| Document and Entity Information - USD ($) | 12 Months Ended | ||
| Dec. 31, 2015 | Mar. 04, 2016 | Jun. 28, 2015 | |
| Document and Entity Information | |||
| Entity Registrant Name | MATTSON TECHNOLOGY INC | ||
| Entity Central Index Key | 928,421 | ||
| Current Fiscal Year End Date | --12-31 | ||
| Entity Filer Category | Accelerated Filer | ||
| Document Type | 10-K | ||
| Document Period End Date | Dec. 31, 2015 | ||
| Document Fiscal Year Focus | 2,015 | ||
| Document Fiscal Period Focus | FY | ||
| Amendment Flag | false | ||
| Entity Common Stock, Shares Outstanding | 75,602,144 | ||
| Entity Well-known Seasoned Issuer | No | ||
| Entity Voluntary Filers | No | ||
| Entity Current Reporting Status | Yes | ||
| Entity Public Float | $ 257,678,608 |
