Document And Entity Information
Document And Entity Information | Nov. 16, 2021 |
Cover [Abstract] | |
Document Type | 8-K |
Amendment Flag | false |
Current Fiscal Year End Date | --09-30 |
Document Period End Date | Nov. 16, 2021 |
Entity Registrant Name | AMTECH SYSTEMS INC |
Entity Central Index Key | 0000720500 |
Entity Emerging Growth Company | false |
Entity File Number | 000-11412 |
Entity Incorporation, State or Country Code | AZ |
Entity Tax Identification Number | 86-0411215 |
Entity Address, Address Line One | 131 S. Clark Drive |
Entity Address, City or Town | Tempe |
Entity Address, State or Province | AZ |
Entity Address, Postal Zip Code | 85281 |
City Area Code | (480) |
Local Phone Number | 967-5146 |
Entity Information, Former Legal or Registered Name | Not Applicable |
Written Communications | false |
Soliciting Material | false |
Pre-commencement Tender Offer | false |
Pre-commencement Issuer Tender Offer | false |
Title of 12(b) Security | Common Stock, par value $0.01 per share |
Trading Symbol | ASYS |
Security Exchange Name | NASDAQ |