EXHIBIT 21
SUBSIDIARIES OF ZYGO CORPORATION (DELAWARE)
Technical Instrument Company (California)
100% owned by Registrant (effective as of August 8, 1996)
Syncotec Neue Technologien und Instrumente GmbH
100% owned by Technical Instrument Company (effective as of September 1, 1997)
NexStar Corporation (Colorado)
100% owned by Registrant (effective as of September 12, 1996)
TechniStar Corporation (Delaware)
25% owned by NexStar Corporation
Sight Systems, Inc. (California)
100% owned by Registrant (effective as of August 19, 1997)
Zygo TeraOptix, Inc. (Delaware)
100% owned by Registrant (effective as of May 5, 2000)
Zygo KK
100% owned by Registrant (effective as of October 1, 1999)
Zygo PTE
100% owned by Registrant (effective as of January 1, 1998)
ZygoLOT GmbH
60% owned by Registrant (effective as of October 2, 1999)
Six Brookside Drive (Connecticut)
100% owned by Registrant (effective as of January 9, 1998)
