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Filing tables
Filing exhibits
- 10-K Annual report
- 10.6 Form of Agreement Evidencing Grant of Stock Option
- 23.1 Consent of Pricewaterhousecoopers LLP
- 31.1 Certification of Chief Executive Officer Required by Rule 13A-14(A)/15D-14(A)
- 31.2 Certification of Chief Financial Officer Required by Rule 13A-14(A)/15D-14(A)
- 32.1 Certification of Chief Executive Officer Pursuant to 18 U.s.c. Section 1350
- 32.2 Certification of Chief Financial Officer Pursuant to 18 U.s.c. Section 1350
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Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (File Nos. 333-56366, 333-46505, 333-04652 and 333-02280) of ADE Corporation of our report dated July 26, 2005, relating to the consolidated financial statements, financial statement schedule, management’s assessment of the effectiveness of internal control over financial reporting and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.
/s/ PricewaterhouseCoopers LLP
Boston, Massachusetts
July 26, 2005