Novellus Systems (NVLS) 10-Q 2009 Q2 Quarterly report

Exhibit 32.2

NOVELLUS SYSTEMS, INC.

CERTIFICATION

In connection with the periodic report of Novellus Systems, Inc. (the “Company”) on Form 10-Q for the period ended June 27, 2009 as filed with the Securities and Exchange Commission (the “Report”), I, Jeffrey C. Benzing, Executive Vice President and Chief Administrative Officer of the Company, hereby certify as of the date hereof, solely for purposes of Title 18, Chapter 63, Section 1350 of the United States Code, that to the best of my knowledge:

(1) the Report fully complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934, and

(2) the information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company at the dates and for the periods indicated.

This Certification has not been, and shall not be deemed, “filed” with the Securities and Exchange Commission.

Dated: July 31, 2009	By:	/s/ Jeffrey C. Benzing
		Jeffrey C. Benzing
		Executive Vice President and Chief Administrative Officer
		(Principal Financial Officer)