| Document And Entity Information | Jan. 17, 2023 |
| Cover [Abstract] | |
| Document Type | 8-K |
| Amendment Flag | false |
| Document Period End Date | Jan. 17, 2023 |
| Entity Registrant Name | AMTECH SYSTEMS INC |
| Entity Central Index Key | 0000720500 |
| Entity Emerging Growth Company | false |
| Securities Act File Number | 000-11412 |
| Entity Incorporation, State or Country Code | AZ |
| Entity Tax Identification Number | 86-0411215 |
| Entity Address, Address Line One | 131 S. Clark Drive |
| Entity Address, City or Town | Tempe |
| Entity Address, State or Province | AZ |
| Entity Address, Postal Zip Code | 85288 |
| City Area Code | (480) |
| Local Phone Number | 967-5146 |
| Entity Information, Former Legal or Registered Name | Not Applicable |
| Written Communications | false |
| Soliciting Material | false |
| Pre-commencement Tender Offer | false |
| Pre-commencement Issuer Tender Offer | false |
| Title of 12(b) Security | Common Stock, par value $0.01 per share |
| Trading Symbol | ASYS |
| Security Exchange Name | NASDAQ |
