AGREEMENT
Pursuant to Rule 13d-1(k)(1) under the Securities Exchange Act of 1934, the undersigned hereby agree that only one statement containing the information required by Schedule 13D need be filed with respect to the ownership by each of the undersigned of shares of stock of Tegal Corporation.
EXECUTED this 13th day of July, 2012.
| Alcatel Lucent | ||
| By: | /s/ Yohann Benard | |
| Name: | Yohann Benard | |
| Title: | Secretary | |
| Alcatel-Lucent Participations | ||
| By: | /s/ Thomas Geary | |
| Name: | Thomas Geary | |
| Title: | President | |
