Document And Entity Information
| Document And Entity Information | Jan. 17, 2023 |
| Cover [Abstract] | |
| Document Type | 8-K/A |
| Amendment Flag | true |
| Document Period End Date | Jan. 17, 2023 |
| Entity Registrant Name | AMTECH SYSTEMS INC |
| Entity Central Index Key | 0000720500 |
| Entity Emerging Growth Company | false |
| Securities Act File Number | 000-11412 |
| Entity Incorporation, State or Country Code | AZ |
| Entity Tax Identification Number | 86-0411215 |
| Entity Address, Address Line One | 131 S. Clark Drive |
| Entity Address, City or Town | Tempe |
| Entity Address, State or Province | AZ |
| Entity Address, Postal Zip Code | 85288 |
| City Area Code | (480) |
| Local Phone Number | 967-5146 |
| Entity Information, Former Legal or Registered Name | Not Applicable |
| Written Communications | false |
| Soliciting Material | false |
| Pre-commencement Tender Offer | false |
| Pre-commencement Issuer Tender Offer | false |
| Title of 12(b) Security | Common Stock, par value $0.01 per share |
| Trading Symbol | ASYS |
| Security Exchange Name | NASDAQ |
| Amendment Description | On January 17, 2023, Amtech Systems, Inc., an Arizona corporation (“Amtech” or the “Company”) filed a Current Report on Form 8-K (the “Initial 8-K”), which included the announcement of the completion of the Company's acquisition of Entrepix, Inc., an Arizona corporation (“Entrepix”), through a reverse triangular merger resulting in Entrepix becoming a wholly owned subsidiary of the Company (the “Acquisition”). This Current Report on Form 8-K/A (this “Form 8-K/A”) is being filed solely to include the financial statements and exhibits that are required by Item 9.01(a) and Item 9.01(b) of Form 8-K that were excluded from the Initial Form 8-K in reliance on the instructions to such items. Except as provided herein, the disclosures made in the Initial Form 8-K remain unchanged. |