Semitool (SMTL) 10-K 2005 FY Annual report

EXHIBIT 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We hereby consent to the incorporation by reference in the Registration Statements on Forms S-3 (Nos. 333-112964 and 333-39492) and Forms S-8 (Nos. 333-114284, 333-62474, 333-89562) of Semitool, Inc. of our report dated December 13, 2005 relating to the financial statements, financial statement schedule, management’s assessment of the effectiveness of internal control over financial reporting and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.

/s/PricewaterhouseCoopers LLP
Seattle, Washington
December 13, 2005