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New words:
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Removed:
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Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name |
| Jurisdiction in which incorporated |
Advanced Compound Materials, Inc |
| State of Delaware |
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Bruce Technologies, Inc |
| State of Massachusetts |
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BTU Europe Ltd. |
| United Kingdom |
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BTU International, Inc. |
| State of Delaware |
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BTU Ltd. (Shanghai) |
| China |
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BTU Overseas, Ltd. |
| State of Delaware |
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BTU Overseas (Shanghai) Co., Ltd. |
| China |
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Entrepix, Inc. |
| State of Arizona |
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Entrepix Asia Ptd., Ltd. |
| Singapore |
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Entrepix International, Inc. |
| State of Arizona |
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Intersurface Dynamics, Inc. |
| State of Connecticut |
|
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P.R. Hoffman Machine Products, Inc. |
| State of Arizona |
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Tempress Systems, Inc. |
| State of Texas |