1619 patents
Page 70 of 81
Utility
Electrostatic Chuck and Method for Manufacturing the Same
22 Apr 20
An electrostatic chuck includes a first ceramic member disk-shaped and having an annular step surface outside a circular wafer holding surface thereof, the annular step surface being at a lower level than the wafer holding surface, the first ceramic member having a volume resistivity that allows Coulomb force to be exerted; a first electrode embedded in the first ceramic member at a position facing the wafer holding surface; a second electrode disposed on the annular step surface of the first ceramic member, the second electrode being independent of the first electrode; and a second ceramic member having an annular shape and configured to cover the annular step surface having the second electrode thereon, the second ceramic member having a volume resistivity that allows Johnsen-Rahbek force to be exerted, wherein an upper surface of the second ceramic member is a focus ring holding surface on which a focus ring is placed.
Tatsuya Kuno, Ikuhisa Morioka, Takashi Kataigi, Kenichiro Aikawa
Filed: 16 Dec 19
Utility
Member for semiconductor manufacturing apparatus, method for producing the same, and heater including shaft
20 Apr 20
A member for a semiconductor manufacturing apparatus according to the present invention is a member that is to be joined to an aluminum nitride base member.
Asumi Nagai, Noboru Nishimura, Yuji Katsuda
Filed: 19 Oct 16
Utility
Honeycomb filter
20 Apr 20
Yasushi Kato, Takahiro Kondo, Junki Matsuya
Filed: 6 Jun 17
Utility
Method for manufacturing zeolite membrane structure
20 Apr 20
A method for manufacturing a zeolite membrane structure includes a step of forming a first zeolite membrane on a porous support by hydrothermal synthesis in a state in which the porous support is immersed in a first zeolite membrane formation solution, a step of immersing the porous support formed the first zeolite membrane for greater than or equal to 5 minutes in a second zeolite membrane formation solution at greater than or equal to 10 degrees C. and less than or equal to 70 degrees C. and greater than or equal to pH 10, and a step of forming a second zeolite membrane on the first zeolite membrane by hydrothermal synthesis in a state in which the porous support formed the first zeolite membrane is immersed in the second zeolite membrane formation solution.
Kenichi Noda, Takeshi Hagio, Makoto Miyahara
Filed: 23 Apr 17
Utility
Composite substrate, elastic wave device, and method for producing elastic wave device
20 Apr 20
A method for producing an elastic wave device includes steps of (a) preparing a first substrate and a second substrate, (b) irradiating a bonding surface of the first substrate and a bonding surface of the second substrate with one of plasma, neutral atom beams, and ion beams of an inert gas, (c) bonding the bonding surface of the first substrate and the bonding surface of the second substrate in a vacuum at room temperature so as to set a strength that allows the first and second substrates to be separated by insertion of a blade; (d) forming a composite substrate by bonding a piezoelectric substrate to another surface of the first substrate; (e) forming electrode on a surface of the piezoelectric substrate of the composite substrate; and then (f) removing the second substrate from the first substrate by separation with the blade.
Ryosuke Hattori, Yuji Hori, Tomoyoshi Tai
Filed: 2 Nov 17
Utility
Epitaxial substrate for semiconductor elements, semiconductor element, and manufacturing method for epitaxial substrates for semiconductor elements
20 Apr 20
An epitaxial substrate for semiconductor elements suppresses leakage current and has a high breakdown voltage.
Mikiya Ichimura, Sota Maehara, Yoshitaka Kuraoka
Filed: 24 Apr 18
Utility
Positive electrode
20 Apr 20
A positive electrode is configured by a plurality of mutually bonded primary particles respectively composed of a lithium composite oxide having a layered rock-salt structure.
Yukinobu Yura, Naoto Ohira, Shigeki Okada
Filed: 12 Apr 18
Utility
Heater for Semiconductor Manufacturing Apparatus
15 Apr 20
A heater for a semiconductor manufacturing apparatus, the heater includes an AlN ceramic substrate and a heating element embedded inside the AlN ceramic substrate.
Keita YAMANA, Kazuhiro Nobori, Kengo Torii
Filed: 12 Dec 19
Utility
Gas Sensor
15 Apr 20
A gas sensor includes a solid electrolyte layer with oxygen ion conductivity, a resistance heating element imbedded in the solid electrolyte layer, a gas flow portion provided in a fore end portion of the solid electrolyte layer, a particular gas detector detecting particular gas in measurement object gas introduced to the gas flow portion and a controller setting, prior to startup of the gas sensor, electric power supplied to the resistance heating element such that a temperature in the fore end portion becomes equal to a preset target temperature, and determining, on basis of a temperature rise speed in the fore end portion when the set electric power is supplied to the resistance heating element, whether temperature raising control of supplying the set electric power to the resistance heating element is to be continued.
Ryo ONISHI, Yasuhide KOJIMA
Filed: 7 Oct 19
Utility
Gas Sensor
15 Apr 20
A gas sensor includes a solid electrolyte layer with oxygen ion conductivity, a gas flow portion (ranging from a gas inlet port to a second inner cavity), a particular gas detector (including a main pump cell, a measurement pump cell, an auxiliary pump cell, etc.), and a control device.
Ryo ONISHI, Yasuhide KOJIMA
Filed: 7 Oct 19
Utility
Package, method for storing or transporting sub-nano membrane structure, and sub-nano membrane structure
13 Apr 20
A package comprises an airtight container having an oxygen permeability of less than or equal to 15 ml/m2dMPa and water vapor permeability of less than or equal to 2 g/m2d, and a sub-nano membrane structure accommodated in the airtight container.
Makoto Miyahara, Makiko Ichikawa, Kenji Yajima, Katsuhiro Tokura
Filed: 4 Apr 17
Utility
Heat exchange member
13 Apr 20
A heat exchange member which does not easily suffer from breakage due to thermal stress by relaxing the thermal stress.
Tatsuo Kawaguchi, Makoto Miyazaki, Yoshimasa Kondo, Hironori Takahashi
Filed: 25 Dec 13
Utility
Heat exchanger
13 Apr 20
A heat exchanger, including: a columnar honeycomb structure having cells partitioned by partition walls composed of ceramics, each cell penetrating from a first end to a second end to form a flow path for a first fluid; an inner tubular member fitted to an outer peripheral surface of the honeycomb structure to circumferentially cover that surface; a spacer directly and circumferentially covering an outer peripheral surface of the inner tubular member as well as indirectly and circumferentially covering the outer peripheral surface of the honeycomb structure; and an outer tubular member directly and circumferentially covering the spacer; wherein the spacer has a three-dimensional structure that allows flow of a second fluid therein and suppresses movement of bubbles in the second fluid; and wherein at least one opening part between the inner tubular member and the outer tubular member forms a gate of the spacer for the second fluid.
Tatsuo Kawaguchi, Daisuke Kimura
Filed: 12 Nov 17
Utility
Sensor element
13 Apr 20
A heater part of a planar sensor element includes: a heater element containing Pt; an insulating layer covering the heater element; and a heater electrode located on a main surface of the sensor element to be exposed.
Kosuke Ujihara, Toru Hayase, Kenji Morimoto
Filed: 7 Mar 18
Utility
Composite substrate and acoustic wave device
13 Apr 20
A composite substrate production method of the invention includes (a) a step of mirror polishing a substrate stack having a diameter of 4 inch or more, the substrate stack including a piezoelectric substrate and a support substrate bonded to each other, the mirror polishing being performed on the piezoelectric substrate side until the thickness of the piezoelectric substrate reaches 3 μm or less; (b) a step of creating data of the distribution of the thickness of the mirror-polished piezoelectric substrate; and (c) a step of performing machining with an ion beam machine based on the data of the thickness distribution so as to produce a composite substrate have some special technical features.
Yuji Hori, Tomoyoshi Tai, Mitsuo Ikejiri
Filed: 12 Nov 17
Utility
Electrostatic Chuck
8 Apr 20
An electrostatic chuck has a structure in which an electrostatic electrode is embedded in a disk-like ceramic plate and attracts a wafer that is placed on the ceramic plate and that has a diameter smaller than that of the ceramic plate by Johnsen-Rahbek force.
Reo WATANABE, Nobuyuki KONDOU, Yutaka UNNO
Filed: 8 Dec 19
Utility
Infrared Light Radiation Device
8 Apr 20
An infrared light radiation device includes a radiation unit and a condenser.
Daiki KATO, Yoshio KONDO
Filed: 19 Sep 19
Utility
Catalyst Deterioration Diagnosis Device and Catalyst Deterioration Diagnosis Method
8 Apr 20
A catalyst deterioration diagnosis device includes: a unit configured to obtain a temperature of a catalyst; a unit configured to obtain a sensor output from a gas sensor disposed between the catalyst and an exhaust port; and a unit configured to determine the catalyst to be faulty when the temperature of the catalyst obtained when the sensor output becomes a preset evaluative output is equal to or higher than an evaluative catalyst temperature.
Osamu NAKASONE, Kosuke MONNA
Filed: 6 Oct 19
Utility
Honeycomb structure
6 Apr 20
A honeycomb structure includes: a honeycomb structure body including a plurality of cells; and a plugging portion to alternately plug open end parts of the plurality of cells on one side as an inflow side of the exhaust gas and open end parts on the other side as an outflow side of the exhaust gas.
Yunie Izumi, Kenji Morimoto
Filed: 16 Mar 17
Utility
Porous ceramic structure
6 Apr 20
A porous ceramic structure has a porous ceramic aggregate configured from a plurality of porous ceramic particles, and the ratio of the number of corners at locations where two other porous ceramic particles are facing a corner of a porous ceramic particle with respect to the number of corners of the porous ceramic particles included in the porous ceramic aggregate is 80% or greater.
Akinobu Oribe, Takahiro Tomita, Hiroharu Kobayashi
Filed: 11 Jan 18