3 patents
Utility
System and Method of Low Temperature Thin Film Deposition and In-situ Annealing
9 Sep 20
Systems and methods of forming a thin film on substrate includes positioning the substrate in a chamber; generating, via a uniform microwave field generator, a microwave field around the substrate; and guiding radicals into the chamber so that plasma is generated about the substrate to form the thin film on the substrate.
Jeffrey Edward Kowalski
Filed: 8 Mar 20
Utility
Apparatus for Annealing Semiconductor Integrated Circuit Wafers
9 Sep 20
An apparatus for annealing semiconductor integrated circuit wafers comprises a microwave energy source and a reactor housing.
Jeffrey Edward Kowalski
Filed: 8 Mar 20
Utility
Microwave Assisted Parallel Plate E-field Applicator
29 Jul 20
A system and method for annealing a target substrate such as a semiconductor using industrial microwave heating and parallel plate reaction.
Jeffrey Edward Kowalski
Filed: 16 Apr 20
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