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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
As independent registered public accountants, we hereby consent to the incorporation of our report dated March 14, 2008 relating to the consolidated financial statements and schedule for the three years ended December 31, 2007, and the effectiveness of internal control over financial reporting as of December 31, 2007 of BTU International, Inc. and subsidiaries included in this Form 10-K, into the Company’s previously filed Registration Statements on Form S-3 (File No. 333-14781) and Form S-8 (File Nos. 333-125924, 333-94713, 333-63298, 033-59081 and 033-59045).
/s/ Vitale, Caturano & Company, Ltd.
VITALE, CATURANO & COMPANY, LTD.
March 17, 2008
Boston, Massachusetts