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EXHIBIT 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in this Annual Report on Form 10-K of Mattson Technology, Inc. for the year ended December 31, 2015 of our report dated March 11, 2016 included in its Registration Statements on Form S-3 (No. 333-191686) and Form S-8 (Nos. 333-39129, 333-59859, 333-87715, 333-41954, 333-54010, 333-63156, 333-100094, 333-113683, 333-119799, 333-128529, 333-130419 and 333-183742) relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting for the year ended December 31, 2015 listed in the accompanying index.
/s/ Armanino LLP
San Ramon, California
March 11, 2016