)		6.78
	Forfeited	(50	)		7.98				(2,000	)		7.22				—			—
	Ending Outstanding	69,154			$	10.13			127,975			$	9.06			120,970			$	9.42
	Stock-based compensation plans are summarized in the table below:
	Name of Plan		Shares Authorized			Shares Available			Options Outstanding			Plan Expiration
	2007 Employee Stock Incentive Plan		1,400,000			194,142			839,004			Mar. 2020
	1998 Employee Stock Option Plan		500,000			—			72,710			Jan. 2008
	Non-Employee Directors Stock Option Plan		350,000			65,600			147,853			Mar. 2020
						259,742			1,059,567
	Stock options were valued using the Black-Scholes option pricing model. See Note 1 for further discussion. Stock option transactions and the options outstanding are summarized as follows:
		Years Ended September 30,
		2013								2012								2011
		Options				Weighted				Options				Weighted				Options			Weighted
						Average								Average							Average
						Exercise								Exercise							Exercise
						Price								Price							Price
	Outstanding at beginning of period	891,293				$	9.37			611,384				$	10.02			636,283			$	7.59
	Granted	312,850				2.95				285,400				7.98				155,233			16.89
	Exercised	(8,450		)		3.08				(600		)		5.33				(178,882		)	7.35
	Forfeited/canceled	(136,126		)		15.75				(4,891		)		9.5				(1,250		)	6.94
	Outstanding at end of period	1,059,567				6.71				891,293				$	9.37			611,384			$	10.02
	Exercisable at end of period	874,591				$	7.13			400,638				$	9.25			232,018			$	8.31
	Weighted average grant-date fair value of options granted during the period	$	1.82							$	4.95							$	10.57
	The following tables summarize information for stock options outstanding and exercisable as of September 30, 2013:
			Options Outstanding
	Range of Exercise		Number			Remaining		Average				Aggregate
	Prices		Outstanding			Contractual		Exercise				Intrinsic
						Life		Price				Value
						(in years)						(in thousands)
	2.95-3.00		305,050			9.2		$	2.95			$	1,327
	3.01-7.00		271,683			5.1		5.07				606
	7.01-8.00		295,920			7.9		7.94				—
	8.01-15.00		113,087			5.9		10.49				—
	15.01-23.00		73,827			7.1		17.54				—
			1,059,567			7.3		$	6.71			$	1,933
	Vested and expected		1,057,477			6.7		$	7.29			$	1,925
	to vest as of
	30-Sep-13
			Options Exercisable
	Range of Exercise		Number			Weighted				Aggregate
	Prices		Exercisable			Average				Intrinsic
						Exercise				Value
						Price
										(in thousands)
	2.95-3.00		149,087			$	2.95			$	649
	3.01-7.00		271,683			5.07				606
	7.01-8.00		295,920			7.94				—
	8.01-15.00		98,775			10.48
	15.01 - 23.00		59,126			17.47				—
			874,591			$	7.13			$	1,255
	The aggregate intrinsic value in the tables above represents the total pretax intrinsic value, based on the Company’s closing stock price of $7.30 per share as of September 30, 2013, which would have been received by the option holders had all option holders exercised their options as of that date. The total intrinsic value of stock options exercised during the fiscal years ended September 30, 2013, 2012 and 2011 was less than $0.1 million, less than $0.1 million and $1.3 million, respectively.

Earnings_Per_Share

Earnings Per Share	12 Months Ended
	Sep. 30, 2013
Earnings Per Share [Abstract]	'
Earnings Per Share	'
	Earnings Per Share
	Basic earnings per share is computed by dividing net income (loss) available to common stockholders by the weighted average number of common shares outstanding for the period. Diluted earnings (loss) per share is computed similarly to basic earnings per share except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued, and the numerator is based on net income (loss). In the case of a net loss, diluted earnings per share is calculated in the same manner as basic earnings per share. Options and restricted stock of approximately 1,130,000, 1,020,000 and 145,000 shares are excluded from the fiscal 2013, 2012 and 2011 earnings per share calculations as they are anti-dilutive.
		2013			2012			2011
		(dollars in thousands, except per share amounts)
	Basic Earnings Per Share Computation
	Net income (loss) attributable to Amtech Systems, Inc.	$	(20,069	)	$	(23,031	)	$	22,882
	Weighted Average Shares Outstanding:
	Common stock	9,529			9,471			9,480
	Basic earnings (loss) per share attributable to Amtech shareholders	$	(2.11	)	$	(2.43	)	$	2.41
	Diluted Earnings Per Share Computation
	Net income (loss) attributable to Amtech Systems, Inc.	$	(20,069	)	$	(23,031	)	$	22,882
	Weighted Average Shares Outstanding:
	Common stock	9,529			9,471			9,480
	Common stock equivalents (1)	—			—			284
	Diluted shares	9,529			9,471			9,764
	Diluted earnings (loss) per share attributable to Amtech shareholders	$	(2.11	)	$	(2.43	)	$	2.34
	(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

Stockholders_Equity

Stockholders' Equity	12 Months Ended
	Sep. 30, 2013
Stockholders' Equity Note [Abstract]	'
Stockholders' Equity	'
	Stockholders’ Equity
	Shareholder Rights Plan – On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the “Rights Agent”), entered into an Amended and Restated Rights Agreement (the “Restated Rights Agreement”) which amends and restates the terms governing the previously authorized shareholder rights (each a “Right”) to purchase fractional shares of the Company’s Series A Participating Preferred Stock (“Series A Preferred”) currently attached to each of the Company’s outstanding Common Shares, par value $0.01 per share (“Common Shares”). As amended, each Right entitles the registered holder to purchase from the Company one one thousandth of a share of Series A Preferred at an exercise price of $51.60 (the “Exercise Price”), subject to adjustment. The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.

Other_Accrued_Liabilities

Other Accrued Liabilities	12 Months Ended
	Sep. 30, 2013
Payables and Accruals [Abstract]	'
Other Liabilities Disclosure	'
	Other Accrued Liabilities
	Other accrued liabilities consist of the following:
		30-Sep-13		30-Sep-12
		(dollars in thousands)
	Unearned research and development grants	$	5,935	$	1,160
	Loss on inventory purchase commitments	1,289		2,422
	Other	2,916		3,917
		$	10,140	$	7,499

Commitments_and_Contingencies

Commitments and Contingencies	12 Months Ended
	Sep. 30, 2013
Commitments and Contingencies Disclosure [Abstract]	'
Commitments and Contingencies	'
	Commitments and Contingencies
	Purchase Obligations – As of September 30, 2013, we had unrecorded purchase obligations in the amount of $12.3 million. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less in the event that any agreements are renegotiated, canceled or terminated.
	Development Project – During the quarter ended June 30, 2013, Shanghai Kingstone Semiconductor Company Ltd. ("Kingstone") entered into an agreement with certain government agencies in Shanghai, China for the purpose of developing ion implanters for a non-solar application. As of September 30, 2013, Kingstone has begun the first phase of this development project and received the first $2.6 million of grant funds for the project. Under the arrangement, Kingstone has agreed that by July 2014 it will have in place $6.1 million of its commitment to the project. The agreement will terminate upon the occurrence of certain events or if the project does not pass the first phase project evaluation. Otherwise, Kingstone has a commitment to provide additional funding to the project by December 2015. Amtech owns 55% of Kingstone Technology Hong King Limited, which owns 100% of Shanghai Kingstone Semiconductor Company Ltd. Amtech has no obligation or plan to fund Kingstone's commitments under this agreement.
	Legal Proceedings – The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. The Company does not believe that any matters or proceedings presently pending will have a material adverse effect on its consolidated financial position, results of operations or liquidity.
	Operating Leases – The Company leases buildings, vehicles and equipment under operating leases. Rental expense under such operating leases was $1.0 million, $1.4 million, $1.2 million in fiscal 2013, 2012 and 2011, respectively. As of September 30, 2013, future minimum rental commitments under non-cancelable operating leases with initial or remaining terms of one year or more totaled $2.9 million, of which $1.2 million, $0.7 million, $0.4 million, $0.2 million and $0.2 million is payable in fiscal 2014, 2015, 2016, 2017 and 2018, respectively, and $0.2 million, thereafter.

Major_Customers_and_Foreign_Sa

Major Customers and Foreign Sales	12 Months Ended
	Sep. 30, 2013
Major Customers and Foreign Sales [Abstract]	'
Major Customers And Foreign Sales	'
	Major Customers and Foreign Sales
	In fiscal 2013, one customer accounted for 20% of net revenue . In fiscal 2012, one customer accounted for 11% of net revenue. In fiscal 2011, two customers individually accounted for 15% and 14% of net revenue. Yingli accounted for 20%, 7% and 15% of our net revenue in fiscal 2013, 2012 and 2011, respectively.
	Our net revenues for fiscal 2013, 2012 and 2011 were to customers in the following geographic regions:
		Years Ended September 30,
		2013		2012		2011
	United States	20	%	13	%	6	%
	Taiwan	14	%	9	%	16	%
	China	39	%	43	%	69	%
	Other	11	%	14	%	3	%
	Total Asia	64	%	66	%	88	%
	Germany	5	%	8	%	3	%
	Other	11	%	13	%	3	%
	Total Europe	16	%	21	%	6	%
		100	%	100	%	100	%

Business_Segments

Business Segments	12 Months Ended
	Sep. 30, 2013
Segment Reporting [Abstract]	'
Business Segments	'
	Business Segments
	The Company operates in two segments: the solar and semiconductor equipment segment and the polishing supplies segment. In the solar and semiconductor equipment segment, we are a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic, semiconductor, silicon wafer and MEMS industries and also offer PECVD (plasma-enhanced chemical vapor deposition) equipment. In the polishing supplies segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.
	Information concerning our business segments is as follows:
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	Solar and semiconductor equipment	$	26,368		$	73,102		$	233,804
	Polishing supplies and equipment	8,430			8,437			12,901
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	Solar and semiconductor equipment	$	(14,377	)	$	(26,236	)	$	46,712
	Polishing supplies and equipment	1,282			1,405			3,648
	Non-segment related loss	(6,899		)	(8,153		)	(12,081		)
		$	(19,994	)	$	(32,984	)	$	38,279
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Capital expenditures:
	Solar and semiconductor equipment	$	98		$	1,121		$	5,106
	Polishing supplies and equipment	80			185			77
		$	178		$	1,306		$	5,183
	Depreciation and amortization expense:
	Solar and semiconductor equipment	$	2,501		$	2,717		$	2,589
	Polishing supplies and equipment	166			141			225
		$	2,667		$	2,858		$	2,814
		September 30,			September 30,
		2013			2012
		(dollars in thousands)
	Identifiable assets:
	Solar and semiconductor equipment	$	106,723		$	123,923
	Polishing supplies and equipment	4,224			5,099
		$	110,947		$	129,022
	Goodwill:
	Solar and semiconductor equipment	$	7,753		$	7,627
	Polishing supplies and equipment	728			728
		$	8,481		$	8,355
	Geographic Regions
	The Company has operations in The Netherlands, United States, France and China. Revenues, operating income (loss) and identifiable assets by geographic region are as follows:
		Years Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	The Netherlands	$	17,615		$	48,294		$	195,404
	United States	11,855			27,638			24,079
	France	5,328			5,584			26,347
	China	—			23			875
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	The Netherlands	$	(11,139	)	$	(18,686	)	$	28,724
	United States	(4,346		)	(1,025		)	(1,742		)
	France	(815		)	(3,041		)	12,992
	China	(3,694		)	(10,232		)	(1,695		)
		$	(19,994	)	$	(32,984	)	$	38,279
					As of September 30,
					2013			2012
	Net long-lived assets
	(excluding intangibles and goodwill)
	The Netherlands				$	8,733		$	9,555
	United States				1,160			1,448
	France				552			676
	China				621			708
					$	11,066		$	12,387

Geographic_Regions

Geographic Regions	12 Months Ended
	Sep. 30, 2013
Segments, Geographical Areas [Abstract]	'
Geographic Regions	'
	Business Segments
	The Company operates in two segments: the solar and semiconductor equipment segment and the polishing supplies segment. In the solar and semiconductor equipment segment, we are a leading supplier of thermal processing systems, including related automation, parts and services, to the solar/photovoltaic, semiconductor, silicon wafer and MEMS industries and also offer PECVD (plasma-enhanced chemical vapor deposition) equipment. In the polishing supplies segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.
	Information concerning our business segments is as follows:
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	Solar and semiconductor equipment	$	26,368		$	73,102		$	233,804
	Polishing supplies and equipment	8,430			8,437			12,901
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	Solar and semiconductor equipment	$	(14,377	)	$	(26,236	)	$	46,712
	Polishing supplies and equipment	1,282			1,405			3,648
	Non-segment related loss	(6,899		)	(8,153		)	(12,081		)
		$	(19,994	)	$	(32,984	)	$	38,279
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Capital expenditures:
	Solar and semiconductor equipment	$	98		$	1,121		$	5,106
	Polishing supplies and equipment	80			185			77
		$	178		$	1,306		$	5,183
	Depreciation and amortization expense:
	Solar and semiconductor equipment	$	2,501		$	2,717		$	2,589
	Polishing supplies and equipment	166			141			225
		$	2,667		$	2,858		$	2,814
		September 30,			September 30,
		2013			2012
		(dollars in thousands)
	Identifiable assets:
	Solar and semiconductor equipment	$	106,723		$	123,923
	Polishing supplies and equipment	4,224			5,099
		$	110,947		$	129,022
	Goodwill:
	Solar and semiconductor equipment	$	7,753		$	7,627
	Polishing supplies and equipment	728			728
		$	8,481		$	8,355
	Geographic Regions
	The Company has operations in The Netherlands, United States, France and China. Revenues, operating income (loss) and identifiable assets by geographic region are as follows:
		Years Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	The Netherlands	$	17,615		$	48,294		$	195,404
	United States	11,855			27,638			24,079
	France	5,328			5,584			26,347
	China	—			23			875
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	The Netherlands	$	(11,139	)	$	(18,686	)	$	28,724
	United States	(4,346		)	(1,025		)	(1,742		)
	France	(815		)	(3,041		)	12,992
	China	(3,694		)	(10,232		)	(1,695		)
		$	(19,994	)	$	(32,984	)	$	38,279
					As of September 30,
					2013			2012
	Net long-lived assets
	(excluding intangibles and goodwill)
	The Netherlands				$	8,733		$	9,555
	United States				1,160			1,448
	France				552			676
	China				621			708
					$	11,066		$	12,387

Income_Taxes

Income Taxes	12 Months Ended
	Sep. 30, 2013
Income Tax Disclosure [Abstract]	'
Income Taxes	'
	Income Taxes
	The components of the provision (benefit) for income taxes are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Current:
	United States	$	(150	)	2,440			$	800
	Foreign	800			(9,380		)	15,910
	State	(110		)	(90		)	110
	Total current	540			(7,030		)	16,820
	Deferred:
	United States	(290		)	—			(100		)
	Foreign	1,610			1,700			(520		)
	State	—			10			(10		)
	Total deferred	1,320			1,710			(630		)
	Total provision (benefit)	$	1,860		$	(5,320	)	$	16,190
	A reconciliation of actual income taxes to income taxes at the expected United States federal corporate income tax rate of thirty-four percent is as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Tax provision (benefit) at the U.S. rate	$	(6,750	)	$	(11,190	)	$	13,410
	Effect of permanent book-tax differences	970			2,010			510
	State tax provision	(110		)	(80		)	100
	Valuation allowance for net deferred tax assets	5,850			1,740			470
	Uncertain tax items	450			(240		)	1,620
	Expiration of foreign net operating loss	—			2,320			170
	Difference between U.S. and foreign rates	1,440			—			—
	Other items	10			120			(90		)
		$	1,860		$	(5,320	)	$	16,190
	Deferred income taxes reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The tax effects of temporary book-tax differences that give rise to significant portions of the deferred tax assets and deferred tax liability are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Deferred tax assets - current:
	Capitalized inventory costs	$	130		$	90		150
	Inventory write-downs	620			600			590
	Accrued warranty	200			20			(580		)
	Deferred profits	800			2,510			6,820
	Accruals and reserves not currently deductible	490			240			2,580
	Deferred tax assets - current	$	2,240		$	3,460		$	9,560
	Valuation allowance	(910		)	—			—
	Deferred tax assets - current net of valuation allowance	$	1,330		$	3,460		$	9,560
	Deferred tax assets (liabilities)- non-current:
	Stock option expense	700			470			270
	Book vs. tax basis of acquired assets	(1,130		)	(1,280		)	(760		)
	Foreign and state net operating losses	9,000			3,640			850
	Book vs. tax depreciation and amortization	60			100			300
	Foreign tax credits	520			—			—
	Other deferred tax assets	(350		)	140			90
	Total deferred tax assets - non-current	8,800			3,070			750
	Valuation allowance	(7,540		)	(2,600		)	(860		)
	Deferred tax assets (liabilities) - non-current, net of valuation allowance	$	1,260		$	470		$	(110	)
	Changes in the deferred tax valuation allowance are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Balance at the beginning of the year	$	2,600		$	860		$	390
	Additions to valuation allowance	5,850			1,740			470
	Balance at the end of the year	$	8,450		$	2,600		$	860
	Accounting for income taxes requires that a valuation allowance is recognized if, based on the weight of available evidence, it is more likely than not that some portion or all of the deferred tax asset will not be realized. Each quarter the valuation allowance is re-evaluated.
	At September 30, 2013, the Company has net operating loss carryforwards in some states, The Netherlands, China, Hong Kong and France which expire in varying amounts between 2013 and 2021. We have established a valuation allowance on all deferred tax assets related to these foreign and state net operating loss carryforwards, except those in France, as based on the weight of available evidence, it is more likely than not that they will not be realized.
	Tax payments of $8.7 million were made and tax refunds of less than $0.1 million were received during fiscal 2013.
	The Company applies the provisions of FASB Interpretation No. 48 (“FIN 48”), “Accounting for Uncertainty in Income Taxes”, (now codified as FASB ASC 740, “Income Tax”). In this regard, an uncertain tax position represents the Company's expected treatment of a tax position taken in a filed tax return, or planned to be taken in a future tax return, that has not been reflected in measuring income tax expense for financial reporting purposes. Approximately $1.8 million of this total represents the amount that, if recognized, would favorably affect our effective income tax rate in future periods.
A reconciliation of the beginning and ending amount of our unrecognized tax benefits is summarized as follows:
	Year Ended September 30,
	2013			2012			2011
	(dollars in thousands)
Balances at beginning of the year	$	2,360		$	2,630		$	1,010
Additions (reductions) related to current year tax positions	—			(390		)	1,210
Additions related to tax positions taken in prior years	530			360			450
Reductions related to settlements with tax authorities	—			(240		)	—
Reductions due to lapse of statute of limitations	(80		)	—			(40		)
Balance at the end of the year	$	2,810		$	2,360		$	2,630
We have classified all of our liabilities for uncertain tax positions as income taxes payable long-term.
We report accrued interest and penalties related to unrecognized tax benefits in income tax expense. We recognized a net expense for interest and penalties of $0.5 million, $0.4 million and $0.2 million for fiscal years 2013, 2012 and 2011, respectively. Income taxes payable long-term on the consolidated balance sheets includes a cumulative accrual for potential interest and penalties of $1.2 million and $0.7 million as of September 30, 2013 and 2012 respectively. During fiscal 2012, we recorded a benefit of $2.4 million, resulting from the reversal of liabilities in taxing jurisdictions where a tax examination was finalized.
The Company does not expect that the amount of our tax reserves for uncertain tax positions will materially change in the next 12 months other than the continued accrual of interest and penalties.
The Company and one or more of its subsidiaries file income tax returns in The Netherlands, Germany, France and other foreign jurisdictions, as well as the U.S. and various states in the U.S. We have not signed any agreements with the Internal Revenue Service, any state or foreign jurisdiction to extend the statute of limitations for any fiscal year. As such, the number of open years is the number of years dictated by statute in each of the respective taxing jurisdictions, but generally is from 3 to 5 years.
These open years contain certain matters that could be subject to differing interpretations of applicable tax laws and regulations as they relate to the amount, timing, or inclusion of revenues and expenses, or the sustainability of income tax positions of the Company and its subsidiaries. During fiscal year 2012, the IRS examination for the fiscal year ending September 30, 2009 was closed without adjustment.

Impairment_Charge

Impairment Charge	12 Months Ended
	Sep. 30, 2013
Restructuring and Related Activities [Abstract]	'
Impairment and Restructuring Charge	'
	Impairment and Restructuring Charge
	Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. The methods used to estimate fair value include the market approach (Level 2) and discounted cash flows (Level 3). The Company gives the greatest weight to the discounted cash flow method. The material estimates and assumptions used in the discounted cash flows method of determining fair value include: projected revenues, material costs and the rates of increase in payroll and other expenses. Projected future cash flows are discounted at a risk-free rate of return adjusted for various risk premiums.
	The Company conducted its periodic assessment of long-lived assets in the fourth quarter of fiscal 2012 and identified the need for an impairment charge in two of its reporting units that serve the solar equipment market that is included in the Company's Solar and Semiconductor Segment. The assessment identified the need to record an impairment charge related to goodwill in the amount of $4.7 million, due primarily to the supply / demand imbalance in the solar equipment market, the expectation that the market downturn would continue into 2013 and the decline in market value of shares of solar companies.
	The Company also recorded charges of $0.7 million in fiscal 2012 for impairment of assets related to license agreements with one of its technology partners. As a result of our technology partner's financial difficulties, their possible inability to service the product and insufficient revenues, management determined that the carrying value of the related assets was not recoverable.
	The Company conducted its periodic assessment of long-lived assets in the fourth quarter of fiscal 2013 and determined there was no impairment. The Company recorded restructuring charges of $0.9 million in fiscal 2013 primarily related to severance costs incurred as a result of the reductions-in-force at certain operations.

Selected_Quarterly_Data_unaudi

Selected Quarterly Data (unaudited)	12 Months Ended
	Sep. 30, 2013
Selected Quarterly Data (Unaudited) [Abstract]	'
Selected Quarterly Data (Unaudited)	'
	Selected Quarterly Data (Unaudited)
		First Quarter			Second Quarter			Third Quarter			Fourth Quarter
	Fiscal Year 2013:	(in thousands, except per share amounts)
	Revenue	$	9,357		$	8,118		$	10,398		$	6,925
	Gross margin	$	1,378		$	2,453		$	(2,677	)	$	3,159
	Provision for income taxes	$	(480	)	$	(800	)	$	2,560		$	580
	Net loss attributable to Amtech Systems, Inc.	$	(4,194	)	$	(2,092	)	$	(12,101	)	$	(1,682	)
	Comprehensive loss attributable to Amtech Systems, Inc.	$	(2,791	)	$	(3,555	)	$	(11,387	)	$	(75	)
	Net loss per share attributable to Amtech Systems, Inc.:
	Basic earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
	Shares used in calculation	9,494			9,539			9,539			9,543
	Diluted earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
	Shares used in calculation	9,494			9,539			9,539			9,543
	Fiscal Year 2012:
	Revenue	$	24,728		$	21,566		$	24,300		$	10,945
	Gross margin	$	7,201		$	4,048		$	4,804		$	(6,860	)
	Provision for income taxes	$	(320	)	$	(220	)	$	(1,110	)	$	(3,670	)
	Net loss attributable to Amtech Systems, Inc.	$	(876	)	$	(5,079	)	$	(2,965	)	$	(14,111	)
	Comprehensive loss attributable to Amtech Systems, Inc.	$	(4,607	)	$	(2,877	)	$	(6,816	)	$	(13,470	)
	Net loss per share attributable to Amtech Systems, Inc.:
	Basic earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
	Shares used in calculation	9,446			9,479			9,479			9,482
	Diluted earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
	Shares used in calculation	9,446			9,479			9,479			9,482

Summary_of_Significant_Account1

Summary of Significant Accounting Policies (Policies)	12 Months Ended
	Sep. 30, 2013
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'
Principles of Consolidation	'
	Principles of Consolidation – The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company’s equity. All material intercompany accounts and transactions have been eliminated in consolidation.
Use of Estimates	'
	Use of Estimates - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.
Change in Accounting Estimate	'
	Change in Accounting Estimate - The Company regularly reviews inventory quantities and inventory purchase commitments and writes down excess and obsolete inventory to its net realizable value, and records a loss for expected purchase order cancellation charges and for excess inventory purchase commitments that cannot be cancelled. The write-down is primarily based on historical inventory usage adjusted for expected changes in product demand and production requirements.
Revenue Recognition	'
	Revenue Recognition – We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present in the arrangements. Where separate units of accounting exist, revenue is allocated to delivered items equal to the total sales price less the greater of (1) the relative fair value of the undelivered items, and (2) all contingent portions of the sales arrangement.
	We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; the seller’s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:
	-1	For our equipment business, transactions where legal title passes to the customer upon shipment, we recognize revenue upon shipment for those products where the customer’s defined specifications have been met with at least two similarly configured systems and processes for a comparably situated customer. However, a portion of the revenue associated with certain installation-related tasks, equal to the greater of the relative fair value of those tasks or the portion of the contract price contingent upon their completion, generally 10%-20% of the system’s selling price (the “holdback”), and directly related costs, if any, are deferred and recognized into income when the tasks are completed. Since we defer only those costs directly related to installation or other unit of accounting not yet delivered and the portion of the contract price is often considerably greater than the fair market value of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in one period will be lower and the gross margin reported in a subsequent period will improve.
	-2	For products where the customer’s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. We have, on occasion, experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some of our customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting our future cash flows and operating results.
	-3	Sales of polishing supplies generally do not include process guarantees, acceptance criteria or holdbacks; therefore, the related revenue is generally recorded upon transfer of title which is generally at the time of shipment.
	-4	Sales of spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.
	-5	Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.
Deferred Profit	'
	Deferred Profit – Revenue deferred pursuant to our revenue policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities.
Cash Equivalents	'
	Cash Equivalents – Cash equivalents in the United States consist of money market mutual funds invested in securities issued by the U.S. Government and its agencies and time deposits. In Europe, cash equivalents consist of money market mutual funds and time deposits. The fair value of the cash equivalents is based on Level One inputs in the fair value hierarchy as defined by ASC No. 820, Fair Value Measurements and Disclosures.
Restricted Cash	'
	Restricted Cash – Restricted cash of $5.1 million and $4.6 million as of September 30, 2013 and 2012, respectively, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment and cash received from research and development grants related to our ion implant technology to be used for research and development projects.
Accounts receivable and allowance for doubtful accounts	'
	Accounts Receivable and Allowance for Doubtful Accounts – Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.
Accounts Receivable - Unbilled and Other	'
	Accounts Receivable - Unbilled and Other – Unbilled and other accounts receivable consist mainly of the contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance.
Concentrations of Credit Risk	'
	Concentrations of Credit Risk – Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company’s customers consist of manufacturers of solar cells, semiconductors, semiconductor wafers, LEDs and MEMS located throughout the world. Credit risk is managed by performing ongoing credit evaluations of the customers’ financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and its country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.
	The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Balances in the United States (approximately 60% of total cash balances) are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company’s cash is maintained in banks in The Netherlands, France and China that are uninsured.
Inventories	'
	Inventories – We value our inventory at the lower of cost or net realizable value. Costs for approximately 80% of inventory are determined on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis.
Property, Plant and Equipment	'
	Property, Plant and Equipment - Property plant, and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation and amortization are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method.
Goodwill	'
	Goodwill - Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate.
Intangibles	'
	Intangibles - Intangible assets are capitalized and amortized over their useful life if the life is determinable. If the life is not determinable, amortization is not recorded.
Long-lived assets	'
	Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.
Warranty	'
	Warranty – A limited warranty is provided free of charge, generally for periods of 12 to 24 months to all purchasers of the Company’s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized.
Research and development expense	'
	Research and Development Expenses - Research and development expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes as well as materials, supplies and facilities used in producing prototypes. Payments received for research and development grants prior to the meeting of milestones are recorded as unearned research and development grant liabilities and included in other accrued liabilities on the balance sheet. When certain contract requirements are met, governmental research and development grants are netted against research and development expenses.
Shipping expenses	'
	Shipping Expense – Shipping expenses of $0.8 million, $1.7 million and $5.9 million for fiscal 2013, 2012 and 2011 are included in selling, general and administrative expenses.
Foreign Currency Transactions and Translation	'
	Foreign Currency Transactions and Translation – The functional currency of the Company’s European operations is the Euro.
Income Taxes	'
	Income Taxes - The Company files consolidated federal income tax returns in the United States for all subsidiaries except those in the Netherlands, France, Hong Kong and China, where separate returns are filed. The Netherlands operations file separate returns in that country and, prior to fiscal 2012, were included in the United States consolidated return. The Company computes deferred income tax assets and liabilities based upon cumulative temporary differences between financial reporting and taxable income, carryforwards available and enacted tax laws. The Company also accrues a liability for uncertain tax positions when it is more likely than not that such tax will be incurred.
	Deferred tax assets reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. Deferred tax assets are reduced by a valuation allowance when, in the opinion of management and based on the weight of available evidence, it is more likely than not that a portion or all of the deferred tax asset will not be realized. Each quarter the valuation allowance is re-evaluated.
Stock-Based Compensation	'
	Stock-Based Compensation - The Company measures compensation costs relating to share-based payment transactions based upon the grant-date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are reported as cash flow from financing activities rather than as cash flow from operating activities.
Fair Value of Financial Instruments	'
	Fair Value of Financial Instruments – Cash, Cash Equivalents and Restricted Cash - The carrying amount of these assets on the Company’s Consolidated Balance Sheets approximates their fair value because of the short maturities of these instruments.
	Receivables and Payables—The recorded amounts of financial instruments, including Accounts Receivable and Accounts Payable, approximate their fair value because of the short maturities of these instruments.
Pensions	'
	Pensions—The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company’s operations in the Netherlands and France and the plan for hourly union employees in Pennsylvania and the Company's defined contribution plan that covers substantially all of the employees in the United States. The multiemployer plans in the United States and France are insignificant.
New Accounting Pronouncements	'
	In July 2013, the FASB issued ASU No. 2013-11 "Income Taxes (Topic 740)." An unrecognized tax benefit, or a portion of an unrecognized tax benefit, should be presented in the financial statements as a reduction to a deferred tax asset for a net operating loss carryforward, a similar tax loss, or a tax credit carryforward, except as follows. To the extent a net operating loss carryforward, a similar tax loss, or a tax credit carryforward is not available at the reporting date under the tax law of the applicable jurisdiction to settle any additional income taxes that would result from the disallowance of a tax position or the tax law of the applicable jurisdiction does not require the entity to use, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit should be presented in the financial statements as a liability and should not be combined with deferred tax assets. The assessment of whether a deferred tax asset is available is based on the unrecognized tax benefit and deferred tax asset that exist at the reporting date and should be made presuming disallowance of the tax position at the reporting date. The amendments in this Update are effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. We expect to adopt the amendment effective October 1, 2014. We do not expect that that the adoption will have a material impact on the Company's consolidated financial statements.
	In March 2013, the FASB issued ASU No. 2013-05 "Foreign Currency Matters (Topic 830)." The objective of the amendments in this Update is to resolve the diversity in practice about which codification subtopic applies to the release of the cumulative translation adjustment into net income when a parent either sells a part or all of its investment in a foreign entity or no longer holds a controlling financial interest in a subsidiary or group of assets that is a business within a foreign entity.
	The amendments in this Update are effective prospectively for fiscal years (and interim reporting periods within those years) beginning after December 15, 2013. The Company will evaluate the impact of the Update as future transactions occur.
	In February 2013, The FASB issued ASU No. 2013-04 "Liabilities (Topic 405)," The guidance in this Update requires an entity to measure obligations resulting from joint and several liability arrangements for which the total amount of the obligation within the scope of this guidance is fixed at the reporting date, as the sum of the following:
	a. The amount the reporting entity agreed to pay on the basis of its arrangement among its co-obligors.
	b. Any additional amount the reporting entity expects to pay on behalf of its co-obligors.
	The guidance in this Update also requires an entity to disclose the nature and amount of the obligation as well as other information about those obligations. The amendments in this Update are effective for fiscal years, and interim periods within those years, beginning after December 15, 2013. The Company does not expect this Update to have a material impact on the Company's consolidated financial statements.

Summary_of_Significant_Account2

Summary of Significant Accounting Policies (Tables)	12 Months Ended
	Sep. 30, 2013
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'
Deferred Profit	'
	The components of deferred profit are as follows:
		September 30,
		2013				2012				2011
		(dollars in thousands)
	Deferred revenue	$	3,371			$	11,200			$	29,666
	Deferred costs	304				964				2,058
	Deferred profit	$	3,067			$	10,236			$	27,608
Allowance For Doubtful Accounts	'
	The following is a summary of the activity in the Company’s allowance for doubtful accounts:
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands)
	Balance at beginning of year	$	517			$	246			$	181
	Provision	199				271				115
	Write offs	(78		)		—				(50		)
	Balance at end of year	$	638			$	517			$	246
Schedule of Inventory, Current	'
	The components of inventories are as follows:
		30-Sep-13				30-Sep-12
		(dollars in thousands)
	Purchased parts and raw materials	$	11,757			$	19,644
	Work-in-process	7,104				2,328
	Finished goods	3,140				3,698
		$	22,001			$	25,670
Property, Plant and Equipment	'
	The following is a summary of property, plant and equipment:
		30-Sep-13				30-Sep-12
		(dollars in thousands)
	Land, building and leasehold improvements	$	10,960			$	10,476
	Equipment and machinery	7,630				7,272
	Furniture and fixtures	5,685				5,458
		24,275				23,206
	Accumulated depreciation and amortization	(13,209		)		(10,819		)
		$	11,066			$	12,387
Schedule of Goodwill	'
	The changes in the carrying amount of goodwill for the year ended September 30, 2013 are as follows.
		Solar and Semiconductor				Polishing Supplies and Equipment				Total
		(dollars in thousands)
	Balance at the beginning of year
	Goodwill	$	12,362			$	728			$	13,090
	Accumulated impairment losses	(4,735		)		—				(4,735		)
		7,627				728				8,355
	Net exchange differences	126				—				126
	Balance at the end of the year
	Goodwill	12,563				728				13,291
	Accumulated impairment losses	(4,810		)		—				(4,810		)
		$	7,753			$	728			$	8,481
Schedule of Finite-Lived Intangible Assets	'
	The following is a summary of intangibles:
		Useful Life		Gross Carrying Amount			Accumulated Amortization			Net Carrying Amount			Gross Carrying Amount		Accumulated Amortization			Net Carrying Amount
				Years Ended September 30,
				2013									2012
				(dollars in thousands)
	Non-compete agreements	4-8 years		$	1,065		$	(717	)	$	348		$	1,057	$	(468	)	$	589
	Customer lists	10 years		871			(532		)	339			828		(432		)	396
	Technology	5-10 years		2,426			(1,422		)	1,004			2,341		(1,085		)	1,256
	In-process research and development	-1		1,600			—			1,600			1,600		—			1,600
	Other	2-10 years		341			(130		)	211			325		(70		)	255
				$	6,303		$	(2,801	)	$	3,502		$	6,151	$	(2,055	)	$	4,096
Schedule of Product Warranty Liability	'
	The following is a summary of activity in accrued warranty expense:
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands)
	Beginning balance	$	2,687			$	2,265			$	1,843
	Warranty expenditures	(1,360		)		(1,831		)		(1,199		)
	Reserve provision	127				2,253				1,621
	Ending balance	$	1,454			$	2,687			$	2,265
Research and Development Expense	'
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands)
	Research and development	$	8,459			$	14,723			$	7,362
	Grants earned	(1,865		)		(1,029		)		(1,578		)
	Net research and development	$	6,594			$	13,694			$	5,784
Schedule of Compensation Cost for Share-based Payment Arrangements, Allocation of Share-based Compensation Costs by Plan	'
	Stock-based compensation expense for the fiscal years ended September 30, 2013, 2012 and 2011 reduced the Company’s results of operations as follows:
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands, except per share amounts)
	Effect on income before income taxes (1)	$	(2,472	)		$	(1,763	)		$	(1,470	)
	Effect on income taxes	$	512			$	255			$	495
	Effect on net income	$	(1,960	)		$	(1,508	)		$	(975	)
	(1) Stock-based compensation expense is included in selling, general and administrative expense
	Stock-based compensation plans are summarized in the table below:
	Name of Plan		Shares Authorized			Shares Available			Options Outstanding			Plan Expiration
	2007 Employee Stock Incentive Plan		1,400,000			194,142			839,004			Mar. 2020
	1998 Employee Stock Option Plan		500,000			—			72,710			Jan. 2008
	Non-Employee Directors Stock Option Plan		350,000			65,600			147,853			Mar. 2020
						259,742			1,059,567
Schedule of the fair value of stock option awards	'
	The Company estimates the fair value of stock option awards on the date of grant using the Black-Scholes option pricing model using the following assumptions:
		Years Ended September 30,
		2013		2012		2011
	Risk free interest rate	1%		1%		2%
	Expected life	6 years		6 years		6 years
	Dividend rate	0%		0%		0%
	Volatility	70%		70%		70%
Schedule of Multiemployer Plans	'
	Below is a table of contributions made by the Company to multiemployer pension plans.
		Contributions
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands)
	Pensioenfonds Metaal en Techniek (PMT)	$	879			$	1,021			$	913
	Other plans	163				181				192
	Total	$	1,042			$	1,202			$	1,105

StockBased_Compensation_Tables

Stock-Based Compensation (Tables)	12 Months Ended
	Sep. 30, 2013
Disclosure of Compensation Related Costs, Share-based Payments [Abstract]	'
Restricted stock transactions and outstanding	'
	Restricted stock transactions and outstanding are summarized as follows:
		Years Ended September 30,
		2013							2012							2011
		Awards			Weighted Average Grant Date Fair Value				Awards			Weighted Average Grant Date Fair Value				Awards			Weighted Average Grant Date Fair Value
	Beginning Outstanding	127,975			$	9.06			120,970			$	9.42			128,751			$	6.34
	Awarded	—			—				60,600			7.98				35,517			17.28
	Released	(58,771	)		7.81				(51,595	)		8.72				(43,298	)		6.78
	Forfeited	(50	)		7.98				(2,000	)		7.22				—			—
	Ending Outstanding	69,154			$	10.13			127,975			$	9.06			120,970			$	9.42
Stock-based compensation plans	'
	Stock-based compensation expense for the fiscal years ended September 30, 2013, 2012 and 2011 reduced the Company’s results of operations as follows:
		Years Ended September 30,
		2013				2012				2011
		(dollars in thousands, except per share amounts)
	Effect on income before income taxes (1)	$	(2,472	)		$	(1,763	)		$	(1,470	)
	Effect on income taxes	$	512			$	255			$	495
	Effect on net income	$	(1,960	)		$	(1,508	)		$	(975	)
	(1) Stock-based compensation expense is included in selling, general and administrative expense
	Stock-based compensation plans are summarized in the table below:
	Name of Plan		Shares Authorized			Shares Available			Options Outstanding			Plan Expiration
	2007 Employee Stock Incentive Plan		1,400,000			194,142			839,004			Mar. 2020
	1998 Employee Stock Option Plan		500,000			—			72,710			Jan. 2008
	Non-Employee Directors Stock Option Plan		350,000			65,600			147,853			Mar. 2020
						259,742			1,059,567
Stock option transactions and the options outstanding	'
	Stock option transactions and the options outstanding are summarized as follows:
		Years Ended September 30,
		2013								2012								2011
		Options				Weighted				Options				Weighted				Options			Weighted
						Average								Average							Average
						Exercise								Exercise							Exercise
						Price								Price							Price
	Outstanding at beginning of period	891,293				$	9.37			611,384				$	10.02			636,283			$	7.59
	Granted	312,850				2.95				285,400				7.98				155,233			16.89
	Exercised	(8,450		)		3.08				(600		)		5.33				(178,882		)	7.35
	Forfeited/canceled	(136,126		)		15.75				(4,891		)		9.5				(1,250		)	6.94
	Outstanding at end of period	1,059,567				6.71				891,293				$	9.37			611,384			$	10.02
	Exercisable at end of period	874,591				$	7.13			400,638				$	9.25			232,018			$	8.31
	Weighted average grant-date fair value of options granted during the period	$	1.82							$	4.95							$	10.57
Stock options outstanding and exercisable	'
	The following tables summarize information for stock options outstanding and exercisable as of September 30, 2013:
			Options Outstanding
	Range of Exercise		Number			Remaining		Average				Aggregate
	Prices		Outstanding			Contractual		Exercise				Intrinsic
						Life		Price				Value
						(in years)						(in thousands)
	2.95-3.00		305,050			9.2		$	2.95			$	1,327
	3.01-7.00		271,683			5.1		5.07				606
	7.01-8.00		295,920			7.9		7.94				—
	8.01-15.00		113,087			5.9		10.49				—
	15.01-23.00		73,827			7.1		17.54				—
			1,059,567			7.3		$	6.71			$	1,933
	Vested and expected		1,057,477			6.7		$	7.29			$	1,925
	to vest as of
	30-Sep-13
			Options Exercisable
	Range of Exercise		Number			Weighted				Aggregate
	Prices		Exercisable			Average				Intrinsic
						Exercise				Value
						Price
										(in thousands)
	2.95-3.00		149,087			$	2.95			$	649
	3.01-7.00		271,683			5.07				606
	7.01-8.00		295,920			7.94				—
	8.01-15.00		98,775			10.48
	15.01 - 23.00		59,126			17.47				—
			874,591			$	7.13			$	1,255

Earnings_Per_Share_Tables

Earnings Per Share (Tables)	12 Months Ended
	Sep. 30, 2013
Earnings Per Share [Abstract]	'
Schedule of Earnings Per Share, Basic and Diluted	'
		2013			2012			2011
		(dollars in thousands, except per share amounts)
	Basic Earnings Per Share Computation
	Net income (loss) attributable to Amtech Systems, Inc.	$	(20,069	)	$	(23,031	)	$	22,882
	Weighted Average Shares Outstanding:
	Common stock	9,529			9,471			9,480
	Basic earnings (loss) per share attributable to Amtech shareholders	$	(2.11	)	$	(2.43	)	$	2.41
	Diluted Earnings Per Share Computation
	Net income (loss) attributable to Amtech Systems, Inc.	$	(20,069	)	$	(23,031	)	$	22,882
	Weighted Average Shares Outstanding:
	Common stock	9,529			9,471			9,480
	Common stock equivalents (1)	—			—			284
	Diluted shares	9,529			9,471			9,764
	Diluted earnings (loss) per share attributable to Amtech shareholders	$	(2.11	)	$	(2.43	)	$	2.34
	(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

Other_Accrued_Liabilities_Tabl

Other Accrued Liabilities (Tables)	12 Months Ended
	Sep. 30, 2013
Payables and Accruals [Abstract]	'
Schedule of Other Accrued Liabilities	'
	Other accrued liabilities consist of the following:
		30-Sep-13		30-Sep-12
		(dollars in thousands)
	Unearned research and development grants	$	5,935	$	1,160
	Loss on inventory purchase commitments	1,289		2,422
	Other	2,916		3,917
		$	10,140	$	7,499

Major_Customers_and_Foreign_Sa1

Major Customers and Foreign Sales (Tables)	12 Months Ended
	Sep. 30, 2013
Major Customers and Foreign Sales [Abstract]	'
Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area	'
	Our net revenues for fiscal 2013, 2012 and 2011 were to customers in the following geographic regions:
		Years Ended September 30,
		2013		2012		2011
	United States	20	%	13	%	6	%
	Taiwan	14	%	9	%	16	%
	China	39	%	43	%	69	%
	Other	11	%	14	%	3	%
	Total Asia	64	%	66	%	88	%
	Germany	5	%	8	%	3	%
	Other	11	%	13	%	3	%
	Total Europe	16	%	21	%	6	%
		100	%	100	%	100	%

Business_Segments_Tables

Business Segments (Tables)	12 Months Ended
	Sep. 30, 2013
Segment Reporting [Abstract]	'
Schedule of Segment Reporting Information, by Segment	'
	Information concerning our business segments is as follows:
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	Solar and semiconductor equipment	$	26,368		$	73,102		$	233,804
	Polishing supplies and equipment	8,430			8,437			12,901
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	Solar and semiconductor equipment	$	(14,377	)	$	(26,236	)	$	46,712
	Polishing supplies and equipment	1,282			1,405			3,648
	Non-segment related loss	(6,899		)	(8,153		)	(12,081		)
		$	(19,994	)	$	(32,984	)	$	38,279
		Years ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Capital expenditures:
	Solar and semiconductor equipment	$	98		$	1,121		$	5,106
	Polishing supplies and equipment	80			185			77
		$	178		$	1,306		$	5,183
	Depreciation and amortization expense:
	Solar and semiconductor equipment	$	2,501		$	2,717		$	2,589
	Polishing supplies and equipment	166			141			225
		$	2,667		$	2,858		$	2,814
		September 30,			September 30,
		2013			2012
		(dollars in thousands)
	Identifiable assets:
	Solar and semiconductor equipment	$	106,723		$	123,923
	Polishing supplies and equipment	4,224			5,099
		$	110,947		$	129,022
	Goodwill:
	Solar and semiconductor equipment	$	7,753		$	7,627
	Polishing supplies and equipment	728			728
		$	8,481		$	8,355

Geographic_Regions_Tables

Geographic Regions (Tables)	12 Months Ended
	Sep. 30, 2013
Segments, Geographical Areas [Abstract]	'
Schedule of Revenues, Operating Income (Loss) and Identifiable Assets by Geographic Region	'
	The Company has operations in The Netherlands, United States, France and China. Revenues, operating income (loss) and identifiable assets by geographic region are as follows:
		Years Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Net revenue:
	The Netherlands	$	17,615		$	48,294		$	195,404
	United States	11,855			27,638			24,079
	France	5,328			5,584			26,347
	China	—			23			875
		$	34,798		$	81,539		$	246,705
	Operating income (loss):
	The Netherlands	$	(11,139	)	$	(18,686	)	$	28,724
	United States	(4,346		)	(1,025		)	(1,742		)
	France	(815		)	(3,041		)	12,992
	China	(3,694		)	(10,232		)	(1,695		)
		$	(19,994	)	$	(32,984	)	$	38,279
					As of September 30,
					2013			2012
	Net long-lived assets
	(excluding intangibles and goodwill)
	The Netherlands				$	8,733		$	9,555
	United States				1,160			1,448
	France				552			676
	China				621			708
					$	11,066		$	12,387

Income_Taxes_Income_Taxes_Tabl

Income Taxes Income Taxes (Tables)	12 Months Ended
	Sep. 30, 2013
Income Tax Disclosure [Abstract]	'
Schedule of Components of the Provision (Benefit) for Income Taxes	'
	The components of the provision (benefit) for income taxes are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Current:
	United States	$	(150	)	2,440			$	800
	Foreign	800			(9,380		)	15,910
	State	(110		)	(90		)	110
	Total current	540			(7,030		)	16,820
	Deferred:
	United States	(290		)	—			(100		)
	Foreign	1,610			1,700			(520		)
	State	—			10			(10		)
	Total deferred	1,320			1,710			(630		)
	Total provision (benefit)	$	1,860		$	(5,320	)	$	16,190
Reconciliation of Actual Income Taxes to Expected Federal Corporate Income Taxes	'
	A reconciliation of actual income taxes to income taxes at the expected United States federal corporate income tax rate of thirty-four percent is as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Tax provision (benefit) at the U.S. rate	$	(6,750	)	$	(11,190	)	$	13,410
	Effect of permanent book-tax differences	970			2,010			510
	State tax provision	(110		)	(80		)	100
	Valuation allowance for net deferred tax assets	5,850			1,740			470
	Uncertain tax items	450			(240		)	1,620
	Expiration of foreign net operating loss	—			2,320			170
	Difference between U.S. and foreign rates	1,440			—			—
	Other items	10			120			(90		)
		$	1,860		$	(5,320	)	$	16,190
Schedule of Deferred Tax Assets and Deferred Tax Liability	'
	The tax effects of temporary book-tax differences that give rise to significant portions of the deferred tax assets and deferred tax liability are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Deferred tax assets - current:
	Capitalized inventory costs	$	130		$	90		150
	Inventory write-downs	620			600			590
	Accrued warranty	200			20			(580		)
	Deferred profits	800			2,510			6,820
	Accruals and reserves not currently deductible	490			240			2,580
	Deferred tax assets - current	$	2,240		$	3,460		$	9,560
	Valuation allowance	(910		)	—			—
	Deferred tax assets - current net of valuation allowance	$	1,330		$	3,460		$	9,560
	Deferred tax assets (liabilities)- non-current:
	Stock option expense	700			470			270
	Book vs. tax basis of acquired assets	(1,130		)	(1,280		)	(760		)
	Foreign and state net operating losses	9,000			3,640			850
	Book vs. tax depreciation and amortization	60			100			300
	Foreign tax credits	520			—			—
	Other deferred tax assets	(350		)	140			90
	Total deferred tax assets - non-current	8,800			3,070			750
	Valuation allowance	(7,540		)	(2,600		)	(860		)
	Deferred tax assets (liabilities) - non-current, net of valuation allowance	$	1,260		$	470		$	(110	)
Changes in Deferred Tax Valuation Allowance	'
	Changes in the deferred tax valuation allowance are as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Balance at the beginning of the year	$	2,600		$	860		$	390
	Additions to valuation allowance	5,850			1,740			470
	Balance at the end of the year	$	8,450		$	2,600		$	860
Schedule of Unrecognized Tax Benefit Liabilities	'
	A reconciliation of the beginning and ending amount of our unrecognized tax benefits is summarized as follows:
		Year Ended September 30,
		2013			2012			2011
		(dollars in thousands)
	Balances at beginning of the year	$	2,360		$	2,630		$	1,010
	Additions (reductions) related to current year tax positions	—			(390		)	1,210
	Additions related to tax positions taken in prior years	530			360			450
	Reductions related to settlements with tax authorities	—			(240		)	—
	Reductions due to lapse of statute of limitations	(80		)	—			(40		)
	Balance at the end of the year	$	2,810		$	2,360		$	2,630

Selected_Quarterly_Data_unaudi1

Selected Quarterly Data (unaudited) (Tables)	12 Months Ended
	Sep. 30, 2013
Selected Quarterly Data (Unaudited) [Abstract]	'
Selected Quarterly Data (Unaudited)	'
		First Quarter			Second Quarter			Third Quarter			Fourth Quarter
	Fiscal Year 2013:	(in thousands, except per share amounts)
	Revenue	$	9,357		$	8,118		$	10,398		$	6,925
	Gross margin	$	1,378		$	2,453		$	(2,677	)	$	3,159
	Provision for income taxes	$	(480	)	$	(800	)	$	2,560		$	580
	Net loss attributable to Amtech Systems, Inc.	$	(4,194	)	$	(2,092	)	$	(12,101	)	$	(1,682	)
	Comprehensive loss attributable to Amtech Systems, Inc.	$	(2,791	)	$	(3,555	)	$	(11,387	)	$	(75	)
	Net loss per share attributable to Amtech Systems, Inc.:
	Basic earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
	Shares used in calculation	9,494			9,539			9,539			9,543
	Diluted earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
	Shares used in calculation	9,494			9,539			9,539			9,543
	Fiscal Year 2012:
	Revenue	$	24,728		$	21,566		$	24,300		$	10,945
	Gross margin	$	7,201		$	4,048		$	4,804		$	(6,860	)
	Provision for income taxes	$	(320	)	$	(220	)	$	(1,110	)	$	(3,670	)
	Net loss attributable to Amtech Systems, Inc.	$	(876	)	$	(5,079	)	$	(2,965	)	$	(14,111	)
	Comprehensive loss attributable to Amtech Systems, Inc.	$	(4,607	)	$	(2,877	)	$	(6,816	)	$	(13,470	)
	Net loss per share attributable to Amtech Systems, Inc.:
	Basic earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
	Shares used in calculation	9,446			9,479			9,479			9,482
	Diluted earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
	Shares used in calculation	9,446			9,479			9,479			9,482

Summary_of_Significant_Account3

Summary of Significant Accounting Policies Change in Accounting Estimate (Details) (USD $)	12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Change in Accounting Estimate [Line Items]	'	'	'
Losses on inventory purchase commitments	$0	$2,455	$0
Write-down of inventory	3,652	10,380	1,167
Inventory Valuation and Obsolescence	'	'	'
Change in Accounting Estimate [Line Items]	'	'	'
Losses on inventory purchase commitments	'	2,455	'
Decrease (Increase) In Operating Income (Loss) Including Portion Attributable To Noncontrolling Interest	'	12,835	'
Decrease (Increase) In Operating Income (Loss) Attributable To Parent	3,700	9,700	'
Earnings Per Share Basic And Diluted Increase (Decrease)	$0.39	$1.01	'
Write-down of inventory	$3,652	$10,380	'

Summary_of_Significant_Account4

Summary of Significant Accounting Policies (Revenue Recognition) (Details)	12 Months Ended
	Sep. 30, 2013
Maximum	'
Gross Profit [Line Items]	'
Contingent portion sales price percent	20.00%
Minimum	'
Gross Profit [Line Items]	'
Contingent portion sales price percent	10.00%

Summary_of_Significant_Account5

Summary of Significant Accounting Policies (Deferred Profit) (Details) (USD $)	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
In Thousands, unless otherwise specified
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'	'
Deferred revenue	$3,371	$11,200	$29,666
Deferred costs	304	964	2,058
Deferred profit	$3,067	$10,236	$27,608

Summary_of_Significant_Account6

Summary of Significant Accounting Policies (Restricted Cash) (Details) (USD $)	Sep. 30, 2013	Sep. 30, 2012
In Thousands, unless otherwise specified
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'
Restricted cash	$5,134	$4,644

Summary_of_Significant_Account7

Summary of Significant Accounting Policies (Allowance for Doubtful Accounts) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Allowance for Doubtful Accounts Receivable [Roll Forward]	'	'	'
Balance at beginning of year	$517	$246	$181
Provision	199	271	115
Write offs	-78	0	-50
Balance at end of year	$638	$517	$246

Summary_of_Significant_Account8

Summary of Significant Accounting Policies (Concentrations of Credit Risk) (Details)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012
	Customer	Customer
United States	'	'
Concentration Risk [Line Items]	'	'
Percentage Of Cash And Cash Equivalents	60.00%	'
Accounts Receivable [Member]	'	'
Concentration Risk [Line Items]	'	'
Number Of Customers	2	2
Accounts Receivable [Member] | Customer One	'	'
Concentration Risk [Line Items]	'	'
Concentration risk, percentage	18.00%	14.00%
Accounts Receivable [Member] | Customer Two	'	'
Concentration Risk [Line Items]	'	'
Concentration risk, percentage	13.00%	12.00%
Accounts Receivable [Member] | Yingli Green Energy	'	'
Concentration Risk [Line Items]	'	'
Concentration risk, percentage	18.00%	14.00%

Summary_of_Significant_Account9

Summary of Significant Accounting Policies (Inventories) (Details) (USD $)	Sep. 30, 2013	Sep. 30, 2012
In Thousands, unless otherwise specified
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'
Percentage of weighted average cost inventory	80.00%	'
Purchased parts and raw materials	$11,757	$19,644
Work-in-process	7,104	2,328
Finished goods	3,140	3,698
Inventory	$22,001	$25,670

Recovered_Sheet1

Summary of Significant Accounting Policies (Property, Plant and Equipment) (Details) (USD $)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Property, Plant and Equipment [Line Items]	'	'	'
Depreciation	$2,000,000	$2,200,000	$2,100,000
Property, plant and equipment, gross	24,275,000	23,206,000	'
Accumulated depreciation and amortization	-13,209,000	-10,819,000	'
Property, plant and equipment - net	11,066,000	12,387,000	'
Equipment, Machinery And Leasehold Improvements | Minimum	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, useful life (in years)	'3 years	'	'
Equipment, Machinery And Leasehold Improvements | Maximum	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, useful life (in years)	'7 years	'	'
Land, building and leasehold improvements	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, gross	10,960,000	10,476,000	'
Buildings	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, useful life (in years)	'20 years	'	'
Equipment and machinery	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, gross	7,630,000	7,272,000	'
Furniture and fixtures	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, gross	$5,685,000	$5,458,000	'
Furniture and fixtures | Minimum	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, useful life (in years)	'5 years	'	'
Furniture and fixtures | Maximum	'	'	'
Property, Plant and Equipment [Line Items]	'	'	'
Property, plant and equipment, useful life (in years)	'10 years	'	'

Recovered_Sheet2

Summary of Significant Accounting Policies (Goodwill) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013
Goodwill [Roll Forward]	'
Goodwill, gross, beginning of year	$13,090
Goodwill, gross, end of year	13,291
Goodwill, accumulated impairment loss, beginning of year	-4,735
Goodwill, accumulated impairment loss, end of year	-4,810
Goodwill, net, beginning of year	8,355
Goodwill, net, end of year	8,481
Exchange differences, net	126
Solar And Semiconductor Equipment	'
Goodwill [Roll Forward]	'
Goodwill, gross, beginning of year	12,362
Goodwill, gross, end of year	12,563
Goodwill, accumulated impairment loss, beginning of year	-4,735
Goodwill, accumulated impairment loss, end of year	-4,810
Goodwill, net, beginning of year	7,627
Goodwill, net, end of year	7,753
Exchange differences, net	126
Polishing Supplies And Equipment	'
Goodwill [Roll Forward]	'
Goodwill, gross, beginning of year	728
Goodwill, gross, end of year	728
Goodwill, accumulated impairment loss, beginning of year	0
Goodwill, accumulated impairment loss, end of year	0
Goodwill, net, beginning of year	728
Goodwill, net, end of year	728
Exchange differences, net	$0

Recovered_Sheet3

Summary of Significant Accounting Policies (Intangibles) (Details) (USD $)	12 Months Ended
	Sep. 30, 2013		Sep. 30, 2012		Sep. 30, 2011
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Amortization of Intangible Assets	$600,000		$700,000		$800,000
Finite-Lived Intangible Assets, Amortization Expense, Next Twelve Months	700,000		'		'
Finite-Lived Intangible Assets, Amortization Expense, Year Two	600,000		'		'
Finite-Lived Intangible Assets, Amortization Expense, Year Three	400,000		'		'
Finite-Lived Intangible Assets, Amortization Expense, Year Four	300,000		'		'
Finite-Lived Intangible Assets, Amortization Expense, after Year Five	1,600,000		'		'
Finite-Lived Intangible Assets, Gross	6,303,000		6,151,000		'
Accumulated amortization	-2,801,000		-2,055,000		'
Finite-Lived Intangible Assets, Net	3,502,000		4,096,000		'
Minimum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Standard Product Warranty, Period	'12 months		'		'
Maximum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Standard Product Warranty, Period	'24 months		'		'
Non-compete agreements	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Finite-Lived Intangible Assets, Gross	1,065,000		1,057,000		'
Accumulated amortization	-717,000		-468,000		'
Finite-Lived Intangible Assets, Net	348,000		589,000		'
Non-compete agreements | Minimum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'4 years		'		'
Non-compete agreements | Maximum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'8 years		'		'
Customer lists	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'10 years		'		'
Finite-Lived Intangible Assets, Gross	871,000		828,000		'
Accumulated amortization	-532,000		-432,000		'
Finite-Lived Intangible Assets, Net	339,000		396,000		'
Technology	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Finite-Lived Intangible Assets, Gross	2,426,000		2,341,000		'
Accumulated amortization	-1,422,000		-1,085,000		'
Finite-Lived Intangible Assets, Net	1,004,000		1,256,000		'
Technology | Minimum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'5 years		'		'
Technology | Maximum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'10 years		'		'
In-process research and development	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Finite-Lived Intangible Assets, Gross	1,600,000	[1]	1,600,000	[1]	'
Accumulated amortization	0	[1]	0	[1]	'
Finite-Lived Intangible Assets, Net	1,600,000	[1]	1,600,000	[1]	'
Other	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Finite-Lived Intangible Assets, Gross	341,000		325,000		'
Accumulated amortization	-130,000		-70,000		'
Finite-Lived Intangible Assets, Net	$211,000		$255,000		'
Other | Minimum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'2 years		'		'
Other | Maximum	'		'		'
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]	'		'		'
Useful Life (in years)	'10 years		'		'
[1]	(1) The in-process research and development will be amortized over its useful life when it has reached technological feasibility.

Recovered_Sheet4

Summary of Significant Accounting Policies (Warranty) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Movement in Standard Product Warranty Accrual [Roll Forward]	'	'	'
Beginning balance	$2,687	$2,265	$1,843
Warranty expenditures	-1,360	-1,831	-1,199
Reserve provision	127	2,253	1,621
Ending balance	$1,454	$2,687	$2,265
Minimum	'	'	'
Product Warranty [Line Items]	'	'	'
Standard Product Warranty, Period	'12 months	'	'
Maximum	'	'	'
Product Warranty [Line Items]	'	'	'
Standard Product Warranty, Period	'24 months	'	'

Recovered_Sheet5

Summary of Significant Accounting Policies (Research and Development Expense) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'	'
Research and development	$8,459	$14,723	$7,362
Grants earned	-1,865	-1,029	-1,578
Net research and development	$6,594	$13,694	$5,784

Recovered_Sheet6

Summary of Significant Accounting Policies (Shipping Expense) (Details) (USD $)	12 Months Ended
In Millions, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'	'
Shipping expenses	$0.80	$1.70	$5.90

Recovered_Sheet7

Summary of Significant Accounting Policies (Foreign Currency Transactions and Translation) (Details) (USD $)	12 Months Ended
In Millions, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'	'
Foreign Currency Transaction Loss, before Tax (less than: .1 million in 2013, .1 million in 2012, .2 million in 2011)	$0.10	$0.10	$0.20

Recovered_Sheet8

Summary of Significant Accounting Policies (Stock-Based Compensation) (Details) (USD $)	1 Months Ended	3 Months Ended	12 Months Ended
	Jun. 30, 2013	Jun. 30, 2013	Sep. 30, 2013		Sep. 30, 2012		Sep. 30, 2011
	Employees	Employees
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Share-Based Compensation Arrangement by Share-Based Payment Award, Percentage of Unvested Stock Options Approved for Acceleration	'	50.00%	'		'		'
Effect on income before income taxes	'	'	($2,472,000)	[1]	($1,763,000)	[1]	($1,470,000)	[1]
Effect on income taxes	'	'	512,000		255,000		495,000
Effect on net income	'	'	-1,960,000		-1,508,000		-975,000
Expiration period	'	'	'10 years		'		'
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]	'	'	'		'		'
Risk free interest rate	'	'	'		'		2.00%
Expected life (in years)	'	'	'		'		'6 years
Dividend rate	'	'	'		'		0.00%
Volatility	'	'	'		'		70.00%
Maximum	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Option vesting period (in years)	'	'	'4 years		'		'
Minimum	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Option vesting period (in years)	'	'	'1 year		'		'
Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercise price	$17.12	'	'		'		'
Number of employees holding options	110	110	'		'		'
Shares of common stock to be purchased as result of acceleration of the vesting	'	400,000	'		'		'
Nonvested awards, total compensation cost not yet recognized	900,000	900,000	'		'		'
Exercisable at end of period, weighted average exercise price (usd per share)	'	'	$7.13		$9.25		$8.31
Options, forfeitures in period	'	'	136,126		4,891		1,250
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]	'	'	'		'		'
Risk free interest rate	'	'	1.00%		1.00%		'
Expected life (in years)	'	'	'6 years		'6 years		'
Dividend rate	'	'	0.00%		0.00%		'
Volatility	'	'	70.00%		70.00%		'
One Half of Unvested Stock Options | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercise price	'	$2.95	'		'		'
Remaining Unvested Stock Options | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercise price range, lower range limit	'	$6.15	'		'		'
Exercise price range, upper range limit	'	$7.98	'		'		'
Accelerated | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercisable at end of period, weighted average exercise price (usd per share)	$5.77	$5.77	'		'		'
Vested and Unvested | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Options, forfeitures in period	100,000	'	'		'		'
Vested | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercise price	$14.79	'	'		'		'
Unvested | Stock Options	'	'	'		'		'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'		'		'
Exercise price	$17.12	'	'		'		'
Effect on income before income taxes	'	($300,000)	'		'		'
[1]	(1) Stock-based compensation expense is included in selling, general and administrative expense

Recovered_Sheet9

Summary of Significant Accounting Policies Pensions (Details) (USD $)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Multiemployer Plan Percentage Decrease in Pension Rights	6.30%	'	'
Multiemployer Plan, Period Contributions	$1,042,000	$1,202,000	$1,105,000
Pensioenfonds Metaal en Techniek	'	'	'
Multiemployer Plans Contribution Rate (less than 5%)	5.00%	'	'
Multiemployer Plan, Coverage Ratio Of Plan Assets To Obligations	101.50%	'	'
Multiemployer Plan Premium Percentage	16.60%	'	'
Multiemployer Plan Number Of Companies Covered	34,000	'	'
Multiemployer Plan Number Of Employees	1,200,000	'	'
Multiemployer Plan, Period Contributions	879,000	1,021,000	913,000
Multiemployer Plans Plan Assets October 31, 2012	63,700,000,000	'	'
Multiemployer Plans Present Value Of Accumulated Plan Benefits October 31, 2012	63,100,000,000	'	'
Other Plans	'	'	'
Multiemployer Plan, Period Contributions	$163,000	$181,000	$192,000
Minimum | Pensioenfonds Metaal en Techniek	'	'	'
Multiemployer Plan, Coverage Ratio Of Plan Assets To Obligations	104.30%	'	'
Multiemployer Plan Coverage Ratio Of Plan Assets To Obligations By December 31, 2012	104.30%	'	'
The Netherlands | Pensioenfonds Metaal en Techniek	'	'	'
Multiemployer Plan Number Of Employees	110	'	'

Recovered_Sheet10

Summary of Significant Accounting Policies (Reclassifications) (Details) (USD $)	Sep. 30, 2012	Sep. 30, 2011
In Millions, unless otherwise specified
Organization, Consolidation and Presentation of Financial Statements [Abstract]	'	'
Prepaid income taxes	$1.40	$4.30

StockBased_Compensation_Detail

Stock-Based Compensation (Details) (USD $)

12 Months Ended

0 Months Ended

3 Months Ended

12 Months Ended

3 Months Ended

12 Months Ended

In Millions, except Share data, unless otherwise specified

Sep. 30, 2013

Sep. 30, 2013

Sep. 30, 2012

Sep. 30, 2011

Sep. 30, 2013

Sep. 30, 2012

Sep. 30, 2011

Sep. 30, 2010

Jan. 31, 2008

Jan. 01, 1998

Sep. 30, 2013

Jul. 31, 2005

Mar. 31, 2009

Sep. 30, 1996

Sep. 30, 2013

Mar. 31, 2009

Apr. 01, 2007

Sep. 30, 2013

Sep. 30, 2013

Sep. 30, 2013

Sep. 30, 2013

Sep. 30, 2013

Restricted Stock

Restricted Stock

Restricted Stock

Stock Options

Stock Options

Stock Options

Stock Options

1998 Employee Stock Option Plan

1998 Employee Stock Option Plan

1998 Employee Stock Option Plan

Non-Employee Directors Stock Option Plan

Non-Employee Directors Stock Option Plan

Non-Employee Directors Stock Option Plan

Non-Employee Directors Stock Option Plan

2007 Employee Stock Incentive Plan

2007 Employee Stock Incentive Plan

2007 Employee Stock Incentive Plan

Maximum

Maximum

Minimum

Minimum

Stock-Based

Stock-Based

Stock Options

Stock-Based

Stock-Based

Stock-Based

Stock Options

Stock-Based

Stock-Based

Stock Options

Stock-Based

Stock-Based

Share-based Compensation Arrangement by Share-based Payment Award [Line Items]

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Stock Issued During Period, Shares, Share-based Compensation, Gross

'

'

'

'

'

'

'

'

'

'

'

200,000

'

100,000

'

'

'

'

'

'

'

'

Share-based Compensation Arrangement by Share-based Payment Award, Number of Additional Shares Authorized

'

'

'

'

'

'

'

'

'

'

'

'

150,000

'

'

900,000

'

'

'

'

'

'

Expiration period

'10 years

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'10 years

'

'

Option vesting period (in years)

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'4 years

'4 years

'1 year

'1 year

Unamortized Expense Share Issuance

'

$0.40

$0.80

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Beginning Outstanding (in shares)

'

127,975

120,970

128,751

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Awarded (in shares)

'

0

60,600

35,517

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Released (in shares)

'

-58,771

-51,595

-43,298

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Forfeited (in shares)

'

-50

-2,000

0

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Ending Outstanding (in shares)

'

69,154

127,975

120,970

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)

'

$9.06

$9.42

$6.34

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Awarded, Weighted Average Grant Date Fair Value (usd per share)

'

$0

$7.98

$17.28

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Released, Weighted Average Grant Date Fair Value (usd per share)

'

$7.81

$8.72

$6.78

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Forfeited, Weighted Average Grant Date Fair Value (usd per share)

'

$7.98

$7.22

$0

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)

'

$10.13

$9.06

$9.42

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

'

Shares Authorized

'

'

'

'

'

'

'

'

'

'

500,000

'

'

'

350,000

'

'

1,400,000

'

'

'

'

Shares Available

'

'

'

'

259,742

'

'

'

500,000

50,000

0

'

'

'

65,600

'

500,000

194,142

'

'

'

'

Options Outstanding

'

'

'

'

1,059,567

891,293

611,384

636,283

'

'

72,710

'

'

'

147,853

'

'

839,004

'

'

'

'

StockBased_Compensation_Stock_

Stock-Based Compensation (Stock Options Valuation) (Details) (Stock Options, USD $)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Stock Options	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'
Outstanding at beginning of period (in shares)	891,293	611,384	636,283
Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)	$9.37	$10.02	$7.59
Granted (in shares)	312,850	285,400	155,233
Granted, Weighted Average Exercise Price (usd per share)	$2.95	$7.98	$16.89
Exercised (in shares)	-8,450	-600	-178,882
Exercised, Weighted Average Exercise Price (usd per share)	$3.08	$5.33	$7.35
Forfeited (in shares)	-136,126	-4,891	-1,250
Forfeited, Weighted Average Exercise Price (usd per share)	$15.75	$9.50	$6.94
Outstanding at end of period (in shares)	1,059,567	891,293	611,384
Outstanding at end of period, Weighted Average Exercise Price (usd per share)	$6.71	$9.37	$10.02
Exercisable at end of period (in shares)	874,591	400,638	232,018
Exercisable at end of period, weighted average exercise price (usd per share)	$7.13	$9.25	$8.31
Weighted average fair value of options granted during the period (usd per share)	$1.82	$4.95	$10.57

StockBased_Compensation_Stock_1

Stock-Based Compensation (Stock Options Outstanding) (Details) (Stock Options, USD $)	12 Months Ended
In Thousands, except Share data, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011	Sep. 30, 2010
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	1,059,567	891,293	611,384	636,283
Remaining Contractual Life (in years)	'7 years 3 months 18 days	'	'	'
Average Exercise Price	$6.71	$9.37	$10.02	$7.59
Aggregate Intrinsic Value	$1,933	'	'	'
Number Outstanding - Vested and expected to vest	1,057,477	'	'	'
Remaining Contractual Life - Vested and expected to vest	'6 years 8 months 19 days	'	'	'
Average Exercise Price - Vested and expected to vest	$7.29	'	'	'
Aggregate Intrinsic Value - Vested and expected to vest	1,925	'	'	'
Exercisable at end of period (in shares)	874,591	400,638	232,018	'
Exercisable at end of period, weighted average exercise price (usd per share)	$7.13	$9.25	$8.31	'
Aggregate intrinsic value	1,255	'	'	'
2.95-3.00	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	305,050	'	'	'
Remaining Contractual Life (in years)	'9 years 2 months 9 days	'	'	'
Average Exercise Price	$2.95	'	'	'
Aggregate Intrinsic Value	1,327	'	'	'
Exercisable at end of period (in shares)	149,087	'	'	'
Exercisable at end of period, weighted average exercise price (usd per share)	$2.95	'	'	'
Aggregate intrinsic value	649	'	'	'
2.95-3.00 | Maximum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$3	'	'	'
2.95-3.00 | Minimum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$2.95	'	'	'
3.01-7.00	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	271,683	'	'	'
Remaining Contractual Life (in years)	'5 years 1 month 24 days	'	'	'
Average Exercise Price	$5.07	'	'	'
Aggregate Intrinsic Value	606	'	'	'
Exercisable at end of period (in shares)	271,683	'	'	'
Exercisable at end of period, weighted average exercise price (usd per share)	$5.07	'	'	'
Aggregate intrinsic value	606	'	'	'
3.01-7.00 | Maximum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$7	'	'	'
3.01-7.00 | Minimum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$3.01	'	'	'
7.01-8.00	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	295,920	'	'	'
Remaining Contractual Life (in years)	'7 years 10 months 24 days	'	'	'
Average Exercise Price	$7.94	'	'	'
Aggregate Intrinsic Value	0	'	'	'
Exercisable at end of period (in shares)	295,920	'	'	'
Exercisable at end of period, weighted average exercise price (usd per share)	$7.94	'	'	'
Aggregate intrinsic value	0	'	'	'
7.01-8.00 | Maximum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$8	'	'	'
7.01-8.00 | Minimum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$7.01	'	'	'
8.01-15.00	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	113,087	'	'	'
Remaining Contractual Life (in years)	'5 years 10 months 24 days	'	'	'
Average Exercise Price	$10.49	'	'	'
Aggregate Intrinsic Value	0	'	'	'
Exercisable at end of period (in shares)	98,775	'	'	'
Exercisable at end of period, weighted average exercise price (usd per share)	$10.48	'	'	'
8.01-15.00 | Maximum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$15	'	'	'
8.01-15.00 | Minimum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$8.01	'	'	'
15.01-23.00	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Number Outstanding	73,827	'	'	'
Remaining Contractual Life (in years)	'7 years 1 month 6 days	'	'	'
Average Exercise Price	$17.54	'	'	'
Aggregate Intrinsic Value	0	'	'	'
Exercisable at end of period (in shares)	59,126	'	'	'
Exercisable at end of period, weighted average exercise price (usd per share)	$17.47	'	'	'
Aggregate intrinsic value	$0	'	'	'
15.01-23.00 | Maximum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$23	'	'	'
15.01-23.00 | Minimum	'	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'	'
Average Exercise Price	$15.01	'	'	'

StockBased_Compensation_Stock_2

Stock-Based Compensation (Stock Options Exercisable) (Details) (Stock Options, USD $)	12 Months Ended
In Millions, except Per Share data, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Stock Options	'	'	'
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]	'	'	'
Closing Stock Price Per Share	$7.30	'	'
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Total Intrinsic Value (less than .1 million in 2013, less than .1 million in 2012, and 1.3 million in 2011)	$0.10	$0.10	$1.30

Earnings_Per_Share_Details

Earnings Per Share (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013		Sep. 30, 2012		Sep. 30, 2011
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]	'	'	'	'	'	'	'	'	'		'		'
Net loss attributable to Amtech Systems, Inc.	($1,682)	($12,101)	($2,092)	($4,194)	($14,111)	($2,965)	($5,079)	($876)	($20,069)		($23,031)		$22,882
Weighted average shares outstanding (in shares)	9,543	9,539	9,539	9,494	9,482	9,479	9,479	9,446	9,529		9,471		9,480
Basic income (loss) per share attributable to Amtech shareholders (dollars per share)	($0.18)	($1.27)	($0.22)	($0.44)	($1.49)	($0.31)	($0.54)	($0.09)	($2.11)		($2.43)		$2.41
Common stock equivalents (in shares)	'	'	'	'	'	'	'	'	0	[1]	0	[1]	284	[1]
Diluted shares (in shares)	9,543	9,539	9,539	9,494	9,482	9,479	9,479	9,446	9,529		9,471		9,764
Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)	($0.18)	($1.27)	($0.22)	($0.44)	($1.49)	($0.31)	($0.54)	($0.09)	($2.11)		($2.43)		$2.34
Stock Options and Restricted Stock	'	'	'	'	'	'	'	'	'		'		'
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]	'	'	'	'	'	'	'	'	'		'		'
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount	'	'	'	'	'	'	'	'	1,130		1,020		145
[1]	(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.

Stockholders_Equity_Details

Stockholders' Equity (Details) (Series A Preferred Stock [Member], USD $)	Sep. 30, 2013	Dec. 15, 2008
Series A Preferred Stock [Member]	'	'
Equity, Class of Treasury Stock [Line Items]	'	'
Preferred Stock, Par or Stated Value Per Share	'	$0.01
Class of Warrant or Right, Number of Securities Called by Warrants or Rights	0.001	'
Class of Warrant or Right, Exercise Price of Warrants or Rights	'	51.6

Other_Accrued_Liabilities_Deta

Other Accrued Liabilities (Details) (USD $)	Sep. 30, 2013	Sep. 30, 2012
In Thousands, unless otherwise specified
Payables and Accruals [Abstract]	'	'
Unearned research and development grants	$5,935	$1,160
Loss on inventory purchase commitments	1,289	2,422
Other	2,916	3,917
Other accrued liabilities	$10,140	$7,499

Commitments_and_Contingencies_

Commitments and Contingencies (Purchase Obligations) (Details) (USD $)	Sep. 30, 2013
In Millions, unless otherwise specified
Commitments and Contingencies Disclosure [Abstract]	'
Purchase obligations	$12.30

Commitments_and_Contingencies_1

Commitments and Contingencies (Operating Leases) (Details) (USD $)	12 Months Ended
In Millions, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Commitments and Contingencies Disclosure [Abstract]	'	'	'
Operating leases, rental expense	$1	$1.40	$1.20
Future minimum rental commitments	2.9	'	'
Future minimum rental commitments, due in fiscal 2014	1.2	'	'
Future minimum rental commitments, due in fiscal 2015	0.7	'	'
Future minimum rental commitments, due in fiscal 2016	0.4	'	'
Future minimum rental commitments, due in fiscal 2017	0.2	'	'
Future minimum rental commitments, due in fiscal 2018	0.2	'	'
Future minimum rental commitments, due thereafter	$0.20	'	'

Commitments_and_Contingencies_2

Commitments and Contingencies Development Project (Details) (USD $)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Schedule of Equity Method Investments [Line Items]	'	'	'
First portion of grant funds received for the development project	$2,600,000	'	'
Customer funding to offset costs incurred	1,865,000	1,029,000	1,578,000
Grant revenue commitment to project	$6,100,000	'	'
Kingstone Holding Company	'	'	'
Schedule of Equity Method Investments [Line Items]	'	'	'
Equity method investment, ownership percentage	55.00%	'	'
Kingstone Semiconductor Company Ltd	'	'	'
Schedule of Equity Method Investments [Line Items]	'	'	'
Percentage of Voting Interest of Acquire Owned Subsidiary	100.00%	'	'

Major_Customers_and_Foreign_Sa2

Major Customers and Foreign Sales (Details)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
	Customer	Customer	Customer
Revenue, Major Customer [Line Items]	'	'	'
Revenue, number of major customers	1	1	2
Revenues, percentage	100.00%	100.00%	100.00%
United States	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	20.00%	13.00%	6.00%
Taiwan	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	14.00%	9.00%	16.00%
China	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	39.00%	43.00%	69.00%
Other	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	11.00%	14.00%	3.00%
Total Asia	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	64.00%	66.00%	88.00%
Germany	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	5.00%	8.00%	3.00%
Other	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	11.00%	13.00%	3.00%
Total Europe	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenues, percentage	16.00%	21.00%	6.00%
Customer Number One	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenue, major customer, percentage	20.00%	11.00%	15.00%
Customer Number Two	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenue, major customer, percentage	'	'	14.00%
Yingli	'	'	'
Revenue, Major Customer [Line Items]	'	'	'
Revenue, major customer, percentage	20.00%	7.00%	15.00%

Business_Segments_Details

Business Segments (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
									segment
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Number of operating segments	'	'	'	'	'	'	'	'	2	'	'
Net revenue	$6,925	$10,398	$8,118	$9,357	$10,945	$24,300	$21,566	$24,728	$34,798	$81,539	$246,705
Operating loss	'	'	'	'	'	'	'	'	-19,994	-32,984	38,279
Capital expenditures	'	'	'	'	'	'	'	'	178	1,306	5,183
Depreciation and amortization	'	'	'	'	'	'	'	'	2,667	2,858	2,814
Identifiable assets	110,947	'	'	'	129,022	'	'	'	110,947	129,022	'
Goodwill	8,481	'	'	'	8,355	'	'	'	8,481	8,355	'
Solar and semiconductor equipment	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	26,368	73,102	233,804
Operating loss	'	'	'	'	'	'	'	'	-14,377	-26,236	46,712
Capital expenditures	'	'	'	'	'	'	'	'	98	1,121	5,106
Depreciation and amortization	'	'	'	'	'	'	'	'	2,501	2,717	2,589
Identifiable assets	106,723	'	'	'	123,923	'	'	'	106,723	123,923	'
Goodwill	7,753	'	'	'	7,627	'	'	'	7,753	7,627	'
Polishing supplies and equipment	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	8,430	8,437	12,901
Operating loss	'	'	'	'	'	'	'	'	1,282	1,405	3,648
Capital expenditures	'	'	'	'	'	'	'	'	80	185	77
Depreciation and amortization	'	'	'	'	'	'	'	'	166	141	225
Identifiable assets	4,224	'	'	'	5,099	'	'	'	4,224	5,099	'
Goodwill	728	'	'	'	728	'	'	'	728	728	'
Non-segment related loss	'	'	'	'	'	'	'	'	'	'	'
Segment Reporting Information [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Operating loss	'	'	'	'	'	'	'	'	($6,899)	($8,153)	($12,081)

Geographic_Regions_Details

Geographic Regions (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	$6,925	$10,398	$8,118	$9,357	$10,945	$24,300	$21,566	$24,728	$34,798	$81,539	$246,705
Operating income (loss)	'	'	'	'	'	'	'	'	-19,994	-32,984	38,279
Net long-lived assets	11,066	'	'	'	12,387	'	'	'	11,066	12,387	'
The Netherlands	'	'	'	'	'	'	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	17,615	48,294	195,404
Operating income (loss)	'	'	'	'	'	'	'	'	-11,139	-18,686	28,724
Net long-lived assets	8,733	'	'	'	9,555	'	'	'	8,733	9,555	'
United States	'	'	'	'	'	'	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	11,855	27,638	24,079
Operating income (loss)	'	'	'	'	'	'	'	'	-4,346	-1,025	-1,742
Net long-lived assets	1,160	'	'	'	1,448	'	'	'	1,160	1,448	'
France	'	'	'	'	'	'	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	5,328	5,584	26,347
Operating income (loss)	'	'	'	'	'	'	'	'	-815	-3,041	12,992
Net long-lived assets	552	'	'	'	676	'	'	'	552	676	'
China	'	'	'	'	'	'	'	'	'	'	'
Revenues from External Customers and Long-Lived Assets [Line Items]	'	'	'	'	'	'	'	'	'	'	'
Net revenue	'	'	'	'	'	'	'	'	0	23	875
Operating income (loss)	'	'	'	'	'	'	'	'	-3,694	-10,232	-1,695
Net long-lived assets	$621	'	'	'	$708	'	'	'	$621	$708	'

Income_Taxes_Components_of_Pro

Income Taxes (Components of Provision (Benefit)) (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Current:	'	'	'	'	'	'	'	'	'	'	'
United States	'	'	'	'	'	'	'	'	($150)	$2,440	$800
Foreign	'	'	'	'	'	'	'	'	800	-9,380	15,910
State	'	'	'	'	'	'	'	'	-110	-90	110
Total current	'	'	'	'	'	'	'	'	540	-7,030	16,820
Deferred:	'	'	'	'	'	'	'	'	'	'	'
United States	'	'	'	'	'	'	'	'	-290	0	-100
Foreign	'	'	'	'	'	'	'	'	1,610	1,700	-520
State	'	'	'	'	'	'	'	'	0	10	-10
Total deferred	'	'	'	'	'	'	'	'	1,320	1,710	-630
Total provision (benefit)	$580	$2,560	($800)	($480)	($3,670)	($1,110)	($220)	($320)	$1,860	($5,320)	$16,190

Income_Taxes_Reconciliation_Ac

Income Taxes (Reconciliation Actual Income Taxes to Expected Federal Corporate Taxes) (Details) (USD $)	3 Months Ended								12 Months Ended
	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Income Tax Disclosure [Abstract]	'	'	'	'	'	'	'	'	'	'	'
Tax provision (benefit) at the U.S. rate	'	'	'	'	'	'	'	'	($6,750,000)	($11,190,000)	$13,410,000
Effect of permanent book-tax differences	'	'	'	'	'	'	'	'	970,000	2,010,000	510,000
State tax provision	'	'	'	'	'	'	'	'	-110,000	-80,000	100,000
Valuation allowance for net deferred tax assets	'	'	'	'	'	'	'	'	5,850,000	1,740,000	470,000
Uncertain tax items	'	'	'	'	'	'	'	'	450,000	-240,000	1,620,000
Expiration of foreign net operating loss	'	'	'	'	'	'	'	'	0	2,320,000	170,000
Difference between U.S. and foreign rates	'	'	'	'	'	'	'	'	1,440,000	0	0
Other items	'	'	'	'	'	'	'	'	10,000	120,000	-90,000
Total provision (benefit)	$580,000	$2,560,000	($800,000)	($480,000)	($3,670,000)	($1,110,000)	($220,000)	($320,000)	$1,860,000	($5,320,000)	$16,190,000

Income_Taxes_Deferred_Tax_Asse

Income Taxes (Deferred Tax Assets and Liabilities) (Details) (USD $)	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
In Thousands, unless otherwise specified
Deferred tax assets - current:	'	'	'
Capitalized inventory costs	$130	$90	$150
Inventory write-downs	620	600	590
Accrued warranty	200	20	-580
Deferred profits	800	2,510	6,820
Accruals and reserves not currently deductible	490	240	2,580
Deferred tax assets - current	1,330	3,460	9,560
Valuation allowance	-910	0	0
Deferred Tax Assets, Gross, Current	2,240	3,460	9,560
Deferred tax assets (liabilities)- non-current:	'	'	'
Stock option expense	700	470	270
Book vs. tax basis of acquired assets	-1,130	-1,280	-760
Foreign and state net operating losses	9,000	3,640	850
Book vs. tax depreciation and amortization	60	100	300
Foreign tax credits	520	0	0
Other deferred tax assets	-350	140	90
Total deferred tax assets - non-current	8,800	3,070	750
Valuation allowance	-7,540	-2,600	-860
Deferred tax assets (liabilities) - non-current, net of valuation allowance	$1,260	$470	($110)

Income_Taxes_Deferred_Tax_Valu

Income Taxes (Deferred Tax Valuation Allowance) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Deferred Tax Valuation Allowance [Roll Forward]	'	'	'
Balance at the beginning of the year	$2,600	$860	$390
Additions to valuation allowance	5,850	1,740	470
Balance at the end of the year	$8,450	$2,600	$860

Income_Taxes_Unrecognized_tax_

Income Taxes (Unrecognized tax benefit) (Details) (USD $)	12 Months Ended
In Thousands, unless otherwise specified	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]	'	'	'
Balances at beginning of the year	$2,360	$2,630	$1,010
Additions (reductions) related to current year tax positions	0	-390	1,210
Additions related to tax positions taken in prior years	530	360	450
Reductions related to settlements with tax authorities	0	-240	0
Reductions due to lapse of statute of limitations	-80	0	-40
Balance at the end of the year	$2,810	$2,360	$2,630

Income_Taxes_Income_Taxes_Text

Income Taxes Income Taxes (Textual) (Details) (USD $)	12 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Income Tax Contingency [Line Items]	'	'	'
Income Taxes Paid	$8,678,000	$5,030,000	$8,451,000
Proceeds from Income Tax Refunds (less than .1 million)	18,000	1,115,000	282,000
Unrecognized tax benefits that would impact effective tax rate	1,800,000	'	'
Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense	500,000	400,000	200,000
Unrecognized tax benefits, income tax penalties and interest accrued	1,200,000	700,000	'
Income Tax Examination, Liability (Refund) Adjustment from Settlement with Taxing Authority	$2,400,000	'	'
Minimum	'	'	'
Income Tax Contingency [Line Items]	'	'	'
Number of years open for tax examinations	'3 years	'	'
Maximum	'	'	'
Income Tax Contingency [Line Items]	'	'	'
Number of years open for tax examinations	'5 years	'	'

Impairment_Charge_Details

Impairment Charge (Details) (USD $)	3 Months Ended	12 Months Ended
	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
		segment
Finite-Lived Intangible Assets [Line Items]	'	'	'	'
Number of Reporting Units	'	2	'	'
Impairment of Intangible Assets, Finite-lived	$4,700,000	'	'	'
Impairment and restructuring charges	'	883,000	5,428,000	0
Licenses	'	'	'	'
Finite-Lived Intangible Assets [Line Items]	'	'	'	'
Impairment of Intangible Assets, Finite-lived	'	'	$700,000	'

Selected_Quarterly_Data_unaudi2

Selected Quarterly Data (unaudited) (Details) (USD $)	3 Months Ended								12 Months Ended
In Thousands, except Per Share data, unless otherwise specified	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2011
Selected Quarterly Data (Unaudited) [Abstract]	'	'	'	'	'	'	'	'	'	'	'
Revenue	$6,925	$10,398	$8,118	$9,357	$10,945	$24,300	$21,566	$24,728	$34,798	$81,539	$246,705
Gross margin	3,159	-2,677	2,453	1,378	-6,860	4,804	4,048	7,201	4,313	9,193	90,657
Provision for income taxes	580	2,560	-800	-480	-3,670	-1,110	-220	-320	1,860	-5,320	16,190
Net loss attributable to Amtech Systems, Inc.	-1,682	-12,101	-2,092	-4,194	-14,111	-2,965	-5,079	-876	-20,069	-23,031	22,882
Comprehensive loss attributable to Amtech Systems, Inc.	($75)	($11,387)	($3,555)	($2,791)	($13,470)	($6,816)	($2,877)	($4,607)	($19,482)	($32,451)	$20,983
Basic (dollars per share)	($0.18)	($1.27)	($0.22)	($0.44)	($1.49)	($0.31)	($0.54)	($0.09)	($2.11)	($2.43)	$2.41
Shares used in calculation	9,543	9,539	9,539	9,494	9,482	9,479	9,479	9,446	9,529	9,471	9,480
Diluted (dollars per share)	($0.18)	($1.27)	($0.22)	($0.44)	($1.49)	($0.31)	($0.54)	($0.09)	($2.11)	($2.43)	$2.34
Shares used in calculation	9,543	9,539	9,539	9,494	9,482	9,479	9,479	9,446	9,529	9,471	9,764