3 patents
Utility
Vacuum Evaporation Source
4 Mar 21
A vacuum evaporation source capable of improving the straightness of a heating wire.
Do Weon Hwang
Filed: 14 Sep 17
Utility
Effusion Cell
9 Sep 20
An effusion cell for evaporating a thin film forming material, including: a case with an inner space; a crucible provided in the inner space and containing the thin film forming material; and a nozzle provided on a top of the crucible so that the thin film forming material is discharged to the outside of the crucible therethrough, in which the nozzle includes an upwardly upwardly reduced inclination formed to be inclined toward an inside of the crucible from one end of a lower of the nozzle; a first upwardly enlarged inclination formed to be inclined toward an edge of the crucible from an upper end portion of the upwardly reduced inclination; and a second upwardly enlarged inclination formed to be inclined toward the edge of the crucible at an upper end portion of the first upwardly enlarged inclination.
Il Kwon Moon, Su Young Cha, Yoon Ki Min, Do Weon Hwang
Filed: 7 Nov 17
Utility
Vacuum Evaporation Source
24 Jun 20
A vacuum evaporation source capable of improving the straightness of a heating wire.
Do Weon Hwang
Filed: 13 Sep 17
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