2 patents
Utility
Thin-film Deposition Methods with Thermal Management of Evaporation Sources
27 May 20
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
Markus Eberhard Beck, Ulrich Alexander Bonne
Filed: 16 Sep 19
Utility
Thin-film deposition methods with thermal management of evaporation sources
28 Oct 19
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
Markus Eberhard Beck, Ulrich Alexander Bonne
Filed: 22 Mar 16
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